Dendooven et al., 2012 - Google Patents
In situ monitoring of atomic layer deposition in nanoporous thin films using ellipsometric porosimetryDendooven et al., 2012
- Document ID
- 16609962476398239582
- Author
- Dendooven J
- Devloo-Casier K
- Levrau E
- Van Hove R
- Pulinthanathu Sree S
- Baklanov M
- Martens J
- Detavernier C
- Publication year
- Publication venue
- Langmuir
External Links
Snippet
Ellipsometric porosimetry (EP) is a handy technique to characterize the porosity and pore size distribution of porous thin films with pore diameters in the range from below 1 nm up to 50 nm and for the characterization of porous low-k films especially. Atomic layer deposition …
- 238000000231 atomic layer deposition 0 title abstract description 294
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