Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array
<p>The top view of the waveguide based surface plasmon resonance (SPR) sensor and the schematic cross-section of the silicon-on-insulator (SOI) rib waveguide embedded in the lower left corner.</p> "> Figure 2
<p>The mode distribution of the SOI rib waveguide with <span class="html-italic">H =</span> 10 μm, <span class="html-italic">h =</span> 5 μm and <span class="html-italic">w =</span> 5 μm at an operating wavelength of 1550 nm.</p> "> Figure 3
<p>The simplified SPR excitation model of the SPR sensor.</p> "> Figure 4
<p>The dispersion of the fundamental transverse electric (TE) guiding mode of the SOI rib waveguide with the total rib height of 10 μm, outside rib height of 5 μm, rib width of 5 μm.</p> "> Figure 5
<p>The single metallic SPR curve of angular interrogation for different thickness of the metal (Au or Al) layer at operating wavelength of 1550 nm and the refractive index of the analyte solution <span class="html-italic">n<sub>a</sub> =</span> 1.33.</p> "> Figure 6
<p>The single metallic SPR curve of wavelength interrogation for different thickness of the metal (Au or Al) layer at resonance angle from <a href="#sensors-15-17313-f005" class="html-fig">Figure 5</a> and the refractive index of the analyte solution <span class="html-italic">n<sub>a</sub> =</span> 1.33.</p> "> Figure 7
<p>The single metallic SPR curve of wavelength interrogation for different SPR active metal (Au or Al) and different refractive index of the analyte solution.</p> "> Figure 8
<p>The comparison diagram of wavelength interrogation curve for single metallic SPR with 40 nm Al and bimetallic SPR curve with 3 nm Au over 37 nm Al.</p> "> Figure 9
<p>The influence of the thickness of Al layer in the bimetallic SPR sensor with 3 nm or 5 nm Au.</p> "> Figure 10
<p>The influence of the thickness of Au layer in the bimetallic SPR sensor with 27 nm or 32 nm Al.</p> "> Figure 11
<p>The electric intensity map of the bimetallic SPR sensor with 3 nm Au over 32 nm Al in the 2D-FDTD simulation at an operating wavelength of 1550 nm. The mesh grid in the regions of trench-based waveguide bends is set to 5 nm, and the mesh grid of metal layer is set to 1 nm.</p> "> Figure 12
<p>Schematic of SPR sensor array for wavelength interrogation.</p> "> Figure 13
<p>The wavelength interrogation curve for the bimetallic SPR curve with 3 nm Au over 32 nm Al.</p> ">
Abstract
:1. Introduction
2. Principle of Operation
2.1. Structure Configuration
2.2. Calculation Model
2.3. Dispersive Material Model
2.4. Quantitative Indicators of Sensor Performance
3. Results and Discussion
3.1. Single Metallic SPR
3.2. Bimetallic SPR
3.3. Transmission Simulation of SPR Sensor
3.4. SPR Sensor Arrays
3.5. Discussion
4. Conclusions
Acknowledgments
Author Contributions
Conflicts of Interest
References
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Yuan, D.; Dong, Y.; Liu, Y.; Li, T. Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array. Sensors 2015, 15, 17313-17328. https://doi.org/10.3390/s150717313
Yuan D, Dong Y, Liu Y, Li T. Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array. Sensors. 2015; 15(7):17313-17328. https://doi.org/10.3390/s150717313
Chicago/Turabian StyleYuan, Dengpeng, Ying Dong, Yujin Liu, and Tianjian Li. 2015. "Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array" Sensors 15, no. 7: 17313-17328. https://doi.org/10.3390/s150717313