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Fabrication of porous silicon channel waveguides with multilayer Bragg cladding

Fabrication of porous silicon channel waveguides with multilayer Bragg cladding

2010
Shuvan Prashant Turaga
Abstract
The ability to control the porosity and hence the refractive index of porous silicon makes it an interesting material for photonic applications. Layers with refractive indices as low as 1.5 up to that of bulk crystalline silicon can be easily fabricated by varying the electrochemical ...

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