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AT521586A3 - Gasmischvorrichtung zur Linearisierung oder Kalibrierung von Gasanalysatoren - Google Patents

Gasmischvorrichtung zur Linearisierung oder Kalibrierung von Gasanalysatoren Download PDF

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Publication number
AT521586A3
AT521586A3 ATA50736/2018A AT507362018A AT521586A3 AT 521586 A3 AT521586 A3 AT 521586A3 AT 507362018 A AT507362018 A AT 507362018A AT 521586 A3 AT521586 A3 AT 521586A3
Authority
AT
Austria
Prior art keywords
gas
inlet
mixing channel
calibration
analyzers
Prior art date
Application number
ATA50736/2018A
Other languages
English (en)
Other versions
AT521586B1 (de
AT521586A2 (de
Inventor
Arar Dr Mario
Schimpl Dr Heinz
Neubauer Karl
Damiean Arestide-Valentin
Original Assignee
Avl List Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Avl List Gmbh filed Critical Avl List Gmbh
Priority to ATA50736/2018A priority Critical patent/AT521586B1/de
Priority to DE112019004259.9T priority patent/DE112019004259A5/de
Priority to CN201980055861.0A priority patent/CN112638515B/zh
Priority to US17/271,210 priority patent/US20210394140A1/en
Priority to JP2021510799A priority patent/JP7216192B2/ja
Priority to PCT/AT2019/060277 priority patent/WO2020041812A1/de
Publication of AT521586A2 publication Critical patent/AT521586A2/de
Application granted granted Critical
Publication of AT521586B1 publication Critical patent/AT521586B1/de
Publication of AT521586A3 publication Critical patent/AT521586A3/de

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/22—Control or regulation
    • B01F35/221—Control or regulation of operational parameters, e.g. level of material in the mixer, temperature or pressure
    • B01F35/2211—Amount of delivered fluid during a period
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/10—Mixing gases with gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/10—Mixing gases with gases
    • B01F23/19—Mixing systems, i.e. flow charts or diagrams; Arrangements, e.g. comprising controlling means
    • B01F23/191—Mixing systems, i.e. flow charts or diagrams; Arrangements, e.g. comprising controlling means characterised by the construction of the controlling means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/30—Injector mixers
    • B01F25/31—Injector mixers in conduits or tubes through which the main component flows
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/30—Injector mixers
    • B01F25/31—Injector mixers in conduits or tubes through which the main component flows
    • B01F25/314—Injector mixers in conduits or tubes through which the main component flows wherein additional components are introduced at the circumference of the conduit
    • B01F25/3141—Injector mixers in conduits or tubes through which the main component flows wherein additional components are introduced at the circumference of the conduit with additional mixing means other than injector mixers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40—Static mixers
    • B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
    • B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
    • B01F25/433—Mixing tubes wherein the shape of the tube influences the mixing, e.g. mixing tubes with varying cross-section or provided with inwardly extending profiles
    • B01F25/4336—Mixers with a diverging cross-section
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00—Other mixers; Mixing plants; Combinations of mixers
    • B01F33/40—Mixers using gas or liquid agitation, e.g. with air supply tubes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/21—Measuring
    • B01F35/211—Measuring of the operational parameters
    • B01F35/2113—Pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/71—Feed mechanisms
    • B01F35/715—Feeding the components in several steps, e.g. successive steps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/80—Forming a predetermined ratio of the substances to be mixed
    • B01F35/83—Forming a predetermined ratio of the substances to be mixed by controlling the ratio of two or more flows, e.g. using flow sensing or flow controlling devices
    • B01F35/833—Flow control by valves, e.g. opening intermittently
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D1/00—Pipe-line systems
    • F17D1/02—Pipe-line systems for gases or vapours
    • F17D1/04—Pipe-line systems for gases or vapours for distribution of gas
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
    • G06Q10/063—Operations research, analysis or management
    • G06Q10/0639—Performance analysis of employees; Performance analysis of enterprise or organisation operations
    • G06Q10/06393—Score-carding, benchmarking or key performance indicator [KPI] analysis
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/10—Office automation; Time management
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q30/00—Commerce
    • G06Q30/02—Marketing; Price estimation or determination; Fundraising
    • G06Q30/0207—Discounts or incentives, e.g. coupons or rebates
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q30/00—Commerce
    • G06Q30/02—Marketing; Price estimation or determination; Fundraising
    • G06Q30/0207—Discounts or incentives, e.g. coupons or rebates
    • G06Q30/0217—Discounts or incentives, e.g. coupons or rebates involving input on products or services in exchange for incentives or rewards
    • G—PHYSICS
    • G16—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR SPECIFIC APPLICATION FIELDS
    • G16H—HEALTHCARE INFORMATICS, i.e. INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR THE HANDLING OR PROCESSING OF MEDICAL OR HEALTHCARE DATA
    • G16H20/00—ICT specially adapted for therapies or health-improving plans, e.g. for handling prescriptions, for steering therapy or for monitoring patient compliance
    • G16H20/30—ICT specially adapted for therapies or health-improving plans, e.g. for handling prescriptions, for steering therapy or for monitoring patient compliance relating to physical therapies or activities, e.g. physiotherapy, acupressure or exercising
    • G—PHYSICS
    • G16—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR SPECIFIC APPLICATION FIELDS
    • G16H—HEALTHCARE INFORMATICS, i.e. INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR THE HANDLING OR PROCESSING OF MEDICAL OR HEALTHCARE DATA
    • G16H40/00—ICT specially adapted for the management or administration of healthcare resources or facilities; ICT specially adapted for the management or operation of medical equipment or devices
    • G16H40/20—ICT specially adapted for the management or administration of healthcare resources or facilities; ICT specially adapted for the management or operation of medical equipment or devices for the management or administration of healthcare resources or facilities, e.g. managing hospital staff or surgery rooms
    • G—PHYSICS
    • G16—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR SPECIFIC APPLICATION FIELDS
    • G16H—HEALTHCARE INFORMATICS, i.e. INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR THE HANDLING OR PROCESSING OF MEDICAL OR HEALTHCARE DATA
    • G16H50/00—ICT specially adapted for medical diagnosis, medical simulation or medical data mining; ICT specially adapted for detecting, monitoring or modelling epidemics or pandemics
    • G16H50/20—ICT specially adapted for medical diagnosis, medical simulation or medical data mining; ICT specially adapted for detecting, monitoring or modelling epidemics or pandemics for computer-aided diagnosis, e.g. based on medical expert systems
    • G—PHYSICS
    • G16—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR SPECIFIC APPLICATION FIELDS
    • G16H—HEALTHCARE INFORMATICS, i.e. INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR THE HANDLING OR PROCESSING OF MEDICAL OR HEALTHCARE DATA
    • G16H50/00—ICT specially adapted for medical diagnosis, medical simulation or medical data mining; ICT specially adapted for detecting, monitoring or modelling epidemics or pandemics
    • G16H50/30—ICT specially adapted for medical diagnosis, medical simulation or medical data mining; ICT specially adapted for detecting, monitoring or modelling epidemics or pandemics for calculating health indices; for individual health risk assessment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0006—Calibrating gas analysers

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  • Engineering & Computer Science (AREA)
  • Business, Economics & Management (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Strategic Management (AREA)
  • Human Resources & Organizations (AREA)
  • General Business, Economics & Management (AREA)
  • Entrepreneurship & Innovation (AREA)
  • Economics (AREA)
  • Public Health (AREA)
  • Development Economics (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Medical Informatics (AREA)
  • Accounting & Taxation (AREA)
  • Theoretical Computer Science (AREA)
  • Finance (AREA)
  • Marketing (AREA)
  • Biomedical Technology (AREA)
  • Primary Health Care (AREA)
  • Epidemiology (AREA)
  • General Health & Medical Sciences (AREA)
  • Operations Research (AREA)
  • Tourism & Hospitality (AREA)
  • Game Theory and Decision Science (AREA)
  • Quality & Reliability (AREA)
  • Data Mining & Analysis (AREA)
  • Databases & Information Systems (AREA)
  • Pathology (AREA)
  • Educational Administration (AREA)
  • Dispersion Chemistry (AREA)
  • Physical Education & Sports Medicine (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biophysics (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Flow Control (AREA)

Abstract

Es sind Gasmischvorrichtungen zur Linearisierung oder Kalibrierung von Gasanalysatoren mit einer ersten Gaseinlassleitung (10) für ein erstes Gas, einer zweiten Gaseinlassleitung (12) für ein zweites Gas, einem Mischkanal (46) mit mindestens zwei in Strömungsrichtung hintereinander angeordneten Einlassöffnungen (72, 74, 76, 78, 80), mindestens zwei Ventilen (26) mit mindestens einem Eingang (28; 30) und einem Ausgang (32), über die eine fluidische Verbindung zwischen zumindest einer der Gaseinlassleitungen (10, 12) und dem Mischkanal (46) über die Einlassöffnungen (72, 74, 76, 78, 80) freigebbar oder absperrbar ist, bekannt. Um die Ausspülzeiten und die Kalibrierdauer zu verringern, wird erfindungsgemäß vorgeschlagen, dass der Strömungsquerschnitt des Mischkanals (46) an einer ersten stromaufwärtigen Einlassöffnung (72; 74; 76; 78) kleiner ist als an einer zweiten stromabwärtigen Einlassöffnung (74; 76; 78; 80), wodurch die Strömungsgeschwindigkeiten am Anfang des Mischkanals im Vergleich zu bekannten Ausführungen erhöht werden können.
ATA50736/2018A 2018-08-28 2018-08-28 Gasmischvorrichtung zur Linearisierung oder Kalibrierung von Gasanalysatoren AT521586B1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
ATA50736/2018A AT521586B1 (de) 2018-08-28 2018-08-28 Gasmischvorrichtung zur Linearisierung oder Kalibrierung von Gasanalysatoren
DE112019004259.9T DE112019004259A5 (de) 2018-08-28 2019-08-28 Gasmischvorrichtung zur Linearisierung oder Kalibrierung von Gasanalysatoren
CN201980055861.0A CN112638515B (zh) 2018-08-28 2019-08-28 用于气体分析器的线性化或校准的气体混合装置
US17/271,210 US20210394140A1 (en) 2018-08-28 2019-08-28 Gas mixing device for linearizing or calibrating gas analyzers
JP2021510799A JP7216192B2 (ja) 2018-08-28 2019-08-28 ガスアナライザを線形化または校正するためのガス混合装置
PCT/AT2019/060277 WO2020041812A1 (de) 2018-08-28 2019-08-28 Gasmischvorrichtung zur linearisierung oder kalibrierung von gasanalysatoren

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ATA50736/2018A AT521586B1 (de) 2018-08-28 2018-08-28 Gasmischvorrichtung zur Linearisierung oder Kalibrierung von Gasanalysatoren

Publications (3)

Publication Number Publication Date
AT521586A2 AT521586A2 (de) 2020-03-15
AT521586B1 AT521586B1 (de) 2020-12-15
AT521586A3 true AT521586A3 (de) 2020-12-15

Family

ID=67875199

Family Applications (1)

Application Number Title Priority Date Filing Date
ATA50736/2018A AT521586B1 (de) 2018-08-28 2018-08-28 Gasmischvorrichtung zur Linearisierung oder Kalibrierung von Gasanalysatoren

Country Status (6)

Country Link
US (1) US20210394140A1 (de)
JP (1) JP7216192B2 (de)
CN (1) CN112638515B (de)
AT (1) AT521586B1 (de)
DE (1) DE112019004259A5 (de)
WO (1) WO2020041812A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102022104748A1 (de) * 2022-02-28 2023-08-31 Physikalisch-Technische Bundesanstalt Braunschweig Und Berlin Verfahren zum Herstellen eines Gasgemisches und Gasgemisch-Herstellanlage

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6082398A (en) * 1996-11-05 2000-07-04 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Device for regulating the flow of gases having substantially different molar masses
WO2004035187A2 (en) * 2002-10-15 2004-04-29 Vast Power Systems, Inc. Method and apparatus for mixing fluids
US20060201065A1 (en) * 2005-03-09 2006-09-14 Conocophillips Company Compact mixer for the mixing of gaseous hydrocarbon and gaseous oxidants
EP1961838A1 (de) * 2007-02-26 2008-08-27 Applied Materials, Inc. Verfahren zur Regelung des Gasflusses in eine Bearbeitungskammer
US20100154908A1 (en) * 2008-12-22 2010-06-24 Tokyo Electron Limited Gas mixture supplying method and apparatus
EP2570179A1 (de) * 2011-09-16 2013-03-20 Air Liquide Deutschland GmbH Verfahren und Vorrichtung zur dynamischen Gasgemisch Produktion

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3000949A1 (de) 1979-01-26 1980-08-28 Bi M Insutrument Co Einrichtung und verfahren zur erzeugung eines eichgasgemisches sowie ventilanordnung hierfuer
JPS586987U (ja) * 1981-07-06 1983-01-17 株式会社クボタ 配管中の混合撹拌装置
US4741354A (en) * 1987-04-06 1988-05-03 Spire Corporation Radial gas manifold
DE9303693U1 (de) 1993-03-12 1993-04-29 Siemens AG, 8000 München Gasmischeinrichtung
FR2829707B1 (fr) 2001-09-19 2003-12-12 Air Liquide Procede et dispositif de melange de deux gaz reactifs
JP5604038B2 (ja) 2008-08-25 2014-10-08 株式会社日立製作所 反応装置及び反応プラント
US8701458B2 (en) * 2009-06-11 2014-04-22 Maquet Critical Care Ab On-demand gas regulator for gas analyzer calibration
JP5441746B2 (ja) * 2010-02-05 2014-03-12 旭有機材工業株式会社 流体混合器および流体混合器を用いた装置
EP2986980B1 (de) * 2013-04-15 2020-05-06 Thermo Fisher Scientific (Bremen) GmbH Gaszuleitungssystem für einen isotopenverhältnisanalysator
JP6403528B2 (ja) 2014-10-03 2018-10-10 旭有機材株式会社 流体混合器および流体混合器を用いた装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6082398A (en) * 1996-11-05 2000-07-04 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Device for regulating the flow of gases having substantially different molar masses
WO2004035187A2 (en) * 2002-10-15 2004-04-29 Vast Power Systems, Inc. Method and apparatus for mixing fluids
US20060201065A1 (en) * 2005-03-09 2006-09-14 Conocophillips Company Compact mixer for the mixing of gaseous hydrocarbon and gaseous oxidants
EP1961838A1 (de) * 2007-02-26 2008-08-27 Applied Materials, Inc. Verfahren zur Regelung des Gasflusses in eine Bearbeitungskammer
US20100154908A1 (en) * 2008-12-22 2010-06-24 Tokyo Electron Limited Gas mixture supplying method and apparatus
EP2570179A1 (de) * 2011-09-16 2013-03-20 Air Liquide Deutschland GmbH Verfahren und Vorrichtung zur dynamischen Gasgemisch Produktion

Also Published As

Publication number Publication date
WO2020041812A1 (de) 2020-03-05
DE112019004259A5 (de) 2021-05-20
AT521586B1 (de) 2020-12-15
CN112638515B (zh) 2023-05-23
JP7216192B2 (ja) 2023-01-31
US20210394140A1 (en) 2021-12-23
AT521586A2 (de) 2020-03-15
JP2021535501A (ja) 2021-12-16
CN112638515A (zh) 2021-04-09

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