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Silva et al., 2016 - Google Patents

DLC films grown on steel using an innovator active screen system for PECVD technique

Silva et al., 2016

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Document ID
2605991146684061745
Author
Silva P
Ramos M
Corat E
Trava-Airoldi V
Publication year
Publication venue
Materials Research

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In this work, an active screen plasma discharge system based technology was incorporated in a PECVD reactor for DLC films growth, making it a new development in DLC films deposition. In this case, the active screen system is used to seek better electrons …
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