Abstract
Tin dioxide is a widely used sensitive material for gas sensors. Many research and development groups in academia and industry are contributing to the increase of (basic) knowledge/(applied) know-how. However, from a systematic point of view the knowledge gaining process seems not to be coherent. One reason is the lack of a general applicable model which combines the basic principles with measurable sensor parameters.
The approach in the presented work is to provide a frame model that deals with all contributions involved in conduction within a real world sensor. For doing so, one starts with identifying the different building blocks of a sensor. Afterwards their main inputs are analyzed in combination with the gas reaction involved in sensing. At the end, the contributions are summarized together with their interactions.
The work presented here is one step towards a general applicable model for real world gas sensors.
Similar content being viewed by others
References
G. Sberveglieri, Sensors and Actuators B, 6, 239 (1992).
N. Bâ rsan, Sensors and Actuators B, 17, 241 (1994).
M. Bauer, N. Bâ rsan, K. Ingrisch, A. Zeppenfeld, I. Denk, B. Schuman, U.Weimar, and W. Göpel, Proc. of the 11th European Microelectronic Conference (1997).
U. Hoefer, K. Steiner, and E. Wagner, Sensors and Actuators B, 26/27, 59 (1995).
S.R. Morrison, The Chemical Physics of Surfaces, 2nd edn. (Plenum Press, New York, 1990).
G. Heiland and D. Kohl, in Chemical Sensor Technology, Vol. 1, edited by T. Seiyama (Kodansha, Tokyo), Ch. 2, pp. 15-38.
V.A. Henrich and P.A. Cox, The Surface Science of Metal Oxides (University Press, Cambridge, 1994), pp. 312-316.
M. Egashira, M. Nakashima, and S. Kawasumi, J. Chem. Soc. Chem. Comm. 1047 (1981).
N. Bâ rsan and R. Ionescu, Sensors and Actuators B, 12, 71 (1993).
S. Lenaerts, M. Honore, G. Huyberechts, J. Roggen, and G. Maes, Sensors and Actuators B, 18/19, 478 (1994).
A. Broniatowski, in Polycrystalline Semi-Conductors, edited by G. Harbeke (Springer Solid State Sciences Series, Vol. 57), (Hardcover-April 1985).
A. Broniatowski, in Polycrystalline Semi-Conductors, edited by G. Harbeke (Springer Solid State Sciences Series, Vol. 57), (Hardcover-April 1985).
R. Stratton, Proc. Phys. Soc. B, 69, 513 (1956).
A. Many, Y. Goldstein, and N.B. Grover, Semiconductor Surfaces (Interscience, New York, 1965), p. 308.
H. Geistlinger, I. Eisele, B. Flietner, and R.Winter, Sensors and Actuators B, 34, 499-505 (1996).
A.F. Hollemann and E. Wieberg, Lehrbuch der Anorganischen Chemie, 101th edn. (Walter de Gruyter, Berlin, 1995), p. 1592.
M. Schweizer-Berberich, PhD Thesis, Universität Tübingen, 1998.
W. Göpel and K.D. Schierbaum, Sensors and Actuators B, 26/27, 1 (1995).
S. Lenaerts, J. Roggen, and G. Maes, Spectrochimica Acta Part A-Molecular Spectroscopy, 51, 883 (1995).
J.P. Joly, L. Gonszalez-Cruz, and Y. Arnaud, Bulletin de la Société Chimique de France, 11 (1986).
B. Gillot, C. Fey, and D. Delafosse, Journal of Chemical Physics, 73, 19 (1976).
N. Yamazoe, J. Fuchigami, M. Kishikawa, and T. Seiyama, Surf. Sci., 86, 335 (1979).
A.M. Volodin and A.E. Cherkasin, Reac. Kinet. Catal. Lett., 17, 329 (1981).
S.C. Chang, J. Vac. Sci. Technol., 17, 366 (1980).
D. Kohl, in Gas Sensors edited by, G. Sberveglieri (Kluwer, Dordrecht, 1992) ch. 2, p. 43.
M. Egashira, M. Nakashima, and S. Kawasumi, J. Chem. Soc. Chem. Comm., 1047 (1981).
K. Morishige, S. Kittaka, and T. Morimoto, Bull. Chem. Soc. Japan, 53, 2128 (1980).
A. Guest, PhD Thesis University of Nottingham, 1985.
E.W. Thornton and P.G. Harrison, J. Chem. Soc. Faraday Trans., 71, 461 (1975).
F. Berger, E. Beche, R. Berjoan, D. Klein, and A. Chambaudet, Applied Surf. Sci., 93, 9 (1996).
J.F. Boyle and K.A. Jones, Electron. Mater. 6, 717 (1977).
S.J. Gentry and T.A. Jones, Sensors and Actuators, 10, 141 (1986).
H. Windischmann and P. Mark, J. Electrochem. Soc.: Solid-State Sci. Technol., 126, 672 (1979).
M.J. Willett, in Techniques and Mechanisms D.E. Williams and in Gas Sensing, Vol. 3, edited by P.T. Moseley, J.O.W. Norris (Adam Hilger, Bristol, 1991), p. 61.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Barsan, N., Weimar, U. Conduction Model of Metal Oxide Gas Sensors. Journal of Electroceramics 7, 143–167 (2001). https://doi.org/10.1023/A:1014405811371
Issue Date:
DOI: https://doi.org/10.1023/A:1014405811371