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AT341792B - Verfahren zur herstellung von schichtstrukturen - Google Patents

Verfahren zur herstellung von schichtstrukturen

Info

Publication number
AT341792B
AT341792B AT450575A AT450575A AT341792B AT 341792 B AT341792 B AT 341792B AT 450575 A AT450575 A AT 450575A AT 450575 A AT450575 A AT 450575A AT 341792 B AT341792 B AT 341792B
Authority
AT
Austria
Prior art keywords
production
layered structures
layered
structures
Prior art date
Application number
AT450575A
Other languages
English (en)
Other versions
ATA450575A (de
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19742437368 external-priority patent/DE2437368C3/de
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of ATA450575A publication Critical patent/ATA450575A/de
Application granted granted Critical
Publication of AT341792B publication Critical patent/AT341792B/de

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/12Unsaturated polyimide precursors
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Medicinal Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Heterocyclic Carbon Compounds Containing A Hetero Ring Having Oxygen Or Sulfur (AREA)
AT450575A 1974-08-02 1975-06-12 Verfahren zur herstellung von schichtstrukturen AT341792B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742437368 DE2437368C3 (de) 1974-08-02 Verfahren zur Herstellung von löslichen, hochwärmebeständigen Reliefstrukturen

Publications (2)

Publication Number Publication Date
ATA450575A ATA450575A (de) 1977-06-15
AT341792B true AT341792B (de) 1978-02-27

Family

ID=5922325

Family Applications (1)

Application Number Title Priority Date Filing Date
AT450575A AT341792B (de) 1974-08-02 1975-06-12 Verfahren zur herstellung von schichtstrukturen

Country Status (8)

Country Link
US (1) US4045223A (de)
JP (1) JPS5444453B2 (de)
AT (1) AT341792B (de)
BE (1) BE831680A (de)
FR (1) FR2280926A1 (de)
GB (1) GB1512971A (de)
IT (1) IT1040122B (de)
NL (1) NL181604C (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5545747A (en) * 1978-09-29 1980-03-31 Hitachi Ltd Photosensitive polymer and its production
JPS5545748A (en) * 1978-09-29 1980-03-31 Hitachi Ltd Photosensitive polymer and its production
DE2933826A1 (de) * 1979-08-21 1981-03-19 Siemens AG, 1000 Berlin und 8000 München Polyimid-, polyisoindolochinazolindion-, polyoxazindion- und polychinazolindion-vorstufen sowie deren herstellung
US4532332A (en) * 1981-08-17 1985-07-30 Ciba-Geigy Corporation N-(hydroxypolyoxaalkylene)phthalimides and succinimides and acrylate esters thereof
DE3233912A1 (de) * 1982-09-13 1984-03-15 Merck Patent Gmbh, 6100 Darmstadt Fotolacke zur ausbildung von reliefstrukturen aus hochwaermebestaendigen polymeren
DE3246403A1 (de) * 1982-12-15 1984-06-20 Merck Patent Gmbh, 6100 Darmstadt Verfahren zur entwicklung von reliefstrukturen auf der basis von strahlungsvernetzten polymervorstufen hochwaermebestaendiger polymere
DE3411660A1 (de) * 1984-03-29 1985-10-03 Siemens AG, 1000 Berlin und 8000 München Verfahren zur herstellung von polyimid- und polyisoindolochinazolindion-vorstufen
US5077378A (en) * 1986-10-02 1991-12-31 Hoechst Celanese Corporation Polyamide containing the hexafluoroisopropylidene group
GB8628003D0 (en) * 1986-11-22 1986-12-31 Ciba Geigy Ag Polymerisable compounds
DE3717933A1 (de) * 1987-05-27 1988-12-08 Hoechst Ag Photopolymerisierbares gemisch, dieses enthaltendes aufzeichnungsmaterial und verfahren zur herstellung von hochwaermebestaendigen reliefstrukturen
DE4217688A1 (de) * 1992-05-29 1993-12-02 Basf Lacke & Farben Durch Einwirkung von Strahlung vernetzendes Gemisch und dessen Verwendung zur Herstellung hochtemperaturbeständiger Reliefstrukturen
US8052800B2 (en) * 2008-12-04 2011-11-08 General Electric Company Method for the removal of an insulative coating using an aqueous solution comprising dimethyl formamide

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3475176A (en) * 1966-09-06 1969-10-28 Eastman Kodak Co Azide sensitized photosensitive prepolymer compositions
US3650746A (en) * 1969-06-16 1972-03-21 Grace W R & Co Dual image formation on separate supports of photocurable composition
US3858510A (en) * 1971-03-11 1975-01-07 Asahi Chemical Ind Relief structures prepared from photosensitive compositions
US3801638A (en) * 1971-03-12 1974-04-02 Gaf Corp Triacrylyldiethylenetriamine,method of producing the same,and photopolymerization process and system utilizing the same
BE793732A (fr) * 1972-01-10 1973-05-02 Grace W R & Co Composition contenant un polyene et un polythiol
NL177718C (nl) * 1973-02-22 1985-11-01 Siemens Ag Werkwijze ter vervaardiging van reliefstructuren uit warmte-bestendige polymeren.
US3847767A (en) * 1973-03-13 1974-11-12 Grace W R & Co Method of producing a screen printable photocurable solder resist

Also Published As

Publication number Publication date
NL181604B (nl) 1987-04-16
NL181604C (nl) 1987-09-16
IT1040122B (it) 1979-12-20
NL7509213A (nl) 1976-02-04
JPS5444453B2 (de) 1979-12-26
GB1512971A (en) 1978-06-01
DE2437368A1 (de) 1976-02-19
JPS5140920A (de) 1976-04-06
ATA450575A (de) 1977-06-15
BE831680A (fr) 1975-11-17
FR2280926A1 (fr) 1976-02-27
DE2437368B2 (de) 1977-04-07
FR2280926B1 (de) 1977-12-16
US4045223A (en) 1977-08-30

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee