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ATE510304T2 - Verfahren zur herstellung von legierungs- halbleiterfilmen der gruppe ib-iiia-via-quaternär oder höher - Google Patents

Verfahren zur herstellung von legierungs- halbleiterfilmen der gruppe ib-iiia-via-quaternär oder höher Download PDF

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Publication number
ATE510304T2
ATE510304T2 AT04744786T AT04744786T ATE510304T2 AT E510304 T2 ATE510304 T2 AT E510304T2 AT 04744786 T AT04744786 T AT 04744786T AT 04744786 T AT04744786 T AT 04744786T AT E510304 T2 ATE510304 T2 AT E510304T2
Authority
AT
Austria
Prior art keywords
iiia
quaternary
semiconductor film
alloy semiconductor
producing group
Prior art date
Application number
AT04744786T
Other languages
English (en)
Inventor
Vivian Alberts
Original Assignee
Univ Johannesburg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=34198392&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE510304(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Univ Johannesburg filed Critical Univ Johannesburg
Application granted granted Critical
Publication of ATE510304T2 publication Critical patent/ATE510304T2/de

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C9/00Alloys based on copper
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/10Semiconductor bodies
    • H10F77/12Active materials
    • H10F77/126Active materials comprising only Group I-III-VI chalcopyrite materials, e.g. CuInSe2, CuGaSe2 or CuInGaSe2 [CIGS]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/541CuInSe2 material PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Photovoltaic Devices (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Chemical Vapour Deposition (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Particle Accelerators (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
AT04744786T 2003-08-14 2004-08-13 Verfahren zur herstellung von legierungs- halbleiterfilmen der gruppe ib-iiia-via-quaternär oder höher ATE510304T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
ZA200306316 2003-08-14
ZA200402497 2004-03-30
PCT/IB2004/051458 WO2005017978A2 (en) 2003-08-14 2004-08-13 Method for the preparation of group ib-iiia-via quaternary or higher alloy semiconductor films

Publications (1)

Publication Number Publication Date
ATE510304T2 true ATE510304T2 (de) 2011-06-15

Family

ID=34198392

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04744786T ATE510304T2 (de) 2003-08-14 2004-08-13 Verfahren zur herstellung von legierungs- halbleiterfilmen der gruppe ib-iiia-via-quaternär oder höher

Country Status (20)

Country Link
US (3) US7682939B2 (de)
EP (3) EP2284905A2 (de)
JP (2) JP4994032B2 (de)
KR (2) KR101027318B1 (de)
AP (2) AP2149A (de)
AT (1) ATE510304T2 (de)
AU (2) AU2004301075B2 (de)
BR (2) BRPI0413567A (de)
CA (2) CA2535703C (de)
CY (1) CY1111940T1 (de)
DE (1) DE202004021800U1 (de)
DK (1) DK1654769T4 (de)
EA (2) EA010171B1 (de)
EG (1) EG25410A (de)
ES (1) ES2366888T5 (de)
HK (1) HK1097105A1 (de)
IL (2) IL173694A0 (de)
MX (2) MXPA06001726A (de)
OA (2) OA13236A (de)
WO (2) WO2005017978A2 (de)

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US8779283B2 (en) * 2007-11-29 2014-07-15 General Electric Company Absorber layer for thin film photovoltaics and a solar cell made therefrom
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US20090215224A1 (en) * 2008-02-21 2009-08-27 Film Solar Tech Inc. Coating methods and apparatus for making a cigs solar cell
DE102008024230A1 (de) * 2008-05-19 2009-11-26 Avancis Gmbh & Co. Kg Schichtsystem für Solarzellen
ES2581378T3 (es) 2008-06-20 2016-09-05 Volker Probst Dispositivo de procesamiento y procedimiento para procesar productos de procesamiento apilados
US7947524B2 (en) * 2008-09-30 2011-05-24 Stion Corporation Humidity control and method for thin film photovoltaic materials
US20110018103A1 (en) * 2008-10-02 2011-01-27 Stion Corporation System and method for transferring substrates in large scale processing of cigs and/or cis devices
US8241943B1 (en) 2009-05-08 2012-08-14 Stion Corporation Sodium doping method and system for shaped CIGS/CIS based thin film solar cells
US8372684B1 (en) * 2009-05-14 2013-02-12 Stion Corporation Method and system for selenization in fabricating CIGS/CIS solar cells
US8507786B1 (en) 2009-06-27 2013-08-13 Stion Corporation Manufacturing method for patterning CIGS/CIS solar cells
US8398772B1 (en) 2009-08-18 2013-03-19 Stion Corporation Method and structure for processing thin film PV cells with improved temperature uniformity
JP5548208B2 (ja) * 2009-09-04 2014-07-16 大陽日酸株式会社 太陽電池用セレン化水素混合ガスの供給方法及び供給装置
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US8859880B2 (en) * 2010-01-22 2014-10-14 Stion Corporation Method and structure for tiling industrial thin-film solar devices
TWI411121B (zh) * 2010-03-11 2013-10-01 Ind Tech Res Inst 光吸收層之製造方法及應用其之太陽能電池結構
MX2012010732A (es) 2010-03-17 2013-04-03 Dow Global Technologies Llc Estructuras de película delgada basadas en calcógeno fotoelectrónicamente activo que incorporan los estratos.
US9096930B2 (en) 2010-03-29 2015-08-04 Stion Corporation Apparatus for manufacturing thin film photovoltaic devices
US8142521B2 (en) * 2010-03-29 2012-03-27 Stion Corporation Large scale MOCVD system for thin film photovoltaic devices
US20130029450A1 (en) * 2010-04-19 2013-01-31 Korea Institute Of Industrial Technology Method for manufacturing solar cell
US8692198B2 (en) 2010-04-21 2014-04-08 Sionyx, Inc. Photosensitive imaging devices and associated methods
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WO2011146115A1 (en) 2010-05-21 2011-11-24 Heliovolt Corporation Liquid precursor for deposition of copper selenide and method of preparing the same
KR20110128580A (ko) 2010-05-24 2011-11-30 삼성전자주식회사 태양 전지 제조 방법
WO2011160130A2 (en) 2010-06-18 2011-12-22 Sionyx, Inc High speed photosensitive devices and associated methods
US8461061B2 (en) 2010-07-23 2013-06-11 Stion Corporation Quartz boat method and apparatus for thin film thermal treatment
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EP2608274A1 (de) 2010-08-17 2013-06-26 Toppan Printing Co., Ltd. Tinte zur herstellung einer verbundhalbleiterdünnschicht, aus der tinte hergestellte verbundhalbleiterdünnschicht, mit der verbundhalbleiterdünnschicht ausgestattete solarzelle und verfahren zur herstellung der solarzelle
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CN103222063A (zh) * 2010-11-22 2013-07-24 京瓷株式会社 光电转换装置
JP2012160514A (ja) * 2011-01-31 2012-08-23 Kyocera Corp 金属カルコゲナイド層の製造方法および光電変換装置の製造方法
EA020377B1 (ru) * 2011-05-12 2014-10-30 Общество С Ограниченной Ответственностью "Изовак" Способ формирования тонких пленок cigs для солнечных батарей и устройство для его реализации
US9496308B2 (en) 2011-06-09 2016-11-15 Sionyx, Llc Process module for increasing the response of backside illuminated photosensitive imagers and associated methods
JP2013021231A (ja) * 2011-07-13 2013-01-31 Kyocera Corp 半導体層の製造方法および光電変換装置の製造方法
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JP2015508375A (ja) * 2011-12-15 2015-03-19 ミッドサマー・アーベー 銅インジウムガリウムジセレニドのリサイクル
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Also Published As

Publication number Publication date
CA2539556A1 (en) 2005-02-24
KR101027318B1 (ko) 2011-04-06
AU2004301075A1 (en) 2005-02-24
JP4864705B2 (ja) 2012-02-01
OA13236A (en) 2006-12-13
BRPI0413567A (pt) 2006-10-17
US20060222558A1 (en) 2006-10-05
CY1111940T1 (el) 2015-11-04
CA2539556C (en) 2010-10-26
AU2004301076A1 (en) 2005-02-24
IL173693A0 (en) 2006-07-05
WO2005017978A3 (en) 2005-10-13
KR20060058717A (ko) 2006-05-30
EA010171B1 (ru) 2008-06-30
MXPA06001726A (es) 2007-05-04
WO2005017978A2 (en) 2005-02-24
OA13237A (en) 2006-12-13
EP1654769B2 (de) 2018-02-07
CA2535703A1 (en) 2005-02-24
EP1654769B1 (de) 2011-05-18
US20100190292A1 (en) 2010-07-29
AU2004301076B2 (en) 2009-11-05
KR20060082075A (ko) 2006-07-14
IL173694A0 (en) 2006-07-05
DE202004021800U1 (de) 2011-04-21
EA200600407A1 (ru) 2006-08-25
DK1654769T3 (da) 2011-09-12
EA009012B1 (ru) 2007-10-26
US7682939B2 (en) 2010-03-23
EP2284905A2 (de) 2011-02-16
WO2005017979A2 (en) 2005-02-24
JP4994032B2 (ja) 2012-08-08
US8735214B2 (en) 2014-05-27
CA2535703C (en) 2011-04-19
BRPI0413572A (pt) 2006-10-17
AP2149A (en) 2010-09-01
EP1654751A2 (de) 2006-05-10
MXPA06001723A (es) 2007-04-25
IL173693A (en) 2014-01-30
DK1654769T4 (en) 2018-05-22
AP2180A (en) 2010-11-29
ES2366888T3 (es) 2011-10-26
AU2004301075B2 (en) 2009-10-08
AP2006003507A0 (en) 2006-02-28
WO2005017979A3 (en) 2006-06-01
KR101004452B1 (ko) 2010-12-28
US20070004078A1 (en) 2007-01-04
JP2007503708A (ja) 2007-02-22
EA200600406A1 (ru) 2006-08-25
ES2366888T5 (es) 2018-05-17
EP1654769A2 (de) 2006-05-10
JP2007502247A (ja) 2007-02-08
US7744705B2 (en) 2010-06-29
EG25410A (en) 2012-01-02
AP2006003508A0 (en) 2006-02-28
HK1097105A1 (en) 2007-06-15

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