MicroESystems Catalog
MicroESystems Catalog
MicroESystems Catalog
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MicroE Systems
High-Performance Encoders
smaller. faster. smarter.
Product Catalog
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High-Performance Encoders
Mercury IITM ......................................Pages 8–9
High resolution and accuracy with
programmable features.
Compact Encoders
MercuryTM and ChipEncoderTM........Pages 10–11
Smallest sensors with high resolution
and accuracy.
Advanced Engineered
OEM Solutions ................................Page 14
Performance and cost optimized solutions
for OEM’s.
Ultra-Performance Encoders
UltraTM ..................................................Page 15
Ultra-high resolution, accuracy and speed
for the most demanding applications.
Packaged Encoders
DRCTM ..................................................Page 15
Sealed rotary encoders with integral bearings;
rugged and reliable.
MicroE Systems’ encoders are renowned for their small size, ease of
setup and features. But more customers are also discovering their world
class performance—lower cyclical error for better velocity control,
accuracy to ±1μm, and resolution that’s stable up to 1.2nm. All of this
performance comes from a 20μm-pitch encoder system that’s a fraction
of the cost of 4μm and 2μm pitch encoders—now that’s value.
INTRODUCTION
Superior performance. World-class reliability. Responsive support and delivery. Focusing on what customers want most is
why MicroE Systems is growing so quickly and introducing new products faster than any other encoder company. With a
growing product line of over 30 models to match your specific application requirements, and direct sales and distributor
offices in 13 countries, we give you a world of encoder solutions.
• First sub-micron encoder with ± 2° setup tolerance • First stick-on index and limits
From ultra-performance encoders with world leading accuracy, to linear and rotary encoders for a wide range of
motion control, automation and metrology applications, MicroE Systems has always focused on technologies that
advance motion control to the next level of performance and value. Here is our product range.
High-Performance Encoders
Incremental encoders with high performance and outstanding value for a wide range
of motion control applications. Linear or rotary. Resolutions from 5µm to 1.2nm
linear, up to 268M CPR rotary. Cyclical error as low as ± 20nm. Measuring lengths up
to 30m using tape scales; accuracy up to ± 1µm using glass scales. Digital, analog,
or high-speed serial output. Models with all electronics in the sensor. Models with
left/right limits and programmable features. Available software.
Compact Encoders
Incremental encoders with the smallest sensors for compact motion control
applications. Screw-mount with cable or mount directly on your PC board.
Linear or rotary. Resolutions from 5µm to 5nm linear, 6k to 67M CPR rotary.
Measuring lengths up to 2m using glass scales; accuracy up to ± 1µm.
Digital, analog, or high-speed serial output.
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OPS Encoders/MTE Encoders
TM TM
OPS Encoders set a new standard for performance and The Micro Tape Encoder is MicroE Systems’ latest tape
value, enabling OEM’s to affordably improve precision, scale product offering. A patented optical detector design
accuracy and quality. Compatible with fast-installing tape allows the MTE series of encoders to offer the small sensor
scales up to 30m long, as well as rotary glass scales, OPS size and industry leading alignment tolerances that are
Encoders offer outstanding performance in a wide range expected from MicroE Systems with the added benefits of
of applications. All electronics are in the sensor, including a status LED in the sensor and the convenience and ease
high-speed interpolation. Factory-set resolutions are 1µm, of installation of a metal tape scale. The tri-color status LED
0.5µm, 0.1µm or 50nm. Dual optical limits enhance system provides installation guidance without the need for external
safety while reducing cabling. The status LED built into the alignment tools or oscilloscopes and an active system
sensor is easy to notice even when installed in complex health signal that the customer can monitor in operation.
OEM systems, and indicates encoder status in real time. The MTE encoder is available in factory set resolutions of
5µm, 2.5µm, or 1µm.
OPS’s encoder technology achieves the highest resolution Optical encoder performance – 1.0µm resolution, 7.2m/s
and accuracy in its class, with low cyclical error, low jitter maximum speed, and bi-directional index window. Status LED
and low power consumption. and wide alignment tolerance allow easy installation and setup.
Maximum Maximum
Model Resolution Output Speed Scales Model Resolution Output Speed Scales
OPS 400 50nm Digital 1.5m/s Linear Tape or MTE 20 1.0μm Digital 7.2m/s Linear Tape
Rotary Glass
OPS 200 100nm Digital 3.0m/s Linear Tape or MTE 8 2.5μm Digital 7.2m/s Linear Tape
Rotary Glass
OPS 40 0.5μm Digital 4.5m/s Linear Tape or MTE 4 5.0μm Digital 7.2m/s Linear Tape
Rotary Glass
OPS 20 1.0μm Digital 4.5m/s Linear Tape or
Rotary Glass
With Tape Scale (Linear) ± 40nm ≤ ± 5μm/m** With Tape Scale (Linear) ≤ ± 8μm/m***
With Glass (Rotary) 0.24μrad ± 19μrad✝
*OPS Series accuracy over any 20μm movement ***Over any one meter of travel after slope correction in the customer’s controller
**Over any one meter of travel after slope correction in the customer’s controller Sold & Serviced By:
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Performance & Value
Encoders
OPS Series
MTE Series
Brand X
22mm
OPS Accuracy:
± 1µm with High-Accuracy Grade Scales
Tape Scales (OPS and MTE Series) Glass Scales (OPS Series Only)
PurePrecision tape scales are easy to install and use. Cut it Use linear glass scales for the highest accuracy and
to any length you need from a coil, or order pre-cut lengths precise thermal management. Rotary glass scales are
with built-in index and limits to make installation even faster. available with or without hubs, and in arc segments.
Its adhesive backing makes application easy and accurate. • Measure length: up to 1m
• Measuring length up to 30m • Rotary accuracy: ± 3.9 arc-sec with 64mm OD scale
• MTE: Choose Compact Encoder Tape (CET TM) with built-in • Custom options: special widths, thicknesses, near-zero
optical index for fast, one-step installation CTE materials, diameters, or rotary arc segments
• OPS: Use Marker Tape II with built-in index and Sold & Serviced By:
limit markers, or cut-to-length Laser Tape II with ELECTROMATE
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Mercury II Encoders TM
OVERVIEW
MicroE Systems revolutionized encoder technology with take another giant step forward by giving you all this,
the original Mercury™ encoder family. Smaller, faster, plus more performance, tape scales, dual limits, and
and smarter than anything before, it set the standard more. Comprehensive testing and manufacturing to
for innovation. Now, with our expanding line of High ISO 9001:2008 quality standards makes for world class
Performance Encoders, the Mercury II™ series, we robustness and reliability. RoHS and CE compliant.
PERFORMANCE
Mercury II’s encoder technology achieves the highest resolution and accuracy in its class, with low cyclical error, low jitter
and low power consumption.
Maximum
Model Resolution Output Speed Scales Accuracy Cyclical Error* Long Travel
Mercury II 6000 5µm – 1.2nm Digital 10m/s Tape or Glass; With Tape ± 30nm Typical ≤ ± 5μm/m**
Linear & Rotary Scale (Linear)
Mercury II 5000 5µm – 1.2nm Digital 10m/s Tape or Glass; With Glass ± 20nm Typical High Accuracy
Linear & Rotary Scales (Linear) Grade: Up to ± 1μm✝
Mercury II 1900 5µm – 1.2nm Analog 7.2m/s Tape or Glass; Standard Accuracy
Linear Grade: ± 1.5μm✝
Mercury II 1600 5µm – 0.5μm Digital 20m/s Tape; Linear *Mercury II 6000/5000 accuracy over any 20μm movement
**Over any one meter of travel after slope correction in the
customer’s controller
✝See data sheets for full specifications
Mercury II Cyclical Error with Glass Scales
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High Performance
Encoders
OVERVIEW
MicroE Systems introduced the Mercury series of compact Motion control engineers around the world specify Mercury
encoders to help equipment designers achieve smaller and and ChipEncoder when their linear or rotary motion control
faster motion systems. Enabling many new applications, applications demand high performance from the smallest
the Compact Encoders series has grown to 12 models possible sensor. Comprehensive testing and manufacturing
due to an expanding range of applications requiring to ISO 9001:2008 quality standards ensure long-term
more resolution, speed, and even smaller sensors. reliability. RoHS and CE compliant.
PERFORMANCE
Mercury and ChipEncoder technology achieves high resolution and low power consumption with the smallest possible sensors.
Mercury 3500 5μm–5nm Digital Programmable Glass; With Glass Scales High accuracy grade:
Linear & Rotary (Linear) up to ± 1μm✝
Mercury 1500 5μm–0.5μm Digital Digital from Glass; Standard accuracy grade:
the Sensor Linear & Rotary ± 3μm✝
Mercury 1000 5μm–78nm Analog 1Vpp Output Glass; ✝ See data sheets for full specifications
Linear & Rotary
Mercury 1200 5μm–78nm Analog PCB Mount Glass;
Linear & Rotary Power
Model Height Weight Consumption
Mercury 1500P 5μm–0.5μm Digital PCB Mount Glass;
Linear & Rotary Mercury 1200 5.6mm 2.6g 0.17W
ChipEncoder™ 10μm–1μm Digital PCB Mount Glass; Linear Mercury 1500P 5.6mm 2.6g 0.17W
& Rotary ChipEncoder™ 3.1mm 0.6g 0.18W
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Compact Encoders
Dual-Axis Models
Mercury 3000 Dual Axis Averager models combine
feedback from two sensors and average them in real
time. The result is higher accuracy in rotary applications
than can be achieved with one sensor – scale
eccentricity errors are virtually eliminated. Outputs can
be A-quad-B or high speed serial.
PC Board Mount
Mercury 1200, Mercury 1500P, and ChipEncoder models
mount directly on your PC board, providing significant
space and cost savings through design integration.
Mercury 1200’s analog outputs can be interpolated by
your electronics, or with a chipset available from MicroE
Systems for use on your PC board, for resolution up
to 78nm (linear). Mercury 1500P and ChipEncoder have
built-in interpolation that produces digital outputs with
up to 0.5μm resolution (linear). All models work with rotary
scales as small as 12mm diameter. And all this comes
in the smallest packages.
SCALES
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High Vacuum Encoders • MercuryTM and Mercury IITM
OVERVIEW
Mercury™ and Mercury II™ vacuum encoders are output, analog output, or digital output right from the
specified in a wide range of applications due to their sensor, all constructed using vacuum-compatible materials
combination of performance, small size, and high vacuum rated up to 10-8 torr. All sensors can be used with linear,
rating. Choose from models with programmable digital rotary and arc segment scales.
PERFORMANCE
Mercury II 6000V 5μm–1.2nm Digital Programmable Glass; With Glass Scales High accuracy grade:
Linear & Rotary (Linear) up to ± 1μm✝
Mercury 3500V 5μm–5nm Digital Programmable Glass; Standard accuracy grade:
Linear & Rotary ± 3μm✝ for Mercury I,
Mercury 2000V 5μm–78nm Digital Programmable Glass; ± 1.5μm✝ for Mercury II
Linear & Rotary ✝ See data sheets for full specifications
Mercury 1000V 5μm–78nm Analog 1Vpp Output Glass;
Linear & Rotary
Mercury 1500V 5μm–0.5μm Digital Digital from Glass;
the Sensor Linear & Rotary
Micro Motion Absolute™ Rotary Encoders provide and software that is developed collaboratively with
absolute position after powering up your system, even if MicroE Systems. Single and multi-axis versions of the
motion occurred when power was off. Our Micro Motion interface are possible.
Absolute™ technology uses a small initial rotary movement Since Micro Motion Absolute™ Rotary Encoders are
on power-up so that your controller will know the absolute based on MicroE Systems’ widely-used and proven
position with certainty. You can quickly restart with optical encoder sensors, they have all of the benefits
confidence even when sensitive, valuable work pieces of our incremental encoders:
are in the motion system.
• High resolution, accuracy, and repeatability enables
Micro Motion Absolute™ Rotary Encoders acquire high precision motion feedback and servo control
absolute position from their pre-programmed absolute
track. By putting absolute position marks at unique • Small sensors, including models that can fit into the
locations, as soon as the motion control system passes most compact spaces
through a small rotation, typically 4º – 7º, your controller • PC board mount-sensors, as small as 7mm x 11mm,
will have absolute position. that can fit onto a small PC board of any shape
Position feedback is sent to the controller with BiSS or SPI • Low power consumption – low as 0.3W
high-speed serial formats using an FPGA in your controller • Reliable long-life operation
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Advanced Engineered OEM Solutions
Advanced Engineered OEM Solutions
OVERVIEW
If your system performance requirements demand a range – from modified standard encoders, to solutions that
customized encoder solution, MicroE has the products involve applications engineering, custom signal processing
and the resources to respond quickly and effectively. electronics, custom scales, and more.
Our custom solutions for the OEM extend over a broad
We also offer advanced solutions for higher volume OEM’s. • High bandwidth analog sensors (up to 2Mhz)
These solutions are developed with our Rapid Customer • High resolution analog sensors (picometer resolution)
Response (RCR) Team in conjunction with a key group
of consulting engineers from our staff. Advanced RCR • Custom electrical outputs: Biss, SPI, SSI, 12C, etc.
solutions include the following: • Opto-mechanical design
• Custom PCB design for ChipSets, ChipEncoder™, • Analog and digital electronics design and layout
and application specific motion control • Firmware development
• Repackaging of SmartPrecision™ Electronics to support
different form factors and multiple axes
• Modification of sensors for high bandwidth applications,
different CTE, custom form factor, and finishing options
• Application specific product solutions such as the
averaging devices and multi-axis interpolation
• Advanced subassembly integration and qualification
• Custom software based on our SmartPrecision Software
platform including counters, drivers, DLL’s, etc.
• Virtual absolute encoder solutions
MicroE Systems’ Rapid Customer Response Team (RCR) • Custom sensor bracket design and manufacture
provides custom prototype solutions with the shortest • Software interfacing, including OEM embedded solutions
possible lead-times. This may include a standard
MicroE product modified for your application, or a • Consultation for connecting a Mercury™ encoder to
full-custom design. customer controller and/or quad counter
• Optional glass materials for CTE considerations, • Motion control sub assembly design and integration
IE: quartz and Zerodur™
• Custom scales with optimized travel length, modified
dimensions, or index locations
• Custom rotary scales with special dimensions,
IE: large through holes, large OD’s, arc segments,
and much more
• Custom cables lengths and connectors for atmospheric,
vacuum, and even non-magnetic applications
• Custom grating holders
• Grating mounting/centering and consultative services
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Ultra-Performance • UltraTM Encoders
Ultra Encoders
TM
OVERVIEW
Designed for the ultimate in performance, G1600 Series and G1600 Series
PE-100 incremental rotary encoders achieve unprecedented levels • Patented optical system achieves superior
of useable resolution, minimal cyclical error, and rotational speed. accuracy: ± 20nrad and 3nrad RMS
• G1600 resolution: 0.94nrad with 104.3mm scale
• G1650 resolution: 1.5nrad with 65.25mm scale
PERFORMANCE • Supports perpendicular writing technology
• G1600: Kit encoder for new media writing
Model Resolution Output Features Scales applications
G1600 0.94nrad Analog Accuracy up Rotary Glass • G1650: Drop-in replacement for the MP 7000
and PA 2000 Series
to ± 20nrad
and 3nrad RMS PE-100
PE-100 N/A Analog Speeds up Rotary Glass • Use with air bearing spindles for velocity control
to 20,000 RPM up to 20,000 RPM
with high S/N • Index performs at full speed
OVERVIEW
Based on decades of field-proven reliability and • Resolutions from 400 to 360,000 Counts per Rev., with
performance, DRC incremental encoders are well known a wide range of shaft/coupling sizes, mounting options,
for fast and easy installation using industry-standard connector styles and cable lengths
mechanical and electrical interfaces. Choose from sealed • High accuracy, high temperature, high shaft load and
or kit-style rotary encoders, kit-style linear encoders, or extra high vibration-resistant models
sealed linear length gages featuring:
• Optical encoder technology with LED light source for
Products
long life and highest performance • 25D, 25B, S15, H15 and F15 Shaft and Hollow-Shaft
• Differential digital outputs with available zero reference Sealed Rotary Encoders; resolution up to 200,000 CPR
• Custom versions available for OEM applications • HT30, T23B, and TK91 Kit-Style Rotary Encoders for
Motors; resolution up to 100,000 CPR
• Sealed Rotary Shaft and Hollow Shaft Encoders
• LDM Kit-Style Linear Encoders; resolution up to 0.5µm
• Rugged, reliable incremental rotary motor encoders
• SST Sealed Linear Length Gages; resolutions up to 1µm
Data Storage Products
Data Storage
Products
OVERVIEW
MicroE Systems has more than a decade of experience Products
designing and manufacturing critical components and
• G1400 and G1600 High Accuracy Rotary Encoders
ultra-precision positioning systems for the data storage
industry. Today we supply these components to the • PE100 High Speed Rotary Encoders
majority of hard disk drive (HDD) manufacturers around • PA200G and PA2046G Rotary Positioners
the world, enabling cost-effective manufacturing of • MP7000 Positioner for Media Writers ELECTROMATE
HDD’s with capacities exceeding 1TB. • MCB2 and SA200a Motion Control SubsystemsToll& Free
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UltraTM Encoders • DRCTM Encoders • Data Storage Products MicroE Systems • info@microesys.com • 15
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Model Features Specifications*
OPS Performance & Value Encoders • Linear Resolution: 5μm – 50nm
OPSTM/MTETM
Pages 6–7 Industry-leading combination of • Rotary Resolution: 163k to 3.27M CPR
performance and value; all electronics • Output: A-quad-B, Index Pulse, and
in the sensor. Dual Limits
MTE
Micro Motion Absolute Rotary Encoders • Rotary Resolution: 5k CPR – 20M CPR
AbsoluteTM Absolute after a small initial move; • Output: A-quad-B, Index, Dual Limits
Page 13 available surface-mount and Alarm
compact sensors.
Data Storage Products for Data Storage • Rotary Resolution: up to 4.68 nrad
Page 15 Ultra-high performance positioners, • Output: 2 semiarbitrary analog outputs
encoders and servo control for Data
Storage applications.