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ATE76040T1 - Verfahren zur herstellung von siliziumtetrafluorid. - Google Patents

Verfahren zur herstellung von siliziumtetrafluorid.

Info

Publication number
ATE76040T1
ATE76040T1 AT87201303T AT87201303T ATE76040T1 AT E76040 T1 ATE76040 T1 AT E76040T1 AT 87201303 T AT87201303 T AT 87201303T AT 87201303 T AT87201303 T AT 87201303T AT E76040 T1 ATE76040 T1 AT E76040T1
Authority
AT
Austria
Prior art keywords
silicon tetrafluoride
gaseous stream
carried out
sulphuric acid
zone
Prior art date
Application number
AT87201303T
Other languages
English (en)
Inventor
Guido Anania
Angelo Bianchi
Vito Cultrera
Francesco Russo
Giovanni Spagna
Original Assignee
Enichem Agricoltura Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Enichem Agricoltura Spa filed Critical Enichem Agricoltura Spa
Application granted granted Critical
Publication of ATE76040T1 publication Critical patent/ATE76040T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/10705—Tetrafluoride

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
AT87201303T 1986-07-23 1987-07-08 Verfahren zur herstellung von siliziumtetrafluorid. ATE76040T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT21226/86A IT1196983B (it) 1986-07-23 1986-07-23 Procedimento per la produzione di tetrafluoruro di silicio
EP87201303A EP0254349B1 (de) 1986-07-23 1987-07-08 Verfahren zur Herstellung von Silizium-Tetrafluorid

Publications (1)

Publication Number Publication Date
ATE76040T1 true ATE76040T1 (de) 1992-05-15

Family

ID=11178673

Family Applications (1)

Application Number Title Priority Date Filing Date
AT87201303T ATE76040T1 (de) 1986-07-23 1987-07-08 Verfahren zur herstellung von siliziumtetrafluorid.

Country Status (8)

Country Link
US (1) US4900530A (de)
EP (1) EP0254349B1 (de)
JP (1) JPS6340714A (de)
AT (1) ATE76040T1 (de)
DE (1) DE3778993D1 (de)
ES (1) ES2032811T3 (de)
GR (1) GR3004735T3 (de)
IT (1) IT1196983B (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NO931606L (no) * 1992-05-26 1993-11-29 Saint Gobain Vitrage Vindusplate med en funksjonell film
US5232602A (en) * 1992-07-01 1993-08-03 Hemlock Semiconductor Corporation Phosphorous removal from tetrachlorosilane
US5242670A (en) * 1992-07-02 1993-09-07 Gehringer Ronald C Method for hydrofluoric acid digestion of silica/alumina matrix material for the production of silicon tetrafluoride, aluminum fluoride and other residual metal fluorides and oxides
US5888468A (en) * 1998-06-05 1999-03-30 Starmet Corp. Method for producing silicon tetrafluoride from uranium tetrafluoride
US6033642A (en) * 1999-03-29 2000-03-07 Starmet Corporation Method for producing silicon tetrafluoride from uranium oxyfluoride
US7666379B2 (en) * 2001-07-16 2010-02-23 Voltaix, Inc. Process and apparatus for removing Bronsted acid impurities in binary halides
JP4588396B2 (ja) * 2003-09-25 2010-12-01 昭和電工株式会社 テトラフルオロシランの製造方法
TW200512159A (en) * 2003-09-25 2005-04-01 Showa Denko Kk Method for producing tetrafluorosilane
JP4576312B2 (ja) * 2005-10-03 2010-11-04 東北電力株式会社 四フッ化ケイ素の製造方法、及びそれに用いる製造装置
EP1951620A2 (de) 2005-11-25 2008-08-06 Vesta Research, Ltd. Verfahren zur herstellung einer silicium-nitrid-verbindung
SG174814A1 (en) * 2007-09-21 2011-10-28 Memc Electronic Materials Processes for purification of silicon tetrafluoride
US8528026B2 (en) * 2008-12-05 2013-09-03 At&T Intellectual Property I, L.P. System and method for processing audio signals received by a communication device
US8124039B2 (en) 2009-01-26 2012-02-28 Vithal Revankar Process of silicon tetrafluoride gas synthesis
CN112158849B (zh) * 2020-09-27 2023-06-30 湖北祥云(集团)化工股份有限公司 一种磷矿伴生氟制备四氟化硅的方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2456509A (en) * 1944-10-06 1948-12-14 Allied Chem & Dye Corp Manufacture of hydrogen fluoride
GB745800A (en) * 1953-08-06 1956-02-29 Kali Chemie Ag Process for the production of pure silicon tetrafluoride
DE1022569B (de) * 1954-06-09 1958-01-16 Grace W R & Co Verfahren zur Herstellung von Siliciumtetrafluorid
GB1015604A (en) * 1961-10-11 1966-01-05 Texas Instruments Ltd A treatment process for silicon compounds
US3758674A (en) * 1971-09-16 1973-09-11 Wellman Power Gas Inc Process for producing anhydrous hf from fluosilicic acid
US3969485A (en) * 1971-10-28 1976-07-13 Flemmert Goesta Lennart Process for converting silicon-and-fluorine-containing waste gases into silicon dioxide and hydrogen fluoride
US4138509A (en) * 1977-12-23 1979-02-06 Motorola, Inc. Silicon purification process
JPS604126B2 (ja) * 1981-03-18 1985-02-01 セントラル硝子株式会社 四弗化珪素の精製法
JPS604127B2 (ja) * 1981-08-06 1985-02-01 セントラル硝子株式会社 四弗化珪素ガスの精製法
US4470959A (en) * 1983-06-20 1984-09-11 Allied Corporation Continuous production of silicon tetrafluoride gas in a vertical column
JPS6090810A (ja) * 1983-10-20 1985-05-22 Mitsui Toatsu Chem Inc フルオロシランガスの製造方法
US4557921A (en) * 1984-06-27 1985-12-10 Ethyl Corporation Purification of halide
JPS6197129A (ja) * 1984-10-18 1986-05-15 Mitsui Toatsu Chem Inc フルオロシラン類の精製法
JPS61118117A (ja) * 1984-11-14 1986-06-05 Taiyo Sanso Kk 有毒ガス成分を含むガスの処理方法

Also Published As

Publication number Publication date
EP0254349A2 (de) 1988-01-27
EP0254349A3 (en) 1988-08-31
US4900530A (en) 1990-02-13
JPS6340714A (ja) 1988-02-22
ES2032811T3 (es) 1993-03-01
DE3778993D1 (de) 1992-06-17
IT8621226A0 (it) 1986-07-23
EP0254349B1 (de) 1992-05-13
IT1196983B (it) 1988-11-25
IT8621226A1 (it) 1988-01-23
GR3004735T3 (de) 1993-04-28

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee