Chip Design: Professor: Sci.D., Professor Vazgen Melikyan
Chip Design: Professor: Sci.D., Professor Vazgen Melikyan
Die
Package
Lead Frame
Bonding Wire
Package
Die
CMOS and FinFET ICs are fabricated on circular slices of silicon called
wafers.
Wafer contains various identical dies.
Side view of a Wafer
Die
Wafer
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Wafer and Die (2)
Useful
Gate
Parasitic
Oxide C
CGB
CGD
C C
GS
SB
Bul
DB
k
Ii Ij
Substrate n-well
VDD
Drain Source
Vi Vj
contact Gate contact L Cdb2
Cdg12
P+ P+ P+ n+ R= Vi Vout
L HW n 1 1 1
Lij 4 aia j IiI j r
n- H Cdb1 dIi dI j dai da j
well
loop a
i i loop j aj ij
W VSS
Capacitances
Bipolar Transistors Resistances Inductances
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Basic Element of IC (1)
In In
Gate
N+ N+
e
Gate Oxide
Out = ? Source Drain
Out = In
OFF P- Substrate ON
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Chip Design
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Basic Element of IC (2)
Drain
Gate
fin
Source
Oxide
Silicon substrate
OFF ON
G G
S S
NMOS Enhancement NMOS Depletion
D D
G G B
S S
PMOS Enhancement NMOS with Bulk Contact
G B
G
S S
NFET Enhancement NFET with Bulk Contact
D D
G G B
S S
PFET Enhancement PFET with Bulk Contact
Source Drain
Source Drain
M4
M3
Isolator
M2
M1
Via
CMOS transistor
P-substrate
Passivation
Wire Dielectric
Etch Stop Layer
Via
Global (up to 9) Dielectric Capping Layer
Intermediate (up to 8)
Metal 1 Pitch
G B G B
S S
Aluminium (Oxide cut) Gate Al Polysilicon Gate SiO 2
contact
W
W
LL
P+ n+ n+ P+ P+ n+
n-well
Gate
Drain
Gate fin_w
fin_thic
Source
Silicon
oxide oxide Fin
in vdd out
vss
Circuit Layout
Intellectual
Property (IP)
IPs
ADC represents large
DAC
blocks performing
PLL
IOs completed
functions (DAC,
Standard ADC, PLL, etc)
Cells
Standard Cells
Row of represent digital
Standard
Cells
nodes performing
simplest functions.
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IC Component Types (2)
IPs
Standard
Cells
Row of
Standard Cells
IOs
Inverter
vss
Circuit Layout
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PLL Example
Circuit Layout
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IC Classification : Signal Type
Provision of compromise
BiCMOS
between performance and power
109
108
107
1970 1975 1980 1985 1990 1995 2000 2005 2010 2015 2018 year
100
10
1
1970 1975 1980 1985 1990 1995 2000 2005 2010 2015 2018 year
Power (Watts)
1000
100
10
1
1970 1975 1980 1985 1990 1995 2000 2005 2010 2015 2018 year
100
10
1
1970 1975 1980 1985 1990 1995 2000 2005 2010 2015 2018 year
100
5 nm
10-1
1970 1975 1980 1985 1990 1995 2000 2005 2010 2015 2017 year
0.01
0.001
0.00001 ¢
0.0001
0.00001
0.000001
0.0000001
1982 1985 1988 1991 1994 1997 2000 2003 2006 2009 2012 2015 2018 Year