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ATE325274T1 - VACUUM PUMP - Google Patents

VACUUM PUMP

Info

Publication number
ATE325274T1
ATE325274T1 AT04292018T AT04292018T ATE325274T1 AT E325274 T1 ATE325274 T1 AT E325274T1 AT 04292018 T AT04292018 T AT 04292018T AT 04292018 T AT04292018 T AT 04292018T AT E325274 T1 ATE325274 T1 AT E325274T1
Authority
AT
Austria
Prior art keywords
rotor
vacuum pump
motor
molecular
shaft
Prior art date
Application number
AT04292018T
Other languages
German (de)
Inventor
Jean-Luc Rival
Original Assignee
Cit Alcatel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=34089871&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE325274(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Cit Alcatel filed Critical Cit Alcatel
Application granted granted Critical
Publication of ATE325274T1 publication Critical patent/ATE325274T1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Electrophonic Musical Instruments (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

The pump has a motor (7) that is inserted inside a cavity (5c) of a molecular rotor (5a) of a molecular pumping stage (5). The motor permits a rotation speed higher than 20000 revolutions per minute, such that electrical power density is high. An upstream end (8b) of a crank shaft (8) is coupled to the rotor and a downstream zone (8b) of the shaft is connected to the primary rotor (9a).
AT04292018T 2003-08-29 2004-08-09 VACUUM PUMP ATE325274T1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0310282A FR2859250B1 (en) 2003-08-29 2003-08-29 VACUUM PUMP

Publications (1)

Publication Number Publication Date
ATE325274T1 true ATE325274T1 (en) 2006-06-15

Family

ID=34089871

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04292018T ATE325274T1 (en) 2003-08-29 2004-08-09 VACUUM PUMP

Country Status (6)

Country Link
US (1) US7160081B2 (en)
EP (1) EP1510697B1 (en)
JP (1) JP2005076631A (en)
AT (1) ATE325274T1 (en)
DE (1) DE602004000798T2 (en)
FR (1) FR2859250B1 (en)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0229356D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
DE10353034A1 (en) * 2003-11-13 2005-06-09 Leybold Vakuum Gmbh Multi-stage friction vacuum pump
GB0329839D0 (en) * 2003-12-23 2004-01-28 Boc Group Plc Vacuum pump
US20090081022A1 (en) * 2007-09-21 2009-03-26 Honeywell International Inc. Radially Staged Microscale Turbomolecular Pump
DE102008024764A1 (en) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Multi-stage vacuum pump
DE102008036623A1 (en) * 2008-08-06 2010-02-11 Oerlikon Leybold Vacuum Gmbh Use of a roller bearing for mounting rotating components in Vakuumeinirchtungen and vacuum device
US8152442B2 (en) * 2008-12-24 2012-04-10 Agilent Technologies, Inc. Centripetal pumping stage and vacuum pump incorporating such pumping stage
US8070419B2 (en) * 2008-12-24 2011-12-06 Agilent Technologies, Inc. Spiral pumping stage and vacuum pump incorporating such pumping stage
DE102009021642B4 (en) * 2009-05-16 2021-07-22 Pfeiffer Vacuum Gmbh Vacuum pump
JP5785494B2 (en) * 2009-08-28 2015-09-30 エドワーズ株式会社 Components used in vacuum pumps and vacuum pumps
DE202011002809U1 (en) * 2011-02-17 2012-06-12 Oerlikon Leybold Vacuum Gmbh Stator element and high vacuum pump
KR101704053B1 (en) * 2011-09-06 2017-02-07 현대자동차주식회사 Vaccum pump integrated ESC apparatus
CN103195724B (en) * 2012-01-04 2015-05-27 李晨 Vertical squirrel cage molecular pump
CN104220748B (en) * 2012-02-03 2017-06-06 英瓦卡尔公司 Pumping installations
EP2956674B1 (en) * 2013-02-15 2019-05-01 Edwards Limited Vacuum pump
DE102013203421A1 (en) 2013-02-28 2014-08-28 Pfeiffer Vacuum Gmbh vacuum pump
DE102014112553A1 (en) * 2014-09-01 2016-03-03 Pfeiffer Vacuum Gmbh vacuum pump
GB201715151D0 (en) * 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump
FR3093544B1 (en) * 2019-03-05 2021-03-12 Pfeiffer Vacuum Turbomolecular vacuum pump and purge process

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
JP3130890B2 (en) * 1999-02-25 2001-01-31 セイコー精機株式会社 Magnetic bearing device and magnetic bearing control device
JP2002138987A (en) * 2000-10-31 2002-05-17 Seiko Instruments Inc Vacuum pump
JP3961273B2 (en) * 2001-12-04 2007-08-22 Ｂｏｃエドワーズ株式会社 Vacuum pump

Also Published As

Publication number Publication date
EP1510697A1 (en) 2005-03-02
DE602004000798T2 (en) 2007-08-16
FR2859250A1 (en) 2005-03-04
FR2859250B1 (en) 2005-11-11
US7160081B2 (en) 2007-01-09
EP1510697B1 (en) 2006-05-03
DE602004000798D1 (en) 2006-06-08
JP2005076631A (en) 2005-03-24
US20050047904A1 (en) 2005-03-03

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties