This paper presents the first acoustic experimental results of a MEMS based bulk piezoelectric tr... more This paper presents the first acoustic experimental results of a MEMS based bulk piezoelectric transducer for use in fully implantable cochlear implants (FICI). For this purpose, the transducer was attached onto an acoustically vibrating membrane. Sensing and energy harvesting performances were measured using neural stimulation and rectifier circuits, respectively. The chip has a 150 Hz bandwidth around 1800 Hz resonance frequency that is suitable for mechanical filtering as a sensor. As an energy harvester, bulk piezoelectric transducer generated a rectified power of 16.25 μW with 2.47 VDC with 120 dB-A sound input at 1780 Hz. Among other MEMS acoustic energy harvesters in the literature, reported transducer has the highest power density (1.5 × 10 −3 W/cm 3) to our knowledge.
This paper presents design and fabrication of a MEMS-based thin film piezoelectric transducer to ... more This paper presents design and fabrication of a MEMS-based thin film piezoelectric transducer to be placed on an eardrum for fully-implantable cochlear implant (FICI) applications. Resonating at a specific frequency within the hearing band, the transducer senses eardrum vibration and generates the required voltage output for the stimulating circuitry. Moreover, high sensitivity of the sensor, 391.9 mV/Pa @900 Hz, decreases the required power for neural stimulation. The transducer provides highest voltage output in the literature (200 mVpp @100 dB SPL) to our knowledge. A multi-frequency piezoelectric sensor, covering the daily acoustic band, is designed based on the test results and validated through FEA. The implemented system provides mechanical filtering, and mimics the natural operation of the cochlea. Herewith, the proposed sensor overcomes the challenges in FICI operations and demonstrates proof-of-concept for next generation FICIs.
This paper presents the first acoustic experimental results of a MEMS based bulk piezoelectric tr... more This paper presents the first acoustic experimental results of a MEMS based bulk piezoelectric transducer for use in fully implantable cochlear implants (FICI). For this purpose, the transducer was attached onto an acoustically vibrating membrane. Sensing and energy harvesting performances were measured using neural stimulation and rectifier circuits, respectively. The chip has a 150 Hz bandwidth around 1800 Hz resonance frequency that is suitable for mechanical filtering as a sensor. As an energy harvester, bulk piezoelectric transducer generated a rectified power of 16.25 μW with 2.47 VDC with 120 dB-A sound input at 1780 Hz. Among other MEMS acoustic energy harvesters in the literature, reported transducer has the highest power density (1.5 × 10 −3 W/cm 3) to our knowledge.
This paper presents design and fabrication of a MEMS-based thin film piezoelectric transducer to ... more This paper presents design and fabrication of a MEMS-based thin film piezoelectric transducer to be placed on an eardrum for fully-implantable cochlear implant (FICI) applications. Resonating at a specific frequency within the hearing band, the transducer senses eardrum vibration and generates the required voltage output for the stimulating circuitry. Moreover, high sensitivity of the sensor, 391.9 mV/Pa @900 Hz, decreases the required power for neural stimulation. The transducer provides highest voltage output in the literature (200 mVpp @100 dB SPL) to our knowledge. A multi-frequency piezoelectric sensor, covering the daily acoustic band, is designed based on the test results and validated through FEA. The implemented system provides mechanical filtering, and mimics the natural operation of the cochlea. Herewith, the proposed sensor overcomes the challenges in FICI operations and demonstrates proof-of-concept for next generation FICIs.
Uploads