12/02/2014
Lecture 2
Background
Limits to smallness
Introduction to micro/nanofabrication
History of nanotechnology
• 2000 Years Ago – Sulfide nanocrystals used by Greeks and Romans
to dye hair
• 1000 Years Ago – Gold nanoparticles of different sizes used to
produce different colours in stained glass windows
• 1959 – “There is plenty of room at the bottom” by R. Feynman
• 1974 – “Nanotechnology” - Taniguchi uses the term nanotechnology
for the first time
• 1981 – IBM develops Scanning Tunnelling Microscope
• 1985 – “Buckyball” - Scientists at Rice University and University of
Sussex discover C60
• 1986 – “Engines of Creation” - 1st nanotechnology book by Eric Drexler.
Atomic Force Microscope invented by Binnig, Quate & Gerbe
• 1989 – IBM logo made with individual atoms
• 1991 – Carbon nanotube discovered by S. Iijima
• 1999 – “Nanomedicine” – 1st nanomedicine book by R. Freitas
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There is plenty of room at the bottom
Richard Feynman
Problem of manipulating and controlling things on a small scale
It is my intention to offer a prize of 1,000 dollars to the
first guy who can take the information on the page of a
book and put it on an area 1/25,000 smaller in linear
scale in such manner that it can be read by an electron
microscope.
And I want to offer another … of another 1,000 dollars to
the first guy who makes an operating electric motor - a
rotating electric motor which can be controlled from the
outside and, not counting the lead-in wires, is only 1/64
inch cube.
Nanoscale
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Nanomaterial dimension
Electron in
Quantum box
Quantum wire
Quantum well
Moore’s law Core i3,i5,i7
Core 2
Moore‟s law states the complexity of an
integrated circuit, with respect to minimum
component cost, will double in about 18 months.
Minimum feature size
Pentium 4: 180 nm 90 nm
Pentium D: 90 nm 65 nm
Core 2: 65 nm 45 nm
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Semiconductor technology roadmap
Nodes are at 32 nm (2010), 22 nm (2012), 14 nm (2014)
5 nm (estimated 2019)
Semiconductor technology roadmap
Resolution Enhancement Tech
Electron Projection L, Proximity EBL
Electron Projection L, Proximity EBL,
Maskless L
Extreme Ultraviolet
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What are limits to smallness
atoms, electrons, molecules
Granular nature of matter is the fundamental limit to
making anything arbitrarily small
No transistor smaller than an atom 0.1 nm, is possible
Again, we can manufacture 1,000 H20 molecules exactly
but to assemble them (below 0 C) in the form ‘NSU’ is
presently impossible!
Electrical/electronic charge q = 1.6x10-19 C limit of
smallness
Molecules combination of at least two atoms
How small can we make it?
Practical limits on making machines and devices on a large
scale are many orders magnitude larger in size
[with present day technology]
With conventional machine tools mechanical parts below
mm size scarcely work
Challenge is to design and make to order a complex
structure out of molecular sized components
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Nanofabrication approaches
“Top-down” approach
• Uses the traditional methods
to pattern a bulk wafer
• Is limited by the resolution
of lithography
• Add a layer of material over
the entire wafer and pattern
that layer using
photolithography
• Pattern material by etching
away certain areas
Top-down approach
Lithography for nanoscale
- Micron scale lithography
Optical lithography, ultra-violet lithography
Focused Ion beam lithography
- 10-100 nm scale lithography
Electron-beam lithography
Resolution enhancement technology
Immersion lithography
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Bottom-up approach
• The opposite of “top-down”
approach
• Instead of taking materials away
to make structures, the “bottom-
up” approach selectively adds
atoms to create structures
• Nature uses the “bottom-up”
approach
Cells, Crystals
• Knowledge in chemistry and
biology can help to assemble
and control growth
Bottom-up approach
Chemical self-assembly
- Man-made synthesis (e.g. carbon nanotube)
- Biological synthesis (e.g. DNA, proteins)
Manipulation of individual atoms using
- Atomic force microscope
- Scanning Tunnelling microscope
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Top-down versus Bottom-up
Similar results can be obtained through bottom-up and top-down processes
