"Thermo-mechanical reliability optimization of MEMS-based quartz resonator ..."

Rui Zhang et al. (2012)

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DOI: 10.1016/J.MICROREL.2012.06.084

access: closed

type: Journal Article

metadata version: 2022-04-22

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Rui Zhang, Hongbin Shi, Yuehong Dai, Jong Tae Park, Toshitsugu Ueda:
Thermo-mechanical reliability optimization of MEMS-based quartz resonator using validated finite element model. Microelectron. Reliab. 52(9-10): 2331-2335 (2012)

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