Design, Implementation and Simulation of a Fringing Field Capacitive Humidity Sensor
<p>Interdigitated capacitive humidity sensor.</p> "> Figure 2
<p>Section view of the capacitive humidity sensor. Spacing (S) and Width (W) are the parameters with the highest influence in the sensitivity of the sensor with Thickness (T) with a very small impact. The stackup is composed of soldermask, copper, FR4 epoxy, copper and soldermask.</p> "> Figure 3
<p>Sensors investigated in this work. 12 of them are fabricated on standard 1.6 mm thickness PCB with S and W varying from 5 to 20 MILs and 3 of them are fabricated on 0.8 mm thickness PCB with fixed aspect ratios W/S = 5/5, 10/5 and 20/5.</p> "> Figure 4
<p>HTMWE electronic circuits, board and partial schematic.</p> "> Figure 5
<p>Humidity and Temperature Measurement Wireless Equipment.</p> "> Figure 6
<p>Full and reduced 2D simulation setup from ANSYS Q3D Extractor.</p> "> Figure 7
<p>Meshing in ANSYS 2D Extractor of a section in the traces of the capacitive sensor.</p> "> Figure 8
<p>Measurement setup for capacitive sensors with a HIOKI 3532-50 LCR Meter. The DUT is connected via a quadripolar connection with a small wire fixture.</p> "> Figure 9
<p>Capacitance measurement circuit investigation setup. A RIGOL DS1052E oscilloscope has CH1 connected to the AC voltage of the capacitor sensor and CH2 connected next to a TENMA 72-7730A Digital Multimeter at the DC output voltage from the peak detector circuit.</p> "> Figure 10
<p>Simulated AC voltage at the capacitor sensor using TINA-TI from Texas Instruments for values corresponding to sensors V1-1L, V4-1L, V2-2L, V5-2L and V8-2L. The simulation schematic is the one from <a href="#sensors-20-05644-f004" class="html-fig">Figure 4</a>b.</p> "> Figure 11
<p>AC voltage at the capacitor sensor on CH1 and DC voltage output from the peak detector circuit on CH2. Both CH1 and CH2 are set to 500 mV/div and time base is 1 us/div. Measurement taken with a RIGOL DS1052E oscilloscope.</p> "> Figure 12
<p>Simulation results of capacitance variation for the 18 structures when the <math display="inline"><semantics> <msub> <mi>ϵ</mi> <mi>r</mi> </msub> </semantics></math> of the environment is swept from 1 to 77. Graphs display the absolute value in pF of the capacitance obtained by multiplying the increase factor with the initial capacitance from <a href="#sensors-20-05644-t001" class="html-table">Table 1</a>.</p> "> Figure 13
<p>Simulation results of capacitance increase factor for the 18 structures when the <math display="inline"><semantics> <msub> <mi>ϵ</mi> <mi>r</mi> </msub> </semantics></math> of the environment is swept from 1 to 77 with value <math display="inline"><semantics> <msub> <mi>ϵ</mi> <mi>r</mi> </msub> </semantics></math> = 1 omitted from the Graph. The data from <a href="#sensors-20-05644-t001" class="html-table">Table 1</a> is used.</p> "> Figure 14
<p>Simulation results of capacitance variation for 3 two-layered structures where the thickness is varied from 0.4 mm to 2 mm. The <math display="inline"><semantics> <msub> <mi>ϵ</mi> <mi>r</mi> </msub> </semantics></math> of the environment is swept from 1 to 77. Data from <a href="#sensors-20-05644-t002" class="html-table">Table 2</a> is used.</p> "> Figure 15
<p>Electric Field distribution between the traces of the capacitive sensors for different thicknesses of the FR4 dielectric. One trace is positively charged and the other is negatively charged.</p> "> Figure A1
<p>LC parallel circuit characterization of measurement setup at LCR meter used for measuring series capacitance and resistance for sensors.</p> ">
Abstract
:1. Introduction
2. Design and Implementation
2.1. Capacitive IDC Sensor
2.2. Capacitance Measurement Circuit
- peak AC voltage of the capacitor [V]
- peak AC voltage of the square signal applied to the capacitor [V]
- the half-period of the signal for the 50% duty cycle signal [ns]
- signal period [ns]
- time constant of the circuit, equal with the product of R and C [ns]
3. Materials and Methods
4. Results
5. Discussion
6. Conclusions
Author Contributions
Funding
Acknowledgments
Conflicts of Interest
Abbreviations
ADC | Analog to Digital Convertor |
HTMWE | Humidity and Temperature Measurement Wireless Equipment |
IDC | Interdigitated |
LCR | (L) Inductance (C) Capacitance and (R) resistance |
LoRa | Long Range |
MIL | One Thousandth of an Inch |
MCU | microcontroller |
PCB | Printed Circuit Board |
UN | United Nations |
WQMCM | Water Quality Monitoring, Control and Management |
WSN | Wireless Sensors Network |
Appendix A. Peak Voltage at Capacitor under Square Signal with Half-Period Lower than the Time Constant of the Circuit
Appendix B. Characterization Model of LC Circuit Used in the Resonance Method at the Measurements Performed with the LCR Meter
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Dielectric Constant | 1 | 10 | 20 | 30 | 40 | 50 | 60 | 70 | 77 | ||
---|---|---|---|---|---|---|---|---|---|---|---|
Sensor | W [MIL] | S [MIL] | C [pF] | Factor | Factor | Factor | Factor | Factor | Factor | Factor | Factor |
V1-1L | 5 | 5 | 307.18 | 1.60 | 1.98 | 2.22 | 2.40 | 2.52 | 2.62 | 2.70 | 2.74 |
V2-1L | 10 | 143.57 | 1.73 | 2.25 | 2.60 | 2.86 | 3.06 | 3.21 | 3.34 | 3.41 | |
V3-1L | 20 | 64.63 | 1.83 | 2.47 | 2.93 | 3.29 | 3.57 | 3.79 | 3.98 | 4.09 | |
V4-1L | 10 | 5 | 234.58 | 1.72 | 2.24 | 2.61 | 2.89 | 3.11 | 3.28 | 3.42 | 3.51 |
V5-1L | 10 | 128.00 | 1.85 | 2.51 | 3.01 | 3.40 | 3.71 | 3.96 | 4.17 | 4.30 | |
V6-1L | 20 | 61.97 | 1.94 | 2.73 | 3.34 | 3.84 | 4.26 | 4.60 | 4.90 | 5.08 | |
V7-1L | 20 | 5 | 165.13 | 1.83 | 2.51 | 3.02 | 3.44 | 3.78 | 4.07 | 4.31 | 4.46 |
V8-1L | 10 | 100.87 | 1.96 | 2.78 | 3.43 | 3.97 | 4.43 | 4.82 | 5.15 | 5.36 | |
V9-1L | 20 | 56.70 | 2.04 | 2.97 | 3.75 | 4.42 | 4.99 | 5.49 | 5.93 | 6.21 | |
V1-2L | 5 | 5 | 613.81 | 1.60 | 1.98 | 2.23 | 2.40 | 2.52 | 2.62 | 2.70 | 2.75 |
V2-2L | 10 | 286.50 | 1.73 | 2.25 | 2.60 | 2.86 | 3.06 | 3.22 | 3.35 | 3.42 | |
V3-2L | 20 | 128.33 | 1.84 | 2.48 | 2.95 | 3.31 | 3.59 | 3.82 | 4.01 | 4.12 | |
V4-2L | 10 | 5 | 468.40 | 1.72 | 2.25 | 2.62 | 2.90 | 3.11 | 3.28 | 3.43 | 3.51 |
V5-2L | 10 | 255.06 | 1.85 | 2.52 | 3.02 | 3.41 | 3.72 | 3.97 | 4.18 | 4.31 | |
V6-2L | 20 | 122.47 | 1.95 | 2.75 | 3.38 | 3.88 | 4.30 | 4.65 | 4.95 | 5.13 | |
V7-2L | 20 | 5 | 328.80 | 1.84 | 2.51 | 3.03 | 3.45 | 3.79 | 4.08 | 4.33 | 4.48 |
V8-2L | 10 | 199.87 | 1.97 | 2.79 | 3.46 | 4.00 | 4.46 | 4.85 | 5.19 | 5.41 | |
V9-2L | 20 | 110.52 | 2.06 | 3.03 | 3.83 | 4.51 | 5.10 | 5.61 | 6.07 | 6.35 |
Dielectric Constant | 1 | 10 | 20 | 30 | 40 | 50 | 60 | 70 | 77 | |||
---|---|---|---|---|---|---|---|---|---|---|---|---|
Sensor | W [MIL] | S [MIL] | T [mm] | C [pF] | C [pF] | C [pF] | C [pF] | C [pF] | C [pF] | C [pF] | C [pF] | C [pF] |
V1-2L | 5 | 5 | 0.4 | 589.98 | 958.29 | 1193.55 | 1345.06 | 1451.02 | 1529.28 | 1589.50 | 1637.28 | 1665.24 |
0.8 | 611.76 | 978.73 | 1213.34 | 1364.51 | 1470.14 | 1548.25 | 1608.30 | 1655.95 | 1683.86 | |||
1.6 | 613.81 | 980.39 | 1214.88 | 1365.89 | 1471.54 | 1549.60 | 1609.63 | 1657.28 | 1685.19 | |||
2 | 614.04 | 980.55 | 1215.03 | 1366.07 | 1471.67 | 1549.70 | 1609.73 | 1657.38 | 1685.27 | |||
V4-2L | 10 | 5 | 0.4 | 425.71 | 764.96 | 1011.47 | 1186.00 | 1316.48 | 1417.98 | 1499.23 | 1565.77 | 1605.60 |
0.8 | 464.14 | 802.47 | 1048.50 | 1222.57 | 1352.84 | 1454.14 | 1535.24 | 1601.63 | 1641.40 | |||
1.6 | 468.40 | 806.35 | 1052.19 | 1226.13 | 1356.31 | 1457.51 | 1538.52 | 1604.90 | 1644.63 | |||
2 | 468.69 | 806.60 | 1052.44 | 1226.37 | 1356.52 | 1457.75 | 1538.72 | 1605.03 | 1644.77 | |||
V7-2L | 20 | 5 | 0.4 | 270.25 | 546.26 | 768.84 | 940.38 | 1077.84 | 1190.86 | 1285.61 | 1366.26 | 1415.97 |
0.8 | 317.29 | 593.05 | 815.41 | 986.82 | 1124.10 | 1237.01 | 1331.67 | 1412.26 | 1461.92 | |||
1.6 | 328.80 | 604.25 | 826.45 | 997.68 | 1134.86 | 1247.67 | 1342.25 | 1422.77 | 1472.39 | |||
2 | 329.44 | 604.86 | 827.05 | 998.26 | 1135.43 | 1248.23 | 1342.77 | 1423.30 | 1472.92 |
Simulation | Measurement | Error | ||||||||
---|---|---|---|---|---|---|---|---|---|---|
Sensor | W [MIL] | S [MIL] | AIR [%] | WATER [%] | ||||||
V1-1L | 5 | 5 | 307.18 | 842.67 | 46.22 | 289.34 | 9.57 | 809.76 | 5.81% | 3.91% |
V2-1L | 10 | 143.57 | 490.17 | 61.48 | 129.73 | 26.54 | 536.87 | 9.64% | 9.53% | |
V3-1L | 20 | 64.63 | 264.61 | |||||||
V4-1L | 10 | 5 | 234.58 | 822.51 | 51.19 | 219.21 | 14.09 | 757.60 | 6.55% | 7.89% |
V5-1L | 10 | 128.00 | 550.26 | 63.12 | 118.83 | 28.71 | 605.78 | 7.17% | 10.09% | |
V6-1L | 20 | 61.97 | 314.81 | |||||||
V7-1L | 20 | 5 | 165.13 | 736.70 | 55.54 | 149.87 | 23.48 | 694.62 | 9.24% | 5.71% |
V8-1L | 10 | 100.87 | 540.91 | 69.98 | 97.55 | 40.25 | 574.12 | 3.29% | 6.14% | |
V9-1L | 20 | 56.70 | 352.25 | |||||||
V1-2L | 5 | 5 | 613.81 | 1685.19 | 40.45 | 563.12 | 10.61 | 1632.41 | 8.26% | 3.13% |
V2-2L | 10 | 286.50 | 980.07 | 46.45 | 263.12 | 9.35 | 1086.00 | 8.16% | 10.81% | |
V3-2L | 20 | 128.33 | 528.75 | |||||||
V4-2L | 10 | 5 | 468.40 | 1644.63 | 41.47 | 423.76 | 9.36 | 1694.01 | 9.53% | 3.00% |
V5-2L | 10 | 255.06 | 1099.96 | 46.49 | 230.58 | 15.85 | 1199.90 | 9.60% | 9.09% | |
V6-2L | 20 | 122.47 | 628.69 | |||||||
V7-2L | 20 | 5 | 328.80 | 1472.39 | 45.20 | 302.76 | 21.51 | 1597.81 | 7.92% | 8.52% |
V8-2L | 10 | 199.87 | 1080.37 | 48.60 | 194.26 | 35.13 | 1185.11 | 2.80% | 9.69% | |
V9-2L | 20 | 110.52 | 702.11 |
Simulation | Measurement | Error | |||||||||
---|---|---|---|---|---|---|---|---|---|---|---|
Sensor | W [MIL] | S [MIL] | T [mm] | AIR [%] | WATER [%] | ||||||
V1-2L | 5.00 | 5.00 | 0.40 | 589.98 | 1665.24 | ||||||
0.80 | 611.76 | 1683.86 | 41.69 | 564.76 | 9.12 | 1870.90 | 8.76% | 9.99% | |||
1.60 | 613.81 | 1685.19 | 40.45 | 563.12 | 10.61 | 1632.41 | 9.02% | 4.26% | |||
2.00 | 614.04 | 1685.27 | |||||||||
V4-2L | 10.00 | 5.00 | 0.40 | 425.71 | 1605.60 | ||||||
0.80 | 464.14 | 1641.40 | 43.16 | 432.09 | 17.91 | 1758.21 | 7.99% | 5.87% | |||
1.60 | 468.40 | 1644.63 | 41.47 | 423.76 | 9.36 | 1694.01 | 10.58% | 1.80% | |||
2.00 | 468.69 | 1644.77 | |||||||||
V7-2L | 20.00 | 5.00 | 0.40 | 270.25 | 1415.97 | ||||||
0.80 | 317.29 | 1461.92 | 46.60 | 298.43 | 23.98 | 1559.21 | 7.04% | 5.41% | |||
1.60 | 328.80 | 1472.39 | 45.20 | 302.76 | 21.51 | 1597.81 | 8.99% | 7.26% | |||
2.00 | 329.44 | 1472.92 |
Analytical | Simulation | Measurement | ||||||
---|---|---|---|---|---|---|---|---|
Sensor | Environment | |||||||
V1-1L | AIR | 289.34 | 2.84 | 2.83 | 2.67 | 2.70 | 2.58 | 2.53 |
WATER | 809.76 | 2.17 | 2.16 | 2.08 | 2.12 | 2.04 | 1.99 | |
V4-1L | AIR | 219.21 | 3.01 | 2.97 | 2.72 | 2.86 | 2.70 | 2.63 |
WATER | 757.60 | 2.20 | 2.19 | 2.12 | 2.18 | 2.08 | 2.05 | |
V2-2L | AIR | 263.12 | 2.90 | 2.88 | 2.69 | 2.74 | 2.60 | 2.57 |
WATER | 1086.11 | 2.03 | 2.01 | 1.95 | 2.04 | 1.96 | 1.92 | |
V5-2L | AIR | 230.58 | 2.98 | 2.95 | 2.72 | 2.78 | 2.66 | 2.60 |
WATER | 1199.90 | 1.99 | 1.97 | 1.89 | 1.98 | 1.92 | 1.88 | |
V8-2L | AIR | 194.26 | 3.06 | 3.02 | 2.74 | 2.86 | 2.68 | 2.64 |
WATER | 1185.11 | 2.00 | 1.97 | 1.91 | 1.98 | 1.92 | 1.88 |
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Petre, A.-R.; Craciunescu, R.; Fratu, O. Design, Implementation and Simulation of a Fringing Field Capacitive Humidity Sensor. Sensors 2020, 20, 5644. https://doi.org/10.3390/s20195644
Petre A-R, Craciunescu R, Fratu O. Design, Implementation and Simulation of a Fringing Field Capacitive Humidity Sensor. Sensors. 2020; 20(19):5644. https://doi.org/10.3390/s20195644
Chicago/Turabian StylePetre, Adrian-Razvan, Razvan Craciunescu, and Octavian Fratu. 2020. "Design, Implementation and Simulation of a Fringing Field Capacitive Humidity Sensor" Sensors 20, no. 19: 5644. https://doi.org/10.3390/s20195644