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Sub-micron parallel laser direct-write

Sub-micron parallel laser direct-write

Applied Surface Science, 2008
Christina Othon
Abstract
We have developed a modified laser induced forward transfer (LIFT) technique which allows for the parallel deposition of hundreds of sub-micron features. The approach utilizes a self-assembled monolayer of monodisperse polystyrene microspheres as the focusing element. A monolayer of close-packed microspheres is formed on top of an ultra-thin quartz support (25μm thick), and a metallic thin film is then deposited

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