Broadband Thin-Film Lithium Niobate Electro-Optic Modulator
<p>(<b>a</b>) Schematic diagram of LN modulator chip. (<b>b</b>) Cross-sectional view of the segmented electrodes. (<b>c</b>) Top view of the segmented electrodes.</p> "> Figure 2
<p>Transmission line equivalent circuit model of the electrode.</p> "> Figure 3
<p>(<b>a</b>) Top and (<b>b</b>) partial view of the segmented electrode with design parameters labeled.</p> "> Figure 4
<p>(<b>a</b>) Effective refractive index of segmented electrodes. (<b>b</b>) S-parameters of segmented electrodes.</p> "> Figure 5
<p>The z component of the optical field and the electric field within the waveguide.</p> "> Figure 6
<p>Schematic diagram of the process. (<b>a</b>) Chip cleaning. (<b>b</b>) Deposition of Chromium. (<b>c</b>) HSQ etching. (<b>d</b>) Chromium etching. (<b>e</b>) LN waveguide etching. (<b>f</b>) Chromium removal. (<b>g</b>) Deposition of silica cladding. (<b>h</b>) Deposition of nickel-chromium metal. (<b>i</b>) PMMA patterning and nickel-chromium metal deposition. (<b>j</b>) PMMA patterning and gold deposition. (<b>k</b>) PMMA stripping.</p> "> Figure 7
<p>Scanning electron microscope images and optical microscope images of the fabricated device: (<b>a</b>,<b>b</b>) SEM images of segmented electrodes; (<b>c</b>) SEM image of MMI; (<b>d</b>) optical microscope image of electrode corners.</p> "> Figure 8
<p>(<b>a</b>) Schematic diagram and (<b>b</b>) real shots of the internal structure of the packaged EO modulator.</p> "> Figure 9
<p>Measured EE bandwidth and EO bandwidth.</p> ">
Abstract
:1. Introduction
2. Design and Simulations
3. Fabrication and Packaging
3.1. Fabrication
3.2. Packaging
4. Results and Discussion
5. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
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Tao, J.; Yang, Y.; Li, X.; Wang, P.; Li, J.; Liu, J. Broadband Thin-Film Lithium Niobate Electro-Optic Modulator. Photonics 2024, 11, 325. https://doi.org/10.3390/photonics11040325
Tao J, Yang Y, Li X, Wang P, Li J, Liu J. Broadband Thin-Film Lithium Niobate Electro-Optic Modulator. Photonics. 2024; 11(4):325. https://doi.org/10.3390/photonics11040325
Chicago/Turabian StyleTao, Jinming, Yinuo Yang, Xintong Li, Peng Wang, Jinye Li, and Jianguo Liu. 2024. "Broadband Thin-Film Lithium Niobate Electro-Optic Modulator" Photonics 11, no. 4: 325. https://doi.org/10.3390/photonics11040325