"Electrostatic linear micro actuator with vibrating motion (application to ..."

Akihiro Koga et al. (1997)

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DOI: 10.1163/156855398X00082

access: closed

type: Journal Article

metadata version: 2020-04-25

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Akihiro Koga, Koichi Suzumori, Toyomi Miyagawa, Masayuki Sekimura:
Electrostatic linear micro actuator with vibrating motion (application to the focusing mechanism of a miniature CCD camera). Adv. Robotics 12(2): 103-113 (1997)

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