"Planarized Nb 4-Layer Fabrication Process for Superconducting Integrated ..."

Shuichi Nagasawa et al. (2021)

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DOI: 10.1587/TRANSELE.2020SUP0001

access: closed

type: Journal Article

metadata version: 2023-09-30

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Shuichi Nagasawa, Masamitsu Tanaka, Naoki Takeuchi, Yuki Yamanashi, Shigeyuki Miyajima, Fumihiro China, Taiki Yamae, Koki Yamazaki, Yuta Somei, Naonori Sega, Yoshinao Mizugaki, Hiroaki Myoren, Hirotaka Terai, Mutsuo Hidaka, Nobuyuki Yoshikawa, Akira Fujimaki:
Planarized Nb 4-Layer Fabrication Process for Superconducting Integrated Circuits and Its Fabricated Device Evaluation. IEICE Trans. Electron. 104-C(9): 435-445 (2021)

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