This paper presents the effects of silicon crystal properties on fundamental behavior of
MEMS resonators. MEMS resonators are commonly built from single crystal silicon with
proven long-term stability. Frequency and quality factor (Q) of silicon resonators, however,
depend on the silicon crystal orientation and its interplay with the resonance mode. It is
experimentally shown that Q of resonators can vary up to 25% with change in crystal
orientation. Anisotropy also causes a split in frequencies of degenerate mode pairs of disk …