"The Level-Set Method for Multi-Material Wet Etching and Non-Planar ..."

Alexander Toifl et al. (2020)

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DOI: 10.1109/ACCESS.2020.3004136

access: open

type: Journal Article

metadata version: 2020-08-06

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Alexander Toifl, Michael Quell, Xaver Klemenschits, Paul Manstetten, Andreas Hössinger, Siegfried Selberherr, Josef Weinbub:
The Level-Set Method for Multi-Material Wet Etching and Non-Planar Selective Epitaxy. IEEE Access 8: 115406-115422 (2020)

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