2-Axis Laser Beam Deflection Units

SUPERSCAN II
This manual has been compiled by RAYLASE for its customers and employees.
RAYLASE reserves the right to change the product described in this manual and the infor-
mation contained therein without prior notice.
The software included in the product and this manual itself are protected by copyright. All
rights are reserved. Duplication of this manual in whole or in part, particularly by photocopy-
ing, scanning or imaging, and reproduction by any means are forbidden without the prior, writ-
ten consent of RAYLASE.
 Contents

CONTENTS

1 BASIC SAFETY INSTRUCTIONS .................................................................................. 4

1.1 Laser safety ..................................................................................................................... 4
1.2 Laser shutter ................................................................................................................... 4
1.3 Signs................................................................................................................................ 4
1.4 Classification of laser devices ......................................................................................... 5
1.5 Laser area ....................................................................................................................... 6
1.6 Special hazards caused by mirrors made of beryllium ................................................... 7
1.7 Special hazards caused by lenses made of zinc selenide .............................................. 7

2 BASIC INFORMATION ................................................................................................... 8

2.1 Introduction ...................................................................................................................... 8
2.2 Intended use .................................................................................................................... 8
2.3 Package contents ............................................................................................................ 8
2.4 Module overview ............................................................................................................. 9
2.5 Warranty ........................................................................................................................ 10
2.6 Manufacturer ................................................................................................................. 10
2.7 Customer support .......................................................................................................... 10
2.8 Status LEDs .................................................................................................................. 11

3 TECHNICAL DATA....................................................................................................... 12
3.1 Rating plate code .......................................................................................................... 12
3.1.1 Primary Name ............................................................................................................... 12
3.1.2 Detailed Description ...................................................................................................... 13
3.2 Conformity with directives ............................................................................................. 13

4 FUNCTIONAL DESCRIPTION ..................................................................................... 14

4.1 Laser beam deflection unit ............................................................................................ 14
4.2 F-Theta lens .................................................................................................................. 15
4.3 Digital interface .............................................................................................................. 16
4.4 Power supply ................................................................................................................. 17

5 INSTALLATION ............................................................................................................ 18

6 MAINTENANCE AND CLEANING ............................................................................... 19

6.1 Cleaning the housing..................................................................................................... 19
6.2 Cleaning the optical system .......................................................................................... 19
6.2.1 Instructions for cleaning lenses and protective glasses ................................................ 20
6.2.2 Instructions for cleaning mirrors .................................................................................... 20
6.2.3 Special notes for mirrors made of beryllium and lenses made of zinc selenide ........... 21

7 TROUBLESHOOTING .................................................................................................. 22

8 DISPOSAL .................................................................................................................... 23

MN065_v1.0.1 2-Axis Laser Beam Deflection Unit SS-II 3

Chapter 1 Basic safety instructions

1 BASIC SAFETY INSTRUCTIONS

1.1 Laser safety

The user is responsible for safe operation and for safeguarding the surrounding area against
hazards that can be caused by laser radiation. OEM customers must ensure compliance with
all local and national regulations.

1.2 Laser shutter

The deflection unit is designed to deflect an input laser beam and output it again.
The deflection unit cannot block or weaken the laser beam. To prevent unwanted emission of
the laser beam, above a particular danger class the laser device must be fitted with a shutter
( page 5, Classification of laser devices).
The laser device must be of sufficient quality that the laser beam can only be emitted at the
beam output on the deflection unit.

1.3 Signs
The following signs must be attached to the deflection unit. These signs may not be removed.
Signs that have become illegible must be replaced.
Rating plate
The rating plate and the identification code printed on it allow
the determination of the deflection unit type ( page 12, Rating
plate code). The serial number and the item number are also
used to identify the deflection unit.

The CE symbol confirms the deflection unit's compliance with

European directives. It indicates that the deflection unit is
approved for free trade within the EU.

The seal label warns against unauthorized opening of the

deflection unit. If the seal is broken, all warranty claims against
RAYLASE are void.

At the point where laser radiation is emitted, a laser warning

sign must be attached. It provides information about the type
of radiation, specific hazards and the degree of protection. The
laser warning sign is attached by the OEM customer in accord-
ance to the laser device's classification ( page 5, Classifica-
tion of laser devices).

The mirrors of the SUPERSCAN II high-speed versions are

made of beryllium. The rating plate indicates if this applies to
the present deflection unit ( page 13, Detailed Description).
In addition, these deflection units are provided with the adja-
cent sign.
Also note  page 7, Special hazards caused by mirrors made
of beryllium.

4 RAYLASE 2-Axis Deflection Unit SS-II MN065_v1.0.1

Basic safety instructions Chapter 1

Lenses for CO2 laser deflection units with linear translator

modules are made of zinc selenide. The rating plate indicates if
this applies to the present deflection unit ( page 13, Detailed
Description). In addition, these deflection units are provided
with the adjacent sign.
Also note  page 7, Special hazards caused by lenses made
of zinc selenide.

1.4 Classification of laser devices

The deflection unit can be fitted on various laser devices. Every laser device is assigned to a
particular danger class, which must be specified at the point where laser radiation is emitted,
e.g. using a warning sign. The following classifications are defined in DIN EN 60825-1:

Class Description

1 The accessible laser radiation is not dangerous under reasonable foreseeable conditions.

1M The accessible laser radiation is in the wavelength range of 302.5 to 4,000nm. The accessi-
ble laser radiation is not dangerous to the eyes, as long as the cross-section is not reduced
by optical instruments (magnifying glasses, lenses, telescopes).

2 The accessible laser radiation is in the visible spectrum (400 to 700nm). Short-term exposure
(up to 0.25s) is not dangerous to the eyes. Additional radiation components outside the
wavelength range from 400-700 nm meet the requirements for class 1.

2M The accessible laser radiation is in the visible spectrum from 400 to 700nm. Short-term expo-
sure (up to 0.25s) is not dangerous to the eyes, as long as the cross-section is not reduced
by optical instruments (magnifying glasses, lenses, telescopes). Additional radiation compo-
nents outside the wavelength range from 400-700nm meet the requirements for class 1M.

3R The accessible laser radiation is in a wavelength range of 302.5 to 10,600nm and is danger-
ous to the eyes. The power or energy is a maximum of five times the limit for permissible
class 2 radiation in the wavelength range from 400 to 700nm.

3B The accessible laser radiation is dangerous to the eyes and frequently to the skin.

4 The accessible laser radiation is extremely dangerous to the eyes and dangerous to the skin.
Even diffuse scattered radiation can be dangerous. The laser radiation can cause fires or a
risk of explosion.

Note: Bear in mind that the deflection unit changes the position at which the beam is emitted
and the new beam output must be marked with a warning sign showing the appropriate classi-
fication.
Note: The deflection unit can change the classification of the laser device, particularly if it is
fitted with a focusing lens. The laser device may require additional protective equipment as a
result.

MN065_v1.0.1 2-Axis Laser Beam Deflection Unit SS-II 5

Chapter 1 Basic safety instructions

1.5 Laser area

For the purposes of accident prevention, the laser area is defined as the area in which the
maximum permitted radiation value can be exceeded. This is generally applicable for class
3B, 3R and 4 lasers. For class 1 to 2M laser devices, a laser area can be produced by focus-
ing the laser beam.
A sufficient beam intensity produces a laser area that covers the entire radiation angle of the
deflection unit and includes the reflection from all objects that can be exposed to the radiation
as a result. Note that even apparently diffuse surfaces can reflect laser radiation and a laser
beam that has been reflected several times can still be dangerous.
The laser area must be indicated by corresponding warning signs or lamps and protected by
appropriate shading and interlock switches.
No flammable or explosive objects or liquids should be located in the laser area.
This operating manual interprets a selection of accident prevention regulations from the point
of view of using laser deflection units in industrial plants. However, the applicable local and
national standards, rules and regulations are binding.

cover
RAYLASE
deflection unit

laser
shutter

deflected laser beam

reflected laser beam

laser area

working surface

6 RAYLASE 2-Axis Deflection Unit SS-II MN065_v1.0.1

Basic safety instructions Chapter 1

1.6 Special hazards caused by mirrors made of beryllium

Beryllium mirrors can be destroyed by improper loading. This can lead to a release of berylli-
um dusts. These dusts can cause cancer, are toxic if swallowed and very toxic by inhalation.
Please observe the specified maximum applicable laser power in the data sheet.
Please note also, that soiled mirrors strengthen the absorption of laser power and thereby
increase the risk of destruction of the mirror.
 page 21, Special notes for mirrors made of beryllium and lenses made of zinc selenide

1.7 Special hazards caused by lenses made of zinc selenide

Zinc selenide lenses can be destroyed by improper loading. This can lead to a release of be-
ryllium dusts. These dusts can cause cancer, are toxic if swallowed and very toxic by inhala-
tion.
Please observe the specified maximum applicable laser power in the data sheet.
Please note also, that soiled lenses strengthen the absorption of laser power and thereby
increase the risk of destruction of the lens.
Therefore it is essential to ensure suitable suction in the production environment. In addition,
the outer protective glass of the F-Theta lens must be checked for dirt regularly and cleaned if
necessary. For non-removable deposits and after wear, which is caused by frequent cleaning,
the protective glass of the F-theta lens should be replaced.
 page 21, Special notes for mirrors made of beryllium and lenses made of zinc selenide

MN065_v1.0.1 2-Axis Laser Beam Deflection Unit SS-II 7

Chapter 2 Basic information

2 BASIC INFORMATION

2.1 Introduction
This operating manual describes the general handling of SUPERSCAN II deflection units.
Refer to the rating plate to determine the present type.
This operating manual contains important information on qualified and safe handling of the
deflection unit. You should therefore familiarize yourself with the content of this manual before
using the deflection unit for the first time. In case of any queries, please contact RAYLASE.
The operating manual must be accessible to anyone who will be involved in developing, in-
stalling or using a laser device featuring the RAYLASE deflection unit. If the deflection unit is
sold on, this operating manual or an authorized copy must be passed on with it.

2.2 Intended use

The deflection unit is developed for two-dimensional deflection and focus laser radiation in a
suitable working range. If the materials to be processed generate toxic fumes, a secure suc-
tion must be ensured.
The deflection unit is designed for use in industrial environment and for use by trained profes-
sionals exclusively. It is made as a subassembly for laser devices. The deflection unit should
be operated only with the specified wavelengths, laser power and beam diameters listed in
the corresponding data sheet.

2.3 Package contents

Standard:
 Deflection unit

Optional:
 F-Theta lens, protective glass
 Control card
 Connecting cable between control card and deflection unit
 Software package

8 RAYLASE 2-Axis Deflection Unit SS-II MN065_v1.0.1

Basic information Chapter 2

2.4 Module overview

The illustration below shows three typical laser devices that are realized using RAYLASE and
customer-specific modules (indicated by dotted lines).

Fig. 1
Laser system
Module overview
RAYLASE SP-ICE control card
or
RAYLASE RLC-PCI control card

RAYLASE
Deflection unit
Driver for RAYLASE control cards

Software:
RAYLASE weldMARK™
or
customer-specific software

Power supply

PC

RAYLASE Laser system

RLC-USB unit
USB port

Driver for RAYLASE control cards

RAYLASE
Deflection unit
Software:
RAYLASE weldMARK™
or
customer-specific software

Power supply

PC

Laser system

RS232 RAYLASE
SP-ICE control card

Driver for RAYLASE control cards

Stand-alone hardware RAYLASE
Software:
Deflection unit
RAYLASE weldMARK™
or
customer-specific software

Power supply

PC

MN065_v1.0.1 2-Axis Laser Beam Deflection Unit SS-II 9

Chapter 2 Basic information

2.5 Warranty
The rights of the customer in respect of any defects in quality or deficiencies in title are gov-
erned by the general conditions of business of RAYLASE AG. These conditions are available
on our website for review.
Before returning the product, please request an authorization number from RAYLASE. Pack
the product in the original packaging or in packaging that provides equivalent protection for
shipping.
RAYLASE shall not be obliged to repair defects under the following circumstances:
 If persons not authorized by RAYLASE have attempted to repair the product.
 If persons not authorized by RAYLASE have modified the product.
 If the product has been used improperly.
 If the product has been connected to incompatible devices.
 If the product has been damaged because of inadmissible high laser power or focusing the
laser on optical areas.
 If the product has been damaged because of unqualified cleaning of the optical areas.
 If the warranty period is expired.
Note: No implicit guarantee or warranty of suitability for specific purposes has been made.
RAYLASE is not responsible for damages arising from use of the product. Individual assem-
blies or other assemblies manufactured by RAYLASE may be subject to separate warranty
conditions. Refer to the corresponding manuals for further information.

2.6 Manufacturer
RAYLASE AG
Argelsrieder Feld 2+4
82234 Wessling
Germany
Tel.: +49 (0) 81 53 - 88 98 - 0
Fax: +49 (0) 81 53 - 88 98 - 10
http://www.raylase.de
E-mail: info@raylase.de

2.7 Customer support

The RAYLASE support services are available for your problems either in respect to the deflec-
tion unit or this manual. Before calling for support, please make sure you refer to any
appropriate sections in the manuals on the supplied CD that may answer your questions.
If you need further assistance call RAYLASE customer service department, Monday through
Friday between 8 A.M. and 5 P.M. (Middle European Time).
The customer service personnel will be able to give you direct assistance and answers to your
questions.

Germany (Wessling)
+49 (0) 81 53 - 88 98 – 0
E-Mail: support@raylase.de

... ask for the customer service department

10 RAYLASE 2-Axis Deflection Unit SS-II MN065_v1.0.1

Basic information Chapter 2

2.8 Status LEDs

The status LEDs allow you to check important functions and statuses of the deflection unit.
They are located on the front or on the top of the deflection unit (depends on type).
LED arrangement Name Color Meaning

D1 red CLK error

Incorrect data transmission.
D2 red Parity error X
Malfunctioning cable.
D3 red Parity error Y

D4 green Temp. error X

Temperature status exists if
LEDs are on.
D5 green Temp. error Y

D6 orange New data X

New data transmitted if LED is
on.
D7 orange New data Y

D8 red Error X Galvanometer scanner or driv-

er faulty.
Power supply is faulty, if LEDs
D9 red Error Y
flicker.

D10 green +VCC

The power supply is operating
properly if LEDs are on.
D11 green -VCC

MN065_v1.0.1 2-Axis Laser Beam Deflection Unit SS-II 11

Chapter 3 Technical data

3 TECHNICAL DATA
This section outlines the common features of all deflection units. For type-specific features,
refer to the data sheets. The individual data can be assigned by the rating plate on the deflec-
tion unit and by the identification code ( below, Rating plate code).

3.1 Rating plate code

With the rating plate code, the properties of the deflection units can be determined. Please
check before installation whether the deflection unit is suitable for the intended use.

3.1.1 Primary Name

With the primary name on the rating plate, the product group, the type, the aperture and the
intended wavelength of the deflection unit can be determined.

Product line
MS = MINISCAN
SS = SUPERSCAN
TS = TURBOSCAN
AS = AXIALSCAN
FS = FOCUSSHIFTER
LT = LTM MODUL
│
│ Type
│ I / II / III = series
│ E = AutoCalibration
│ F = LTM Typ FOCUSSHIFTER
│ FC = LTM Typ FOCUSSHIFTERCompact Size
│ 1.5 / 2 /3 = Gain at FOCUSSHIFTER – after F/FC
│ │
│ │ Aperture
│ │ 07…70 [mm]
│ │ │
│ │ │ Wavelength
│ │ │ [AL] = 193nm
│ │ │ [TY] = 355nm
│ │ │ [405] = 405nm
│ │ │ [AG] = 400nm to 1064nm
│ │ │ [AR] = 488nm to 514nm
│ │ │ [DY] = 532nm
│ │ │ [DY+Y] = 532nm & 1064nm
│ │ │ [780-980] = 780nm to 980nm
│ │ │ [780-980+AL] = 780nm to 980nm & 193nm
│ │ │ [850-870+Y] = 850nm to 870nm & 1064nm
│ │ │ [900-1030+AL] = 900nm to 1030nm & 193nm
│ │ │ [900-1100+AL] = 900nm bis 1100nm & 193nm
│ │ │ [915+975] = 915nm & 975nm
│ │ │ [975] = 975nm
│ │ │ [975+985+AL] = 975nm & 985nm & 193nm
│ │ │ [Y] = 1064nm
│ │ │ [C*] = 9000nm to 11000nm
│ │ │ [AU] = C02 wideband
│ │ │ [C] = 10600nm
│ │ │ │
│ │ │ │ Version deviation
│ │ │ │ V1 … V9 = (e.g. deviation from the standard mirror deflection)
│ │ │ │ │
│ │ │ │ │ Additional information or customer shortcut
└─ └─── └─ └────────── └─ └
GG-TTTT-AA [WWWWWWWWWWW] VV/D

Note: All mirrors have, in addition to the above coatings, a deflector for the wavelength 633nm.

12 RAYLASE 2-Axis Deflection Unit SS-II MN065_v1.0.1

Technical data Chapter 3

3.1.2 Detailed Description

With the detailed description on the rating plate, the mirror material, the type of cooling, the
size of the aperture, the type of tuning, the type of connector can be determined. If the scan
head is a customized one then the detailed description contains the individual customer num-
ber (DKdNr).

Mirror material
BE = Beryllium
BA = Beryllium/Alu
OG = Optical Glass
QU = Quarz
SI = Silicium
SC = SiliciumCarbid
ZS = Zinkselenid
│
│ Mechanical design
│
│ Cooling
│ [N] = no cooling
│ [W] = water cooling
│ [W2] = water cooling with 90° angle
│ [A] = air-cooled
│ [WA] = water cooling and air cooling for mirrors
│ [W2A] = water cooling with 90° angle and air cooling for mirrors
│
│ Other mechanical design
│ [L] = Head with a lager input aperture for LTM
│ [10] = Field size(at AS in cm)Examples: F10… 100m × 100mm; F12… 120m × 120mm; etc.
│ [M] = motorization in LTM
│ [P] = Laser pointer
│ [C] = Camera adapter
│ [D] = Dust protection
│ │
│ │ Tuning
│ │ LN = low Noise
│ │ RA = short acceleration time
│ │ ST = minimal step time
│ │ VC = vector
│ │ ML = multiple tuning (default: LN)
│ │ MR = multiple tuning (default: RA)
│ │ MS = multiple tuning (default: ST)
│ │ │
│ │ │ Connector
│ │ │ D1 = 25pin D-Sub-connector
│ │ │ D2 = 25pin D-Sub-connector + 9pin D-Sub-connector
│ │ │ DF = D-Sub for FOCUSSHIFTER
│ │ │ A1 = 25-pin D-Sub-connector
│ │ │ A2 = 25-pin D-Sub-connector+ 9-pin D-Sub-connector
│ │ │ E2 = 6-pin Epic-connector+ 17-pin Epic-connector
│ │ │ E3 = 6-pin Epic-connector+ 17-pin Epic-connector+ M12 circular connector
│ │ │ E4 = 6-pin Epic-connector+ 17-pin Epic-connector+ M8 circular connector
│ │ │ E5 = 6-pin Epic-connector+ 17-pin Epic-connector+ M8 + M12 circular connector
│ │ │ │
│ │ │ │ Navision customer number
└─ └──── └─ └─ └────
SS-[MMM]-TT-CC/DKdNr

3.2 Conformity with directives

The deflection unit conforms to the requirements of the following directives:
 EU Directive 2004/108/EC (EMC)
 WEEE Directive 2012/19/EC
RoHS II 2011/65/EU
 Directive 2006/42/EC on machinery
 For details of conformity with other directives, contact RAYLASE.

MN065_v1.0.1 2-Axis Laser Beam Deflection Unit SS-II 13

Chapter 4 Functional description

4 FUNCTIONAL DESCRIPTION

4.1 Laser beam deflection unit

The deflection unit can be used to deflect a laser beam in X and Y directions. This produces
an area within which a laser can be directed at any position. This area is known as the "mark-
ing field" and is shown in Fig. 2. Deflection is performed by two mirrors, each of which is
moved by a galvanometer scanner. The deflection unit has a beam input, into which the laser
beam is fed, and a beam output, through which the laser beam is emitted from the unit after
deflection. Only suitable lasers can be fed into the beam input. Refer to the corresponding
data sheet for details. Depending on the version, the beam output is either open or fitted with
an F-Theta lens or protection glass ( page 15, F-Theta lens).

Fig. 2
Functional
principle

1 Digital interface Only for deflection units with water cooling

2 Power supply 8 Input coolant

3 Beam input 9 Output coolant
4 Beam output
5 Marking field
6 Status LEDs
7 Galvanometer scanners with
mirrors

14 RAYLASE 2-Axis Deflection Unit SS-II MN065_v1.0.1

Functional description Chapter 4

Only for deflection units fitted with an F-Theta lens

4.2 F-Theta lens

The F-Theta lens is designed especially for use with 2-axis deflection units. It focuses the
laser beam at optimum quality to any position on the marking field. At the same time, it pro-
vides partial optical compensation for the barrel-shaped distortion that is unavoidable when
using a two-axis deflection unit. The remaining distortion (see below) must be compensated
by the deflection unit drive.

Fig. 3
Field distortion
with and without
F-Theta lens

Distortion caused by two-mirror Distortion caused by F-Theta Distortion caused by two-

deflection. lens. mirror deflection and F-Theta
lens.

Fig. 4
Example: F-
Theta lens for
Nd:YAG

1 Lens element inc. lens 3 Clamp ring

2 Protective glass 4 Protective cap

Assembly instructions
o Before installation, check the protection window for dirt, scratches or cracks.
- If the protection window is dirty, it must be cleaned ( page 20, Instructions for
cleaning lenses and protective glasses).
- If the protection window is scratched or cracked, it must be replaced.
o Brush the outer thread of the protective glass with a small amount of special grease for
photo-mechanical components. Normal fats are not suitable because they release gases
and thus the optical system can be destroyed.
o Screw the protection window and mount into the beam output of the deflection unit until it is
positioned securely.

MN065_v1.0.1 2-Axis Laser Beam Deflection Unit SS-II 15

Chapter 4 Functional description

4.3 Digital interface

The deflection unit is connected to a RAYLASE control card using the 25-pin D-SUB connect-
or. All signals are compatible with RAYLASE's extended function XY2-100 standard.
If the deflection unit is equipped with an 9-pin D-SUB connector, the power supply for the unit
is performed on this connector. Deflection units that are not equipped with a 9-pin D-SUB
connector are supplied via the digital interface. Observe the following connection table:
J1 PIN Signal PIN Signal

1 I -SENDCLOCK 14 I +SENDCLOCK

1 2 I -SYNC 15 I +SYNC

3 I -X CHANNEL 16 I +X CHANNEL
14
4 I -Y CHANNEL 17 I +Y CHANNEL

5 I -Z CHANNEL 18 I +Z CHANNEL
13
6 O -HEAD-STATUS 19 O +HEAD-STATUS
25
7 I -P-DAC CHANNEL 20 I +P-DAC CHANNEL
25 PIN D-SUB 8 nc 21 nc

9 nc1 +VSS1 22 nc1 +VSS1

10 nc1 +VSS1 23 GND

11 GND 24 GND

12 nc1 -VSS1 25 nc1 -VSS1

13 nc1 -VSS1 --- ---

I = Diff. Input, nc = Not connected (not used) O = Diff. Output
1) The power supply must be provided by the OEM customers.

Specifications
Diff. Input-, Diff. Input+ - Diff. Output-, Diff. Output+
Input voltage 0V to +5V Output low max. 0.6V max. 40mA
Input threshold ±200mV Output high min. 2V @ 50Ω max. 40mA
Hysteresis typ. 45mV ESD protection ±10kV
Input impedance 120Ω
ESD protection ±15kV

Power supply
Des. Voltage Current Residual ripple Noise
-VSS -15V to -18V 2.5A ≤100mV ≤0,5% DC
at 30MHz
+VSS +15V to +18V 2.5A

16 RAYLASE 2-Axis Deflection Unit SS-II MN065_v1.0.1

Functional description Chapter 4

4.4 Power supply

The 9-pin D-SUB connector provides the deflection unit with power. The power supply must
be provided by the OEM customer. Refer to the following connection and parameter table:
J1 PIN Designation Voltage Current Residual Noise
ripple

1, 2, 6 -VSS -15V to - min. 2.5A ≤100mV ≤0.5% DC at

6 18V 30MHz
9
1 4, 5, 9 +VSS +15V to min. 2.5A
+18V
5
3, 7, 8 GND
9 PIN D-SUB

MN065_v1.0.1 2-Axis Laser Beam Deflection Unit SS-II 17

Chapter 5 Installation

5 INSTALLATION
Warning:
 The laser beam can cause severe injury to the eyes and the skin. Note that
even apparently matt objects can reflect laser beams. All personnel in the
room must wear appropriate laser protection goggles and, if necessary, pro-
tective clothing.
 Never look directly in the laser beam, even when wearing protective gog-
gles.
 The deflection unit may require the assignment of a different danger class
( page 5, Classification of laser devices) to the laser device.
 The laser must be switched off during installation.
 We recommend that the laser area is completely protected by an appropri-
ate working chamber. If this is not possible, appropriate protective measures
for the laser class must be implemented.
 The mirrors in the deflection unit must move freely after installation of the
deflection unit. No components of the laser device may protrude into the de-
flection unit.
 The laser device must be of sufficient quality that the laser beam can only be
emitted at the beam output on the deflection unit.
 The "Laser radiation" national accident prevention regulations must be ob-
served.
 Connecting cables may not be subjected to mechanical strain.
 The deflection unit must be protected against moisture, dust and corrosive
vapors.
 The optical components may only be touched when wearing suitable cotton
gloves.
 The deflection unit must be protected against static discharge and strong
electromagnetic fields.
 The power density of the input laser radiation may not exceed the maximum
permissible power density of the optical components of the deflection unit.
 The beam path and the function of the deflection unit must be tested after
installation.
We recommend performing all tests with a danger class 1 or 2 laser to min-
imize the risk of injury. If this is not possible, the laser used must be set to
the lowest possible power. This setting must be secured against accidental
adjustment.

Procedure
o Carefully remove the protective cover over the beam input with a small screwdriver.
o To install the deflection unit, insert locating pins into the corresponding holes and attach
the deflection unit to the prepared installation surface using screws.
Note: The deflection unit may only be installed using the pins and screws specified by
RAYLASE. Follow the installation drawing supplied.
o For details about the connection, the deflection unit to a RAYLASE control card, refer to
the corresponding manual.

18 RAYLASE 2-Axis Deflection Unit SS-II MN065_v1.0.1

Maintenance and Cleaning Chapter 6

6 MAINTENANCE AND CLEANING

The subsystem doesn‘t contain any components that require regular maintenance.
Repairs may only be carried out by RAYLASE or RAYLASE certified service centers because
special know-how and comprehensive testing methods are required.
RAYLASE offers worldwide certified service and repair centers.
For a service and repair center in your area, see www.raylase.com.

6.1 Cleaning the housing

Warning:
The laser beam can cause severe injury to the eyes and the skin. Before clean-
ing, make sure that the laser device is switched off and secured against acci-
dentally being switched on.

The deflection unit housing is dust proof. It can be cleaned with a duster. If it is very dirty, the
duster can be moistened with a light and non-aggressive cleaning solution (e.g. soap solu-
tion).

6.2 Cleaning the optical system

Warning:
The laser beam can cause severe injury to the eyes and the skin. Before clean-
ing, make sure that the laser device is switched off and secured against acci-
dentally being switched on.

Dirty optical surfaces result in increased absorption of the laser radiation. This can cause the
dirt to heat up sufficiently, so that it burns into the optical surfaces and damage them perma-
nently.
The following circumstances can cause increased accumulation of dirt:
 The ambient atmosphere is contaminated with dirt, grease or other particles.
 Vapors and particles are produced while working.
 Talking, coughing or sneezing close to optical surfaces.

In general, all contamination of the optical system should be avoided wherever possible.
However, as contamination cannot be avoided completely, the optical system must be
cleaned at appropriate intervals. Regular checking and cleaning of the optical surfaces can
prevent permanent damage.
Note: RAYLASE accepts no liability for damaged optical components!
Note: Damage caused during the laser process, e.g. when processing metals, is irreversible
and cannot be resolved by cleaning.

MN065_v1.0.1 2-Axis Laser Beam Deflection Unit SS-II 19

Chapter 6 Maintenance and Cleaning

For deflection units with lens and protective glasses only

6.2.1 Instructions for cleaning lenses and protective glasses

Warning:
The laser beam can cause severe injury to the eyes and the skin. Before clean-
ing, make sure that the laser device is switched off and secured against acci-
dentally being switched on.

Fingerprints contain aggressive substances that can damage the optical surfaces. Optical
surfaces should therefore only be touched when wearing suitable gloves or with a lens clean-
ing cloth.
o Only touch the optical elements when wearing suitable cotton gloves and only touch the
edges.
o Blow loose particles from the surface with clean and oil-free compressed air. Note that the
compressed air in workshops can contain oil particles and is therefore unsuitable for clean-
ing the optical system.
o Moisten a suitable lens cleaning cloth with ethanol suitable for cleaning optical compo-
nents.
o Place one end of the moistened cloth on the optical system and slowly move it over the
optical components. Do not exert any pressure and do not rub the optical components.
o Remove any remaining ethanol residue with a dry optical cloth.
o Repeat the procedure until the surface is completely clean. Use a new cleaning cloth for
each repetition.

6.2.2 Instructions for cleaning mirrors

Warning:
The laser beam can cause severe injury to the eyes and the skin. Before clean-
ing, make sure that the laser device is switched off and secured against acci-
dentally being switched on.

The mirror surfaces are extremely sensitive and may only be cleaned by experienced person-
nel. We strongly recommend sending the deflection unit in to RAYLASE for the mirror clean-
ing, as opening of the deflection unit by unauthorized personnel voids the warranty.
However, if you want to clean the mirrors by yourself, follow the same procedure as for clean-
ing the lens but with even more care ( above, Instructions for cleaning lenses and protective
glasses).

20 RAYLASE 2-Axis Deflection Unit SS-II MN065_v1.0.1

Maintenance and Cleaning Chapter 6

6.2.3 Special notes for mirrors made of beryllium and lenses made of zinc selenide

Warning:
If the deflection unit is provided with one of the adjacent signs, there
is a health hazard coming from the material of the optical compo-
nents.

Behaviour if mirrors or lenses may be or are actually destroyed

 Turn the laser device off immediately!
 Leave the room for at least 30 minutes!
 Under no circumstances remove the protective glass or the F-Theta lens of the deflection
unit, to check a possible destruction.
 In the deflection unit, toxic dust or fragments may be created.
 If the deflection unit has nevertheless been opened and fragments have been fallen out,
the fragments must be collected wearing appropriate protective clothing and respirators
and disposed of as a hazardous substance according to the local regulations.
 Label the defective deflection unit with a clear warning and send the unit airtight and well
packaged to RAYLASE.
 The persons commissioned with the dismantling of the deflection unit must wear suitable
protective clothing and respirators.
 The room in which the beryllium mirror or the zinc selenide lens has been destroyed, must
be cleaned, decontaminated and ventilated sufficiently .
 Wear gloves and a surgical mask for the following steps!
 Gather all the broken pieces carefully and pack them in a sealed plastic container.
 Clean all contaminated components and surfaces with a damp cloth and pack the cloth in a
sealed plastic container.
 Send the container to your supplier. He is responsible for the proper disposal of the mate-
rial.

Hazardous properties of beryllium

With the destruction of a beryllium mirror by laser radiation beryllium dusts may be generated.
These dusts can cause cancer, are toxic if swallowed and very toxic by inhalation.

Hazardous properties of zinc selenide

With the destruction of the lenses made of zinc selenide, toxic dusts may be generated with
hydrogen selenide and selenium dioxide. These dusts can cause cancer, are toxic if swal-
lowed and very toxic by inhalation.
In order to improve the optical properties of the material, zinc selenide is often provided with
an anti-reflective coating, which can contain thorium fluoride. Thorium is an α-emitter and
weakly radioactive. It is potentially hazardous to health if inhaled or swallowed. Since the tho-
rium-containing coating is embedded between layers of non-radioactive layers, there is no risk
for the user under normal circumstances.

MN065_v1.0.1 2-Axis Laser Beam Deflection Unit SS-II 21

Chapter 7 Troubleshooting

7 TROUBLESHOOTING
Warning:
The laser beam can cause severe injury to the eyes and the skin.
 Never look directly or indirectly into the laser beam during troubleshooting.
 Do not disable any safety precautions for the protection against laser radia-
tion.
 Wear protective clothing and/or goggles appropriate to the relevant laser
class.

In case of malfunctions, check whether the symptom and a possible remedy are included in
the following checklist.
Problem Possible cause and remedy

Poor marking Defective power supply

quality
Incorrect marking parameters

Marking quality Lens dirty  page 20, Instructions for cleaning lenses and protective
has deteriorated glasses

Mirror dirty  page 20, Instructions for cleaning mirrors

Laser power The RAYLASE weldMARK™ software can compensate a loss

decreasing of laser power.
Menu: System > Global adjustments

Marking parameters changed

Divergence optics changed

Laser spot Dirty lens  page 20, Instructions for cleaning lenses and protective
changed glasses

Dirty or dam-  page 20, Instructions for cleaning mirrors

aged mirrors
Send deflection unit in for repair

Laser system adjusted

No laser beam, Beam path Remove protective cover from beam input and/or output
although pro- blocked.
cess started
from PC. Laser driver fault

Fault in laser system

The deflection Data cable  page 11, Status LEDs

unit only de- defective
flects the laser
beam in one
direction or not
at all.

X and Y axis Incorrect cabling

reversed

If the fault cannot be resolved, contact RAYLASE Customer Service for further assistance.

22 RAYLASE 2-Axis Deflection Unit SS-II MN065_v1.0.1

Disposal Chapter 8

8 DISPOSAL

For the disposal of the deflection unit, note local policies, regulations and laws. If the mirrors
are made of beryllium, the local Hazardous Substance Regulations must be considered. The
rating plate shows which deflection units are concerned ( page 13, Detailed Description)

MN065_v1.0.1 2-Axis Laser Beam Deflection Unit SS-II 23

Index

INDEX

B P
Beryllium.................................................... 7, 21 Package contents ............................................ 8
Power supply ................................................. 17
C
R
CE symbol ....................................................... 4
Cleaning ........................................................ 19 Rating plate ..................................................... 4
Conformity with directives.............................. 13
Customer Service .......................................... 10
Customer Support ......................................... 10
S
Safety instructions ........................................... 4
D Seal label ......................................................... 4
Shutter ............................................................. 4
Digital interface .............................................. 16 Signs................................................................ 4
Status LEDs................................................... 11
F
T
Functional description.................................... 14
Technical data ............................................... 12
Troubleshooting ............................................. 22
I
Installation ..................................................... 18 W
Warranty ........................................................ 10
L
Laser beam deflection unit ............................ 14 X
Laser safety ..................................................... 4
XY2-100 Standard ......................................... 17
M
Z
Manufacturer ................................................. 10
Zinkselenid ................................................ 7, 21

24 RAYLASE 2-Axis Deflection Unit SS-II MN065_v1.0.1

SUPERSCAN-IIE
General Specifications

Typical Deflection (optical) ±0.393 rad

Voltage ±15 to ±18 V
Resolution optically 12 µrad
Power
Current 3 A, RMS, max. 10 A Repeatability (RMS) 2 µrad
Supply
1)
Ripple / Max. 200 mVpp, @ 20 MHz Max. Gaindrift < 15 ppm/K
Noise bandwidth Max. Offsetdrift
1)
< 10 µrad/K
1), 2)
Ambient Temperature +15 to +35 °C Long-term Drift < 150 µrad
Long-term Drift with water tempering [W] < 100 µrad
Storage Temperature -10 to +60 °C 1), 2)
[W2]
Humidity ≤ 80 % non-condensing Position noise (RMS) < 10 µrad
Interface Signals Digital XY2-100 Protocol Auto-calibration option:
3)
Position Accuracy < 50 µrad/K
1) Drift per axis, 2) after warming-up, variations of ambient temperature < 1K, variations of cooling water 1K < 3) depending on
the interval between auto-calibration cycles
Aperture Dependent Specifications – Mechanical Data
SS-IIE-10 SS-IIE-12 SS-IIE-15 SS-II-20 SS-IIE-20 L SS-IIE-30
Input Aperture [mm] 10.0 12.0 15,0 20.0 20.0 30.0
1 1 1 1
Beam Displacement [mm] 12.4 14.0 18.55/18.05 26.28/25.63 26.28/25.63 35.98/35.38
Weight, without objective [kg] approx. 3.3 approx. 3.3 approx. 3.3 approx. 3.3 approx. 5.9 approx. 5.9
170 x 125 x 170 x 125 x 170 x 125 x 170 x 125 x 203 x 159 x 203 x 159 x
Dimension (mm) (L x W x H) 2 2
117.5 117.5 117.5 117.5 150/160.5 150/160.5
1) Specification for fused Silica mirrors, 2) AXIALSCAN variation only, additional output plate for protection window
Aperture Dependent Specifications - Mirror Variations
Wavelengths SS-II-10 SS-II-12 SS-II-15 SS-II-20 SS-II-30
355 nm SI SI QU, SI QU,
532 nm SI SI QU, SI, BE QU, SI, BE QU
780 - 980 nm + AL QU QU QU
1064 nm SI SI QU, SI, BE QU, SI, BE QU, SI, SC, BE
900 - 1100 nm + AL SC
1060 – 1080 nm QU, SC
10600 nm SI SI SI,BE SI, BE SI, SC, BE
Standard: QU = Quarz (Fused Silica), SI = Silicium - High Speed: SC = Silicium Carbid, BE = Beryllium
Type Dependent Specifications – Tuning:
Tuning Description
LN Low Noise
RA Short acceleration time

Type Dependent Specifications – Dynamic Data

SS-IIE-10 SS-IIE-12 SS-IIE-15
Mirror Type SI SI QU BE
Tuning LN RA RA LN RA LN RA
Acceleration Time [ms] ≤ 0.30 ≤ 0.19 ≤ 0.25 ≤ 0.55 ≤ 0.36 ≤ 0.40 ≤ 0.24
1), 2)
Writing Speed [cps] 600 800 650 350 435 450 615
1)
Positioning Speed [m/s] 16.0 10.0 9.0 8.0 6.0 12.0 9.0

SS-IIE-20 / SS-IIE-20 L SS-IIE-30

Mirror Type QU SI BE QU SI SiC BE
Tuning RA RA RA RA RA RA RA
Acceleration Time [ms] ≤ 0.58 ≤ 0.61 ≤ 0.40 ≤ 0.9 ≤ 0.84 ≤ 0.52 ≤ 0.50
1), 2)
Writing Speed [cps] 350 350 450 - - - -
1)
Positioning Speed [m/s] 6.0 6.0 7.0 4.0 5.0 6.0 6.0
1) With F-Theta Lens f=160 / field size 110 mm x 110 mm, 2) Single-stroke font with 1 mm height.

03/2014 SUPERSCAN-IIE
Mirrors & Objectives
Scan mirrors and objectives with optimized mounts are available for all typical laser types, wavelengths, power densities, focal
lengths and working fields. Customer specific configurations are also possible. Please contact the RAYLASE support team for
specific information and possible combinations on +49-8153-8898-0 or email support@raylase.de

Options
The SUPERSCAN II scan heads provide two types of water-tempering connections for the electronics and galvanometer
scanners, Straight [W] connectors and 90° [W2] connectors along with air-cooling [A] of the deflection mirrors. This ensures
constant working conditions and excellent long-term stability, thus guaranteeing reliable operation even in high-laser-power
applications.

Auto calibration option [K] available for all SUPERSCAN II models with reference sensors for automatic drift compensation
which ensures process stability.

BE and SC mirrors allow for higher speed performance due to the lightweight mirror substrates and optimized mirror mounts.

Air flushing Specifications

Specifications Flow rate Air Pressure
Air Clean air free of water & oil 100 l / min 1.0 - 1.5 bar

Water Tempering Specifications

Specifications Flow rate Pressure loss
1)
Water Clean tap water with additives 2 l / min 0.3 bar
Temperature 22-28°C 4 l / min 0.4 bar
Pressure 2-5 bar 6 l / min 0.7 bar

(1) Caution: When using cooling water including deionized water, suitable additives must be used to prevent the growth of
algae and protect the aluminium parts against corrosion.
Additive recommendations: Standard industrial applications e.g. CCL105 (NALCO)
Food & beverage, packaging applications: e.g. polypropylene glycol e.g. DOWCAL N. (Dow Chemical).
Please consult your additive supplier for dosage information

03/2014 SUPERSCAN-IIE