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AT383758B - Verfahren zur herstellung eines sputter-targets - Google Patents

Verfahren zur herstellung eines sputter-targets

Info

Publication number
AT383758B
AT383758B AT0372385A AT372385A AT383758B AT 383758 B AT383758 B AT 383758B AT 0372385 A AT0372385 A AT 0372385A AT 372385 A AT372385 A AT 372385A AT 383758 B AT383758 B AT 383758B
Authority
AT
Austria
Prior art keywords
producing
sputter target
sputter
target
Prior art date
Application number
AT0372385A
Other languages
English (en)
Other versions
ATA372385A (de
Inventor
Erich Dr Kny
Original Assignee
Plansee Metallwerk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plansee Metallwerk filed Critical Plansee Metallwerk
Priority to AT0372385A priority Critical patent/AT383758B/de
Priority to US06/943,930 priority patent/US4731116A/en
Priority to JP61305148A priority patent/JPS62158162A/ja
Priority to EP86202362A priority patent/EP0228141B1/de
Priority to DE8686202362T priority patent/DE3682493D1/de
Publication of ATA372385A publication Critical patent/ATA372385A/de
Application granted granted Critical
Publication of AT383758B publication Critical patent/AT383758B/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Powder Metallurgy (AREA)
  • Ceramic Products (AREA)
AT0372385A 1985-12-23 1985-12-23 Verfahren zur herstellung eines sputter-targets AT383758B (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
AT0372385A AT383758B (de) 1985-12-23 1985-12-23 Verfahren zur herstellung eines sputter-targets
US06/943,930 US4731116A (en) 1985-12-23 1986-12-18 Sputter target and process for producing sputter target
JP61305148A JPS62158162A (ja) 1985-12-23 1986-12-19 スパツタ−タ−ゲツトの製造方法
EP86202362A EP0228141B1 (de) 1985-12-23 1986-12-22 Verfahren zur Herstellung eines Sputter-Targets
DE8686202362T DE3682493D1 (de) 1985-12-23 1986-12-22 Verfahren zur herstellung eines sputter-targets.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT0372385A AT383758B (de) 1985-12-23 1985-12-23 Verfahren zur herstellung eines sputter-targets

Publications (2)

Publication Number Publication Date
ATA372385A ATA372385A (de) 1987-01-15
AT383758B true AT383758B (de) 1987-08-25

Family

ID=3554508

Family Applications (1)

Application Number Title Priority Date Filing Date
AT0372385A AT383758B (de) 1985-12-23 1985-12-23 Verfahren zur herstellung eines sputter-targets

Country Status (5)

Country Link
US (1) US4731116A (de)
EP (1) EP0228141B1 (de)
JP (1) JPS62158162A (de)
AT (1) AT383758B (de)
DE (1) DE3682493D1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4820393A (en) * 1987-05-11 1989-04-11 Tosoh Smd, Inc. Titanium nitride sputter targets
US4838935A (en) * 1988-05-31 1989-06-13 Cominco Ltd. Method for making tungsten-titanium sputtering targets and product
EP0480409B1 (de) * 1990-10-09 1994-07-13 Nec Corporation Verfahren zur Herstellung eines Ti/TiN/Al Kontaktes unter Benutzung eines reaktiven Zerstäubungsprozesses
US5234487A (en) * 1991-04-15 1993-08-10 Tosoh Smd, Inc. Method of producing tungsten-titanium sputter targets and targets produced thereby
US5415829A (en) * 1992-12-28 1995-05-16 Nikko Kyodo Co., Ltd. Sputtering target
US5397050A (en) * 1993-10-27 1995-03-14 Tosoh Smd, Inc. Method of bonding tungsten titanium sputter targets to titanium plates and target assemblies produced thereby
US6071389A (en) * 1998-08-21 2000-06-06 Tosoh Smd, Inc. Diffusion bonded sputter target assembly and method of making
US6110351A (en) * 1998-10-15 2000-08-29 University Of Hawaii Method of electrochemical machining (ECM) of particulate metal-matrix composites (MMcs)
ATE430636T1 (de) 1998-12-28 2009-05-15 Ultraclad Corp Verfahren zur herstellung eines silizium/aluminiumsputtertargets
US6352626B1 (en) 1999-04-19 2002-03-05 Von Zweck Heimart Sputter ion source for boron and other targets
US20030227068A1 (en) * 2001-05-31 2003-12-11 Jianxing Li Sputtering target
US6797137B2 (en) * 2001-04-11 2004-09-28 Heraeus, Inc. Mechanically alloyed precious metal magnetic sputtering targets fabricated using rapidly solidfied alloy powders and elemental Pt metal
US6554179B2 (en) * 2001-07-06 2003-04-29 General Atomics Reaction brazing of tungsten or molybdenum body to carbonaceous support
US20050268768A1 (en) * 2002-06-19 2005-12-08 Johnson David N Circular saw blade for cutting ferous materials
US20070189916A1 (en) * 2002-07-23 2007-08-16 Heraeus Incorporated Sputtering targets and methods for fabricating sputtering targets having multiple materials
US6759005B2 (en) 2002-07-23 2004-07-06 Heraeus, Inc. Fabrication of B/C/N/O/Si doped sputtering targets
US20040123920A1 (en) * 2002-10-08 2004-07-01 Thomas Michael E. Homogenous solid solution alloys for sputter-deposited thin films
US8784729B2 (en) * 2007-01-16 2014-07-22 H.C. Starck Inc. High density refractory metals and alloys sputtering targets
EP2806048B1 (de) * 2007-02-09 2017-10-11 JX Nippon Mining & Metals Corporation Aus einer sinterungsresistenten Metalllegierung mit hohem Schmelzpunkt geformtes Target, Metallsilicid mit hohem Schmelzpunkt, Metallcarbid mit hohem Schmelzpunkt, Metallnitrid mit hohem Schmelzpunkt oder Metallborid mit hohem Schmelzpunkt, Verfahren zur Herstellung des Targets, Anordnung für eine Sputter-Target-Rückplatte und Herstellungsverfahren dafür
TWI458985B (zh) * 2011-02-23 2014-11-01 King Yuan Electronics Co Ltd 高硬度耐磨探針與其製作方法
JP6117425B2 (ja) * 2014-03-26 2017-04-19 Ｊｘ金属株式会社 炭化タングステン又は炭化チタンからなるスパッタリングターゲット
US10889887B2 (en) * 2016-08-22 2021-01-12 Honeywell International Inc. Chalcogenide sputtering target and method of making the same
US20240186127A1 (en) * 2022-06-23 2024-06-06 Intel Corporation Sputter targets for self-doped source and drain contacts

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT113511B (de) * 1925-12-12 1929-06-10 Krupp Ag Verfahren zur Herstellung von Werkzeugen aus gesinterten Hartmetallegierungen.
CH412352A (fr) * 1958-08-30 1966-04-30 Commissariat Energie Atomique Procédé de fabrication de membranes métalliques microporeuses
GB1598837A (en) * 1977-02-18 1981-09-23 Gen Electric Temperature resistant abrasive compact and method for making same

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3551991A (en) * 1969-04-16 1971-01-05 Gen Electric Infiltrated cemented carbides
DE2364635A1 (de) * 1973-12-24 1975-06-26 Degussa Verfahren zur herstellung von formkoerpern aus siliziumnitrid
US4209375A (en) * 1979-08-02 1980-06-24 The United States Of America As Represented By The United States Department Of Energy Sputter target
US4331476A (en) * 1980-01-31 1982-05-25 Tektronix, Inc. Sputtering targets with low mobile ion contamination
JPS6066425A (ja) * 1983-09-22 1985-04-16 Nippon Telegr & Teleph Corp <Ntt> Ｌｓｉ電極用の高純度モリブデンタ−ゲツトならびに高純度モリブデンシリサイドタ−ゲツトおよびその製造方法
JPS60221569A (ja) * 1984-04-19 1985-11-06 Koujiyundo Kagaku Kenkyusho:Kk 電気的蒸着用タ−ゲツト
US4619697A (en) * 1984-08-30 1986-10-28 Mitsubishi Kinzoku Kabushiki Kaisha Sputtering target material and process for producing the same
AU571419B2 (en) * 1984-09-08 1988-04-14 Sumitomo Electric Industries, Ltd. Diamond sintered for tools and method of manufacture

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT113511B (de) * 1925-12-12 1929-06-10 Krupp Ag Verfahren zur Herstellung von Werkzeugen aus gesinterten Hartmetallegierungen.
CH412352A (fr) * 1958-08-30 1966-04-30 Commissariat Energie Atomique Procédé de fabrication de membranes métalliques microporeuses
GB1598837A (en) * 1977-02-18 1981-09-23 Gen Electric Temperature resistant abrasive compact and method for making same

Also Published As

Publication number Publication date
US4731116A (en) 1988-03-15
EP0228141A3 (en) 1989-06-14
DE3682493D1 (de) 1991-12-19
JPS62158162A (ja) 1987-07-14
EP0228141B1 (de) 1991-11-13
EP0228141A2 (de) 1987-07-08
ATA372385A (de) 1987-01-15

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee
ELJ Ceased due to non-payment of the annual fee