Abstract
Cross-coupling effect severely hinder fast and accurate tracking for parallel piezo nanopositioning stages. In this paper, a data-driven feedforward decoupling filter (DDFDF) is proposed to reduce the cross-coupling caused errors. Traditional control methods for coupled system could achieve good performance on the premise that the dynamic model is accurate and no non-minimum phase zeros exist. The proposed method is totally data-driven with the advantage of no need for accurate identified model and model structure by Gauss-Newton gradient-based algorithm. The DDFDF for eliminating cross-coupling errors was verified on a 2-DOF coupled nanopositioning stage through simulations. Results show the effectiveness of the proposed controller by comparing with open-loop simulations and the well-designed feedback controller.
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References
Devasia, S., Eleftheriou, E., Moheimani, S.O.R.: A survey of control issues in nanopositioning. IEEE Trans. Control Syst. Technol. 15(5), 802–823 (2007)
Salapaka, S.M., Salapaka, M.V.: Scanning probe microscopy. IEEE Control Syst. 28(2), 65–83 (2008)
Binnig, G., Quate, C.F., Gerber, C.: Atomic force microscope. Phys. Rev. Lett. 56(9), 930 (1986)
Rakotondrabe, M., Haddab, Y., Lutz, P.: Development, modeling, and control of a micro-/nanopositioning 2-DOF stick–slip device. IEEE/ASME Trans. Mechatron. 14(6), 733–745 (2009)
Yong, Y.K., Moheimani, S.O.R., Kenton, B.J., et al.: Invited review article: High-speed flexure-guided nanopositioning: Mechanical design and control issues. Rev. Sci. Instrum. 83(12), 121101 (2012)
Kenton, B.J., Leang, K.K.: Design and control of a three-axis serial-kinematic high-bandwidth nanopositioner. IEEE/ASME Trans. Mechatron. 17(2), 356–369 (2012)
Bhikkaji, B., Ratnam, M., Moheimani, S.O.R.: PVPF control of piezoelectric tube scanners. Sens. Actuators A 135(2), 700–712 (2007)
Li, Y., Xu, Q.: Development and assessment of a novel decoupled XY parallel micropositioning platform. IEEE/ASME Trans. Mechatron. 15(1), 125–135 (2010)
Yao, Q., Dong, J., Ferreira, P.M.: Design, analysis, fabrication and testing of a parallel-kinematic micropositioning XY stage. Int. J. Mach. Tools Manuf. 47(6), 946–961 (2007)
Das, S.K., Pota, H.R., Petersen, I.R.: Multivariable negative-imaginary controller design for damping and cross coupling reduction of nanopositioners: a reference model matching approach. IEEE/ASME Trans. Mechatron. 20(6), 3123–3134 (2015)
Das, S.K., Pota, H.R., Petersen, I.R.: A MIMO double resonant controller design for nanopositioners. IEEE Trans. Nanotechnol. 14(2), 224–237 (2015)
Das, S.K., Pota, H.R., Petersen, I.R.: Resonant controller design for a piezoelectric tube scanner: a mixed negative-imaginary and small-gain approach. IEEE Trans. Control Syst. Technol. 22(5), 1899–1906 (2014)
Yong, Y.K., Liu, K., Moheimani, S.O.R.: Reducing cross-coupling in a compliant XY nanopositioner for fast and accurate raster scanning. IEEE Trans. Control Syst. Technol. 18(5), 1172–1179 (2010)
Hjalmarsson, H., Gevers, M., Gunnarsson, S., et al.: Iterative feedback tuning: theory and applications. IEEE Control Syst. 18(4), 26–41 (1998)
Hjalmarsson, H.: Efficient tuning of linear multivariable controllers using iterative feedback tuning. Int. J. Adapt. Control Signal Process. 13(7), 553–572 (1999)
Campi, M.C., Lecchini, A., Savaresi, S.M.: Virtual reference feedback tuning: a direct method for the design of feedback controllers. Automatica 38(8), 1337–1346 (2002)
Campi, M.C., Lecchini, A., Savaresi, S.M.: An application of the virtual reference feedback tuning method to a benchmark problem. Eur. J. Control 9(1), 66–76 (2003)
Zheng, J., Guo, G., Wang, Y.: Feedforward decoupling control design for dual-actuator system in hard disk drives. IEEE Trans. Magn. 40(4), 2080–2082 (2004)
Boyd, S., Vandenberghe, L.: Convex Optimization. Cambridge University Press, Cambridge (2004)
Teo, Y.R., Eielsen, A.A., Gravdahl, J.T., et al.: Discrete-time repetitive control with model-less FIR filter inversion for high performance nanopositioning. In: IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), pp. 1664–1669 (2014)
Hu, C., Yao, B., Wang, Q.: Coordinated adaptive robust contouring control of an industrial biaxial precision gantry with cogging force compensations. IEEE Trans. Industr. Electron. 57(5), 1746–1754 (2010)
Chen, C.S., Chen, L.Y.: Robust cross-coupling synchronous control by shaping position commands in multiaxes system. IEEE Trans. Industr. Electron. 59(12), 4761–4773 (2012)
Skogestad, S., Postlethwaite, I.: Multivariable Feedback Control: Analysis and Design. Wiley, New York (2007)
Huusom, J.K., Poulsen, N.K., Jørgensen, S.B.: Improving convergence of iterative feedback tuning. J. Process Control 19(4), 570–578 (2009)
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This research was sponsored by National Natural Science Foundation of China (NSFC, Grant No.51375349).
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Feng, Z., Ling, J., Ming, M., Xiao, X. (2016). Data-Driven Feedforward Decoupling Filter Design for Parallel Nanopositioning Stages. In: Kubota, N., Kiguchi, K., Liu, H., Obo, T. (eds) Intelligent Robotics and Applications. ICIRA 2016. Lecture Notes in Computer Science(), vol 9834. Springer, Cham. https://doi.org/10.1007/978-3-319-43506-0_61
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DOI: https://doi.org/10.1007/978-3-319-43506-0_61
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