"Layout decomposition with pairwise coloring for multiple patterning ..."

Ye Zhang et al. (2013)

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DOI: 10.1109/ICCAD.2013.6691115

access: closed

type: Conference or Workshop Paper

metadata version: 2023-08-16

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Ye Zhang, Wai-Shing Luk, Hai Zhou, Changhao Yan, Xuan Zeng:
Layout decomposition with pairwise coloring for multiple patterning lithography. ICCAD 2013: 170-177

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