Abstract
Precise ablation of metals using tightly focused femtosecond laser pulses with intensities close to the damage threshold can yield sub-wavelength, nanometer-sized holes or craters. These structures in metals can exhibit plasmonic effects, thereby affecting the interactions involved. We numerically simulate light propagation inside such holes and model the ablation process. We show that surface plasmon resonances can be excited at near-infrared and visible wavelengths. At resonance wavelengths, significant enhancement of aspect ratio is possible. Our results show that plasmonic effects are essential for the understanding of precision laser processing of metals, and they can be exploited to significantly enhance the performance of laser micro- and nano-machining.
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References
Stuart BC, Feit MD, Herman S, Rubenchik AM, Shore BW, Perry MD (1996) Nanosecond-to-femtosecond laser-induced breakdown in dielectrics. Phys Rev B 53:1749
Pronko PP, Dutta SK, Squier J, Rudd JV, Du D, Mourou G (1995) Machining of sub-micron holes using a femtosecond laser at 800 nm. Opt Commun 114:106–110
Joglekar AP Liu H, Meyhöfer E, Mourou G, Hunt AJ (2004) Optics at critical intensity: applications to nanomorphing. Proc Natl Acad Sci USA 101:5856–5861
Englert L, Rethfeld B, Haag L, Wollenhaupt M, Sarpe-Tudoran C, Baumert T (2007) Control of ionization processes in high band gap materials via tailored femtosecond pulses. Opt Express 15:17855–17862
Herbstman JF, Hunt AJ (2010) High-aspect ratio nanochannel formation by single femtosecond laser pulses. Opt Express 18:16840–16848
Ebbesen TW, Lezec HJ, Ghaemi HF, Thio T, Wolff T (1998) Extraordinary optical transmission through sub-wavelength hole arrays. Nature 391:667–669
Genet C, Ebbesen TW (2007) Light in tiny holes. Nature 445:39–46
Marcatili EA, Schmeltzer R (1964) Hollow metallic and dielectric waveguides for long distance optical transmission and lasers. Bell Syst Tech J 43:1783–1809
Stratton JA (1941) Electromagntic theory. McGraw-Hill, New York
Rakic D, Djurisic AB, Elazar JM, Majewski ML (1998) Optical properties of metallic films for vertical-cavity optoelectronic devices. Appl Opt 37:5271–5283
Wavenology from Wave Computation Techonologies, Inc., Durham, NC
Acknowledgement
This work was supported by the Scientific and Technological Research Council of Turkey (TUBITAK, grant numbers 110T330 and 110E002).
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Simsek, E., Akturk, S. Plasmonic Enhancement During Femtosecond Laser Drilling of Sub-wavelength Holes in Metals. Plasmonics 6, 767–772 (2011). https://doi.org/10.1007/s11468-011-9262-z
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DOI: https://doi.org/10.1007/s11468-011-9262-z