2B: Transparent and

Semi-Absorbing Films

James N. Hilfiker
University of Toledo
(August 18, 2009)
 Session 2B Outline

ƒ Transparent Films (continued):

– Index Grading
– Thickness Non-Uniformity
– Simple Anisotropy

ƒ UV Absorption:
– Point by Point fitting.

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 Thin Film Modeling
Thin Films

Transparent Semi-Absorbing Absorbing

• Cauchy 3 Step Approach •Advanced
Methods
• Roughness 1. Thickness (transparent λs)

• Grading 2. Pt-by-Pt “n,k

• Anisotropy 3. GENOSC
Experimental Data Experimental Data Experimental Data
100 270 40 400 38 160
Exp Ψ -E 65°
80 Exp Δ -E 65° 240 36
140
30 300

Δ in degrees
Ψ in degrees
Δ in degrees

Δ in degrees
Ψ in degrees

Ψ in degrees

210 34
60 120
180 20 200 32
40 Exp Ψ -E 65°
150 100
10 100 30 Exp Δ -E 65°
20 120 Exp Ψ -E 65°
Exp Δ -E 65° 28 80
0 0 0 300 600 900 1200 1500 1800
0 90 Wavelength (nm)
0 300 600 900 1200 1500 1800 0 300 600 900 1200 1500 1800
Wavelength (nm) Wavelength (nm)

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 Transparent Film Strategies

ƒ Cauchy equation:
– Describes index versus wavelength.
ƒ Surface Roughness
– Sensitive for large index & absorbing films.
ƒ Index Grading
ƒ Thickness Non-Uniformity
ƒ Anisotropy

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 Transparent Film Review
1. Use Cauchy equation for index.
2. Estimate index by Psi peaks.
3. Estimate Thickness from oscillations.
4. Try roughness, grading, anisotropy?

90
Exp E 75°
75
n=1.5
Ψ in degrees

60
Generated and Experimental
45 n=2 30

30 n=2.5 25

20
n=3

Ψ in degrees
15
15
0 10
600 700 800 900 1000 1100
Model Fit
Wavelength (nm) 5 Exp E 75°

0
600 700 800 900 1000 1100
Wavelength (nm)

5
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 Index Grading

ƒ Optical properties can vary through film thickness.

ƒ Model this behavior by dividing film into ‘slices’
where optical constants vary between each.
14 270 14 270
Model Fit Model Fit
Exp Ψ -E 65° Exp Ψ -E 65°

Ψ in degrees
Exp Δ -E 65° Exp Δ -E 65° 180
Ψ in degrees

180
12 12

Δ in degrees

Δ in degrees
90 90

10 10
0 0
(A) (B)
8 -90 8 -90
400 600 800 1000 1200
Wavelength (nm)

TiO 2 Graded TiO2 2

BK7 BK7

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 Grading in WVASE32
ƒ Position mouse over
layer and right-click
mouse – this will access
new features.

– “Convert to Simple
Grade”.

ƒ Two Types:
– Simple Grading
– Function-Based
Grading.
(Not covered here).

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 Simple Grading

ƒ Describes index variation

between top and bottom of
film.
ƒ Fit: %variation, total thickness.
ƒ Graph shows grading profile.
– Choose ‘Wavelength’ for
graph.
– Click on graph to update.

ƒ Average index comes from

reference material.

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 Simple Grading
ƒ Coupled material is “center” index.
Optical Constants
2.45

2.40 cauchy

Index of refraction ' n'

SimpleGraded top
SimpleGraded bottom
2.35

2.30

2.25

2.20

2.15
600 800 1000 1200 1400 1600 1800
Wavelength (nm)
Optical Constants
2.45
cauchy
2.40 SimpleGraded top

Index of refraction ' n'

SimpleGraded bottom

2.35

2.30

2.25

2.20
600 800 1000 1200 1400 1600 1800
Wavelength (nm)

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 DEMONSTRATION

ƒ 2B_1_SiC on Si
Fit with Cauchy.
Does Roughness / Grading improve Results?

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 Example

ƒ “2B_2_TiO2 on BK7.dat”
– Use “BK7_U.mat” for substrate.
Fit with Cauchy
Does Roughness and/or Grading
improve model?

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 Non-uniform Thickness
ƒ Measurement spot can be large enough to see variation in
film thickness within the measured area
– Discrete thickness actually a “spread” of thicknesses.

•t

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 Case: Thickness Nonuniformity
Experimental Data
80
ƒ How are data affected
Ideal Film
Same Film, 3% Thickness Non-Uniformity

by measurements over 60

“spread” of thicknesses.

Ψ in degrees
40

•Data from thicker 20

and thinner film go in

opposite directions – 0
0 300 600 900 1200 1500 1800
average together. Wavelength (nm)
Ideal Data
With 3% non-uniformity
Varied Thickness Data
t

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 Case: Thickness Nonuniformity
Experimental Data
80
ƒ Near a sharp
Ideal Film
Same Film, 3% Thickness Non-Uniformity

feature, the data 60

are affected by the

Ψ in degrees
thickness variation. 40

20

0
Ideal Data 0 300 600 900 1200 1500 1800
With 3% non-uniformity Wavelength (nm)
Varied Thickness Data

•Data from thicker and thinner film

go in same directions – pulls
average down.

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 Wavelength Spread
ƒ A grating or prism is used to spread wavelengths
and collect a small region on the detector.
– Discrete wavelength is actually a “spread” of wavelengths.

Slit or
Detector
element
Grating

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 Case 1: Wavelength spread
2um Film on Si
80
ƒ How will data be 5 nm bandwidth

affected by
Ideal
60

measurements over a

Ψ in degrees
“spread” of 40

wavelengths
compared to a 20

discrete wavelength. 0
0 300 600 900 1200 1500 1800
Wavelength (nm)

31.0

30.0

29.0
Ψ in degrees

28.0
Data at shorter and
27.0
longer wavelengths
average back to the
26.0

λ0 center value
25.0
1380 1385 1390 1395 1400
Wavelength (nm)

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 Case 1: Wavelength spread
2um Film on Si
ƒ Near a sharp feature, 80

the data WILL be 5 nm bandwidth

Ideal

affected by the 60

Ψ in degrees
spread in wavelength.
40

20

0
0 300 600 900 1200 1500 1800
Wavelength (nm)
60

λ0 50
Ψ in degrees

40 Data at shorter and

longer wavelengths
30 are both pulling data
downward.
20
460 465 470 475
Wavelength (nm)

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Model Options Dialog Box

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 Measure Depolarization!
ƒ Non-idealities can cause depolarization:
– Thickness non-uniformity
– Wavelength Spread
– Angle spread

Also:
– Patterned layers
– Backside substrate reflections

Measure depolarization to help quantify

the non-ideality
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 What is depolarization
ƒ A portion of the POLARIZED light
becomes randomly polarized during
the measurement. 5%
95%
+
Unpolarized
Light
Non-uniform film

Substrate

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 Measuring Depolarization
ƒ Only on Ellipsometers with COMPENSATOR
– VASE with AutoRetarder
– M-2000 (rotating compensator)
– IR-VASE (rotating compensator)
ƒ Compensator distinguishes between unpolarized
and circularly polarized light.

compensator

compensator
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 Thickness Uniformity

ƒ The uniformity of a film is more important as

the film thickness increases.
Experimental Data
80
200nm thick, 3% non-uniform
3 microns thick, 3% non-uniform
60
%Depolarization

40

20

0
0 300 600 900 1200 1500 1800
Wavelength (nm)

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 DEMONSTRATION

ƒ 2B_3_SiOx on Si
Fit with Cauchy.
Try Thickness Non-Uniformity and Bandwidth.
What does Depolarization tell us?

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 Example: Thickness Non-
Uniformity
“2B_4_Thick Dielectric on Si.dat”
ƒ Try to adjust:
– Thickness, Cauchy amplitude (An) and Thickness Non-
uniformity to match “Psi” and “Depolarization”.

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Break!!

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 Anisotropy
ƒ Optically anisotropic material
– Different index values in different directions.
– Exhibits different optical properties depending
on the polarization direction of light beam
Beam C

Beam B

z
y
Beam A
x

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 Anisotropic Materials
ƒ Anisotropic crystalline materials:
– Quartz, Sapphire, etc.
– Tetragonal, Hexagonal, Rhombohedral, …
– Crystalline organic chains.
– Liquid crystals.
– Sugars (chiral).
ƒ Materials strained during processing.
– Plastic sheets (PET, etc.), spin-on films.
ƒ Materials with preferred orientation
growth.
– Certain columnar growth films.
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 Anisotropic Material Requires

ƒ Direction-dependent distribution of
atomic or molecular properties
ƒ Long-range alignment and
confinement.

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 Types of Anisotropy

Figure from:
Spectroscopic Ellipsometry:
Principles and Applications
by Hiroyuki Fujiwara (2003)

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 Modeling Anisotropy

ƒ Right click on layer and choose

‘Add Uniaxial Anisotropy’
0 Uniaxial 1 mm
-1 Nz (cauchy)/100% (dNz) 0 nm
-2 dNz 0 nm
-3 cauchy 0 nm
or
‘Add Biaxial Anisotropy’
0 Biaxial 1 mm
-1 Ny (cauchy)/50% (dNxy) 0 nm
-2 Nx (cauchy)/-50% (dNxy) 0 nm
-3 dNxy 0 nm
-4 Nz (cauchy)/100% (dNz) 0 nm
-5 dNz 0 nm
-6 cauchy 0 nm

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 Anisotropic Film
Describe optical constants in 2 or 3 orthogonal directions

3 biaxial 637.22 nm
2 cauchy2 0 nm
1 cauchy 0 nm
0 si_jaw 1 mm

To adjust optical constants, ‘couple’ to layers below.

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 Polymer on Si

ƒ Isotropic Cauchy Fit

MSE = 173.5 1 cauchy 602.4 nm
0 si_jaw 1 mm

Generated and Experimental Generated and Experimental

100 300

Model Fit 200

80 Exp E 55°
Exp E 65°
Ψ in degrees

Exp E 75° 100

Δ in degrees
60
0 Model Fit
40 Exp E 55°
Exp E 65°
-100 Exp E 75°
20
-200
0
400 600 800 1000 1200 1400 1600 1800 -300
400 600 800 1000 1200 1400 1600 1800
Wavelength (nm)
Wavelength (nm)

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 Polymer on Si

ƒ Uniaxial Anisotropy Fit.

4 Uniaxial 637.65 nm
3 Nz (cauchy)/100% (dNz) 0 nm
MSE < 21 2 dNz 0 nm
1 cauchy 0 nm
0 si_jaw 1 mm

Generated and Experimental Generated and Experimental

100 300

80 Model Fit 200

Exp E 55°
Exp E 65°

Δ in degrees
Ψ in degrees

60 Exp E 75° 100

Model Fit
40 0 Exp E 55°
Exp E 65°
Exp E 75°
20 -100

0 -200
400 600 800 1000 1200 1400 1600 1800 400 600 800 1000 1200 1400 1600 1800
Wavelength (nm) Wavelength (nm)

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 Polymer Result
biaxial Optical Constants
1.80

1.75 nx
Index of refraction ' n'

nz
1.70

1.65

1.60

1.55
400 600 800 1000 1200 1400 1600 1800
Wavelength (nm)

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 Psi bulge – Small angles
ƒ Anisotropy creates skew (or bulge) seen in interference curves

100
Simulation for 45° (Film on Silicon)
Nx > Nz ( Δ n = -0.2)
Nx > Nz ( Δ n = -0.1)
80 Isotropic
Nx < Nz ( Δ n = 0.1)
Nx < Nz ( Δ n = 0.2)
Ψ in degrees

60

nz>nx nx>nz
40

20 nx>nz nz>nx
600 800 1000 1200 1400 1600 1800
Wavelength (nm)

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 Psi bulge – Large Angles

60 Simulation for 75° (Film on Silicon)

Nx > Nz ( Δ n = -0.2)
Nx > Nz ( Δ n = -0.1)
50 Isotropic
Nx < Nz ( Δ n = 0.1)
Nx < Nz ( Δ n = 0.2)
40
Ψ in degrees

nx>nz nz>nx
30

20
nz>nx nx>nz
10

0
300 600 900 1200 1500 1800
Wavelength (nm)

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 DEMONSTRATION

ƒ 2B_5_Polymer on Si

Fit with Anisotropic Model.

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 Thin Film Anisotropy Example

ƒ “2B_6_low-k on Si.dat”

Fit data with “uniaxial” anisotropy.

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Break!!

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 UV Absorbing Films

ƒ Transparent films with onset of absorption in

UV: - SiON, Resists, organic AR Coatings, etc.

Experimental Data
•2.7 •1.5 50
•Index of refraction '•n •'

Exp E 70°

•Extinction Coefficient '•k•'

•2.4 •1.2
40
Exp E 75°

Ψ in degrees
•2.1 30
•0.9
•1.8 •n 20
•0.6
•1.5 •k
10
•1.2 •0.3
0
•0.9 •0.0 0 300 600 900 1200 1500 1800
•0 •300 •600 •900 •1200 •1500 •1800 Wavelength (nm)
•Wavelength (nm)

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 Multiple UV Absorptions
ƒ Organic and inorganic dielectrics become absorbing at
short UV wavelengths. Often multiple absorptions are seen.
AZ BARLi ARC Optical Constants
2.2 1.0

Extinction Coefficient 'k'

2.0 0.8
Index of refraction 'n'

1.8 0.6

1.6 0.4

1.4 0.2

1.2 0.0
0 200 400 600 800 1000 1200
Wavelength in nm

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 Absorption or Non-Uniformity?

ƒ Both affect oscillations, but different

shapes depending on mechanism.
100

80
Ψ in degrees

60

40

20 1um SiO2/Si, 70°

with 5% Non-Uniformity
with UV Absorption
0
300 600 900 1200 1500 1800
Wavelength (nm)

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 Dividing the Problem in Two

ƒ Fit n and thickness in transparent region.

ƒ Fix thickness to fit n,k in absorbing region.

DATA UNKNOWNS DATA UNKNOWNS

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 Step 1: Cauchy fit Transparent Region

ƒ Cauchy fit at longer wavelengths determines

thickness.

1.80 0.25

Extinction Coefficient 'k'

0.20
Cauchy only valid in
Index of refraction 'n'

1.70
transparent region!
0.15
1.60
0.10

1.50
n 0.05
k
1.40 0.00
0 200 400 600 800 1000 1200 1400

Wavelength in nm

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 Range Selecting Data
ƒ From “Experimental Data” Window, click “Range Select”
(short cut: CTRL-R)

Angles to include in fit.

Wavelengths to
include in fit.

Data types to
include in fit.

Quickly choose
all data.

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 Step 2: Point-by-Point Fit
ƒ Optical constants are fit at individual
wavelengths.

Start at Transparent Wavelengths

If fit is working,
press No to proceed

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 Demonstration

ƒ “2B_7_Organic on Si.dat”
– Use Cauchy-Point by Point Fit procedure
to determine optical constants over full
spectral range.

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Example: UV Absorption
ƒ “2B_8_Organic on Si.dat” and
“2B_9_Organic on Si.dat”
• (Use si_vuv.mat for substrate)
Fit longer wavelengths with Cauchy.
Fix Thickness and fit n,k using Point-by-Point method.

•Save Environments for

demonstrations tomorrow!!!

Extra Credit:
Are results correct?
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 Point-by-Point Fits

ƒ Advantages
– Small subtleties in complex index dispersion are
not missed.
– QUICK!
2.2 0.8
– EASY!

Extinction Coefficient ' k'

2.0
Index of refraction ' n'

0.6
n
k
1.8
0.4
•Small subtleties in 1.6
optical constants are
difficult to model with 1.4
0.2
dispersion model.
1.2 0.0
0.0 1.0 2.0 3.0 4.0 5.0 6.0 7.0
Photon Energy (eV)

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 Point-by-Point Fits

ƒ Disadvantages
– Does not enforce Kramers-Kronig consistency
(can become unphysical).
– Noise in Ψ, Δ are included in optical constants.
– Requires accurate starting optical model.

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 Semi-Absorbing Films

Divide analysis into parts:

ƒ Step 1: Transparent Region.

ƒ Step 2: Absorbing Region.

ƒ Step 3: Use GENOSC for n & k.

(Session 3)

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 Session 2B Summary

Topics Covered:
9 Index Grading
9 Thickness Non-Uniformity
9 Simple Anisotropy
9 UV Absorption

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