ATE510304T2 - Verfahren zur herstellung von legierungs- halbleiterfilmen der gruppe ib-iiia-via-quaternär oder höher - Google Patents
Verfahren zur herstellung von legierungs- halbleiterfilmen der gruppe ib-iiia-via-quaternär oder höher Download PDFInfo
- Publication number
- ATE510304T2 ATE510304T2 AT04744786T AT04744786T ATE510304T2 AT E510304 T2 ATE510304 T2 AT E510304T2 AT 04744786 T AT04744786 T AT 04744786T AT 04744786 T AT04744786 T AT 04744786T AT E510304 T2 ATE510304 T2 AT E510304T2
- Authority
- AT
- Austria
- Prior art keywords
- iiia
- quaternary
- semiconductor film
- alloy semiconductor
- producing group
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C9/00—Alloys based on copper
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/12—Active materials
- H10F77/126—Active materials comprising only Group I-III-VI chalcopyrite materials, e.g. CuInSe2, CuGaSe2 or CuInGaSe2 [CIGS]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Photovoltaic Devices (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Chemical Vapour Deposition (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Particle Accelerators (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electrodes Of Semiconductors (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ZA200306316 | 2003-08-14 | ||
ZA200402497 | 2004-03-30 | ||
PCT/IB2004/051458 WO2005017978A2 (en) | 2003-08-14 | 2004-08-13 | Method for the preparation of group ib-iiia-via quaternary or higher alloy semiconductor films |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE510304T2 true ATE510304T2 (de) | 2011-06-15 |
Family
ID=34198392
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT04744786T ATE510304T2 (de) | 2003-08-14 | 2004-08-13 | Verfahren zur herstellung von legierungs- halbleiterfilmen der gruppe ib-iiia-via-quaternär oder höher |
Country Status (20)
Country | Link |
---|---|
US (3) | US7682939B2 (de) |
EP (3) | EP2284905A2 (de) |
JP (2) | JP4994032B2 (de) |
KR (2) | KR101027318B1 (de) |
AP (2) | AP2149A (de) |
AT (1) | ATE510304T2 (de) |
AU (2) | AU2004301075B2 (de) |
BR (2) | BRPI0413567A (de) |
CA (2) | CA2535703C (de) |
CY (1) | CY1111940T1 (de) |
DE (1) | DE202004021800U1 (de) |
DK (1) | DK1654769T4 (de) |
EA (2) | EA010171B1 (de) |
EG (1) | EG25410A (de) |
ES (1) | ES2366888T5 (de) |
HK (1) | HK1097105A1 (de) |
IL (2) | IL173694A0 (de) |
MX (2) | MXPA06001726A (de) |
OA (2) | OA13236A (de) |
WO (2) | WO2005017978A2 (de) |
Families Citing this family (56)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7442629B2 (en) | 2004-09-24 | 2008-10-28 | President & Fellows Of Harvard College | Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate |
US7057256B2 (en) | 2001-05-25 | 2006-06-06 | President & Fellows Of Harvard College | Silicon-based visible and near-infrared optoelectric devices |
DE602007005092D1 (de) * | 2006-01-12 | 2010-04-15 | Heliovolt Corp | Verfahren zur herstellung gesteuerter segregierter phasendomänenstrukturen |
US8372685B2 (en) * | 2006-06-12 | 2013-02-12 | Nanosolar, Inc. | Bandgap grading in thin-film devices via solid group IIIA particles |
DE102006055662B3 (de) * | 2006-11-23 | 2008-06-26 | Gfe Metalle Und Materialien Gmbh | Beschichtungswerkstoff auf Basis einer Kupfer-Indium-Gallium-Legierung, insbesondere zur Herstellung von Sputtertargets, Rohrkathoden und dergleichen |
WO2008121997A2 (en) * | 2007-03-30 | 2008-10-09 | Craig Leidholm | Formation of photovoltaic absorber layers on foil substrates |
US8071179B2 (en) | 2007-06-29 | 2011-12-06 | Stion Corporation | Methods for infusing one or more materials into nano-voids if nanoporous or nanostructured materials |
WO2009017172A1 (ja) * | 2007-08-02 | 2009-02-05 | Showa Shell Sekiyu K. K. | Cis系薄膜太陽電池の光吸収層の作製方法 |
US8258001B2 (en) * | 2007-10-26 | 2012-09-04 | Solopower, Inc. | Method and apparatus for forming copper indium gallium chalcogenide layers |
US8779283B2 (en) * | 2007-11-29 | 2014-07-15 | General Electric Company | Absorber layer for thin film photovoltaics and a solar cell made therefrom |
JP4620105B2 (ja) * | 2007-11-30 | 2011-01-26 | 昭和シェル石油株式会社 | Cis系薄膜太陽電池の光吸収層の製造方法 |
KR101447113B1 (ko) * | 2008-01-15 | 2014-10-07 | 삼성전자주식회사 | 화합물 반도체 수직 적층 이미지 센서 |
US20090215224A1 (en) * | 2008-02-21 | 2009-08-27 | Film Solar Tech Inc. | Coating methods and apparatus for making a cigs solar cell |
DE102008024230A1 (de) * | 2008-05-19 | 2009-11-26 | Avancis Gmbh & Co. Kg | Schichtsystem für Solarzellen |
ES2581378T3 (es) † | 2008-06-20 | 2016-09-05 | Volker Probst | Dispositivo de procesamiento y procedimiento para procesar productos de procesamiento apilados |
US7947524B2 (en) * | 2008-09-30 | 2011-05-24 | Stion Corporation | Humidity control and method for thin film photovoltaic materials |
US20110018103A1 (en) * | 2008-10-02 | 2011-01-27 | Stion Corporation | System and method for transferring substrates in large scale processing of cigs and/or cis devices |
US8241943B1 (en) | 2009-05-08 | 2012-08-14 | Stion Corporation | Sodium doping method and system for shaped CIGS/CIS based thin film solar cells |
US8372684B1 (en) * | 2009-05-14 | 2013-02-12 | Stion Corporation | Method and system for selenization in fabricating CIGS/CIS solar cells |
US8507786B1 (en) | 2009-06-27 | 2013-08-13 | Stion Corporation | Manufacturing method for patterning CIGS/CIS solar cells |
US8398772B1 (en) | 2009-08-18 | 2013-03-19 | Stion Corporation | Method and structure for processing thin film PV cells with improved temperature uniformity |
JP5548208B2 (ja) * | 2009-09-04 | 2014-07-16 | 大陽日酸株式会社 | 太陽電池用セレン化水素混合ガスの供給方法及び供給装置 |
TW201124544A (en) * | 2009-11-24 | 2011-07-16 | Applied Quantum Technology Llc | Chalcogenide absorber layers for photovoltaic applications and methods of manufacturing the same |
KR20110060139A (ko) * | 2009-11-30 | 2011-06-08 | 삼성전자주식회사 | 태양 전지 제조 방법 |
US8859880B2 (en) * | 2010-01-22 | 2014-10-14 | Stion Corporation | Method and structure for tiling industrial thin-film solar devices |
TWI411121B (zh) * | 2010-03-11 | 2013-10-01 | Ind Tech Res Inst | 光吸收層之製造方法及應用其之太陽能電池結構 |
MX2012010732A (es) | 2010-03-17 | 2013-04-03 | Dow Global Technologies Llc | Estructuras de película delgada basadas en calcógeno fotoelectrónicamente activo que incorporan los estratos. |
US9096930B2 (en) | 2010-03-29 | 2015-08-04 | Stion Corporation | Apparatus for manufacturing thin film photovoltaic devices |
US8142521B2 (en) * | 2010-03-29 | 2012-03-27 | Stion Corporation | Large scale MOCVD system for thin film photovoltaic devices |
US20130029450A1 (en) * | 2010-04-19 | 2013-01-31 | Korea Institute Of Industrial Technology | Method for manufacturing solar cell |
US8692198B2 (en) | 2010-04-21 | 2014-04-08 | Sionyx, Inc. | Photosensitive imaging devices and associated methods |
SG185071A1 (en) * | 2010-04-30 | 2012-12-28 | Dow Global Technologies Llc | Method of manufacture of chalcogenide-based photovoltaic cells |
WO2011146115A1 (en) | 2010-05-21 | 2011-11-24 | Heliovolt Corporation | Liquid precursor for deposition of copper selenide and method of preparing the same |
KR20110128580A (ko) | 2010-05-24 | 2011-11-30 | 삼성전자주식회사 | 태양 전지 제조 방법 |
WO2011160130A2 (en) | 2010-06-18 | 2011-12-22 | Sionyx, Inc | High speed photosensitive devices and associated methods |
US8461061B2 (en) | 2010-07-23 | 2013-06-11 | Stion Corporation | Quartz boat method and apparatus for thin film thermal treatment |
WO2012023973A2 (en) | 2010-08-16 | 2012-02-23 | Heliovolt Corporation | Liquid precursor for deposition of indium selenide and method of preparing the same |
EP2608274A1 (de) | 2010-08-17 | 2013-06-26 | Toppan Printing Co., Ltd. | Tinte zur herstellung einer verbundhalbleiterdünnschicht, aus der tinte hergestellte verbundhalbleiterdünnschicht, mit der verbundhalbleiterdünnschicht ausgestattete solarzelle und verfahren zur herstellung der solarzelle |
JP2012079997A (ja) * | 2010-10-05 | 2012-04-19 | Kobe Steel Ltd | 化合物半導体薄膜太陽電池用光吸収層の製造方法、およびIn−Cu合金スパッタリングターゲット |
CN103222063A (zh) * | 2010-11-22 | 2013-07-24 | 京瓷株式会社 | 光电转换装置 |
JP2012160514A (ja) * | 2011-01-31 | 2012-08-23 | Kyocera Corp | 金属カルコゲナイド層の製造方法および光電変換装置の製造方法 |
EA020377B1 (ru) * | 2011-05-12 | 2014-10-30 | Общество С Ограниченной Ответственностью "Изовак" | Способ формирования тонких пленок cigs для солнечных батарей и устройство для его реализации |
US9496308B2 (en) | 2011-06-09 | 2016-11-15 | Sionyx, Llc | Process module for increasing the response of backside illuminated photosensitive imagers and associated methods |
JP2013021231A (ja) * | 2011-07-13 | 2013-01-31 | Kyocera Corp | 半導体層の製造方法および光電変換装置の製造方法 |
WO2013010127A2 (en) | 2011-07-13 | 2013-01-17 | Sionyx, Inc. | Biometric imaging devices and associated methods |
JP2015508375A (ja) * | 2011-12-15 | 2015-03-19 | ミッドサマー・アーベー | 銅インジウムガリウムジセレニドのリサイクル |
US20130344646A1 (en) * | 2011-12-21 | 2013-12-26 | Intermolecular, Inc. | Absorbers for High-Efficiency Thin-Film PV |
DE102012205378A1 (de) * | 2012-04-02 | 2013-10-02 | Robert Bosch Gmbh | Verfahren zur Herstellung von Dünnschichtsolarmodulen sowie nach diesem Verfahren erhältliche Dünnschichtsolarmodule |
ITFI20120090A1 (it) * | 2012-05-10 | 2013-11-11 | Advanced Res On Pv Tech S R L | Processo per la produzione di celle solari a film sottili |
US8586457B1 (en) * | 2012-05-17 | 2013-11-19 | Intermolecular, Inc. | Method of fabricating high efficiency CIGS solar cells |
US9105797B2 (en) | 2012-05-31 | 2015-08-11 | Alliance For Sustainable Energy, Llc | Liquid precursor inks for deposition of In—Se, Ga—Se and In—Ga—Se |
US20150287853A1 (en) * | 2012-10-26 | 2015-10-08 | Hitachi, Ltd. | Method for producing semiconductor film, solar cell, and chalcopyrite compound |
US9209345B2 (en) | 2013-06-29 | 2015-12-08 | Sionyx, Inc. | Shallow trench textured regions and associated methods |
US9768015B2 (en) * | 2015-06-11 | 2017-09-19 | Alliance For Sustainable Energy, Llc | Methods of forming CIGS films |
WO2019157562A1 (en) * | 2018-02-16 | 2019-08-22 | Newsouth Innovations Pty Limited | Adamantine semiconductor and uses thereof |
KR102015985B1 (ko) * | 2018-04-17 | 2019-08-29 | 한국과학기술연구원 | 태양전지용 cigs 박막의 제조방법 |
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JPH0555615A (ja) * | 1991-08-28 | 1993-03-05 | Fuji Electric Co Ltd | 薄膜太陽電池の製造方法 |
US5436204A (en) * | 1993-04-12 | 1995-07-25 | Midwest Research Institute | Recrystallization method to selenization of thin-film Cu(In,Ga)Se2 for semiconductor device applications |
US5441897A (en) | 1993-04-12 | 1995-08-15 | Midwest Research Institute | Method of fabricating high-efficiency Cu(In,Ga)(SeS)2 thin films for solar cells |
US5356839A (en) | 1993-04-12 | 1994-10-18 | Midwest Research Institute | Enhanced quality thin film Cu(In,Ga)Se2 for semiconductor device applications by vapor-phase recrystallization |
US5674555A (en) | 1995-11-30 | 1997-10-07 | University Of Delaware | Process for preparing group Ib-IIIa-VIa semiconducting films |
JPH1012635A (ja) * | 1996-04-26 | 1998-01-16 | Yazaki Corp | I−iii−vi2系薄膜層の形成方法及びその形成装置 |
JP2922466B2 (ja) | 1996-08-29 | 1999-07-26 | 時夫 中田 | 薄膜太陽電池 |
US5985691A (en) | 1997-05-16 | 1999-11-16 | International Solar Electric Technology, Inc. | Method of making compound semiconductor films and making related electronic devices |
JP4177480B2 (ja) | 1998-05-15 | 2008-11-05 | インターナショナル ソーラー エレクトリック テクノロジー,インコーポレイテッド | 化合物半導体フィルムおよび関連電子装置の製造方法 |
US6127202A (en) * | 1998-07-02 | 2000-10-03 | International Solar Electronic Technology, Inc. | Oxide-based method of making compound semiconductor films and making related electronic devices |
AU2249201A (en) | 1999-11-16 | 2001-05-30 | Midwest Research Institute | A novel processing approach towards the formation of thin-film Cu(In,Ga)Se2 |
US20030008493A1 (en) * | 2001-07-03 | 2003-01-09 | Shyh-Dar Lee | Interconnect structure manufacturing |
-
2004
- 2004-08-13 OA OA1200600050A patent/OA13236A/en unknown
- 2004-08-13 EP EP10014635A patent/EP2284905A2/de not_active Withdrawn
- 2004-08-13 BR BRPI0413567-9A patent/BRPI0413567A/pt not_active IP Right Cessation
- 2004-08-13 EA EA200600406A patent/EA010171B1/ru not_active IP Right Cessation
- 2004-08-13 KR KR1020067003123A patent/KR101027318B1/ko not_active IP Right Cessation
- 2004-08-13 DE DE202004021800U patent/DE202004021800U1/de not_active Expired - Lifetime
- 2004-08-13 CA CA2535703A patent/CA2535703C/en not_active Expired - Lifetime
- 2004-08-13 AU AU2004301075A patent/AU2004301075B2/en not_active Ceased
- 2004-08-13 WO PCT/IB2004/051458 patent/WO2005017978A2/en active Search and Examination
- 2004-08-13 ES ES04744786.7T patent/ES2366888T5/es not_active Expired - Lifetime
- 2004-08-13 AU AU2004301076A patent/AU2004301076B2/en not_active Ceased
- 2004-08-13 OA OA1200600051A patent/OA13237A/en unknown
- 2004-08-13 EP EP04744786.7A patent/EP1654769B2/de not_active Expired - Lifetime
- 2004-08-13 EP EP04744787A patent/EP1654751A2/de not_active Withdrawn
- 2004-08-13 KR KR1020067003122A patent/KR101004452B1/ko not_active IP Right Cessation
- 2004-08-13 AT AT04744786T patent/ATE510304T2/de active
- 2004-08-13 MX MXPA06001726A patent/MXPA06001726A/es active IP Right Grant
- 2004-08-13 EA EA200600407A patent/EA009012B1/ru not_active IP Right Cessation
- 2004-08-13 DK DK04744786.7T patent/DK1654769T4/en active
- 2004-08-13 AP AP2006003508A patent/AP2149A/xx active
- 2004-08-13 AP AP2006003507A patent/AP2180A/xx active
- 2004-08-13 CA CA2539556A patent/CA2539556C/en not_active Expired - Lifetime
- 2004-08-13 US US10/568,227 patent/US7682939B2/en not_active Expired - Fee Related
- 2004-08-13 WO PCT/IB2004/051459 patent/WO2005017979A2/en active Search and Examination
- 2004-08-13 US US10/568,229 patent/US7744705B2/en not_active Expired - Fee Related
- 2004-08-13 MX MXPA06001723A patent/MXPA06001723A/es active IP Right Grant
- 2004-08-13 JP JP2006523109A patent/JP4994032B2/ja not_active Expired - Fee Related
- 2004-08-13 BR BRPI0413572-5A patent/BRPI0413572A/pt not_active IP Right Cessation
- 2004-08-13 JP JP2006523110A patent/JP4864705B2/ja not_active Expired - Fee Related
-
2006
- 2006-02-11 EG EGNA2006000140 patent/EG25410A/xx active
- 2006-02-13 IL IL173694A patent/IL173694A0/en unknown
- 2006-02-13 IL IL173693A patent/IL173693A/en not_active IP Right Cessation
-
2007
- 2007-02-23 HK HK07102040.9A patent/HK1097105A1/xx not_active IP Right Cessation
-
2010
- 2010-03-19 US US12/728,054 patent/US8735214B2/en not_active Expired - Fee Related
-
2011
- 2011-08-17 CY CY20111100787T patent/CY1111940T1/el unknown
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