ATE115242T1 - Anlage zum pumpen von gasen mit pumpengeschwindigkeitsregelung. - Google Patents

Anlage zum pumpen von gasen mit pumpengeschwindigkeitsregelung.

Info

Publication number: ATE115242T1
Authority: AT; Austria
Prior art keywords: bellows; speed control; pump speed; delivery outlet; wall
Prior art date: 1991-10-07

Application number

AT92402669T

Other languages

English (en)

Inventor

Jean-Marc Paquet

Luc Mathieu

Original Assignee

Cit Alcatel

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1991-10-07

Filing date

1992-09-29

Publication date

1994-12-15

1992-09-29 Application filed by Cit Alcatel filed Critical Cit Alcatel

1994-12-15 Application granted granted Critical

1994-12-15 Publication of ATE115242T1 publication Critical patent/ATE115242T1/de

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B41/00—Pumping installations or systems specially adapted for elastic fluids
- F04B41/06—Combinations of two or more pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/22—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by means of valves
- F04B49/225—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by means of valves with throttling valves or valves varying the pump inlet opening or the outlet opening

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
Fluid Mechanics (AREA)
Applications Or Details Of Rotary Compressors (AREA)
Reciprocating Pumps (AREA)
Gas Separation By Absorption (AREA)
Control Of The Air-Fuel Ratio Of Carburetors (AREA)

AT92402669T 1991-10-07 1992-09-29 Anlage zum pumpen von gasen mit pumpengeschwindigkeitsregelung. ATE115242T1 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
FR9112310A FR2682164B1 (fr)	1991-10-07	1991-10-07	Installation de pompage de gaz avec regulation de la vitesse de pompage.

Publications (1)

Publication Number	Publication Date
ATE115242T1 true ATE115242T1 (de)	1994-12-15

Family

ID=9417654

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AT92402669T ATE115242T1 (de)	1991-10-07	1992-09-29	Anlage zum pumpen von gasen mit pumpengeschwindigkeitsregelung.

Country Status (7)

Country	Link
US (1)	US5244353A (de)
EP (1)	EP0537051B1 (de)
JP (1)	JP3251983B2 (de)
AT (1)	ATE115242T1 (de)
DE (1)	DE69200828T2 (de)
DK (1)	DK0537051T3 (de)
FR (1)	FR2682164B1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US20030236489A1 (en)	2002-06-21	2003-12-25	Baxter International, Inc.	Method and apparatus for closed-loop flow control system
FR2971018A1 (fr) *	2011-01-27	2012-08-03	Alcatel Vacuum Technology France	Pompe a vide primaire, installation pour le traitement de substrats et procede de pompage
CN102155386A (zh) *	2011-05-27	2011-08-17	开平太平洋绝缘材料有限公司	液环式真空泵
GB2508396B (en) *	2012-11-30	2015-10-07	Edwards Ltd	Improvements in and relating to vacuum conduits
WO2016137887A1 (en) *	2015-02-23	2016-09-01	Howden Roots Llc	Device for conditioning flow of working fluids
US11815095B2 (en) *	2019-01-10	2023-11-14	Elival Co., Ltd	Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US1948907A (en) *	1931-04-18	1934-02-27	Egli Eugen	Compressor
US2951633A (en) *	1955-07-14	1960-09-06	Wagner Electric Corp	System and method of lubricating air compressors and the like
US2935242A (en) *	1955-07-23	1960-05-03	Heraeus Gmbh W C	Pumping apparatus
CH470589A (de) *	1968-10-11	1969-03-31	Balzers Patent Beteilig Ag	Anordnung zur Evakuierung von Rezipienten
US3680980A (en) *	1970-02-20	1972-08-01	Hans U Bart	Fuel pump
US3922110A (en) *	1974-01-28	1975-11-25	Henry Huse	Multi-stage vacuum pump
US4596518A (en) *	1984-02-03	1986-06-24	Diesel Kiki Co., Ltd.	Swash-plate type compressor
JPS60171989U (ja) *	1984-04-25	1985-11-14	株式会社ボッシュオートモーティブ　システム	カ−ク−ラ用ベ−ン型圧縮機
US4563134A (en) *	1985-06-24	1986-01-07	General Motors Corporation	Cylinder head with pressure regulator valve
JPS63263282A (ja) *	1987-04-22	1988-10-31	Toyota Autom Loom Works Ltd	カ−エアコン用圧縮機の能力制御機構
US4850806A (en) *	1988-05-24	1989-07-25	The Boc Group, Inc.	Controlled by-pass for a booster pump

1991
- 1991-10-07 FR FR9112310A patent/FR2682164B1/fr not_active Expired - Fee Related
1992
- 1992-09-29 DE DE69200828T patent/DE69200828T2/de not_active Expired - Fee Related
- 1992-09-29 AT AT92402669T patent/ATE115242T1/de not_active IP Right Cessation
- 1992-09-29 EP EP92402669A patent/EP0537051B1/de not_active Expired - Lifetime
- 1992-09-29 DK DK92402669.3T patent/DK0537051T3/da active
- 1992-10-05 US US07/956,243 patent/US5244353A/en not_active Expired - Fee Related
- 1992-10-07 JP JP26865192A patent/JP3251983B2/ja not_active Expired - Fee Related

Also Published As

Publication number	Publication date
DE69200828T2 (de)	1995-04-13
DE69200828D1 (de)	1995-01-19
JP3251983B2 (ja)	2002-01-28
FR2682164A1 (fr)	1993-04-09
EP0537051A1 (de)	1993-04-14
FR2682164B1 (fr)	1995-01-20
EP0537051B1 (de)	1994-12-07
US5244353A (en)	1993-09-14
DK0537051T3 (da)	1995-03-06
JPH05231371A (ja)	1993-09-07

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ATE180314T1 (de)	1999-06-15	Kryopumpe
KR930021841A (ko)	1993-11-23	계속 주행중인 다수의 사의 흡인장치
DE69200828D1 (de)	1995-01-19	Anlage zum Pumpen von Gasen mit Pumpengeschwindigkeitsregelung.
DE59304693D1 (de)	1997-01-16	Dampfturbine
DE69829546D1 (de)	2005-05-04	Pumpsystem für Flüssigkeiten
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DE69510588D1 (de)	1999-08-12	Freikolbenmaschine
SE7906445L (sv)	1980-10-13	Centrifugalpump
US3845904A (en)	1974-11-05	Variable flow two stage nozzle
GB945265A (en)	1963-12-23	Mechanical seal with controlled leakage
SE8603887D0 (sv)	1986-09-16	Regulator valve, and double-acting valve device including such a valve
GB1159173A (en)	1969-07-23	Improvements in and relating to the Desorption of Foreign Molecules from the Inner Wall Surface of a Receptacle
JPS5799233A (en)	1982-06-19	Supercharger of motorcycle
JPS5549599A (en)	1980-04-10	Vacuum generating valve
JPS55139566A (en)	1980-10-31	Valve device
JPS54120354A (en)	1979-09-18	Axial sealing device
GB1510549A (en)	1978-05-10	Pumping means for manure
GB2008805A (en)	1979-06-06	Valve for controlling respiratory gas
FR2332565A1 (fr)	1977-06-17	Regulateur de pression
JPS56138433A (en)	1981-10-29	Reducing device of harmful exhaust from diesel engine
JPS57165696A (en)	1982-10-12	Compressor pressure control system
ES132778U (es)	1968-02-01	Bomba con camara de presion que regula la uniformidad del caudal.
JPS5330001A (en)	1978-03-20	Pump running method
JPS57212400A (en)	1982-12-27	Vacuum generating apparatus

Legal Events

Date	Code	Title	Description
1995-05-15	UEP	Publication of translation of european patent specification
1996-12-15	REN	Ceased due to non-payment of the annual fee