Information

Cleanroom Product Range-subjected to change

123

Information
General information
Introduction to Cleanroom
The term Cleanroom is something you associate with in
modern industries. However, the
root of cleanroom design goes
back more than a century. Think
of the need to control contamination in hospitals and you would
be able to imagine the first
cleanroom.
It can be seen that the requirement for cleanroom can be
broadly divided into two areas:

That in which inanimate particles are a problem and where

their presence may prevent a
product functioning or reduce
its useful life.

To ensure the absence of microbe carrying particles whose

growth could lead to human
infection.
Definition of cleanroom
It is clear that a cleanroom is a
room that is clean. However, a
cleanroom now has a special
meaning and it is defined in
ISO 144641 as:
A room in which the concentration of airborne particles is controlled and which contains one or
more clean zones.
And in ISO 14644-1 as:
A room in which the concentration of airborne particles is controlled, and which is constructed
and used in a manner to minimise
the introduction, generation and
retention of particles inside the
room and in which other relevant
particles inside the room and in
which other relevant parameters
e.g. temperature, humidity and
pressure, are controlled as necessary.

124

Classification of cleanroom
Cleanroom are classified by the
cleanliness of their air. The
method most easily understood
and universally applied is the
one suggested in versions of
Federal Standard 209 up to
edition "D.
The Federal Standard FS 209D
Table shows the simplified
classification of Cleanroom
Class according to the older
Federal Standard 209D. This
standard has now been superseded by the metric version;
Federal Standard 209E which
was published in 1992. The
basic unit of measurement
within a cleanroom is a micron
(m) which is one millionth of a
metre.

How small is a sub micro particle?

Objects

Approximate Size
[m]

Human hair

100

Rubbing or abrading an ordinary painted surface 90

Sliding metal surfaces (non-lubricated)

75

Crumpling or folding paper

65

Rubbing an epoxy painted surface

40

Belt drive (Conveyor)

30

Dust

25

Writing with ball pen on ordinary paper

20

Abrading of the skin

04

Oil smoke particles

0.1

The Federal Standard FS 209D

Measured Particle Size [m]
Class

To classify cleanroom, the number of particles equal to and

greater than 0.5 m is measured in one cubic foot of air and
this count is used to identify
the Cleanroom Class.
However, because of the simplicity and universal usage of
the Federal Standard 209D, it is
unlikely to be forgotten or
removed. It is also likely that
the Federal Standard 209E will
supersede it but by the new
International Standard Organisations (ISO) standard ISO
14644-1.
Cleanroom for different
industries
The required standard of
cleanliness of a room is dependent on the task performed
in it; the more susceptible the
product is to contamination,
the better the standard.

0.1

0.2

0.3

0.5

5.0

35

7.5

NA

10

350

75

30

10

NA

100

NA

750

300

100

NA

1000

NA

NA

NA

1000

10000

NA

NA

NA

10000

70

100000

NA

NA

NA

100000

7000

The possible cleanroom

requirements for various tasks
ISO Class (FS 209E)

Tasks

ISO Class 3 (Class 1)

Integrated circuit manufacturers manufacturing

sub-micron geometries only use these rooms.

ISO Class 4
(Class 10)

Semiconductor manufacturers producing

integrated circuits with line widths below 2 m
use these rooms.

ISO Class 5
(Class 100)

Used with a bacteria-free or particulate-free

environment is required in the manufacture of
aseptically produced injectable medicines.
Required for implant or transplant surgical
operations.

ISO Class 6
(Class 1000)

Manufacture of high quality optical equipment.

Assembly and testing of precision gyroscopes.
Assembly and testing of precision gyroscopes.
Assembly of miniaturised bearings.

ISO Class 7
(Class 10000)

Assembly of precision of hydraulic or

pneumatic equipment, servo-control valves,
precision timing devices, high grade gearing.

ISO Class 8
Class 100000)

General optical work, assembly of electronic

components, hydraulic and pneumatic
assembly.
Cleanroom Product Range-subjected to change

Information
General information
International standard of cleanroom
Introduction
The Federal Standard 209E have
long been the only definition of
cleanroom classification available
from a standard organisation. It is
from the U.S. General Service
Administration and approved for
use by all U.S. Agencies. In the
absence of an international
standard, FS 209E was broadly
used internationally.
The need for a new international
standard that covered more
cleanroom environmental
parameters and practices led to
the formation of a technical
committee of the International
Standards Organisation. The
technical committee is named TC
209 Cleanroom and Associated
Controlled Environments.
The goal of TC 209 is
standardization of equipment,
facilities and operational
methods for cleanroom and
associated controlled
environments. This includes
procedural limits and testing
procedures to achieve desired
attributes to minimise micro
contamination.
The ISO committee will produce
11 new standards documents
that relate to cleanroom or clean
zones.
Cleanroom standard adopted by
different countries
Some countries completely
adopted FS 209, while others
made their own national version,
similar to FS 209. Some made
minor changes of the classes to
comply with the metric system,
but all changed the denomination
of the classes.
Because of the different naming
of the classes in different
countries, care must be taken not
to mix up the standards.

Some major national standards exist today:

British standard: BS5295

Japanese standard: JIS B
9920

Australian standard: AS
1386

French standard: AFNOR X

44101

Dutch standard: VCCN-RL-1

Russian standard: GOST

This guideline, which was

R50766-95

developed just recently, is the

only guideline, which can be used
for the classification of operating
materials. The aim of this
guideline is to provide a
standardized procedure for
qualifying or comparing operating
materials with regards to their
airborne particle emission.
FESTO is applying this guideline
for the particle emission tests it
conducts.

The table shows major national

standards exist today.

Country

Standard

Year

Description

Australia

AS 1386

1989

Cleanroom and clean work stations

France

AFNOR X44101

1981

Definition of cleanroom levels

Germany

VDI 2083.3

1993

Contamination control measuring technique for

clean air rooms

Holland

VCCN 1

1992

Dust and micro-organism classification of air

Japan

JIS-B-9920

1989

Measuring methods for airborne particles in

cleanroom and evaluating methods, etc.

Russia

Gost-R 50766

1995

Cleanroom classification, General requirements

UK

BS 5295

1989

Environmental cleanliness in enclosed spaces

US

FS 209E

1992

Airborne particulate cleanliness classes in

cleanroom and clean zones

A comparison of major
engineering cleanroom
classes in the world
USA 209E
1992

ISO
14644-1
1997

Japan
B 9920
1989

ISO Class 1

ISO Class 2

ISO Class 3

10

ISO Class 4

100

ISO Class 5

1000

ISO Class 6

10000

ISO Class 7

100000

ISO Class 8
ISO Class 9

Cleanroom Product Range-subjected to change

Germany standard: VDI2083

The German Engineering
Association, known as VDI, has
published the VDI 2083 as
"Cleanroom engineering"
guideline, for the first time in
1976. The various tasks and
measures associated with
cleanroom technology are
described the VDI guideline
series VDI 2083.

France
X44101
1981

Germany
VDI 2083
1990

UK
BS 5295
1989

Australia
AS 1386
1989

0.035

0.35

4000

E,F

3.5

G,H

35

400000

350

4000000

3500

L
125

Information
General information
International standard for cleanroom
Introduction
After 40 years, the FS 209E has
been officially retired. This
paves the way for worldwide
harmonisation promised by the
new cleanroom protocols from
the International Organisation
for Standardisation (ISO). The
Institute of Environmental Sciences and Technology (IEST)
submitted a request to retire
the federal standard and it was
approved. The Federal Standard 209E was officially retired
by the US Government on 29
November 2001.
Basically, the quality of air in a
cleanroom has not changed,
what has changed is the measuring system. ISO standards
use only the metric system.
Almost all countries now use
the new ISO 14644 standard.
ISO classification standard
Because of the large number of
cleanroom standards produced
by individual countries, it is
very desirable that one worldwide standard of cleanroom
classification is produced. ISO
has set up a technical
committee (TC 209) and will
produce 10 new standards
documents that relate to
cleanroom or clean zones. The
first two standards have been
published: ISO 14644-1 and 2.

126

ISO 14644-1 classification of

air cleanliness
Cleanliness class designations
and quantity have changed
from FS 209E. Along with the
obvious change to metric
measure of air volume, ISO
14644-1 adds three additional
classes two cleaner than
Class 10 and one dirtier than
Class 100,000.
ISO 14644-2 cleanroom testing
for compliance
ISO 14644-2 determines the
type and frequency of testing
required conforming to the
standard. Table 2.12 indicates
which tests are mandatory and
Table 2.13 indicates which
tests are optional.

ISO 14644-1

Airborne Particulate Cleanliness Classes ISO 14644-1

Number of Particles per Cubic Meter by Micrometer Size
Class

0.1 m

0.2 m

0.3 m

0.5 m

ISO 1

10

ISO 2

100

ISO 3

1000

ISO 4

1 m

5 m

24

10

237

102

35

10000

2370

1020

352

83

ISO 5

100000

23700

10200

3520

832

29

ISO 6

1000000 237000

102000

35200

8320

293

ISO 7

352000

83200

2930

ISO 8

3520000 832000

ISO 9

35200000 8320000 293000

29300

ISO 14644-2
Summary of FS 209E and ISO
14644-1 and 2
The cleanliness classification
levels defined by FS 209E and
ISO 14644-1 are approximately
equal, except the new ISO
standard uses new class
designations, a metric measure
of air volume and adds three
additional classes two cleaner
than Class 10 and one dirtier
than Class 100,000. The second
new ISO standard, ISO 146442, gives requirements for
monitoring a cleanroom or
clean zone to provide evidence
of its continued compliance

Schedule of Tests to Demonstrate Continuing Compliance

Maximum
Time Interval

Test Procedure

ISO 5

6 months

ISO 14644-1 Annex A

ISO 5

12 months

Air Pressure
Test

All Classes

12 months

ISO 14644-1 Annex B5

Air Flow

All Classes

12 months

ISO 14644-1 Annex B4

Test Parameter Class

Particle Count
Test

Table compares the FS 209E to

the new ISO 14644-1
classifications.

ISO 14644-1

FED STD 209E

ISO Class

English

Metric

M1.5

10

M2.5

100

M3.5

1000

M4.5

10000

M5.5

100000

M6.5

Cleanroom Product Range-subjected to change

Information
General Information
Basic principles for designing cleanroom equipment
Introduction
The design of cleanroom
equipment plays an important
role in cleanroom technology. It
would be wasteful to design a
state-of-the-art cleanroom and do
not place any importance on the
equipment used in the
cleanroom. When designing
cleanroom equipment, care must
be taken right from the initial
stage.
Using pneumatic cylinder in
cleanroom
When you lower the piston speed,
the particle count will greatly
reduce as the impact at the end
position is reduced.
To help reduce the impact,
cylinders with cushioning will
significantly help in the reduction
of particles generated.
When there is a need to have end
position stopping, do not use
rubber stoppers, use shock
absorbers as they generate lesser
particles.
Using rotary moving elements
Whenever possible rotary
movements should be employed,
as lesser particles are generated
by rotary moving elements.
Furthermore, it is easier to seal
rotating elements from the clean
environment.
Minimising sliding friction
The design should minimise
sliding friction. Do not use sliding
tracks, it is better if you could use
roller tracking. Lip sealing is also
not allowed and tries to avoid
unnecessary functional contact.
Principle of arranging task
integration
Reduce the number of
components used to a minimum,
if possible make use of single
components which can assume
several functions.

Analysing ways of gripping

products
If you need to use a gripper in
the production, avoid gripping
in the same direction as the
direction of the first airflow.
Keep the product contact to a
minimum either by the
equipment or the operator.
If you grip either from the side
or from beneath the product,
the gripper does not affect the
airflow around the product and
the airflow obstruction caused
by the gripper is kept to a minimum.
If the gripper can only be used
above the product, then keep
moving elements next to the
product and select the shape of
the gripper and its distance
away from the product in such
a way that stagnant areas do
not reach the product
Choice of materials / surface
finish
With regard to the choice of
materials, the following are
recommended:

Use materials with low

electrostatic charge
properties

Combination of materials:
plastic - metal: avoid
insulated partial systems

Surfaces should be smooth

where possible, no sharp
edges

Easier to clean, minimising

influence on airflow

In semiconductor industry:
No moving elements made of
copper of brass

Better: special steel,

aluminium
Secondary measures and
alternatives
The following are some
additional guidelines, which
should be considered:

Encapsulating components
Cleanroom Product Range-subjected to change

All moving parts enclosed

Vacuum Suction
Accurately aimed local
airflow direction
Unconventional sources of
contamination
In addition to dust and other
particles, surface
contamination can be any one
of the following reaction
layers of chemical compounds,
absorbed
layers of mostly hydrocarbons
and moisture, or variable
composition contaminants due
to preferential diffusion of one
component through a
substrate.
ESD behavior of operating
materials
ESD stands for Electrostatic
Discharge. It is the rapid
transfer from static charged
bodies of materials to or from
Electrostatic Discharge
Sensitive Electronic Devices.
Virtually all electronic devices
are ESD sensitive; the
sensitivity is based on product
and design. ESD occurs when
charge is generated, stored on
an object and rapidly
transferred.

Magnetic influences
When handling components,
which are subject to magnetic
influences, care must be taken to
ensure that they are shielded
from the electromagnetic effects.
Another option would be keeping
critical products away from
Electric motors, permanent
magnets, coils and
electromagnetic fields.
Properties of materials
The properties of the materials
used in the equipment affects the
level of contamination. If the
wrong choice were made there
would be more particles emitted
and would greatly affect the
cleanroom.
Take note of the following points
when choosing the right material:
Know the emission of particles
from the material in use

Constantly
Sporadically
Which size of particle, critical/
uncritical?

Which combinations of
materials emit particles

Know the life span of material

Correlation between the wear
and tear of materials used and
tool life

Materials become charged via:

First air flowing onto them

Friction from other materials
Particles generated are not
removed by the first air flow

Contamination adheres to
charged materials

Formation of larger
agglomerates

Sporadic, intermittent
detachment of very large
forms of contamination
ESD is harmful to the system
and must be removed.
Recommended ways of
removing of electrostatic
charges are:

Outgassing
When the equipment is under
extremes of temperature, there is
the likely occurrence of
"Outgassing" which is simply the
release of gases or volatile
substances from a material other
than a change of state of the
material.
Make sure that the emission
levels of volatile substances do
not exceed limits. They must not
be harmful to either the product
or the personnel working the
area. The materials chosen must
pass tests at extremes of
temperature.

127

Information
General Information
Qualifying equipment for cleanroom used
Qualification tests are carried out
to assess the cleanroom
suitability of operating materials
that include equipment.
It is very important to note here
that No operating material may
be allocated to a cleanroom
class. It is therefore wrong to say
that Our product has the
Cleanroom ISO Class 3
The reasons are:

Cleanroom classes were drawn

up only for the acceptance and
classification of cleanroom.

Operating materials do not

fulfil these fundamental
conditions.

Missing of specifications for

the classification of operating
materials.

Correlation of cleanroom
classification / air volume

Air volume
Defined degree of
cleanliness per volume of air

Procedures for classification

standards are related to
cleanroom
Moreover we could not just
transfer the cleanroom
classifications to operating
materials, because these are
standards based on degree of
cleanliness per volume of air and
not for qualifying equipment used
in the cleanroom.
It is important to note that the
Federal Standard and ISO
standard does not cover this
area. VDI 2083 Part 8 "Cleanroom
suitability of equipment", which
was developed just recently, is
the only guideline, which can be
used for the classification of
operating materials.

128

This guideline is applicable to

operating materials which are
introduced into a cleanroom.
The aim of this guideline is to
provide a standardized
procedure for qualifying or
comparing operating materials
with regards to their airborne
particle emission.
FESTO is applying this
guideline for the particle
emission tests it conducts on
all Festo cleanroom products.
Introduction of VDI2083 Part 8
Operating materials are often
responsible for contaminating
the production environment in
cleanroom. An operating material does not process a cleanliness class, rather only a suitability for use in cleanroom
classes. This means that an
operating material may only be
assessed with respect to its use
in cleanroom with a defined
level of particle cleanliness of
the air.
The design, construction and
operation of an operating
material (geometry and
dynamics) should be selected
in such a way that airflow
patterns in the cleanroom
environment are affected as
little as possible. This can also
checked by performing airflow
visualization tests.
The standardized assessment
of airborne particle emission,
supported by a statistical
analysis of the results, should
enable a comparison and
assessment of operating
materials. This should lend
transparency to the
assessment of operating
materials concerning their
suitability for use in cleanroom.

Cleanroom suitability
Cleanroom suitability assesses
the suitability of an operating
material for use in cleanroom
which have been specified in
accordance with a regulating
body for assessing air
cleanliness. The classification
criterion in this instance is the
emission of particles from the
operating material.
Measurement technology
Only optical particle counters
(OPC) have been used in this
guideline for measuring
airborne particles. Further
information concerning the use,
handling and method of
function of OPCs can be found
in the guidelines VDI 3489 Part
3 and VDI 2083 Part 3.
Procedure
The highest concentration of
particulate contamination
emitted from the operating
material into the system or
product space is measured.
The size distribution of
particles emitted from the
operating material being
assessed for its cleanroom
suitability may vary
considerably. As the
distribution characteristics of
each operating material are not
always known, it does not
suffice to investigate only one
range of particle size.
Therefore, at least three
representative particle size
ranges are to be selected.
These must be as distant from
one another as possible.

The procedure for carrying out

cleanroom suitability tests in
accordance with regulating
bodies for assessing air
cleanliness may be summarized
as follows:

Specification of operating
parameters;

Localization of particle
sources;

Classification measurements;
Statistical analysis;
Classification of the operating
material
Measurement classification
The parameters required for the
classification measurements are
either prescribed or have been
ascertained from the
measurements taken beforehand:

Typical operating conditions of

the operating material during
the measurement procedure;

Measuring points on the

operating material;

Positions of the OPC sampling

probe at the operating
material measuring points.
Statistical analysis
The suitability of an operating
material for a given cleanroom
class is determined using a
statistical method. For this, all
particle size ranges measured
must be taken into consideration.
In order to obtain significant data
for all the statistical observations
to be carried out, there must be a
random distribution of particles in
the air.

The concentration measured is

then compared with the limiting
values given by the regulating
body concerned with air
cleanliness and thus an
assessment made of suitability
for use in a specific air
cleanliness class defined by
that regulating body.

Cleanroom Product Range-subjected to change

Information
General Information
Measurement of airborne particle in cleanroom
One of the major sources of
contamination is operating
materials. Contamination caused
by operating materials can be
either:

Chemical
Physical
Biological
Radiological
Ionic

Particle contamination falls under

the umbrella of physical
contamination. Particles is
caused by:

When leakage from the

pneumatic components will
lead to particle contamination.
The air, which leaks, might
bring along particles with it.

When operating materials

come into contact with one
another, there is bound to be
abrasion, make sure that the
abrasion is to a minimum as
particles are generated.

When the pneumatic

components move from end to
end, there tend to be knocking
at the end position, this will
lead to minor vibration and
also cause particles to be
released.
The optical particle counter OPC
It is a microprocessor-based
instrument that detects airborne
particles, analyses and stores the
data in eight size classes, and
produces reports. It displays
real time data on a CRT and
contains a printer, which can be
used to produce hard copies of
reports.

Measuring the test

environment
In order to get correct particle
count results, the test
environment, in which the tests
are carried out should have
little or no influence on the
particle measurements. The
parameters, which influence
the particle count, are the
particle count in the:

Base Measurement of Airborne

Particulate in MENV
Similar to the zero-count
measurement, which is used for
the OPC, the base
measurement is used for the
Mini-environment.

Air velocity (V)

Air Temperature (T)
Relative Humidity (H)

Environment
Air velocity
Degree of turbulence
Relative humidity

The purpose of measuring the

test environment is to
determine whether the given
environment is suitable for
particle measurement.
Therefore, the ground
contamination level of the test
environment has to be
measured for the cleanroom as
well as the Mini-environment
(MENV). The lower the "ground
contamination level", the more
accurate the particle
measurements will be.

VTH Measurement
Three major environment
parameters:

are measured in the cleanroom

and MENV to ensure the meet
the requirements. We obtain
these readings by using the
Kanomax Climomaster. This is a
precision measuring
instrument, which has velocity,
temperature and humidity
sensors.
Simultaneous measurements of
air velocity air temperature and
relative humidity can be
obtained with a single probe of
this instrument.

The measurement time is 3

minutes, 1.0 ft and at maximum
airflow velocity of the MENV. The
measurement point used is the
center of MENV on operational
level of component.
The Climomaster is setup as
follows:

Data sampling time : 60

seconds

Data sampling interval : 1

second

Number of sampling data : 1

VTH measurement time : 3
minutes
Upon completion of the test, the
readings must be within the
parameters:
First airflow velocity :
0.45 0.05 m/s
Temperature : 20.0 2.0C
Relative humidity : 55 10%

Zero the count measurement

Before any test is done, a zerocount measurement is made.
When doing a zero-count measurement, it is a functional test.
For this test, a zero-filter is
attached to the OPC and the
counter takes measurement for
about 3 minutes. The reading
obtained should be zero. Then
the environment is ready for
use.

During the airborne particle

emission measurements, the
operating parameters of the
optical particle counter are set
as follows:
Air volume : 1.0 cfm
Sampling time : 60 seconds
Delay time : 1 second
Measurement time : 5 minutes

Cleanroom Product Range-subjected to change

129

Information
General Information
The principle of measuring contamination level of pneumatic components
The Direct Measurement
Principle

Introduction
Basically there are two different
measuring principles how to
assess the clean room suitability
of operating materials. One
principle is to localize the particle
source and to measure the
particle emission directly at its
source.
Another principle is to assess the
total particle emission, by
measuring the average particle
emission in the space
surrounding the operating
material.
The direct Measurement
Principle
Applying the direct measurement
the specimen is operated inside a
clean room or mini environment.
There should be laminar, vertical
air flow around the specimen.

130

The Average Measurement

Principle

While the specimen is operated

a particle counter with a
movable measurement probe is
used to screen the entire
product for sources of particles.
Subsequently, the particle
emission is measured for 100
minutes at every particle
source, which has been located
before, in order to establish the
particle emission behavior.
The major advantage of this
principle is that it can be
applied to operating equipment
of almost any size.
Furthermore, it provides some
information about the particle
distribution and concentration
around the operating material.
This measurement principle is
described in detail in the VDI
2083-8 guideline.

The average Measurement

Principle
Using the average
measurement principle, the
specimen is operated inside a
container. The container is then
supplied with a defined volume
of clean dry air.
Simultaneously, the particle
emission is measured inside
the container, by using an
optical particle counter. All air,
which does not flow through
the particle counter, is release
through an exhaust opening. In
order to get the measurement
results, the ration between the
exhaust air and the amount of
air flowing through the particle
counter has to be known.
The major disadvantages of
this method are that the result
largely depends on the
placement of the measurement
probe inside the container as
the particle emission is not
necessarily consistent.

This makes the measurement

principle also very unsuitable for
measuring larger operating
materials, as the particle
emission get more inconsistent
inside of larger containers.
The advantage of this method is
that it allows a direct comparison
among several test specimen.
Furthermore, it is a lot easier to
handle.
There is no guideline available
from any independent
organization, such as ISO, VDI,
DIN, FDA etc., describing this
measurement principle.
How does FESTO measure?
FESTO decided to apply the direct
measurement method, as this
measurement allows the user to
gain information about the
highest particle concentration
around the product. Furthermore,
this measurement method is
described in the VDI-2083-8
guideline, which gives FESTO the
possibility to have a neutral
reference for the measurements.
Cleanroom Product Range-subjected to change

Information
Festo Cleanroom project
Festo cleanroom project - A collaboration among 3 parties
Festos cooperation with
Fraunhofer of Germany and
Nanyang Polytechnic of
Singapore

The cleanroom environment in

Nanyang Polytechnic of
Singapore

Supply Air from Fans

Ceiling
Window
Panel

Return

HEPA

Air

Utility and
Equipment
Chase

Return Air
Plenum
Floor

Grey Room

The cleanroom project initiated

by Festo is a collaboration among
Fraunhofer Institute for
Manufacturing Engineering and
Automation in Germany, Nanyang
Polytechnic (NYP) of Singapore
and Festo Singapore.
The objective is to work together
in the field of particle emission of
Festo products.
Furthermore, it is Festos
intention to improve the
experience in the field of particle
measurements, contamination
control as well as cleanroom
applications in general.

Cleanroom Product Range-subjected to change

Were doing the measurement

according the VDI 2083-8
guideline which is described on
page 82 and the following
pages. Fraunhofer Institute
approved this measurement
principle and attested this in a
Certificate of qualification.
The certification covers: The
support for the performance of
testing the cleanroom suitability of pneumatic components of
the company Festo AG & Co.

Cleanroom

Cleanroom environment
The cleanroom environment in
Nanyang Polytechnic is ISO
Class 6 cleanroom. The design
of this cleanroom is shown.
This is a cleanroom typical
layout.
This is a ballroom type
cleanroom with the area of
120 m2. The air flows in a
unidirectional way from a
ceiling of High Efficiency
Particular Air (HEPA) filters
down to the floor of the
cleanroom. The return air
passes through a return air
plenum in the Grey Room. The
Grey Room, which is located
just beside the cleanroom,
where it is used for service.

131

Information
Festo Cleanroom project
Test procedure of Festo cleanroom components
Mini-environment (MENV)
A Class 1 clean Mini-Environment
(MENV) is used within a cleanroom to provide the high level of
protection to products against
contamination and ESD events.
The specification of MENV is
shown. This MENV is a cleanroom
test cabinet with one clear
antistatic front panel and three
side panels. The dimension of
MENV is 1.2m x 0.6m internal
area and with 2.2m height. In
order to achieve high cleanliness
class, Ultra Low Penetration Air
(ULPA) Fan Filter Unit (99.9995%
efficiency on 0.12 micron) is
installed on the ceiling of the
MENV. The unidirectional supply
of air flows vertically from the Fan
Filter Unit (FFU), and the air
velocity can be adjusted up from
0.2 m/s to 0.6 m/s.

In accordance with the US FEDSTD-209E, a cleanroom is

classified to be of Class 1 if only
one particle of the size of 0.5
m or larger can be found in a
reference volume of one cubic
foot of the first air (filtered air
supplied).
In accordance with the ISO
14644-1, a cleanroom is
classified to be of Class 3 if only
35 particles of the size of 0.5
m or larger can be found in a
reference volume of one cubic
meter of the first air (filtered air
supplied).

Summary specification of MENV

Design:
Internal
Dimensions:
Cleanliness:
Air Velocity:

Vertical Laminar
Flow
1200 x 600 mm
ISO Class 3
0 0.6 m/s
infinitely
adjustable

Light
Intensity:
Main Body:
Front Design:

800 1000 lux

Aluminium
Clear Front
Cover
230 V, single
Power Supply: phase 50 Hz

Data Sampling Time: 60

seconds

Data Sampling Interval: 1

second

Measurement Time: 120

minutes

There is no tabletop installed in

the mini environment. Instead a
removable clean room trolley
with perforated tabletop is
used. The height of the trolley/
table is approx. 1.10 m

Measuring Instrument
The two most important test
instruments for the particle
measurements are Optical
Particle Counter (OPC) and Flow
Meter.
A LASAIR 210 Optical Particle
Counter, manufactured by
Particle Measuring Systems
Incorporation, and Model 6521
Climomaster (airflow, relative
humidity and temperature
measurement), manufactured
by KANOMAX Japan incorporation, are used in the particle
measurements.

132

Optical Particle Counter

The LASAIR 210 OPC is used to
detect the concentration of
particles. The flow volume of this
counter is 1.0 CFM (cubic foot per
minute) or 28.3 liters per minute.
The counter is able to detect
particle size from 0.2 m to 5.0
m. The particle counter has
eight channels.
The setting of OPC is:

Flow Meter
The flow meter Model 6521
Climomaster is used to measure
the airflow parameters.
Simultaneous measurements of
air velocity, air temperature and
relative humidity can be obtained
with a single probe of this
precision instrument.
The setting of flow meter is

Data Sampling Time: 60

seconds

Data Sampling Interval: 1

second

Number of Sampling Data: 1

Measurement Time: 3 minutes

Cleanroom Product Range-subjected to change

Information
Festo Cleanroom project
Test procedure of Festo cleanroom components
Testing of Festo cleanroom
pneumatic product range
The VDI-2083-8 guideline
describes, how particle
measurements have to be carried
out, in order to establish the
particle emission of individual
equipment. If a whole range of
equipment is to be tested, it
becomes viable to define,
whether all types and sizes of the
equipment has to be tested or
whether it would be sufficient to
test a defined share and to apply
the results to the remaining
products. Such a procedure
becomes especially important if
extensive product ranges are
involved.
To achieve the above mentioned,
this guideline has been
developed. The guideline is
based on the measurement
procedures applied by F-SG. This
guideline is not a FESTO
Standard.
Subject of test
FESTO products, which are part of
the clean room product range. It
does not apply to the testing of
standard product or special
applications.
Specimen Selection
The number of specimen to be
tested is determined by the size
and the number of products in
one product range. In every
product range, the smallest and
the largest type is tested. The
terms small and large are defined
as follows:

Furthermore, at least, 25% of

all products within one product
range have to be tested.
Each test is conducted with a
number of two identical
specimens.
Definition of a Product Range
The selection of test samples
does apply only, if the product
design is consistently the
same, throughout a product
range. This is defined as
follows:

The working principle of all

products within the product
range is identical.

All materials of all products

within the product range are
identical, including all
lubricants.

The geometry of all products

within the product range is
identical, especially the
geometry of all seals.

The working pressure of all

products within the product
range is the same.
If not all products of a product
range fulfill the abovementioned requirement, all
products of that particular
product range have to be
tested.

For cylinders, slide units, shock

absorbers and grippers, small
and large are defined by the
piston diameter.

For valves and filters, service

units, small and large are
defined by the flow rate.

For tubes and fittings, small

and large are defined by the
tube diameter.

Cleanroom Product Range-subjected to change

133

Information
Festo Cleanroom project
Test procedure of Festo cleanroom components
Standard operation procedure
(SOP) are done before actual
commencement of the test. These
procedure are standard
regardless of the type of test
specimen.
Step 1: Inward transfer of test
samples
Before any test is done, the
components need to be prepared.
The preparation for the
cleanroom suitability assessment
involves the cleaning of these
components according to the
Festo-SG guidelines "Operating
Conditions for Cleanroom Tests".
The cleaning sequence is outlined
below:

Decontamination of test
samples (inner and outer parts)
with Isopropanol saturated
wipers and ultrapure
compressed dry air.
Sequence:

Pre-cleaning by blowing
component surface with
ultra-pure compressed dry
air.

Cleaning of component
surface using pre-saturated
wipers containing a blend of
Isopropyl alcohol.

Final cleaning by blowing

component surface with
ultra-pure compressed dry
air.

Bringing the test samples into

the CR-environment and MENV

Step 2: Testing of instrument

It is also important to note that
each time before the tests are
made the required zero count
measurement, base
measurement and VTH
measurement are carried out as
follows:

OPC airflow
OPC laser-reference
OPC zero-particle-count
(measurement time: 3
minutes, with zero-filter
attached)

MENV air flow velocity

(maximum power of FFU)

Relative humidity
(measurement time: 1
minute with measurement
intervals of 1 second)

Airflow-velocity
(measurement time: 1
minute with measurement
intervals of 1 second)

Temperature (measurement
time: 1 minute with
measurement intervals of 1
second)

Base measurements of
MENV, airborne particulate
contamination
(measurement time 3
minutes, 1.0 cft, at maximum
air flow velocity of MENV,
measurement point in the
center of MENV on
operational level of
component)

Step 3: Adjustment of the

operating parameters for the
test sample
After mounting the component
on a test support fixture, it is
ready for the test.

Step 5: Classification
measurements
During the test, the airborne
particle generated by the
component is measured using a
discrete particle counter (DPC).

Adjustment of operating

Particle size is 0.2 mm, 0.7

parameters e.g. cushioning

on actuator, speed of
actuator

mm, 1.0 mm, 2.0 mm, 3.0

mm, and 5.0 mm are
selected.

Statement about performed

Measurement time:
standard-classification: 100

duty cycles at the time of

testing

Documentation of
adjustment (sketch or
photograph)
Step 4: Localization
measurements
Determination of points of
highest concentrations of
particle emission (according to
VDI 2083 part 8)

Coarse localization
measurement

Localization measurement

minutes (according to VDI

2083 part 8) at the
measurement points that
were found during the
Localization measurements

lifecycle-test: several days,

up to months

Documentation of
measurements points (sketch
or photograph)
Step 6: Statistical evaluation
Evaluation according to guideline
VDI 2083 part 8
Step 7: Visual inspection
Visual inspection of tested
components (e.g. wear and tear,
deposition of lubricants and
particles, product failure)
Step 8: Classification
Classification of test specimen
according to statistical evaluation
and visual inspection (see
guideline VDI 2083 part 8)

Arranging the test samples

(with gloves, intermediate
decontamination, cleaning)

134

Cleanroom Product Range-subjected to change

Information
Festo Cleanroom project
Test procedure of Festo cleanroom components
Step 9: Documentation
Complete documentation
should contain the following
information

Title, Date , Place of test

Person responsible
Test environment
Operating Parameters
Temperature
Relative humidity
Air flow velocity
Particulate concentration

Description of measurement
points

Sketches or photographs
References to applied
standards and guidelines

Documentation
Particle concentration at
measurement points

Graphical visualization of
particle emission

Interpretation of results and

conclusion

Classification related to

in test environment

Measurement technology
Type
Model
Detection limits
Air flow
Description of sample
technique

Sample Characteristics
Type
Supplier
Serial Number
Component description
Operating parameters of

Testing of DSNU--RR-SA cylinder

applied standards/
guidelines

General Assessment
Potential for optimization
Testing of ADVU--RR-SA cylinder

Operating condition for testing

Festo components in
cleanroom
Operating Conditions are
defined by Festo-SG
individually for different Festo
products. The guidelines for
product range, cylinders, rotary
actuators, valves, grippers and
service units are listed in page
88 and 89.

components

Break-in load
Running-in time
Mounting position
Operating frequency
Attached load
Supply (air- power supply
etc.)

Preparing compressed air for

testing Festo components in
cleanroom

Compressor
Air storage
Refrigeration dryer
Prefilter regulator of 40 m
Testing of CDN--RR-SA cylinder

Fine filter 1 m
Micro filter 0.1 m

Air

Cleanroom Product Range-subjected to change

40 m 1m

0.1 m

135

Information
Festo Cleanroom project
Conditions at which Festo cleanroom components are tested
Operating conditions for
Cleanroom tests - Cylinders
Pneumatic linear actuators:

Single- and double-acting

cylinders with and without
piston rods

Guide and slide units

Each test is conducted with a
number of two identical
specimens. The supply air should
be clean dry air. This clean dry air
is filtered with micro-filter which
eliminates 99.9999% of particles
bigger than 0.01 mm. The
operating pressure for all
samples is 6.0 0.3 bar or
maximum pressure, for specimen,
whose operating pressure is less
than 6.0 bar. The ambient
temperature should be 20 2 C.
The medium temperature should
not exceed 30 C. The max.
speed is defined as 0.2 m/s for all
kinds of cylinders. The speed is
adjusted by means of one-way
flow control valves, installed as
close as possible to the cylinder
ports. The adjustment is done in a
way, that the piston safely
reaches its end-position.
Tables below shows: A pulse/
interval ratio of 1:1 should be
used for all frequencies. On the
condition of the max. speed
0.2m/s, the different frequencies
are defined due to different
piston diameter., they are shown
as following table. The
frequencies can be adjusted by
changing PLC programming.

Type

Piston
rod
cylinder

Piston
Frequency
diameter [Hz]
[mm]
6 to 8

10 to 20

1.5

25 to 50

136

In the case of cylinders with

protection against torsion,
testing should be carried out
using 20% of the maximum
moment.
Piston
Diameter
[mm]

Additional Mass
[kg] (20% theor.
effective force)

0.570

10

0.910

12

1.450

Piston
diameter
[mm]

Stroke length *
[mm]

16

2.250

6 to 8

20 or max. stroke

20

3.600

10 to 20

50 or max. stroke

25

5.700

25 to 32

100 or max. stroke

32

9.100

40 to 50

200 or max. stroke

40

14.500

63 to 100

300 or max. stroke

50

22.500

63

36.000

80

36.000

100

36.000

Cleanroom test of cylinders

should be carried out under
different load conditions.
However, because of short of
time, cylinders are only tested
under the condition of
horizontally mounted with a
load.
Table below shows: Load
parameters for piston-rod
cylinders without guide or
protection against torsion.

[mm]

Suction rate at vacuum port

[mm] Min.
vacuum
flowrate
[l/min]

Recommend
Vacuum
generator
[Type]

12...25 23

VN-07-L-

32...50 35

VN-07-L-

Additional Mass [kg]

Moment due to additional
(3% theoretical effective
load [Nm]
force)
M=mxgxs
0.057

0.0168

0.091

0.0357

10

0.145

0.0711

12

0.225

0.1324

16

0.360

0.2825

20

0.570

0.5592

25

0.910

1.1159

32

1.450

2.2759

40

2.225

4.4145

50

3.600

8.8290

63

5.700

16.7751

80

9.100

26.7813

100

14.500

42.6735

1.0

63 to 100 0.3
Rodless 8 to 100
cylinders

The end position cushioning

should be adjusted in such a
way that there is no hard
metallic impact in the end
positions and the piston does
not rebound.
For test sample of cylinders, the
following stroke lengths are
chosen for the various piston
rods as:

0.5

Whenever possible compression

fittings with sealing rings in
combination with polyurethane
tubes should be used for the for
the air supply. This is to ensure
minimum leakage.
For all cylinders with piston rod
the mounting position is defined
as horizontal, with the supply
ports on the bottom of the
sample, except for DGPL cylinder
and slide units. For the latter the
port orientation is determined by
the product design. Cylinders
without piston rod are tested in
horizontal and vertical mounting
positions. If possible, standard
mounting-accessories should be
used. To minimize turbulence, the
mounting accessories should
disturb the airflow as little as
possible.
Prior to every measurement the
supply pressure must be
checked. The pressure should be
6.0 +/- 0.3 bar.
Acoustic/visual/tactile check
under test conditions to see that
test specimens are operating
correctly and that there is not
sticking, jamming, stopping short
of end positions, jerky motion,
bottoming-out of cushioning or
leaks which can be felt or heard.
As any leakage leads to high
emission of particles, there
should be no detectable leakage.
If there is any leakage detected,
the test should be aborted.
As the amount of particles,
emitted by a cylinder, is not
constant throughout its service
life, particle measurements have
to be undertaken at different
stages of the service life.
Particle measurement should be
carried out after 20,000 duty
cycles have been completed

Cleanroom Product Range-subjected to change

Information
Festo Cleanroom project
Conditions at which Festo cleanroom components are tested
Ensure that the tubing connect
does not increase the size of
the additional volume by more
than 20%. Tube size of supply
line with maximum length of
100 cm.

Operating conditions for

cleanroom tests - Valves
Pneumatic digital switching
valves as follows:

Mechanically-actuated/
manually-operated digital
switching valves

Whenever possible
compression or barbed fittings
in combination with
polyurethane tubes should be
used for the for the air supply.
This is to ensure minimum
leakage. For those valves that
barbed fittings are not
available, push-in fittings are
used in the test.

Pneumatically-actuated digital
switching valves

Solenoid-actuated digital
switching valves
Each test is conducted with a
number of two identical
specimens. The supply air should
be clean dry air. This clean dry air
is filtered with micro-filter which
eliminates 99.9999% of particles
bigger than 0.01 m. The
operating pressure for all
samples is 6.0 +/- 0.3 bar or
maximum pressure, for specimen,
whose operating pressure is less
than 6.0 bar. The ambient
temperature should be 20 +/- 2
degree Celsius. The medium
temperature should not exceed
30 degree Celsius.

Acoustic/visual/tactile check
under test conditions to see
that test specimens (and pilot
valves) are operating correctly
and that there is no failure to
switch, sticking, incomplete
venting of outputs or leaks
which can be felt or heard. Any
departures from normal
operation should be
documented.

Table shows: A pulse/interval

ratio of 1:1 should be used for all
frequencies. The additional
volumes should be connected to
the outputs of the test specimens
via pieces of tubing and
appropriate fittings.

As any leakage leads to high

emission of particles, there
should be no detectable
leakage. If there is any leakage
detected, the test should be
aborted.

Operating conditions for

cleanroom tests - Air
preparation units

Filter
Filters
Fine and micro filters
Pressure regulators
Manual on-off valve
Solenoid actuated on-off
valve

Soft start valves

The specifications of test
specimens are as:

Pressure range: 0 to 7 bar

Degree of filtration: refer to
filter type filter or micro-filter
connected

Filter type LF or LFMA/B with

connector plates are used

Pressure gauge connections

Manual condensate drain
The supply air should be clean
dry air. This clean dry air is
filtered with micro-filter which
eliminates 99.9999% of
particles bigger than 0.01 mm.
The compressed air regulator is
connected with micro-filter to
adjust the pressure. The
working pressure during the
test is 7 bar. The air
preparation unites are
measured under the following
conditions:

Primary pressure (input

pressure) p1=7 bar

The controlled pressure

(output pressure) p2= 6 bar

Pressure drop p=1 bar

Valve port size

Switching
frequency [Hz]

Additional
volume [ml]

Inner diameter
of tube [mm]

M3

M5

10

3-4

M7

10

4-6

1/8

10

4-6

1/4

25

4-6

3/8

25

6-9

1/2

50

6-9

3/4

100

13

400

13

Cleanroom Product Range-subjected to change

Class

The ambient temperature should

be 20 2 C. The medium
temperature should not exceed
30 C. A minimum flow rate of 125
l/min is necessary for correct
operation. However, flow measurement devices such as flow
sensors or flowmeters are need to
ensure this minimum flow rate.
The switch frequency for on-off
valves are 2 Hz. The mounting
position for is vertical 5. The
operating voltage for solenoid
actuated on-off valve is set as 24
10% V DC. For manual condensate drain, plastic tubing is connected to the barb fitting. This is
to ensure minimum leakage.
Prior to every measurement the
supply pressure must bechecked.
The pressure should be 7.0 0.3
bar. Acoustic/visual/tactile check
under test conditions to see that
test specimens are operating
correctly. As any leakage leads to
high emission of particles, there
should be no detectable leakage.
If there is any leakage detected,
the test should be aborted.
Although, it should be avoided
that any medium such as air or
lubricant is leaking out of the
pneumatic system, it cannot be
entirely avoided if pneumatic
actuators are applied. In order to
minimize harmful contamination,
the medium, mostly compressed
air or nitrogen, should be dried
and filtered accordance to ISO
8573-1, Class 1.
Compressed Air Quality Standard:
ISO8573-1

Dust

Water

Oil

[um]

[mg/m]

[DTP]

[g/m]

[mg/m]

0.1

0.1

-70

0.003

0.01

-40

0.12

0.1

-20

0.88

15

+3

6.0

40

10

+7

7.8

25

+10

9.4

137

Information
Festo Cleanroom project
Benefits of using Festo cleanroom components
In all automation processes,
pneumatics plays an important
role. This is the same for
cleanroom, pneumatics are
used in cleanroom for the
following reasons:

Automation of production sequence with pneumatics

Lower space requirements with

pneumatics

Lower levels of contamination

Basic principle of Festo

cleanroom product range
It is known that there isnt
a standard or guideline for
cleanroom product design
available. In order to develop
products for cleanroom
application, we mainly base on
the principle of avoiding
cleanroom contamination by
preventing particles generated
from the components.

with pneumatics

Laminar flow virtually unimpaired by pneumatics

Benefits

Avoidance or reduction of
particle emissions both with
stationary components and in
an operating sequences

Minimization of disturbance
factors affecting laminar flow

Counter measures against possible environmental influences

(e.g. acids, aggressive media)

This principle includes the

following three aspects:

Non-contaminant release
very low leakage construction

Non-contaminant generation
special material, surface
treatment and special lubrication specification

Non-contaminant in production processes component

cleaning and double bag
packaging

Valves

Exhaust air from both main

valve and pilot valve are
released via common exhaust ports

Breather air from underside

of piston is removed via
exhaust ports

Leak-free design principle

Air preparation unit

Regulator: vent air in the

bonnet is sucked through a
vacuum connection on an
additional ring

Air filter: drain is discharged

from cleanroom via drain
guide port
Grippers

Air leakage is extracted via

vacuum suction port
Vacuum and other components

Exhaust air is ported to the

outside of cleanroom

Difference in comparison
with standard products
The following list is the difference
between the standard products
and those used in cleanroom.

Generally suitable for

unlubricated operation

Cleanroom compatible grease

used when necessary

Cleanroom compatible

The above three aspects can be

achieved for cleanroom compatibility by modifying our standard products to cleanroom
products with some special
features. The general principle
is to design an additional vacuum suction port so that air
leakage during operation can
be sucked back and extracted
by vacuum.

Shock absorber: replacement of a new housing with a

vacuum port

Fittings & tubing: air leakage

is minimized by using the
barbed fittings
Non contaminant generating
Piston rod is made of corrosion
resistant steel

markings

Ducted exhaust ports and

connections for air breather
ports

Extraction by means of vacuum

where necessary

Non contaminants releasing:

Drives

Air leakage from the piston

rod is sucked back and
extracted by vacuum via a
additional vacuum suction
port on the front cap or
barrel (housing)

Leak-free design principle

Non contaminant in production

process

Cleaning individual components by ultrasonic cleaning

bath

All components are cleaned

and assembled in a
cleanroom

Functional test in a

Production sequence of Festo

cleanroom product range
Basically, the manufacturing of
clean room pneumatics is not any
different from the design of any
other pneumatic component. It is
just, that special care is taken, to
avoid any kind of contamination
caused by the product.
Design office
Firstly the design of a standard
product is modified with a view to
cleanroom compatibility.
Assembly
All products are assembled
outside the cleanroom, according
to the standard assembly
procedures. In very special cases,
cleanroom grease is applied
instead of the standard lubricant.
Testing
Just as any standard product,
cleanroom products are tested,
concerning their functionality.
There is no particle emission test
conducted for every product.
Cleaning
Before packing all products are
cleaned under cleanroom
condition of ISO Class 7. The
cleaning is done either by means
of an ultrasonic bath or with
isopropanol wipers.
Packaging
Packaging is done in antistatic
plastic bags. Whereby each
product is double packed and
sealed. Just as the cleaning, the
packaging takes place under
cleanroom condition of ISO Class
7. When the product is ready for
shipment, it is transferred out of
the cleanroom through an airlock.

cleanroom

Double-packed in plastic
bags in a cleanroom

138

Cleanroom Product Range-subjected to change