"Simulation and experiments of intrinsic bending of multilayer ..."

Li Wen et al. (2011)

> Home

Details and statistics

DOI: 10.1109/NEMS.2011.6017435

access: closed

type: Conference or Workshop Paper

metadata version: 2023-01-18

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/nems/WenZYCW11
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/nems/WenZYCW11
Li Wen, Hongjiang Zeng, Zheng Yuan, Jiaru Chu, Hai Wang:
Simulation and experiments of intrinsic bending of multilayer microcantilever for maskless scanning plasma etching. NEMS 2011: 634-637

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.