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Azmoodeh, 2008 - Google Patents

Fabrication and characterization of nanoscale elements of a miniaturized gas ionization sensor

Azmoodeh, 2008

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Document ID
4912392225899808948
Author
Azmoodeh N
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In this thesis the nanoscale elements of a Gas Ionization Sensor (GIS) were studied, designed and fabricated. A GIS is working by fingerprinting the ionization breakdown voltage of unknown gases which displays good selectivity even in the very low gas pressure …
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