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WO2021213425A1 - 半导体制造过程中的故障监测系统及方法 - Google Patents

半导体制造过程中的故障监测系统及方法 Download PDF

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Publication number
WO2021213425A1
WO2021213425A1 PCT/CN2021/088629 CN2021088629W WO2021213425A1 WO 2021213425 A1 WO2021213425 A1 WO 2021213425A1 CN 2021088629 W CN2021088629 W CN 2021088629W WO 2021213425 A1 WO2021213425 A1 WO 2021213425A1
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Prior art keywords
record
machine
handling
arrival
module
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PCT/CN2021/088629
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English (en)
French (fr)
Inventor
黎焕诚
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长鑫存储技术有限公司
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Application filed by 长鑫存储技术有限公司 filed Critical 长鑫存储技术有限公司
Priority to EP21792686.4A priority Critical patent/EP3958296B1/en
Priority to US17/386,450 priority patent/US20210358784A1/en
Publication of WO2021213425A1 publication Critical patent/WO2021213425A1/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0224—Process history based detection method, e.g. whereby history implies the availability of large amounts of data
    • G05B23/0227—Qualitative history assessment, whereby the type of data acted upon, e.g. waveforms, images or patterns, is not relevant, e.g. rule based assessment; if-then decisions
    • G05B23/0235—Qualitative history assessment, whereby the type of data acted upon, e.g. waveforms, images or patterns, is not relevant, e.g. rule based assessment; if-then decisions based on a comparison with predetermined threshold or range, e.g. "classical methods", carried out during normal operation; threshold adaptation or choice; when or how to compare with the threshold
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
    • G05B23/0267—Fault communication, e.g. human machine interface [HMI]
    • G05B23/0272—Presentation of monitored results, e.g. selection of status reports to be displayed; Filtering information to the user
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps

Definitions

  • the present invention relates to the technical field of semiconductor manufacturing, in particular to a fault monitoring system and method in the semiconductor manufacturing process.
  • FOUP Front Opening Unified Pod
  • AMHS Automatic Material Handling System
  • the current transfer process mainly includes: when the FOUP containing wafers is to be transferred, MES (Manufacturing Execution System) sends the transfer request to AMHS; AMHS assigns its own OHT (Overhead Hoist Transfer, overhead transfer equipment) to transfer the specified FOUP to the destination machine, and transport the FOUP to the EQP (Equipment, semiconductor production equipment that is the machine), and put it on the Load Port on the machine side; Load Port reads and reports the FOUP ID to EAP ( EQP Automation Program, machine automation control program; EAP notifies TCS (Tool Control System, machine control system) to the machine and the FOUP ID read by the machine; TCS reads it according to the reported machine and machine
  • TCS Tool Control System, machine control system
  • the FOUP ID generates the goods arrival machine record and the FOUP ID reading record, and sends them to the MES, so that the MES can update the goods arrival machine status to the database according to the received goods arrival machine record and the FOUP ID reading record, and Carry out the
  • One aspect of the present invention provides a fault monitoring method in a semiconductor manufacturing process, including:
  • the abnormal notification information is generated and sent to the monitoring platform.
  • Another aspect of the present invention also provides a fault monitoring system in the semiconductor manufacturing process, including:
  • the storage module is used to store the record of the completion of the handling and the record of the arrival of the goods to the machine;
  • the monitoring module is communicatively connected with the storage module, and is used to obtain the handling completion record and the goods arrival record from the manufacturing execution system, compare the obtained handling completion record and the goods arrival record, and determine Whether the handling completion record corresponds to the goods arrival machine record, and when the handling completion record does not correspond to the goods arrival machine record, generating and sending abnormal notification information to the monitoring platform.
  • FIG. 1 is a schematic flowchart of a method for monitoring faults in a semiconductor manufacturing process according to an embodiment of the present invention
  • FIG. 2 is a schematic flowchart of another method for monitoring faults in a semiconductor manufacturing process according to an embodiment of the present invention
  • FIG. 3 is a schematic diagram of the electrical structure of a fault monitoring system in the semiconductor manufacturing process provided by the present invention.
  • FIG. 4 is a schematic diagram of the electrical structure of another fault monitoring system in the semiconductor manufacturing process provided by the present invention.
  • FIG. 5 is a schematic diagram of the interaction relationship between a fault monitoring system and other systems in a semiconductor manufacturing process provided by the present invention.
  • an embodiment of the present invention provides a fault monitoring method in a semiconductor manufacturing process, which mainly includes step S110 to step S130.
  • Step S110 Obtain the handling completion record and the goods arrival record from the manufacturing execution system.
  • the handling completion record is generated and fed back to the manufacturing execution system by the automated material handling system in response to a handling request from the manufacturing execution system and performing corresponding handling actions on the material.
  • the transfer completion record includes at least the destination machine ID (Identity document, identification information) of the successful transfer and the identification information of the material.
  • the identification information of the material may specifically be FOUP ID.
  • FOUP Front Opening Unified Pod
  • the identification information of the material may specifically be FOUP ID.
  • FOUP Front Opening Unified Pod
  • it also includes the transportation of the FOUP to the Load Port of the destination machine.
  • each machine contains several Load Ports.
  • the transport The completion record can also include the Load Port ID of the destination machine.
  • the goods-to-machine record is received and read by the destination machine of the material being transported, fed back to the machine control system, and then fed back to the manufacturing execution system by the machine control system.
  • the goods arrival machine record includes at least the identification information of the material read by the machine and the identification information of the machine.
  • the goods arrival machine record includes the machine ID and the FOUP ID reported by the machine.
  • the goods arrival machine record may also include the destination machine. The specific Load Port ID of the station.
  • the MES sends the transport task to AMHS; AMHS assigns its OHT to transport the designated FOUP to the destination machine, and transport the FOUP to the EQP (Equipment, semiconductor production equipment) (Machine) above, and placed on the Load Port (load port) of the machine end, and then generate a transfer completion record after the transfer is successful, the transfer completion record includes the destination machine ID, Load Port ID, and FOUP ID; Load Port Read and report the FOUP ID to EAP; EAP notifies the machine that TCS performs the reporting behavior and the FOUP ID read by the machine; TCS generates the goods arrival record based on the reported machine ID and the FOUP ID read by the machine , And send it to the MES, so that the MES can update the status of the arrival of the goods to the database according to the received record of the arrival of the goods, and store it.
  • EQP Equipment, semiconductor production equipment
  • the machine ID can be a device number, a device model, or its device information.
  • the device number is used as the machine ID, so it can be named according to the process characteristics, but each machine corresponds to and has only one machine ID for easy management.
  • the fault monitoring method can be realized by running the monitoring program "watchdog".
  • the handling completion record and the goods arrival machine record may also include other information, such as material status information and handling time information.
  • the material status information is used to characterize the current production status of the material, for example, the material is currently in a state of being processed or being processed.
  • Step S120 comparing the acquired transfer completion record with the cargo arrival machine record, and judging whether the transfer completion record corresponds to the cargo arrival machine record.
  • the transfer completion record and the cargo arrival machine record are compared, and when the identification information of the destination machine successfully transferred in the transfer completion record is the same as that of the cargo arrival machine
  • the identification information of the machine in the machine record is consistent, and the identification information of the material being transported is consistent with the identification information of the material read by the machine, it is determined that the transport completion record is consistent with the goods arrival.
  • the machine record corresponds. Otherwise, it is determined that the transport completion record for comparison does not correspond to the cargo arrival machine record.
  • the obtained transfer completion record and the cargo arrival machine record are compared, and it is judged whether the transfer completion record and the cargo arrival machine record correspond one-to-one, mainly based on the transfer completion record and
  • the FOUP information in the cargo arrival machine record includes the specific location information of the FOUP, the production status information of the FOUP and the FOUP ID, and it is determined whether each handling completion record has a matching cargo arrival machine record. If the cargo arrival record matching one of the handling completion records is not found, it is determined that the machine corresponding to the handling completion record is in the completion of handling but the FOUP information has not been updated, that is, the machine currently has no reading behavior.
  • Step S130 When the transfer completion record does not correspond to the cargo arrival machine record, the abnormal notification information is completed and sent to the monitoring platform.
  • the transportation completion record is compared with the goods arrival machine record, and when the transportation completion record does not correspond to the goods arrival machine record, it is determined that there is an abnormality in the manufacturing process , And generate and send abnormal notification information to the monitoring platform to realize automatic detection of non-behavior after the goods arrive at the machine, so that the problem of non-read behavior of the machine after the goods arrive at the machine can be found as soon as possible, thereby ensuring production efficiency.
  • the obtaining the handling completion record and the goods arrival record from the manufacturing execution system includes:
  • the transfer completion record is obtained from the first sub-module of the storage module of the manufacturing execution system, and the cargo arrival record is obtained from the second sub-module of the storage module of the manufacturing execution system.
  • the storage module of the manufacturing execution system in this embodiment includes a first sub-module and a second sub-module, which are respectively used to store the transfer completion record and the cargo arrival machine record.
  • the transfer completion record and the cargo arrival machine record are obtained from the manufacturing execution system. Records, also including:
  • the goods arrival record is obtained from the manufacturing execution system.
  • the trigger information is generated by the manufacturing execution system after updating the handling completion record to trigger the start of the "watchdog" and obtaining the handling completion record from the manufacturing execution system.
  • the step of obtaining the completed handling from the manufacturing execution system can be completed before the step of obtaining the goods arrival record, or it may be carried out at the same time as the step of obtaining the goods arrival record. The example does not limit this.
  • generating and sending abnormal notification information to the monitoring platform includes:
  • the abnormal notification information is generated and sent to the monitoring platform.
  • the fault monitoring system determines that the material has been transported but the position or status of the material corresponding to the machine is not updated. And the Load Port of the machine, count the "inconsistency" of the position or state of the material once, use the “inconsistency” count as the number of retries, and determine whether the number of retries is less than the preset retries frequency. If yes, perform the second timing, and after the second timing duration reaches the second preset time interval, return to obtaining the goods arrival machine record from the second sub-module of the storage module of the manufacturing execution system A step of. Otherwise, the abnormal notification information is generated and sent to the monitoring platform.
  • the "watchdog" When it is determined that the loading port of the machine and the machine corresponding to the completed but not updated status is determined, considering that the time for the machine to read and report the FOUP ID is much shorter than the interval between two transport tasks, it can be After judging that there is no one-to-one correspondence between the porter completion record and the goods arrival machine record, the "watchdog" repeatedly obtains the goods arrival machine record from the manufacturing execution system at a second preset time interval , In order to confirm as soon as possible whether there is a non-behavior problem on the goods arrival machine, and notify the staff to solve the fault in time when it is determined that there is a non-behavior problem on the goods arrival machine. In addition, only obtaining the goods-to-machine record from the manufacturing execution system at the second preset time interval can reduce the amount of data transmission and speed up the judgment process.
  • the value range of the second time interval is 5-15 seconds. It can be understood that setting the value range of the second time interval from 5 to 15 seconds can allow the machine to have sufficient time to read and report the FOUP ID, avoiding the short time and/or slow reading speed of the machine. Misjudgment is generated, and in addition, it also avoids that the non-behavior of the goods arriving at the machine cannot be discovered in time due to the long interval.
  • the second time interval preferentially selects 8, 10, and 12 seconds.
  • the value range of the preset number of retries is 3-8 times. It can be understood that the handling completion record is generated before the goods arrival machine record. Therefore, it is possible that when the handling completion record is read, the working machine is still in the process of reading or reporting the FOUP ID, so it cannot be based on one time. The comparison result judges whether there is no reading behavior when the goods arrive at the machine.
  • the goods arrival machine record may be obtained multiple times according to the second time interval, and the position of the material Or the "inconsistency" of the state is continuously counted, that is, when the number of retries reaches the preset number of retries, abnormal notification information is sent to avoid misjudgment.
  • the preset number of retries is preferably set to 4, 5, and 6 times.
  • the abnormal notification information is sent to the monitoring platform in the form of an email, a short message, or an alarm management system (AMS) notification, so that the personnel at the monitoring platform can obtain the abnormal notification.
  • AMS alarm management system
  • an alarm device can also be set up at the monitoring platform, including the way of flashing a warning light or sounding a warning horn, so that the staff at the monitoring platform can obtain abnormal notification information in time.
  • the abnormal notification information may include the machine ID, the Load Port ID, and the FOUP ID; in addition, it may also include the FOUP handling completion time and the current status information of the material.
  • an embodiment of the present invention also provides a fault monitoring system for a semiconductor manufacturing system, please refer to FIG. 3, FIG. 4, and FIG. 5.
  • the fault monitoring system includes a storage module 310 and a monitoring module 320.
  • the storage module 310 is used to store the record of the completion of the transportation and the record of the arrival of the goods to the machine.
  • the monitoring module 320 is communicatively connected with the storage module 310, and is used to obtain the handling completion record and the goods arrival machine record from the manufacturing execution system, and compare the obtained handling completion record and the goods arrival machine record , Determine whether the handling completion record corresponds to the cargo arrival machine record, and when the handling completion record does not correspond to the cargo arrival machine record, generate and send abnormal notification information to the monitoring platform.
  • the handling completion record is generated and fed back to the manufacturing execution system by the automated material handling system in response to a handling request from the manufacturing execution system and performing corresponding handling actions on the material.
  • the transfer completion record includes at least the destination machine ID and material identification information of the successful transfer.
  • the identification information of the material may specifically be FOUP ID.
  • FOUP ID the identification information of the material
  • it also includes the transportation of the FOUP to the Load Port of the destination machine.
  • each machine contains several Load Ports.
  • the transport The completion record can also include the Load Port ID of the destination machine.
  • the goods-to-machine record is received and read by the destination machine of the material being transported, fed back to the machine control system, and then fed back to the manufacturing execution system by the machine control system.
  • the goods-to-machine recording machine includes at least the identification information of the material read by the machine and the identification information of the machine.
  • the goods arrival machine record includes the machine ID and the FOUP ID reported by the machine; in another embodiment, the goods arrival machine record may also include the destination machine's The specific Load Port ID.
  • the storage module 310 is set in the MES.
  • MES sends a transport task to AMHS; AMHS assigns its OHT to transport the designated FOUP to the destination machine, and transports the FOUP to the top of the EQP, and places it on the Load Port of the EQP, and then After the transfer is successful, a transfer completion record is generated.
  • the transfer completion record includes the destination machine ID, Load Port ID, and FOUP ID; Load Port reads and reports the FOUP ID to EAP; EAP notifies the machine and machine that TCS has performed the reporting behavior.
  • TCS generates a goods arrival record based on the reported machine and the FOUP ID read by the machine, and sends it to the MES so that the MES can update the goods according to the received goods arrival record.
  • the machine status is stored in the database and stored in the storage module 310.
  • the machine ID may specifically be a device number, a device model, or its device information.
  • the device number is used as the machine ID, so it can be named according to the process characteristics, but each machine corresponds to and has only one machine ID for easy management.
  • the monitoring module 320 may be a "watchdog" monitoring program.
  • the handling completion record and the goods arrival machine record may also include other information, such as material status information and handling time information.
  • the material status information is used to characterize the current production status of the material, for example, the material is currently in a state of being processed or being processed.
  • the storage module 310 includes a first sub-module 311 and a second sub-module 312.
  • the first sub-module 311 is used to store the transfer completion record; the second sub-module 312 is used to store the cargo arrival record. It can be understood that by separately storing and separately acquiring the handling completion record and the cargo arrival machine record, it is convenient to read and compare data, and is beneficial to speed up the processing process.
  • the monitoring module 320 includes a first acquisition module 311, a second acquisition module 322, a comparison module 323, and an abnormality notification module 324.
  • the first obtaining module 321 is configured to obtain the handling completion record from the first sub-module 311.
  • the second obtaining module 322 is configured to obtain the goods arrival machine record from the second sub-module 312.
  • the comparison module 323 is configured to compare the acquired transfer completion record with the cargo arrival machine record, and determine whether the transfer completion record corresponds to the cargo arrival machine record.
  • the abnormal notification module 324 is configured to generate and send abnormal notification information to the monitoring platform when the handling completion record does not correspond to the cargo arrival machine record.
  • the transfer completion record and the cargo arrival machine record are compared, when the identification information of the destination machine successfully transferred in the transfer completion record is the same as that of the cargo arrival machine
  • the identification information of the machine in the machine record is consistent, and the identification information of the material being transported is consistent with the identification information of the material read by the machine, it is determined that the transport completion record is consistent with the arrival of the goods.
  • the machine record corresponds. Otherwise, it is determined that the transport completion record for comparison does not correspond to the cargo arrival machine record.
  • the obtained transfer completion record and the cargo arrival machine record are compared, and it is judged whether the transfer completion record and the cargo arrival machine record correspond one-to-one, mainly based on the transfer completion record and
  • the FOUP information in the cargo arrival machine record may include the specific location information of the FOUP, the production status information of the FOUP and the FOUP ID, and it is determined whether each handling completion record has a matching cargo arrival machine record. If the cargo arrival record matching one of the handling completion records is not found, it is determined that the machine corresponding to the handling completion record is in the completion of handling but the FOUP information has not been updated, that is, the machine currently has no reading behavior.
  • the fault monitoring system further includes a timing activation module 330, the timing activation module 330 is configured to receive trigger information sent by the manufacturing execution system, and trigger the first acquisition module according to the trigger information 321 acquires the transfer completion record and starts a first timing, and when the first timing duration reaches a first preset time interval, triggers the second acquiring module 322 to acquire the goods arrival record.
  • the timing activation module 330 is configured to receive trigger information sent by the manufacturing execution system, and trigger the first acquisition module according to the trigger information 321 acquires the transfer completion record and starts a first timing, and when the first timing duration reaches a first preset time interval, triggers the second acquiring module 322 to acquire the goods arrival record.
  • the trigger information is generated by the manufacturing execution system after updating the handling completion record to trigger the start of the "watchdog" and obtaining the handling completion record from the manufacturing execution system.
  • the handling completion record is generated before the cargo arrival machine record, it is possible that when the handling completion record is read, the normally working machine is still in the process of reading or reporting the FOUP ID, so it needs to be delayed for a while Then obtain the goods arrival record, the present invention sets the timing start module 330 to perform the first timing, and obtains the goods from the manufacturing execution system after the first timing duration reaches the first preset time interval. Go to the machine to record, so as to avoid incorrect judgments caused by the fact that the manufacturing execution system has not been updated in time.
  • the step of obtaining the completed handling from the manufacturing execution system can be completed before the step of obtaining the goods arrival record, or it may be carried out at the same time as the step of obtaining the goods arrival record. The example does not limit this.
  • the timing activation module 330 is further configured to trigger after the second preset time interval has elapsed when the comparison module 323 determines that the handling completion record does not correspond to the cargo arrival machine record.
  • the second acquiring module 322 retries to acquire the cargo arrival machine record, and then triggers the comparison module 323 to compare and judge the cargo arrival record acquired by the retry with the handling completion record, until The number of retries reaches the preset number of retries;
  • the abnormality notification module is further configured to generate and send the abnormality notification information to the monitoring platform when the result of the last judgment is still not corresponding.
  • the handling completion record does not correspond to the cargo arrival machine record, it is determined by the fault monitoring system that the material has been transported but the position or status of the material has not been updated.
  • the Load Port of the machine counts the "inconsistency" of the position or state of the material once, uses the “inconsistency” count as the number of retries, and determines whether the number of retries is less than the preset number of retries. If yes, perform the second timing, and after the second timing duration reaches the second preset time interval, return to the second sub-module 312 of the storage module 310 of the manufacturing execution system to obtain the goods arrival. Steps recorded by the station. Otherwise, the abnormal notification information is generated and sent to the monitoring platform.
  • the "watchdog" When it is determined that the loading port of the machine and the machine corresponding to the status that have been transported is completed but not updated, considering that the time for the machine to read and report the FOUP ID is much shorter than the interval between two transport tasks, it can be After judging that the porter's completion record does not correspond to the goods arrival machine record one-to-one, the "watchdog" repeatedly obtains the goods arrival machine record from the manufacturing execution system at the second preset time interval , In order to confirm as soon as possible whether there is a non-behavior problem on the goods arrival machine, and notify the staff to solve the fault in time when it is determined that there is a non-behavior problem on the goods arrival machine. In addition, only obtaining the goods-to-machine record from the manufacturing execution system at the second preset time interval can reduce the amount of data transmission and speed up the judgment process.
  • the first time interval is generally much larger than the second time interval.
  • the value range of the second time interval is 5-15 seconds. It can be understood that setting the value range of the second time interval from 5 to 15 seconds can allow the machine to have sufficient time to read and report the FOUP ID, avoiding misjudgments due to short time and slow machine reading speed In addition, it also avoids that the non-behavior problem of goods arriving at the machine cannot be discovered in time due to the long interval.
  • the second time interval preferentially selects 8, 10, and 12 seconds.
  • the value range of the preset number of retries is 3-8 times. It can be understood that the handling completion record is generated before the goods arrival machine record. Therefore, it is possible that when the handling completion record is read, the working machine is still in the process of reading or reporting the FOUP ID, so it cannot be based on one time. The comparison result judges whether there is no reading behavior when the goods arrive at the machine, so as to avoid misjudgment.
  • the preset number of retries is preferably set to 4, 5, and 6 times.
  • the abnormal notification information is sent to the monitoring platform in the form of an email, a short message, or an alarm management system (AMS) notification, so that the personnel at the monitoring platform can obtain the abnormal notification.
  • AMS alarm management system
  • an alarm device can also be set up at the monitoring platform, including the way of flashing a warning light or sounding a warning horn, so that the staff at the monitoring platform can obtain abnormal notification information in time.
  • the abnormal notification information may include the machine ID, the Load Port ID, and the FOUP ID; in addition, it may also include the FOUP handling completion time and the current status information of the material.

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Abstract

一种半导体制造过程中的故障监测系统及方法。其中故障监测方法包括：从制造执行系统中获取搬运完工记录和货到机台记录（S110）；对获取的所述搬运完工记录和所述货到机台记录进行比较，判断所述搬运完工记录与所述货到机台记录是否对应（S120）；当所述搬运完工记录与所述货到机台记录不对应时，生成并发送异常通报信息给监控平台（S130），实现货到机台后无行为的自动化侦测。

Description

半导体制造过程中的故障监测系统及方法
本申请要求于2020年4月21日提交的申请号为202010316832.X、名称为“半导体制造过程中的故障监测系统及方法”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本发明涉及半导体制造技术领域，特别是涉及一种半导体制造过程中的故障监测系统及方法。
背景技术
半导体装置的制造过程中，为了避免晶圆在每一台生产机台之间的传送被外部环境中的微尘污染，进而影响到良率，一般使用FOUP(Front Opening Unified Pod，前端开启式硅片承载盒)来保护、运送即存储晶圆。目前一般使用AMHS(Automated Material Handling System，自动化物料搬运系统)实现传送，以提高生产效率和安全性。
目前传送过程主要包括：当要搬运包含晶圆的FOUP时，MES(Manufacturing Execution System，制造执行系统)发送搬运要求至AMHS；AMHS指派自身的OHT(Overhead Hoist Transfer，悬挂式搬送设备)搬运指定的FOUP到目的地机台，并将FOUP运送到EQP(Equipment，半导体生产设备即机台)上方，并放上机台端的Load Port(装载端口)上；Load Port读取并上报FOUP ID至EAP(EQP Automation Program，机台自动化控制程式)；EAP通报TCS(Tool Control System，机台控制系统)货到机台和机台读取到的FOUP ID；TCS根据上报的机台和机台读取到的FOUP ID生成货到机台记录和FOUP ID读取记录，并发送给所述 MES，以使MES根据接收的货到机台记录和FOUP ID读取记录更新货到机台状态至数据库，并进行后续生产流程。
但是，MES发送搬运任务至AMHS并通过OHT将FOUP运送到EQP后，经常会出现机台并未读取与上报FOUP ID至TCS&EAP的问题，导致货到机台后无行为，严重影响了生产效率。
发明内容
本发明的一方面提供了一种半导体制造过程中的故障监测方法，包括：
从制造执行系统中获取搬运完工记录和货到机台记录；
对获取的所述搬运完工记录和所述货到机台记录进行比较，判断所述搬运完工记录与所述货到机台记录是否对应；
当所述搬运完工记录与所述货到机台记录不对应时，生成并发送异常通报信息给监控平台。
本发明的另一方面还提供了一种半导体制造过程中的故障监测系统，包括：
存储模块，用于存储搬运完工记录和货到机台记录；
监控模块，与所述存储模块通信连接，用于从制造执行系统中获取搬运完工记录和货到机台记录，对获取的所述搬运完工记录和所述货到机台记录进行比较，判断所述搬运完工记录与所述货到机台记录是否对应，以及当所述搬运完工记录与所述货到机台记录不对应时，生成并发送异常通报信息给监控平台。
本发明的一个或多个实施例的细节在下面的附图和描述中提出。本发明的其它特征、目的和优点将从说明书、附图以及权利要求书变得明显。
附图说明
为了更好地描述和说明本申请的实施例，可参考一幅或多幅附图，但用于描述附图的附加细节或示例不应当被认为是对本申请的发明创造、目前所描述的实施例或优选方式中任何一者的范围的限制。
图1为本发明实施例提供的一种半导体制造过程中的故障监测方法的流程示意图；
图2为本发明实施例提供的另一种半导体制造过程中的故障监测方法的流程示意图；
图3为本发明提供的一种半导体制造过程中的故障监测系统的电气结构示意图；
图4为本发明提供的另一种半导体制造过程中的故障监测系统的电气结构示意图；
图5为本发明提供的一种半导体制造过程中的故障监测系统与其他系统的交互关系示意图。
具体实施方式
为使本发明的上述目的、特征和优点能够更加明显易懂，下面结合附图对本发明的具体实施方式做详细的说明。在下面的描述中阐述了很多具体细节以便于充分理解本发明。但是本发明能够以很多不同于在此描述的其它方式来实施，本领域技术人员可以在不违背本发明内涵的情况下做类似改进，因此本发明不受下面公开的具体实施的限制。
请参见图1和图2，本发明实施例提供了一种半导体制造过程中的故障监测方法，主要包括步骤S110至步骤S130。
步骤S110，从制造执行系统中获取搬运完工记录和货到机台记录。
本实施例中，所述搬运完工记录是自动化物料搬运系统在响应来自所述制造执行系统中的搬运请求，对所述物料实施对应的搬运行为后生成并反馈给所述制造执行系统的。一般来讲，所述搬运完工记录至少包括搬运成功的目的地机台ID(Identity document，标识信息)和物料的标识信息。而对于实际要使用FOUP(Front Opening Unified Pod，前端开启式硅片承载盒)来保护和运送晶圆的，所述物料的标识信息具体可以为FOUP ID。另外，在实际搬运过程中，还包括将FOUP搬运至目的地机台的Load Port上，一般情况下，每个机台都对应包含有若干个Load Port，在另一实施例中，所述搬运完工记录还可以包括目的地机台的Load Port ID。
所述货到机台记录是由目的地机台接收并读取到所述被搬运的物料，反馈给机台控制系统，再由所述机台控制系统反馈给所述制造执行系统的。所述货到机台记录至少包括所述机台读取到的物料的标识信息和所述机台的标识信息。本实施例中，所述货到机台记录包括所述机台ID和所述机台上报的FOUP ID，在另一实施例中，所述货到机台记录还可以包括所述目的地机台的具体的Load Port ID。
具体制造过程中，当要搬运包含晶圆的FOUP时，MES发送搬运任务至AMHS；AMHS指派自身的OHT搬运指定的FOUP到目的地机台，并将FOUP运送到EQP(Equipment，半导体生产设备即机台)上方，并放在机台端的Load Port(装载端口)上，然后在搬运成功后生成搬运完工记录，所述搬运完工记录包括目的地机台ID、Load Port ID和FOUP ID；Load Port读取并上报FOUP ID至EAP；EAP通报TCS执行上报行为的机台和机台读取到的FOUP ID；TCS根据上报的机台ID和机台读取到的FOUP ID生成货到机台记录，并发送给所述MES，以使MES根据接收的货到机台记录更新货到机台状态至数据库，并存储。
可以理解，所述机台ID为可以为设备编号、设备型号或其设备信息。本实施例中，采用设备编号作为机台ID，因此可依据制程特性进行命名,但每个机台对应有且只有一个机台ID，以便于管理。此外，所述故障监测方法可通过监控程序“看门狗”运行实现。在其它一些实施例中，所述搬运完工记录和所述货到机台记录还可以包括其他的一些信息，如物料状态信息和搬运时间信息。其中，所述物料状态信息用于表征当前物料所处的生产状态，例如物料当前处于待加工状态或正在加工状态。
步骤S120，对获取的所述搬运完工记录和所述货到机台记录进行比较，判断所述搬运完工记录与所述货到机台记录是否对应。
本实施例中，对于一所述搬运完工记录和一所述货到机台记录进行比较，当所述搬运完工记录中的所述搬运成功的目的地机台的标识信息与所述货到机台记录中的所述机台的标识信息一致，且所述被搬运的物料的标识信息与所述机台读取到的物料的标识信息一致时，判定所述搬运完工记录与所述货到机台记录相对应。否则，判定进行比较的所述搬运完工记录和所述货到机台记录不对应。
具体的，对获取的所述搬运完工记录和所述货到机台记录进行比较，判断所述搬运完工记录与所述货到机台记录是否一一对应，主要是根据所述搬运完工记录和所述货到机台记录中的FOUP的信息，包括FOUP的具体位置信息、FOUP的生产状态信息和FOUP ID，判断是否每一搬运完工记录都有与之匹配的货到机台记录。如查询不到与其中一个搬运完工记录相匹配的货到机台记录时，则判断所述搬运完工记录对应的机台处于搬运完成但未更新FOUP的信息，即机台目前没有读取行为。
步骤S130，当所述搬运完工记录与所述货到机台记录不对应时，成并发送 异常通报信息给监控平台。
本发明提供的故障监测方法中，通过将所述搬运完工记录和所述货到机台记录进行比较，并在所述搬运完工记录与所述货到机台记录不对应时判定制造过程存在异常，以及生成并发送异常通报信息给监控平台，实现货到机台后无行为的自动化侦测，以使得可以尽早发现货到机台后机台无读取行为的问题，从而保证生产效率。
在其中一个实施例中，所述从制造执行系统中获取搬运完工记录和货到机台记录，包括：
从所述制造执行系统的存储模块的第一子模块中获取所述搬运完工记录，以及从所述制造执行系统的存储模块的第二子模块中获取所述货到机台记录。
可以理解，本实施例中所述制造执行系统的存储模块包括第一子模块和第二子模块，分别用于存储所述搬运完工记录和所述货到机台记录。通过分别存储以及分别获取所述搬运完工记录和所述货到机台记录，便于数据的读取和比较，有利于加速处理进程。
由于工序先后存在时间差，因此所述搬运完工记录的更新早于所述货到机台记录的更新，因此在其中一个实施例中，所述从制造执行系统中获取搬运完工记录和货到机台记录，还包括：
接收所述制造执行系统发送的触发信息，其中所述触发信息是所述制造执行系统在接收到搬运完工记录后生成的；
根据所述触发信息从所述制造执行系统中获取所述搬运完工记录，并开始进行第一计时；
当所述第一计时时长达到第一预设时间间隔后，从所述制造执行系统中获取所述货到机台记录。
本实施例中，所述触发信息是由所述制造执行系统在更新搬运完工记录后生成的，以触发“看门狗”启动并从所述制造执行系统中获取所述搬运完工记录。同时进行第一计时，并在所述第一计时时长达到第一预设时间间隔后，从所述制造执行系统中获取所述货到机台记录，从而避免因所述制造执行系统还没来及更新而导致产生错误判断。需指出的是，从所述制造执行系统中获取所述搬运完工的步骤，可以在执行获取货到机台记录的步骤之前完成，也可以与获取货到机台记录的步骤同时进行，本实施例对此并不进行限制。
在其中一个实施例中，所述当所述搬运完工记录与所述货到机台记录不对应时，生成并发送异常通报信息给监控平台，包括：
当所述搬运完工记录与所述货到机台记录不对应时，经过第二预设时间间隔后重试获取所述货到机台记录，并判断所述搬运完工记录与所述货到机台记录是否对应，直至重试次数达到预设重试次数；
若最后一次判断的结果仍为不对应，则生成并发送所述异常通报信息给所述监控平台。
本实施例中，当所述搬运完工记录与所述货到机台记录不对应时，通过所述故障监测系统确定物料已搬运完成但未更新所述物料的位置或状态对应的所述机台以及所述机台的Load Port，对所述物料的位置或状态的“不一致”计数一次，并将所述“不一致”计数作为重试次数，并判断所述重试次数是否小于预设重试次数。若是，则进行第二计时，并在所述第二计时时长达到第二预设时间间隔后，返回至从所述制造执行系统的存储模块的第二子模块中获取所述货到机台记录的步骤。否则，生成并发送所述异常通报信息给所述监控平台。
当确定已搬运完成但未更新状态对应的所述机台以及所述机台的Load Port后，考虑到机台读取并上报FOUP ID的时间远小于两次搬运任务之间的间隔， 因此可在判断所述搬运工完工记录与所述货到机台记录不一一对应之后，“看门狗”按照第二预设时间间隔从所述制造执行系统中重复获取所述货到机台记录，以尽快确认是否存在货到机台无行为问题，并在确定存在货到机台无行为问题时通知工作人员及时解决该故障。此外，仅按照第二预设时间间隔从所述制造执行系统中获取所述货到机台记录，可减小数据量的传输，加快判断进程。
在其中一个实施例中，所述第二时间间隔的取值范围为5～15秒。可以理解，将第二时间间隔的取值范围为5～15秒，可使得机台有充足的时间读取并上报FOUP ID，避免因时间过短、和/或机台读取速度较慢而产生误判断，此外也避免了因间隔时间太长而导致货到机台无行为问题不能被及时发现。本实施例中，所述第二时间间隔优先选择8、10和12秒。
在其中一个实施例中，所述预设重试次数的取值范围为3～8次。可以理解，搬运完工记录先于所述货到机台记录生成，因此有可能在读取搬运完工记录时，正常工作的机台还处于读取或上报FOUP ID的过程，因此并不能根据一次的比较结果判断是否存在货到机台无读取行为。本实施例中，在判断所述搬运完工记录与所述货到机台记录不一一对应之后，可以根据所述第二时间间隔多次获取货到机台记录，并在所述物料的位置或状态的“不一致”连续计数次数，即重试次数达到所述预设重试次数时发送异常通报信息，以避免产生误判。本实施例中，优先的将预设重试次数设置为4、5和6次。
在其中一个实施例中，以邮件、简讯或警报管理系统(Alarm Management System，AMS)的通知的形式将所述异常通报信息给所述监控平台，方便监控平台处的工作人员获取所述异常通报信息所包含的具体内容，并快速排除故障。此外，还可以在监控平台处设置警报装置，包括警示灯闪烁或警示喇叭鸣响的方式，以使监控平台处工作人员及时获取异常通报信息。本实施例中，所述异 常通报信息可以包括机台ID、Load Port ID和FOUP ID；此外，还可以包括所述FOUP搬运完工时间以及所述物料当前的状态信息。
基于同一发明构思，本发明实施例还提供了一种半导体制造系统的故障监测系统，请参见图3、图4和图5。所述故障监测系统包括存储模块310和监控模块320。
所述存储模块310用于存储搬运完工记录和货到机台记录。
所述监控模块320与所述存储模块310通信连接，用于从制造执行系统中获取搬运完工记录和货到机台记录，对获取的所述搬运完工记录和所述货到机台记录进行比较，判断所述搬运完工记录与所述货到机台记录是否对应，以及当所述搬运完工记录与所述货到机台记录不对应时，生成并发送异常通报信息给监控平台。
本实施例中，所述搬运完工记录是自动化物料搬运系统在响应来自所述制造执行系统中的搬运请求，对所述物料实施对应的搬运行为后生成并反馈给所述制造执行系统的。一般来讲，所述搬运完工记录至少包括搬运成功的目的地机台ID和物料的标识信息。而对于实际要使用FOUP来保护和运送晶圆的自动化物料搬运系统，所述物料的标识信息具体可以为FOUP ID。另外，在实际搬运过程中，还包括将FOUP搬运至目的地机台的Load Port上，一般情况下，每个机台都对应包含有若干个Load Port，在另一实施例中，所述搬运完工记录还可以包括目的地机台的Load Port ID。
所述货到机台记录是由目的地机台接收并读取到所述被搬运的物料，反馈给机台控制系统，再由所述机台控制系统反馈给所述制造执行系统的。所述货到机台记录机至少包括所述机台读取到的物料的标识信息和所述机台的标识信息。具体的，所述货到机台记录包括所述机台ID和所述机台上报的FOUP ID； 在另一实施例中，所述货到机台记录还可以包括所述目的地机台的具体的Load Port ID。
具体制造系统中，所述存储模块310设置在MES中。当要搬运包含晶圆的FOUP时，MES发送搬运任务至AMHS；AMHS指派自身的OHT搬运指定的FOUP到目的地机台，并将FOUP运送到EQP上方，并放在EQP的Load Port上，然后在搬运成功后生成搬运完工记录，所述搬运完工记录包括目的地机台ID、Load Port ID和FOUP ID；Load Port读取并上报FOUP ID至EAP；EAP通报TCS执行上报行为的机台和机台读取到的FOUP ID；TCS根据上报的机台和机台读取到的FOUP ID生成货到机台记录，并发送给所述MES，以使MES根据接收的货到机台记录更新货到机台状态至数据库，并存储在所述存储模块310。
可以理解，所述机台ID具体为可以为设备编号、设备型号或其设备信息。本实施例中，采用设备编号作为机台ID，因此可依据制程特性进行命名,但每个机台对应有且只有一个机台ID，以便于管理。此外，所述监控模块320可以为“看门狗”监测程序。在其它一些实施例中，所述搬运完工记录和所述货到机台记录还可以包括其他的一些信息，如物料状态信息和搬运时间信息。其中，所述物料状态信息用于表征当前物料所处的生产状态，例如物料当前处于待加工状态或正在加工状态。
在其中一个实施例中，所述存储模块310包括第一子模块311和第二子模块312。其中所述第一子模块311用于存储所述搬运完工记录；所述第二子模块312用于存储所述货到机台记录。可以理解，通过分别存储以及分别获取所述搬运完工记录和所述货到机台记录，便于数据的读取和比较，有利于加速处理进程。
在其中一个实施例中，所述监控模块320包括第一获取模块311、第二获取模块322、比较模块323和异常通报模块324。
所述第一获取模块321用于从所述第一子模块311中获取所述搬运完工记录。
所述第二获取模块322用于从所述第二子模块312中获取所述货到机台记录。
所述比较模块323用于对获取的所述搬运完工记录和所述货到机台记录进行比较，判断所述搬运完工记录与所述货到机台记录是否对应。
所述异常通报模块324用于在所述搬运完工记录与所述货到机台记录不对应时，生成并发送异常通报信息给监控平台。
本实施例中，对于一所述搬运完工记录和一所述货到机台记录进行比较，当所述搬运完工记录中的所述搬运成功的目的地机台的标识信息与所述货到机台记录中的所述机台的标识信息一致，且所述被搬运的物料的标识信息与所述机台读取到的物料的标识信息一致时，判定所述搬运完工记录与所述货到机台记录相对应。否则，判定进行比较的所述搬运完工记录和所述货到机台记录不对应。
具体的，对获取的所述搬运完工记录和所述货到机台记录进行比较，判断所述搬运完工记录与所述货到机台记录是否一一对应，主要是根据所述搬运完工记录和所述货到机台记录中的FOUP的信息，可以包括FOUP的具体位置信息、FOUP的生产状态信息和FOUP ID，判断是否每一搬运完工记录都有与之匹配的货到机台记录。如查询不到与其中一个搬运完工记录相匹配的货到机台记录时，则判断所述搬运完工记录对应的机台处于搬运完成但未更新FOUP的信息，即机台目前没有读取行为。
在其中一个实施例中，所述故障监测系统还包括定时启动模块330，所述定时启动模块330用于接收所述制造执行系统发送的触发信息，根据所述触发信息触发所述第一获取模块321获取所述搬运完工记录，并开始进行第一计时，以及当所述第一计时时长达到第一预设时间间隔后，触发所述第二获取模块322获取所述货到机台记录。
本实施例中，所述触发信息是由所述制造执行系统在更新搬运完工记录后生成的，以触发“看门狗”启动并从所述制造执行系统中获取所述搬运完工记录。同时，由于搬运完工记录先于所述货到机台记录生成，因此有可能在读取搬运完工记录时，正常工作的机台还处于读取或上报FOUP ID的过程，所以需要延后一段时间再获取货到机台记录，本发明设置所述定时启动模块330进行第一计时，并在所述第一计时时长达到第一预设时间间隔后，从所述制造执行系统中获取所述货到机台记录，从而避免因所述制造执行系统还没来及更新而导致产生错误判断。需指出的是，从所述制造执行系统中获取所述搬运完工的步骤，可以在执行获取货到机台记录的步骤之前完成，也可以与获取货到机台记录的步骤同时进行，本实施例对此并不进行限制。
在其中一个实施例中，所述定时启动模块330还用于在所述比较模块323判断所述搬运完工记录与所述货到机台记录为不对应时，经过第二预设时间间隔后触发所述第二获取模块322重试获取所述货到机台记录，再触发所述比较模块323对所述搬运完工记录与重试获取到的所述货到机台记录进行比较和判断，直至重试次数达到预设重试次数；所述异常通报模块还用于在最后一次判断的结果仍为不对应时，生成并发送所述异常通报信息给所述监控平台。
具体的，当所述搬运完工记录与所述货到机台记录不对应时，通过所述故障监测系统确定物料已搬运完成但未更新所述物料的位置或状态对应的所述机 台以及所述机台的Load Port，对所述物料的位置或状态的“不一致”计数一次，并将所述“不一致”计数作为重试次数，并判断所述重试次数是否小于预设重试次数。若是，则进行第二计时，并在所述第二计时时长达到第二预设时间间隔后，返回至从所述制造执行系统的存储模块310的第二子模块312中获取所述货到机台记录的步骤。否则，生成并发送所述异常通报信息给所述监控平台。
当确定已搬运完成但未更新状态对应的所述机台以及所述机台的Load Port后，考虑到机台读取并上报FOUP ID的时间远小于两次搬运任务之间的间隔，因此可在判断所述搬运工完工记录与所述货到机台记录不一一对应之后，“看门狗”按照预第二设时间间隔从所述制造执行系统中重复获取所述货到机台记录，以尽快确认是否存在货到机台无行为问题，并在确定存在货到机台无行为问题时通知工作人员及时解决该故障。此外，仅按照第二预设时间间隔从所述制造执行系统中获取所述货到机台记录，可减小数据量的传输，加快判断进程。
另，考虑到正常情况下物料搬运的周期较长，而获取货到机台记录和/或搬运工完工记录的时间较短，因此一般的所述第一时间间隔远大于第二时间间隔。
在其中一个实施例中，所述第二时间间隔的取值范围为5～15秒。可以理解，将第二时间间隔的取值范围为5～15秒，可使得机台有充足的时间读取并上报FOUP ID，避免因时间过短、机台读取速度较慢而产生误判断，此外也避免了因间隔时间太长而导致货到机台无行为问题不能被及时发现。本实施例中，所述第二时间间隔优先选择8、10和12秒。
在其中一个实施例中，所述预设重试次数的取值范围为3～8次。可以理解，搬运完工记录先于所述货到机台记录生成，因此有可能在读取搬运完工记录时，正常工作的机台还处于读取或上报FOUP ID的过程，因此并不能根据一次的比较结果判断是否存在货到机台无读取行为，以避免产生误判。本实施例中，优 先的将预设重试次数设置为4、5和6次。
在其中一个实施例中，以邮件、简讯或警报管理系统(Alarm Management System，AMS)的通知的形式将所述异常通报信息给所述监控平台，方便监控平台处的工作人员获取所述异常通报信息所包含的具体内容，并快速排除故障。此外，还可以在监控平台处设置警报装置，包括警示灯闪烁或警示喇叭鸣响的方式，以使监控平台处工作人员及时获取异常通报信息。本实施例中，所述异常通报信息可以包括机台ID、Load Port ID和FOUP ID；此外，还可以包括所述FOUP搬运完工时间以及所述物料当前的状态信息。
以上所述实施例的各技术特征可以进行任意的组合，为使描述简洁，未对上述实施例中的各个技术特征所有可能的组合都进行描述，然而，只要这些技术特征的组合不存在矛盾，都应当认为是本说明书记载的范围。
以上所述实施例仅表达了本发明的几种实施方式，其描述较为具体和详细，但并不能因此而理解为对发明专利范围的限制。应当指出的是，对于本领域的普通技术人员来说，在不脱离本发明构思的前提下，还可以做出若干变形和改进，这些都属于本发明的保护范围。因此，本发明专利的保护范围应以所附权利要求为准。

Claims (19)

  1. 一种半导体制造过程中的故障监测方法，包括：
    从制造执行系统中获取搬运完工记录和货到机台记录；
    对获取的所述搬运完工记录和所述货到机台记录进行比较，判断所述搬运完工记录与所述货到机台记录是否对应；
    当所述搬运完工记录与所述货到机台记录不对应时，生成并发送异常通报信息给监控平台。
  2. 如权利要求1所述的故障监测方法，其中，所述搬运完工记录至少包括搬运成功的目的地机台的标识信息和被搬运的物料的标识信息；所述货到机台记录至少包括所述机台的标识信息和所述机台读取到的物料的标识信息。
  3. 如权利要求1所述的故障监测方法，其中，所述搬运完工记录是由自动化物料搬运系统响应来自所述制造执行系统中的搬运请求，对所述物料实施对应的搬运行为后生成并反馈给所述制造执行系统的。
  4. 如权利要求1所述的故障监测方法，其中，所述货到机台记录是由目的地机台接收并读取到被搬运的物料，反馈给机台控制系统，再由所述机台控制系统反馈给所述制造执行系统的。
  5. 如权利要求1所述的故障监测方法，其中，所述从制造执行系统中获取搬运完工记录和货到机台记录，包括：
    从所述制造执行系统的存储模块的第一子模块中获取所述搬运完工记录，以及从所述制造执行系统的存储模块的第二子模块中获取所述货到机台记录。
  6. 如权利要求5所述的故障监测方法，其中，所述从制造执行系统中获取搬运完工记录和货到机台记录，还包括：
    接收所述制造执行系统发送的触发信息，其中所述触发信息是所述制造执行系统在接收到搬运完工记录后生成的；
    根据所述触发信息从所述制造执行系统中获取所述搬运完工记录，并开始进行第一计时；
    当所述第一计时时长达到第一预设时间间隔后，从所述制造执行系统中获取所述货到机台记录。
  7. 如权利要求6所述的故障监测方法，其中，所述当所述搬运完工记录与所述货到机台记录不对应时，生成并发送异常通报信息给监控平台，包括：
    当所述搬运完工记录与所述货到机台记录不对应时，经过第二预设时间间隔后重试获取所述货到机台记录，并判断所述搬运完工记录与所述货到机台记录是否对应，直至重试次数达到预设重试次数；
    若最后一次判断的结果仍为不对应，则生成并发送所述异常通报信息给所述监控平台。
  8. 如权利要求7所述的故障监测方法，其中，所述第二预设时间间隔的取值范围为5～15秒。
  9. 如权利要求7所述的故障监测方法，其中，所述预设重试次数的取值范围为3～8次。
  10. 如权利要求9所述的故障监测方法，其中，所述发送异常通报信息包括以邮件、简讯或警报管理系统的通知的形式发送相关的物料和机台的信息。
  11. 一种半导体制造过程中的故障监测系统，包括：
    存储模块，用于存储搬运完工记录和货到机台记录；和
    监控模块，与所述存储模块通信连接，用于从制造执行系统中获取搬运完工记录和货到机台记录，对获取的所述搬运完工记录和所述货到机台记录进行 比较，判断所述搬运完工记录与所述货到机台记录是否对应，以及当所述搬运完工记录与所述货到机台记录不对应时，生成并发送异常通报信息给监控平台。
  12. 如权利要求11所述的故障监测系统，其中，所述存储模块包括：
    第一子模块，用于存储所述搬运完工记录；和
    第二子模块，用于存储所述货到机台记录。
  13. 如权利要求12所述的故障监测系统，其中，所述监控模块包括：
    第一获取模块，用于从所述第一子模块中获取所述搬运完工记录；
    第二获取模块，用于从所述第二子模块中获取所述货到机台记录；
    比较模块，用于对获取的所述搬运完工记录和所述货到机台记录进行比较，判断所述搬运完工记录与所述货到机台记录是否对应；以及
    异常通报模块，用于在所述搬运完工记录与所述货到机台记录不对应时，生成并发送异常通报信息给监控平台。
  14. 如权利要求13所述的故障监测系统，其中，所述搬运完工记录是由自动化物料搬运系统响应来自所述制造执行系统中的搬运请求，对所述物料实施对应的搬运行为后生成并反馈给所述制造执行系统的。
  15. 如权利要求13所述的故障监测系统，其中，所述货到机台记录是由目的地机台接收并读取到被搬运的物料，反馈给机台控制系统，再由所述机台控制系统反馈给所述制造执行系统的。
  16. 如权利要求13所述的故障监测系统，其中，还包括定时启动模块，所述定时启动模块用于接收所述制造执行系统发送的触发信息，根据所述触发信息触发所述第一获取模块获取所述搬运完工记录，并开始进行第一计时，以及当所述第一计时时长达到第一预设时间间隔后，触发所述第二获取模块获取所述货到机台记录。
  17. 如权利要求16所述的故障监测系统，其中，
    所述定时启动模块，还用于在所述比较模块判断所述搬运完工记录与所述货到机台记录为不对应时，经过第二预设时间间隔后触发所述第二获取模块重试获取所述货到机台记录，再触发所述比较模块对所述搬运完工记录与重试获取到的所述货到机台记录进行比较和判断，直至重试次数达到预设重试次数；
    所述异常通报模块，还用于在最后一次判断的结果仍为不对应时，生成并发送所述异常通报信息给所述监控平台。
  18. 如权利要求17所述的故障监测系统，其中，所述第二预设时间间隔的取值范围为5～15秒。
  19. 如权利要求17所述的故障监测系统，其中，所述预设重试次数的取值范围为3～8次。
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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114850162B (zh) * 2022-03-31 2024-02-20 上海哥瑞利软件股份有限公司 半导体12寸MES系统中FOUP Clean的自动化流程设计方法及系统
CN114978955A (zh) * 2022-04-13 2022-08-30 杭州悟川科技有限公司 一种基于物联网的工业设备健康监测系统
CN115472534A (zh) * 2022-09-09 2022-12-13 北京北方华创微电子装备有限公司 一种半导体设备及其控制方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101151197A (zh) * 2005-03-28 2008-03-26 亚仕帝科技股份有限公司 自动材料处理系统
US20090062954A1 (en) * 2007-08-29 2009-03-05 Promos Technologies Inc. Method and system for auto-dispatching lots in photolithography process
CN104181812A (zh) * 2013-05-20 2014-12-03 中芯国际集成电路制造(上海)有限公司 一种晶片货架提示方法、装置和系统
CN109755165A (zh) * 2017-11-08 2019-05-14 台湾积体电路制造股份有限公司 容器运送方法及仓储
CN110875222A (zh) * 2018-08-30 2020-03-10 台湾积体电路制造股份有限公司 设备前端装置及其操作方法
CN110957245A (zh) * 2018-09-27 2020-04-03 台湾积体电路制造股份有限公司 用于监测机台的系统及方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2240411A1 (de) * 1972-08-14 1974-03-07 Rohr Ind Numerische steuerung von werkzeugmaschinen mit kompensation der werkzeugabnutzung
JP3691371B2 (ja) * 2000-09-22 2005-09-07 株式会社日立製作所 半導体製造装置の清掃時期判断方法
US6778879B2 (en) * 2002-10-10 2004-08-17 Taiwan Semiconductor Manufacturing Co., Ltd Automated material handling system and method of use
TW200421142A (en) * 2003-04-11 2004-10-16 Hon Hai Prec Ind Co Ltd Cargo auto tracking system and method
US7440932B2 (en) * 2003-10-02 2008-10-21 International Business Machines Corporation Method and system for automating issue resolution in manufacturing execution and material control systems
JP2006293467A (ja) * 2005-04-06 2006-10-26 Hitachi Information Systems Ltd 障害監視システム
CN101446816B (zh) * 2007-11-27 2010-12-08 鸿富锦精密工业（深圳）有限公司 货物搬运预警系统及方法
JP5968705B2 (ja) * 2012-07-13 2016-08-10 ルネサスエレクトロニクス株式会社 半導体装置の製造方法
US9367882B2 (en) * 2012-08-07 2016-06-14 GlobalFoundries, Inc. Waferstart processes and systems for integrated circuit fabrication
US9915932B2 (en) * 2014-12-01 2018-03-13 Applied Materials, Inc. System and method for equipment monitoring using a group candidate baseline and probabilistic model
US10437412B2 (en) * 2016-06-10 2019-10-08 OneTrust, LLC Consent receipt management systems and related methods
CN106909129B (zh) * 2017-02-23 2019-10-18 惠科股份有限公司 一种搬运管理的方法及系统
CN107843827A (zh) * 2017-10-23 2018-03-27 上海斐讯数据通信技术有限公司 一种主板自动化测试控制装置、系统及方法
TWI658346B (zh) * 2017-11-13 2019-05-01 台灣積體電路製造股份有限公司 智慧型環境及安全監控方法及監控系統

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101151197A (zh) * 2005-03-28 2008-03-26 亚仕帝科技股份有限公司 自动材料处理系统
US20090062954A1 (en) * 2007-08-29 2009-03-05 Promos Technologies Inc. Method and system for auto-dispatching lots in photolithography process
CN104181812A (zh) * 2013-05-20 2014-12-03 中芯国际集成电路制造(上海)有限公司 一种晶片货架提示方法、装置和系统
CN109755165A (zh) * 2017-11-08 2019-05-14 台湾积体电路制造股份有限公司 容器运送方法及仓储
CN110875222A (zh) * 2018-08-30 2020-03-10 台湾积体电路制造股份有限公司 设备前端装置及其操作方法
CN110957245A (zh) * 2018-09-27 2020-04-03 台湾积体电路制造股份有限公司 用于监测机台的系统及方法

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