[go: up one dir, main page]

AT345058B - Verfahren zur verbesserung der haltbarkeit von aus siliciumoxiden bestehenden schutzschichten - Google Patents

Verfahren zur verbesserung der haltbarkeit von aus siliciumoxiden bestehenden schutzschichten

Info

Publication number
AT345058B
AT345058B AT597876A AT597876A AT345058B AT 345058 B AT345058 B AT 345058B AT 597876 A AT597876 A AT 597876A AT 597876 A AT597876 A AT 597876A AT 345058 B AT345058 B AT 345058B
Authority
AT
Austria
Prior art keywords
durability
improving
protective coatings
silicon oxides
coatings consisting
Prior art date
Application number
AT597876A
Other languages
English (en)
Other versions
ATA597876A (de
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ATA597876A publication Critical patent/ATA597876A/de
Application granted granted Critical
Publication of AT345058B publication Critical patent/AT345058B/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C23C16/402—Silicon dioxide
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/266—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension of base or substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31652—Of asbestos
    • Y10T428/31663—As siloxane, silicone or silane

Landscapes

  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Silicon Compounds (AREA)
  • Laminated Bodies (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Optical Filters (AREA)
AT597876A 1975-08-13 1976-08-11 Verfahren zur verbesserung der haltbarkeit von aus siliciumoxiden bestehenden schutzschichten AT345058B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752536013 DE2536013A1 (de) 1975-08-13 1975-08-13 Verfahren zur verbesserung der haltbarkeit von aus siliciumoxiden bestehenden schutzschichten

Publications (2)

Publication Number Publication Date
ATA597876A ATA597876A (de) 1977-12-15
AT345058B true AT345058B (de) 1978-08-25

Family

ID=5953855

Family Applications (1)

Application Number Title Priority Date Filing Date
AT597876A AT345058B (de) 1975-08-13 1976-08-11 Verfahren zur verbesserung der haltbarkeit von aus siliciumoxiden bestehenden schutzschichten

Country Status (10)

Country Link
US (1) US4105821A (de)
JP (1) JPS5223580A (de)
AT (1) AT345058B (de)
DE (1) DE2536013A1 (de)
ES (1) ES450687A1 (de)
FR (1) FR2320363A1 (de)
GB (1) GB1536720A (de)
IT (1) IT1065805B (de)
NL (1) NL7608974A (de)
SE (1) SE7609029L (de)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2062013B (en) * 1979-10-31 1984-07-04 Ni I Edxperimental Inst Avtomo Coating reflecting surfaces with organic layer by glow discharge
US4410418A (en) * 1982-03-30 1983-10-18 Phillips Petroleum Company Method for reducing carbon formation in a thermal cracking process
US4483132A (en) * 1983-02-14 1984-11-20 Deere & Company Cotton picker spindle
JPS60142584A (ja) * 1983-12-28 1985-07-27 川崎製鉄株式会社 プリント基板およびその製造方法
CA1240215A (en) * 1984-07-11 1988-08-09 Edwin A. Chandross Fabrication of devices with a silicon oxide region
JPS61227165A (ja) * 1985-03-29 1986-10-09 Mitsubishi Electric Corp 蒸着装置
KR870000750A (ko) * 1985-06-14 1987-02-20 이마드 마하윌리 이산화실리콘 필름을 화학적으로 증기피복하는 방법
JPS63149601A (ja) * 1986-12-15 1988-06-22 Toyota Central Res & Dev Lab Inc 防曇性光学部材
DE4021798A1 (de) * 1990-07-09 1992-02-06 Heraeus Quarzglas Infrarotstrahler mit geschuetzter reflexionsschicht und verfahren zu seiner herstellung
EP0470777A3 (en) * 1990-08-07 1993-06-02 The Boc Group, Inc. Thin gas barrier films and rapid deposition method therefor
TW289900B (de) 1994-04-22 1996-11-01 Gould Electronics Inc
US5527562A (en) * 1994-10-21 1996-06-18 Aluminum Company Of America Siloxane coatings for aluminum reflectors
DE19704947A1 (de) * 1997-02-10 1998-08-13 Leybold Systems Gmbh Verfahren und Vorrichtung zur Schutzbeschichtung von Verspiegelungsschichten
EP1129318B1 (de) * 1998-11-12 2003-08-20 Alcan Technology & Management AG Reflektor mit resistenter oberfläche
US6350397B1 (en) 1999-03-10 2002-02-26 Aspen Research Corporation Optical member with layer having a coating geometry and composition that enhance cleaning properties
US6896970B2 (en) 2001-01-31 2005-05-24 Areway, Inc. Corrosion resistant coating giving polished effect
US6709119B2 (en) 2001-04-27 2004-03-23 Alusuisse Technology & Management Ltd. Resistant surface reflector
US20080268177A1 (en) * 2002-05-17 2008-10-30 Air Products And Chemicals, Inc. Porogens, Porogenated Precursors and Methods for Using the Same to Provide Porous Organosilica Glass Films with Low Dielectric Constants
US9061317B2 (en) 2002-04-17 2015-06-23 Air Products And Chemicals, Inc. Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants
US6846515B2 (en) * 2002-04-17 2005-01-25 Air Products And Chemicals, Inc. Methods for using porogens and/or porogenated precursors to provide porous organosilica glass films with low dielectric constants
US8293001B2 (en) * 2002-04-17 2012-10-23 Air Products And Chemicals, Inc. Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants
US8951342B2 (en) 2002-04-17 2015-02-10 Air Products And Chemicals, Inc. Methods for using porogens for low k porous organosilica glass films
US7384471B2 (en) * 2002-04-17 2008-06-10 Air Products And Chemicals, Inc. Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants
US6921062B2 (en) 2002-07-23 2005-07-26 Advanced Technology Materials, Inc. Vaporizer delivery ampoule
US7914897B2 (en) * 2003-06-23 2011-03-29 University Of Zurich Superhydrophobic coating
US7332445B2 (en) * 2004-09-28 2008-02-19 Air Products And Chemicals, Inc. Porous low dielectric constant compositions and methods for making and using same
JP5259938B2 (ja) * 2006-08-14 2013-08-07 スタンレー電気株式会社 金属多層膜構造およびその成膜方法
US20080241805A1 (en) 2006-08-31 2008-10-02 Q-Track Corporation System and method for simulated dosimetry using a real time locating system
DE102006056578A1 (de) * 2006-11-30 2008-06-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Herstellung einer Nanostruktur an einer Kunststoffoberfläche
EP2134773B1 (de) * 2007-04-04 2015-05-27 Tetra Laval Holdings & Finance S.A. Verpackungslaminat; verfahren zur herstellung des verpackungsaminats und daraus hergestellter verpackungsbehälter
CN104487608A (zh) 2012-05-31 2015-04-01 高级技术材料公司 基于源试剂的用于批量沉积的高物质通量流体的输送
JP6542089B2 (ja) * 2015-09-30 2019-07-10 富士フイルム株式会社 車両用ミラー

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB706003A (en) * 1949-05-18 1954-03-24 British American Res Ltd Improvements in the coating of articles by evaporation and/or sputtering in evacuated chambers
US2748031A (en) * 1952-12-31 1956-05-29 Kafig Emanuel Reproduction of printed patterns by vacuum evaporation
US2904450A (en) * 1958-05-14 1959-09-15 Ford Motor Co Transparent coating
US3352712A (en) * 1964-08-28 1967-11-14 Rca Corp Method of stabilizing semi-conductor devices having exposed surfaces of a hydrophilic oxide
GB1229473A (de) * 1968-06-14 1971-04-21
CS151965B1 (de) * 1970-07-03 1973-12-19
US3984581A (en) * 1973-02-28 1976-10-05 Carl Zeiss-Stiftung Method for the production of anti-reflection coatings on optical elements made of transparent organic polymers
US3991234A (en) * 1974-09-30 1976-11-09 American Optical Corporation Process for coating a lens of synthetic polymer with a durable abrasion resistant vitreous composition

Also Published As

Publication number Publication date
JPS5223580A (en) 1977-02-22
ES450687A1 (es) 1977-07-16
GB1536720A (en) 1978-12-20
US4105821A (en) 1978-08-08
FR2320363A1 (fr) 1977-03-04
ATA597876A (de) 1977-12-15
SE7609029L (sv) 1977-02-14
NL7608974A (nl) 1977-02-15
DE2536013A1 (de) 1977-03-03
FR2320363B3 (de) 1977-07-29
IT1065805B (it) 1985-03-04

Similar Documents

Publication Publication Date Title
AT345058B (de) Verfahren zur verbesserung der haltbarkeit von aus siliciumoxiden bestehenden schutzschichten
DD124475A5 (de) Verfahren zur rueckgewinnung von aethylenoxid
ATA349776A (de) Verfahren zur modifizierung der physikalischen eigenschaften von uretahnelastomern
AT363160B (de) Verfahren zur verbesserung der schmiereigenschaften von molybdaensulfid
PT65443B (de) Verfahren zur herstellung von tertiaren aliphatischen aminen
PT65757B (de) Verfahren zur herstellung von suppositorien
DD128782A5 (de) Verfahren zur herstellung von n-alkyldiphenylaminen
ATA621476A (de) Verfahren zur verbesserung der klebrigkeit von kautschukmischungen
AT344147B (de) Verfahren zur herstellung von acylcyaniden
DD128949A5 (de) Verfahren zur verbesserung der aktivitaet von oxidoreduktase
ATA314576A (de) Verfahren zur herstellung von 4-nideralkyl-5- cyano-oxazolen
AT345252B (de) Verfahren zur herstellung von magnetoxiden
AT349032B (de) Verfahren zur herstellung von 4-alkyl-thiosemicarbaziden
DD132758A6 (de) Verbessertes verfahren zur erhoehung der intravenoesvertraeglichkeit von gammaglobulinen
ATA44576A (de) Verfahren zur herstellung von n- (alfa-alkoxyathyl)-carbonsaureamiden
DD132435A5 (de) Verfahren zur herstellung von indolochinolizinen
ATA366276A (de) Verfahren zur abscheidung von metallischem ruthenium
AT339923B (de) Verfahren zur destillativen reinigung von 2,5-dioxo -1-oxa-2- phospholanen
AT342296B (de) Verfahren zur herstellung von schlagzahen vinylaromat-pfropf-copolymeren
DD132195A5 (de) Verfahren zur herstellung von aminen
AT345850B (de) Verfahren zur herstellung von arylen-bis- sulfonylharnstoffen
ATA616476A (de) Verfahren zur beschichtung von metall- gegenstaenden
AT366934B (de) Verfahren zur beschichtung von oberflaechen
DD130147A5 (de) Verfahren zur herstellung von aethylenoxid
DD127949A5 (de) Verfahren zur herstellung von cephalosporinen

Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee