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Wang et al., 2004 - Google Patents

Plasma-charging damage of floating MIM capacitors

Wang et al., 2004

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Document ID
5227610890817481352
Author
Wang Z
Ackaert J
Salm C
Kuper F
Tack M
De Backer E
Coppens P
De Schepper L
Vlachakis B
Publication year
Publication venue
IEEE Transactions on Electron Devices

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Snippet

In this paper, the mechanism of plasma-charging damage (PCD) of metal-insulator-metal (MIM) capacitors as well as possible protection schemes are discussed. A range of test structures with different antennas simulating interconnect layout variations have been used …
Continue reading at research.utwente.nl (PDF) (other versions)

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