"On smoothing three-dimensional Monte Carlo ion implantation simulation ..."

Clemens Heitzinger, Andreas Hössinger, Siegfried Selberherr (2003)

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DOI: 10.1109/TCAD.2003.814259

access: closed

type: Journal Article

metadata version: 2020-09-24

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Clemens Heitzinger, Andreas Hössinger, Siegfried Selberherr:
On smoothing three-dimensional Monte Carlo ion implantation simulation results. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 22(7): 879-883 (2003)

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