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AR001149A1 - Set of M x N thin film powered mirrors featuring dielectric layers and method of manufacturing the same - Google Patents

Set of M x N thin film powered mirrors featuring dielectric layers and method of manufacturing the same

Info

Publication number
AR001149A1
AR001149A1 AR33563296A AR33563296A AR001149A1 AR 001149 A1 AR001149 A1 AR 001149A1 AR 33563296 A AR33563296 A AR 33563296A AR 33563296 A AR33563296 A AR 33563296A AR 001149 A1 AR001149 A1 AR 001149A1
Authority
AR
Argentina
Prior art keywords
thin film
featuring
manufacturing
dielectric layers
same
Prior art date
Application number
AR33563296A
Other languages
Spanish (es)
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Publication of AR001149A1 publication Critical patent/AR001149A1/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0102—Constructional details, not otherwise provided for in this subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/02—Function characteristic reflective

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Transforming Electric Information Into Light Information (AREA)
  • Video Image Reproduction Devices For Color Tv Systems (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Projection Apparatus (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

Un conjunto de M x N espejos accionados de película delgada que presenta capas dieléctricas y método para fabricarlo en donde el conjunto incluye unamatriz activa, un conjunto de estructuras actuadoras, cada una de las estructurasactuad oras incluye un miembro elástico, un segundo electrodo depelícula delgada, un miembro electromovible de película delgada y un primer electrodo de película delgada y un número M x N de pilas multicapas demiembros dieléctricos de películadelgada. Además de la provisión de una protección contra los ataques físicos y químicos sobre el primer electrodo depelícula delgada el cual asimismo actúa como un espejo para reflejar un haz de luz, la pila multicapa de miembrosdieléctricos de pelíc ula delgada ubicadosobre la parte superior de cada una de las estructuras actuadoras provee la reflectancia máxima en cada uno de los espejos accionados de película delgadapara asegurar por lo tanto una eficiencia ópticaóptima del conjunto.A set of M x N thin film actuated mirrors featuring dielectric layers and method of manufacturing where the set includes an active matrix, a set of actuating structures, each of the actuating structures includes an elastic member, a second thin film electrode, an electromovable thin film member and a first thin film electrode and an M x N number of multilayer cells of thin film dielectric members. In addition to providing protection against physical and chemical attack on the first thin film electrode which also acts as a mirror to reflect a light beam, the multilayer stack of thin film dielectric members located on top of each other. The actuator structures provide the maximum reflectance in each of the thin film powered mirrors to ensure therefore optimal optical efficiency of the assembly.

AR33563296A 1996-01-31 1996-03-04 Set of M x N thin film powered mirrors featuring dielectric layers and method of manufacturing the same AR001149A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960002315A KR100229790B1 (en) 1996-01-31 1996-01-31 Thin Film Fluorescence Control Device with Dielectric Layer

Publications (1)

Publication Number Publication Date
AR001149A1 true AR001149A1 (en) 1997-09-24

Family

ID=36955865

Family Applications (1)

Application Number Title Priority Date Filing Date
AR33563296A AR001149A1 (en) 1996-01-31 1996-03-04 Set of M x N thin film powered mirrors featuring dielectric layers and method of manufacturing the same

Country Status (14)

Country Link
JP (1) JP4152437B2 (en)
KR (1) KR100229790B1 (en)
CN (1) CN1104815C (en)
AR (1) AR001149A1 (en)
AU (1) AU724477B2 (en)
BR (1) BR9607803A (en)
CA (1) CA2216557A1 (en)
CZ (1) CZ304197A3 (en)
HU (1) HUP9801148A3 (en)
PE (1) PE47197A1 (en)
PL (1) PL179839B1 (en)
TW (1) TW348324B (en)
UY (1) UY24186A1 (en)
WO (1) WO1997028653A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4582380B2 (en) * 2001-05-11 2010-11-17 ソニー株式会社 LIGHT MODULATION ELEMENT, OPTICAL DEVICE USING THE SAME, AND LIGHT MODULATION ELEMENT MANUFACTURING METHOD

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5260798A (en) * 1989-11-01 1993-11-09 Aura Systems, Inc. Pixel intensity modulator
US5247222A (en) * 1991-11-04 1993-09-21 Engle Craig D Constrained shear mode modulator
JP3283881B2 (en) * 1993-10-29 2002-05-20 テーウー エレクトロニクス カンパニー リミテッド M × N thin-film actuated mirror array and method of manufacturing the same
HU220517B1 (en) * 1993-11-09 2002-03-28 Daewoo Electronics Co. Ltd. Thin film actuated mirror array and method for the manufacture thereof
US5355008A (en) * 1993-11-19 1994-10-11 Micrel, Inc. Diamond shaped gate mesh for cellular MOS transistor array

Also Published As

Publication number Publication date
MX9707476A (en) 1997-11-29
UY24186A1 (en) 1996-06-21
KR100229790B1 (en) 1999-11-15
JP4152437B2 (en) 2008-09-17
TW348324B (en) 1998-12-21
JPH11503538A (en) 1999-03-26
CN1104815C (en) 2003-04-02
CN1179871A (en) 1998-04-22
WO1997028653A1 (en) 1997-08-07
HUP9801148A3 (en) 2002-07-29
CA2216557A1 (en) 1997-08-07
AU724477B2 (en) 2000-09-21
BR9607803A (en) 1998-07-07
KR970060514A (en) 1997-08-12
PE47197A1 (en) 1998-02-06
PL322490A1 (en) 1998-02-02
AU5289996A (en) 1997-08-22
PL179839B1 (en) 2000-11-30
CZ304197A3 (en) 1998-04-15
HUP9801148A2 (en) 1998-08-28

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