[go: up one dir, main page]

ATE393024T1 - Piezoelektrischer aktor, damit versehener flüssigkeitausstosskopf, piezoelektrisches bauelement und dazugehöriges herstellungsverfahren - Google Patents

Piezoelektrischer aktor, damit versehener flüssigkeitausstosskopf, piezoelektrisches bauelement und dazugehöriges herstellungsverfahren

Info

Publication number
ATE393024T1
ATE393024T1 AT03006116T AT03006116T ATE393024T1 AT E393024 T1 ATE393024 T1 AT E393024T1 AT 03006116 T AT03006116 T AT 03006116T AT 03006116 T AT03006116 T AT 03006116T AT E393024 T1 ATE393024 T1 AT E393024T1
Authority
AT
Austria
Prior art keywords
piezoelectric layer
piezoelectric
production method
liquid discharge
discharge head
Prior art date
Application number
AT03006116T
Other languages
English (en)
Inventor
Chang Junhua
Takahiro Katakura
Motonori Okumura
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of ATE393024T1 publication Critical patent/ATE393024T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/081—Shaping or machining of piezoelectric or electrostrictive bodies by coating or depositing using masks, e.g. lift-off
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14258—Multi layer thin film type piezoelectric element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead-based oxides
    • H10N30/8554—Lead-zirconium titanate [PZT] based

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Reciprocating Pumps (AREA)
  • Micromachines (AREA)
AT03006116T 2002-03-18 2003-03-18 Piezoelektrischer aktor, damit versehener flüssigkeitausstosskopf, piezoelektrisches bauelement und dazugehöriges herstellungsverfahren ATE393024T1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2002075089 2002-03-18
JP2002075091 2002-03-18
JP2002156153 2002-05-29
JP2003070545A JP4305016B2 (ja) 2002-03-18 2003-03-14 圧電アクチュエータユニット、及び、それを用いた液体噴射ヘッド

Publications (1)

Publication Number Publication Date
ATE393024T1 true ATE393024T1 (de) 2008-05-15

Family

ID=27792242

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03006116T ATE393024T1 (de) 2002-03-18 2003-03-18 Piezoelektrischer aktor, damit versehener flüssigkeitausstosskopf, piezoelektrisches bauelement und dazugehöriges herstellungsverfahren

Country Status (6)

Country Link
US (1) US6949869B2 (de)
EP (2) EP1775130A3 (de)
JP (1) JP4305016B2 (de)
CN (1) CN1226145C (de)
AT (1) ATE393024T1 (de)
DE (1) DE60320476T2 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3555682B2 (ja) * 2002-07-09 2004-08-18 セイコーエプソン株式会社 液体吐出ヘッド
KR100519764B1 (ko) * 2003-03-20 2005-10-07 삼성전자주식회사 잉크젯 프린트헤드의 압전 액츄에이터 및 그 형성 방법
JP4113143B2 (ja) * 2004-03-15 2008-07-09 Ｔｄｋ株式会社 薄膜圧電体素子、サスペンション、及びハードディスク装置
US7420317B2 (en) * 2004-10-15 2008-09-02 Fujifilm Dimatix, Inc. Forming piezoelectric actuators
US7388319B2 (en) * 2004-10-15 2008-06-17 Fujifilm Dimatix, Inc. Forming piezoelectric actuators
KR100694132B1 (ko) * 2005-06-28 2007-03-12 삼성전자주식회사 잉크 카트리지의 잉크 채널 유닛과 그 제조 방법
TWI294789B (en) 2005-11-29 2008-03-21 Ind Tech Res Inst Droplet ejecting head
CN100513180C (zh) * 2005-12-06 2009-07-15 财团法人工业技术研究院 微液滴喷头
JP5082337B2 (ja) * 2006-08-23 2012-11-28 ブラザー工業株式会社 圧電アクチュエータ、インクジェットプリンタ及び圧電アクチュエータの製造方法
JP4300431B2 (ja) 2007-01-15 2009-07-22 セイコーエプソン株式会社 アクチュエータ装置及びそれを用いた液体噴射ヘッド
CN100566530C (zh) * 2007-02-16 2009-12-02 财团法人工业技术研究院 微液滴冷却装置
CN102292216B (zh) * 2009-01-20 2014-04-09 惠普开发有限公司 流体喷射器结构
JP5754129B2 (ja) * 2010-03-11 2015-07-29 セイコーエプソン株式会社 圧電素子、圧電センサー、電子機器、および圧電素子の製造方法
CN102398421B (zh) * 2010-09-09 2014-05-21 研能科技股份有限公司 压电致动模块及其所适用的压电喷墨头的制造方法
US8939556B2 (en) * 2011-06-09 2015-01-27 Hewlett-Packard Development Company, L.P. Fluid ejection device
JP5957914B2 (ja) 2012-02-01 2016-07-27 セイコーエプソン株式会社 液体噴射ヘッドおよび液体噴射装置
US8904876B2 (en) * 2012-09-29 2014-12-09 Stryker Corporation Flexible piezocapacitive and piezoresistive force and pressure sensors
JP6083190B2 (ja) * 2012-10-22 2017-02-22 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置並びにアクチュエーター装置
JP2015000560A (ja) * 2013-06-18 2015-01-05 株式会社リコー 電気機械変換素子及びその電気機械変換素子の製造方法、液滴吐出ヘッド、液体カートリッジ、画像形成装置、液滴吐出装置、並びに、ポンプ装置
JP6476848B2 (ja) 2014-12-26 2019-03-06 ブラザー工業株式会社 液体吐出装置
EP3274178A4 (de) * 2015-03-26 2018-11-21 Seiko Epson Corporation Flüssigkeitsausstosskopf und flüssigkeitsausstossvorrichtung
JP6980027B2 (ja) * 2017-07-15 2021-12-15 新科實業有限公司SAE Magnetics(H.K.)Ltd. 薄膜圧電アクチュエータ
JP7247556B2 (ja) * 2018-11-30 2023-03-29 ブラザー工業株式会社 圧電アクチュエータ及び圧電アクチュエータの製造方法
CN112439640B (zh) * 2019-08-28 2022-08-02 若川深度科技有限公司 扭力杆式压电致动装置
CN112780532A (zh) * 2019-11-04 2021-05-11 科际精密股份有限公司 致动装置
JP7615678B2 (ja) 2020-12-28 2025-01-17 ブラザー工業株式会社 印刷装置及びヘッド

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2952934B2 (ja) 1989-02-21 1999-09-27 セイコーエプソン株式会社 液体噴射ヘッドとその製造方法、及び液体噴射記録装置
JP2842448B2 (ja) 1989-07-11 1999-01-06 日本碍子株式会社 圧電／電歪膜型アクチュエータ
US5706820A (en) * 1995-06-07 1998-01-13 Acuson Corporation Ultrasonic transducer with reduced elevation sidelobes and method for the manufacture thereof
EP0803918B2 (de) 1996-04-11 2010-10-20 Seiko Epson Corporation Piezolelektrischer Vibrator, diesen piezoelektrischen Vibrator verwendender Tintenstrahldruckkopf und Verfahren zur Herstellung
JP3484889B2 (ja) 1996-05-21 2004-01-06 セイコーエプソン株式会社 圧電振動子ユニット、これの製造方法、及びインクジェット式記録ヘッド
JPH09277531A (ja) 1996-04-18 1997-10-28 Ricoh Co Ltd インクジェットヘッド
JP3666125B2 (ja) 1996-06-05 2005-06-29 株式会社村田製作所 圧電型インクジェットヘッド
JP3666177B2 (ja) 1997-04-14 2005-06-29 松下電器産業株式会社 インクジェット記録装置
JPH115305A (ja) 1997-04-24 1999-01-12 Matsushita Electric Ind Co Ltd 液体噴射装置とその製造方法
JP3379479B2 (ja) 1998-07-01 2003-02-24 セイコーエプソン株式会社 機能性薄膜、圧電体素子、インクジェット式記録ヘッド、プリンタ、圧電体素子の製造方法およびインクジェット式記録ヘッドの製造方法、
JP3451956B2 (ja) 1998-08-31 2003-09-29 松下電器産業株式会社 チップ吸着用のダイコレットならびにチップのボンディング装置およびボンディング方法
JP2000141647A (ja) 1998-11-10 2000-05-23 Matsushita Electric Ind Co Ltd インクジェット記録装置
JP2000332313A (ja) 1999-05-21 2000-11-30 Matsushita Electric Ind Co Ltd 薄膜圧電型バイモルフ素子及びその応用
JP2001024248A (ja) * 1999-07-07 2001-01-26 Samsung Electro Mech Co Ltd 低温焼成法による多層圧電／電歪セラミックアクチュエータの製造方法及びその方法によって製造された多層圧電／電歪セラミックアクチュエータ
JP2001077438A (ja) 1999-09-07 2001-03-23 Matsushita Electric Ind Co Ltd 圧電素子、インクジェット式記録ヘッド、およびこれらの製造方法
WO2001075985A1 (fr) * 2000-03-30 2001-10-11 Fujitsu Limited Actionneur piezoelectrique, son procede de fabrication et tete a jet d'encre dotee de cet actionneur
JP3796394B2 (ja) 2000-06-21 2006-07-12 キヤノン株式会社 圧電素子の製造方法および液体噴射記録ヘッドの製造方法
JP4393068B2 (ja) 2001-03-12 2010-01-06 日本碍子株式会社 圧電／電歪膜型アクチュエータ及び製造方法

Also Published As

Publication number Publication date
US6949869B2 (en) 2005-09-27
EP1775130A3 (de) 2007-11-21
EP1775130A2 (de) 2007-04-18
DE60320476T2 (de) 2009-05-14
EP1346828A2 (de) 2003-09-24
JP4305016B2 (ja) 2009-07-29
US20040004413A1 (en) 2004-01-08
CN1445090A (zh) 2003-10-01
EP1346828B1 (de) 2008-04-23
DE60320476D1 (de) 2008-06-05
JP2004056085A (ja) 2004-02-19
CN1226145C (zh) 2005-11-09
EP1346828A3 (de) 2003-11-05

Similar Documents

Publication Publication Date Title
ATE393024T1 (de) Piezoelektrischer aktor, damit versehener flüssigkeitausstosskopf, piezoelektrisches bauelement und dazugehöriges herstellungsverfahren
KR100809712B1 (ko) 압전 액튜에이터
TW200709947A (en) Electrostatic actuator, droplet discharge head, method for driving droplet discharge head, and method for manufacturing electrostatic actuator
WO2004017063A3 (de) Vorrichtung und verfahren zur detektion einer substanz mithilfe eines hochfrequenten piezoakustischen dünnfilmresonators
TWI256373B (en) Micromachine and method of fabricating the same
WO2008090651A1 (ja) 圧電共振子及び圧電フィルタ
ATE495014T1 (de) Piezoelektrisches stellglied und dieses aufweisender fluideinspritzkopf
ATE504975T1 (de) Piezoelektrischer resonator, piezoelektrischer filter und kommunikationsvorrichtung
EP1566852A3 (de) Piezoelektrisches Betätigungsglied, Uhr und elektronisches Gerät
WO2003016599A1 (fr) Element a semi-conducteur organique
ATE412523T1 (de) Flüssigkeitsausstosskopf und dazugehöriges herstellungsverfahren
ATE538502T1 (de) Mehrschichtiges piezoelektrisches bauelement
EP1346829A3 (de) Piezoelektrischer Aktor, damit versehener Flüssigkeitsausstosskopf, und dazugehöriges Herstellungsverfahren
DK1764844T3 (da) Piezoelektrisk aktuater
GB2370153A (en) Electrode patterning for a differential pzt activator
JP2003219499A (ja) 圧電スピーカ
DE602004025399D1 (de) Dünnschicht-Volumenwellen-Resonator (FBAR) mit Luftspalt und Herstellungsmethode dafür
DE602006018214D1 (de) Piezoelektrischer Aktuator, Vorrichtung um Flüssigkeit zu transportieren, Verfahren um piezoelektrischen Aktuator herzustellen
WO2003036786A3 (de) Piezoelektrischer antrieb
DE502006000374D1 (de) Schwingungsreduzierendes Bauteil und damit ausgerüstetes Vakuumpumpsystem
DE10345730A1 (de) Piezoaktor
WO2001006542A3 (de) Verfahren zur herstellung eines vertikal-halbleitertransistorbauelements und vertikal-halbleitertransistorbauelement
JP2004531189A5 (de)
DE60323797D1 (de) Tintenstrahldruckkopf mit laminiertem piezoelektrischem Aktuator
AU2003206604A1 (en) Piezoelectric motor and method for actuating same

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties