TW202505699A - Quad flat non-leaded package and manufacturing method thereof - Google Patents
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- 238000004806 packaging method and process Methods 0.000 claims description 64
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- 238000000034 method Methods 0.000 claims description 29
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- 229910052782 aluminium Inorganic materials 0.000 claims description 3
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- 238000005452 bending Methods 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
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Abstract
Description
本揭露是有關於一種四方扁平無引腳封裝及其製造方法。The present disclosure relates to a quad flat no-lead package and a method for manufacturing the same.
隨著電子產品的小型化,手持產品之市場不斷擴張。主要受手機及數位助理市場之驅動,所述裝置之製造商正面臨著產品體積壓縮以及更多類個人電腦功能之需求的挑戰。而額外增加之功能僅能藉由高性能之邏輯積體電路結合增加之記憶體容量來達成。為因應此種挑戰,更小之印製電路板將為表面黏著元件製造商設計產品帶來了壓力。As electronic products become smaller, the market for handheld products continues to expand. Driven primarily by the mobile phone and digital assistant markets, manufacturers of these devices are facing the challenge of product size compression and the need for more personal computer functions. The additional functions can only be achieved through high-performance logic integrated circuits combined with increased memory capacity. In response to this challenge, smaller printed circuit boards will put pressure on surface mount component manufacturers to design products.
現今手持產品市場中,許多廣泛使用之元件開始從有引腳形式向無引腳形式過渡。使得電子元件越來朝向節省印製電路板空間來設計。因此節省出的額外空間可用於配置附加的裝置功能所需之元件。In today's handheld product market, many widely used components are beginning to transition from pinned to pinless forms. This has led to electronic components being designed to save printed circuit board space. The extra space saved can be used to configure components required for additional device functions.
現行廣泛使用的四方平面無引腳封裝(QFN, Quad Flat No leads)或雙面無引腳封裝(DFN, Dual Flat No-Lead)等無引腳封裝結構大多是單面具有電連接墊,以作為對外連接的端子,因而只能進行平面式(2D)的封裝體上板作業,而無法執行立體(3D)的堆疊設置,導致此種封裝結構的功能及效能難以進一步擴充。Most of the widely used leadless package structures such as Quad Flat No Leads (QFN) or Dual Flat No-Lead (DFN) have electrical connection pads on one side as terminals for external connections. Therefore, they can only perform planar (2D) package mounting operations, but cannot perform three-dimensional (3D) stacking settings, making it difficult to further expand the functions and performance of this package structure.
本揭露提供一種半導體封裝及其製造方法,其可讓原本導線架型態的半導體封裝達到立體堆疊的目的,更可提升半導體封裝的功能及效能。The present disclosure provides a semiconductor package and a manufacturing method thereof, which can achieve the purpose of three-dimensional stacking of the original lead frame type semiconductor package and can also improve the function and performance of the semiconductor package.
本揭露的一種四方扁平無引腳封裝包括導線架、多個導電柱、晶片以及封裝膠體。導線架包括晶片座以及多個引腳。多個導電柱設置於多個引腳上並電性連接多個引腳,其中多個導電柱中的每一個包括底座部以及連接底座部的柱體部,且底座部的最大外徑實質上大於柱體部的最大外徑。晶片設置於晶片座上並電性連接多個引腳。封裝膠體包覆晶片、導線架以及多個導電柱,其中封裝膠體暴露多個引腳的下表面以及多個導電柱的頂表面。A square flat leadless package disclosed herein includes a lead frame, a plurality of conductive pillars, a chip, and a packaging resin. The lead frame includes a chip seat and a plurality of pins. The plurality of conductive pillars are arranged on the plurality of pins and electrically connected to the plurality of pins, wherein each of the plurality of conductive pillars includes a base portion and a column portion connected to the base portion, and the maximum outer diameter of the base portion is substantially larger than the maximum outer diameter of the column portion. The chip is arranged on the chip seat and electrically connected to the plurality of pins. The packaging resin covers the chip, the lead frame, and the plurality of conductive pillars, wherein the packaging resin exposes the lower surfaces of the plurality of pins and the top surfaces of the plurality of conductive pillars.
本揭露的一種四方扁平無引腳封裝的製造方法包括下列步驟。提供導線架,其中導線架包括晶片座以及多個引腳;以打線裝置於多個引腳的其中之一上形成導電柱,其中導電柱包括底座部以及連接底座部的柱體部,且底座部的最大外徑實質上大於柱體部的最大外徑;設置晶片於晶片座上並使晶片電性連接多個引腳;以及形成封裝膠體以包覆晶片、導線架以及導電柱。The present invention discloses a manufacturing method of a quad flat no-lead package, comprising the following steps: providing a lead frame, wherein the lead frame comprises a chip seat and a plurality of leads; forming a conductive column on one of the plurality of leads by a wire bonding device, wherein the conductive column comprises a base portion and a column portion connected to the base portion, and the maximum outer diameter of the base portion is substantially greater than the maximum outer diameter of the column portion; placing a chip on the chip seat and electrically connecting the chip to the plurality of leads; and forming a packaging resin to cover the chip, the lead frame and the conductive column.
基於上述,本揭露的四方扁平無引腳封裝以打線裝置於對應的引腳上形成導電柱,使導電柱的配置可依電性連接所需而具有可選擇性及可調整性的特性,依所需而形成於導線架的引腳上,將晶片設置於導線架的晶片座上,並使封裝膠體暴露引腳的下表面以及導電柱的頂表面。如此配置,被封裝膠體所暴露的引腳的下表面以及導電柱的頂表面可分別與其他的元件電性連接,因而使四方扁平無引腳封裝得以於封裝膠體的上下兩側分別堆疊其他的基板或封裝件,以達到立體堆疊的目的,更可提升半導體封裝的功能及效能。Based on the above, the quad flat leadless package disclosed in the present invention forms conductive posts on corresponding pins with a wire bonding device, so that the configuration of the conductive posts can have the characteristics of selectivity and adjustability according to the needs of electrical connection, and is formed on the pins of the lead frame according to needs, and the chip is placed on the chip seat of the lead frame, and the packaging colloid exposes the lower surface of the pins and the top surface of the conductive posts. In this configuration, the lower surface of the pins and the top surface of the conductive posts exposed by the packaging colloid can be electrically connected to other components respectively, so that the quad flat leadless package can be stacked with other substrates or packaging components on the upper and lower sides of the packaging colloid respectively to achieve the purpose of three-dimensional stacking, and can also improve the function and performance of the semiconductor package.
有關本揭露之前述及其他技術內容、特點與功效,在以下配合參考圖式之各實施例的詳細說明中,將可清楚的呈現。以下實施例中所提到的方向用語,例如:「上」、「下」、「前」、「後」、「左」、「右」等,僅是參考附加圖式的方向。因此,使用的方向用語是用來說明,而並非用來限制本揭露。並且,在下列各實施例中,相同或相似的元件將採用相同或相似的標號。The above-mentioned and other technical contents, features and effects of the present disclosure will be clearly presented in the detailed description of each embodiment with reference to the drawings below. The directional terms mentioned in the following embodiments, such as "up", "down", "front", "back", "left", "right", etc., are only referenced to the directions of the attached drawings. Therefore, the directional terms used are used for explanation, not for limiting the present disclosure. In addition, in the following embodiments, the same or similar components will adopt the same or similar reference numerals.
圖1至圖6是依照本揭露的一實施例的一種四方扁平無引腳封裝的製造方法的流程剖面示意圖。在一些實施例中,半導體封裝的製造方法可包括下列步驟。首先,請參照圖1,提供導線架110,其中,導線架110包括晶片座112以及多個引腳114。在本實施例中,引腳114可環繞晶片座112而設置於晶片座112的外圍。在一實施例中,導線架110可經由對金屬層進行蝕刻製程而形成圖案化之導線架。Figures 1 to 6 are schematic cross-sectional views of a process of manufacturing a quad flat leadless package according to an embodiment of the present disclosure. In some embodiments, the method for manufacturing a semiconductor package may include the following steps. First, please refer to Figure 1, and provide a
接著,請參照圖2,設置晶片140於晶片座112上,並使晶片140電性連接對應的引腳114。在一實施例中,晶片140可包括多個接點142,其可形成於晶片140的主動表面S1上。在本實施例中,晶片140可包括顯示驅動器電路積體電路(integrated circuit;IC)、影像感測器積體電路、記憶體積體電路、邏輯積體電路、類比積體電路、超高頻(ultra-high frequency;UHF)積體電路或射頻(radio frequency;RF)積體電路,但本揭露並不僅限於此。Next, referring to FIG. 2 , a
接著,請參照圖3,在本實施例中,晶片140可例如通過打線接合的方式設置於導線架110上並電性連接至對應的引腳114。具體來說,半導體封裝更可包括多條導線150,其中,晶片140包括具有多個接點142的主動表面S1以及相對於主動表面S1的背表面S2,且晶片140以背表面S2設置於晶片座112上,再以導線150連接於晶片140的接點142與導線架110的引腳114之間,以電性連接晶片140與導線架110。在本實施例中,晶片140可經由晶粒貼合膜(die attach film, DAF)貼附至晶片座112上。當然,本揭露並不限制晶片140設置於晶片座112上並與對應的引腳114電性連接的方法。Next, please refer to FIG. 3 . In the present embodiment, the
接著,請參照圖4,在本實施例中,以打線裝置105於多個引腳的至少其中之一上形成導電柱120,並使導電柱120電性連接對應的引腳114。在本實施例中,導電柱120包括底座部122以及連接底座部122的柱體部124,且底座部122的最大外徑D1實質上大於柱體部124的最大外徑D2。導電柱120可包括銅、金、銀、鈦、鎢、鋁及/或其類似物等適合的導電材料。在本實施例中,導電柱120為以打線裝置105所形成的銅導線或鋁導線。舉例而言,在本實施例中,形成導電柱120的方式可包括先以打線裝置105於引腳114上形成底座部122,並使打線裝置105往遠離此引腳114的方向移動預定距離,以形成連接底座部122並延伸此預定距離的柱體部124,也就是說,導電柱120的底座部122可為打線接合製程中的初始焊點,而柱體部124則可為打線接合製程中所形成的焊線,因此,底座部122的外徑D1會大於柱體部124的外徑D2。舉例而言,柱體部124的最大外徑D2實質上大於或等於10密耳(mil),但本揭露並不以此為限。Next, please refer to FIG. 4 . In the present embodiment, a
在一實施例中,導電柱120更可包括連接柱體部124的頂端部126,且頂端部126的最大外徑D3實質上大於柱體部124的最大外徑D2。舉例而言,在本實施例中,於打線裝置105形成柱體部124之後,可再以打線裝置105形成頂端部126於柱體部124上,也就是說,導電柱120的底座部122可為打線接合製程中的初始焊點,柱體部124可為打線接合製程中所形成的焊線,而頂端部126則可為打線接合製程中的終端焊點。因此,頂端部126的外徑D2會大於柱體部124的外徑D2,且柱體部124連接於底座部122與頂端部126之間。In one embodiment, the
值得注意的是,於前述實施例中,晶片140是先設置於晶片座112上,再以打線裝置105進行打線接合以將晶片140電性連接至引腳114,之後,再以打線裝置105形成導電柱120於對應之引腳114上,但本揭露並不限於此。於其它可行之實施例中,晶片140、導電柱120及接線接合之製程可視所需而調整製程順序。舉例來說,本揭露可先放置晶片140於晶片座112上,再以打線裝置105形成導電柱120於對應之引腳114上,之後,再以打線裝置105進行打線接合以將晶片140電性連接至引腳114。如此,亦屬於本揭露之運用範疇。It is worth noting that in the aforementioned embodiment, the
接著,請參照圖5,形成封裝膠體160以包覆晶片140、導線架110以及導電柱120。封裝膠體160可例如透過塑模(molding)製程而形成。在本實施例中,導線150也被包覆於封裝膠體160內。舉例而言,封裝膠體160可包括環氧樹脂(epoxy resin)。在本實施例中,封裝膠體160在此階段可以是全面性地包覆晶片140、導線150以及導電柱120(包括頂端部126),並且封裝膠體160的底表面164暴露晶片座112以及引腳114的下表面。Next, please refer to FIG. 5 , a
接著,請參照圖6,對封裝膠體160進行減薄製程,以使封裝膠體160暴露導電柱120的頂表面。在本實施例中,可利用減薄工具50對封裝膠體160進行化學機械拋光、雷射減薄及/或研磨等減薄製程,直到使封裝膠體160暴露頂端部126的頂表面為止。值得注意的是,為方便說明,於本實施例圖式中以研磨減薄方式做為範例示意。換句話說,本實施例可利用化學機械拋光、雷射減薄等減薄製程來移除導電柱120的頂表面上方的封裝膠體160,以使導電柱120的頂表面與封裝膠體160的上表面162實質上共平面。如此,封裝膠體160可至少暴露引腳114的下表面以及導電柱120的頂表面。Next, please refer to FIG. 6 , the
在本實施例中,研磨等減薄製程可進行至移除頂端部126的一部分,此經研磨的頂端部126的外徑D3實質上大於柱體部124的外徑D2,因而可增加導電柱120暴露於外的面積,進而增加之後與外部電子元件電性連接時的可接合面積。至此,四方扁平無引腳封裝100的製作方法可大致完成。In this embodiment, the thinning process such as grinding can be performed to remove a portion of the
在此必須說明的是,後續各實施例的四方扁平無引腳封裝與前述實施例的四方扁平無引腳封裝相似,因此,後述各實施例沿用前述實施例的元件標號與部分內容,其中採用相同的標號來表示相同或近似的元件,並且省略了相同技術內容的說明。關於省略部分的說明可參考前述實施例,各實施例不再重複贅述。It must be noted here that the quad flat no-pin package of each subsequent embodiment is similar to the quad flat no-pin package of the aforementioned embodiment, and therefore, each subsequent embodiment uses the component numbers and part of the content of the aforementioned embodiment, wherein the same number is used to represent the same or similar components, and the description of the same technical content is omitted. The description of the omitted part can refer to the aforementioned embodiment, and each embodiment will not be repeated.
圖7是依照本揭露的一實施例的一種四方扁平無引腳封裝的剖面示意圖。在本實施例中,形成導電柱120a的方法可包括以打線裝置於相應的引腳114上形成彼此堆疊的多個(子)導電柱1201、1202,其中,多個導電柱1201、1202中的每一個包括底座部122以及連接底座部122的柱體部124,且底座部122的最大外徑D1實質上大於柱體部124的最大外徑D2。舉例而言,在本實施例中,形成導電柱120a的方式可例如先以打線裝置於引腳114上形成導電柱1201的底座部122,並使打線裝置往遠離此引腳114的方向移動預定距離,以形成連接底座部122並延伸此預定距離的導電柱1201的柱體部124。接著,再以打線裝置於導電柱1201的柱體部124上形成導電柱1202的底座部122,並使打線裝置往遠離底座部122的方向移動預定距離,以形成連接底座部122並延伸此預定距離的導電柱1202的柱體部124。本實施例僅繪示兩個彼此堆疊的子導電柱1201、1202,然而,在其他實施例中,導電柱120a可由兩個以上的子導電柱彼此堆疊而成。子導電柱的數量可取決於四方扁平無引腳封裝100a的高度,本揭露並不侷限於此。FIG7 is a cross-sectional view of a quad flat no-lead package according to an embodiment of the present disclosure. In this embodiment, the method of forming the conductive pillar 120a may include forming a plurality of (sub) conductive pillars 1201 and 1202 stacked on each other on the corresponding
圖8是依照本揭露的一實施例的一種四方扁平無引腳封裝的剖面示意圖。圖8A是圖8的四方扁平無引腳封裝的局部上視示意圖。在此必須說明的是,以下圖式所揭示的導電柱數量為方便說明,於示意圖上僅繪製示意為一組,而並非用來限制本揭露之導電柱數量。請同時參照圖8及圖8A,在本實施例中,形成如圖8所示的導電柱120b的方法包括以打線裝置於相應的引腳上形成底座部122,並往遠離相應的引腳114的方向移動預定距離以形成第一柱體部1241,之後再移動回相應的引腳114以形成彎折部1242以及第二柱體部1243。如此,柱體部由底座部122往上延伸預定距離並經彎折而往下延伸至對應的引腳114上。詳細而言,從結構上來看,底座部122設置於對應的引腳114上,且柱體部由底座部122往上延伸至封裝膠體160的上表面,再經彎折而由封裝膠體160的上表面往下延伸至對應的引腳114上。在本實施例中,底座部122的外徑D1實質上大於柱體部1241、1243的外徑D2。並且,在形成封裝膠160後,可對封裝膠體160進行減薄製程,以使封裝膠體160暴露導電柱120b的彎折部1242的頂表面。FIG8 is a schematic cross-sectional view of a square flat no-pin package according to an embodiment of the present disclosure. FIG8A is a schematic top view of a portion of the square flat no-pin package of FIG8 . It must be noted here that the number of conductive posts disclosed in the following figures is only shown as a group in the schematic diagram for the convenience of explanation, and is not used to limit the number of conductive posts disclosed in the present disclosure. Please refer to FIG8 and FIG8A at the same time. In the present embodiment, the method of forming the
圖8B是依照本揭露的一實施例的一種四方扁平無引腳封裝的剖面示意圖。圖8C是圖8B的四方扁平無引腳封裝的局部上視示意圖。Fig. 8B is a cross-sectional schematic diagram of a quad flat no-lead package according to an embodiment of the present disclosure. Fig. 8C is a partial top view schematic diagram of the quad flat no-lead package of Fig. 8B.
請同時參照圖8B及圖8C,在本實施例中,可再進一步對如圖8所示的封裝結構的封裝膠體160及導電柱進行減薄製程,直到移除如圖8所示的彎折部1242而暴露出柱體部1241、1243的頂表面。從結構的角度上來看,導電柱120c的底座部包括第一底座部122以及第二底座部125,柱體部包括連接第一底座部122的第一柱體部1241以及連接第二底座部125的第二柱體部1243,且封裝膠體160暴露第一柱體部1241以及第二柱體部1243的頂表面。並且,第一底座部122以及第二底座部125的最大外徑實質上大於第一柱體部1241以及第二柱體部1243的最大外徑。值得說明的是,第一柱體部1241及第二柱體部1243的頂表面暴露於封裝膠體160表面上,可做為導電端子以供產品3D堆疊運用或是再進一步製作重佈線(RDL)製程,實際運用可依產品需求而定,不以此為限。Please refer to FIG. 8B and FIG. 8C at the same time. In this embodiment, the
圖9是依照本揭露的一實施例的四方扁平無引腳封裝的剖面示意圖。在本實施例中,可再進一步對如圖6所示的封裝結構的封裝膠體160及導電柱進行減薄製程,直到移除導電柱的整個頂端部126為止,以暴露出柱體部124的頂表面。從結構的角度上來看,底座部122設置於對應的引腳114上,且柱體部122由底座部122往上延伸至暴露於封裝膠體160的上表面。在本實施例中,底座部122的外徑D1實質上大於柱體部124的外徑D2。FIG9 is a cross-sectional schematic diagram of a square flat leadless package according to an embodiment of the present disclosure. In this embodiment, the
圖10是依照本揭露的一實施例的具有四方扁平無引腳封裝的半導體封裝結構的剖面示意圖。圖10之後的導電柱皆以圖6的導電柱型態繪示,但本領域具有通常知識者應了解,前述的所有實施例的導電柱型態皆可應用於後續所教示的所有四方扁平無引腳封裝中。FIG10 is a cross-sectional view of a semiconductor package structure having a quad flat no-lead package according to an embodiment of the present disclosure. The conductive posts after FIG10 are all depicted in the conductive post type of FIG6 , but a person skilled in the art should understand that the conductive post types of all the aforementioned embodiments can be applied to all quad flat no-lead packages taught in the following.
請參照圖6及圖10,在一些實施例中,由上述製程所形成的四方扁平無引腳封裝100的封裝膠體160至少暴露了引腳114的下表面以及導電柱120的頂表面,因此,四方扁平無引腳封裝100可於其上下兩側在分別與其他的元件電性連接。舉例而言,在圖10的實施例中,可再將基板200設置於四方扁平無引腳封裝100的封裝膠體160的底表面,並與引腳114形成電性連接。在一實施例中,基板200包括多個電性接點232,其分別與被封裝膠體160所暴露的引腳114的下表面連接,以形成如圖10所示的半導體封裝10。6 and 10, in some embodiments, the
在本實施例中,基板200更可包括多個電性導通孔234以及多個電性接點236,其中,電性接點232與電性接點236可分別設置於基板200的相對兩表面,而電性導通孔234則可延伸通過基板200以電性連接於電性接點232與電性接點236之間,如此,電性接點232、電性導通孔234與電性接點236等導電元件可共同組成電傳導路徑230,以電性連通基板200的相對兩表面。在本實施例中,基板200可包括電路板、中介板(interposer)、晶圓等可與封裝件電性連接的電子元件。In the present embodiment, the substrate 200 may further include a plurality of electrical vias 234 and a plurality of electrical contacts 236, wherein the electrical contacts 232 and the electrical contacts 236 may be respectively disposed on two opposite surfaces of the substrate 200, and the electrical vias 234 may extend through the substrate 200 to electrically connect between the electrical contacts 232 and the electrical contacts 236. Thus, the electrical contacts 232, the electrical vias 234, the electrical contacts 236 and other conductive elements may together form an electrical conductive path 230 to electrically connect two opposite surfaces of the substrate 200. In the present embodiment, the substrate 200 may include electronic elements such as a circuit board, an interposer, and a wafer that may be electrically connected to a package.
圖11是依照本揭露的一實施例的具有四方扁平無引腳封裝的半導體封裝結構的剖面示意圖。在本實施例中,半導體封裝結構10a更可包括封裝件100’,其設置於封裝膠體160的頂表面,且封裝件100’包括多個電性接點170,分別與被封裝膠體160所暴露的導電柱120的頂表面連接。在本實施例中,封裝件100’可與四方扁平無引腳封裝100的結構大致相似(也包括導線架、晶片、導線、封裝膠體等元件)。然而,在其他實施例中,封裝件100’也可以是與四方扁平無引腳封裝100的結構完全不同的封裝件,只要其電性接點170可與四方扁平無引腳封裝100的導電柱120電性連接即可。FIG11 is a cross-sectional schematic diagram of a semiconductor package structure having a quad flat no-lead package according to an embodiment of the present disclosure. In this embodiment, the semiconductor package structure 10a may further include a package 100', which is disposed on the top surface of the
圖12是依照本揭露的一實施例的具有四方扁平無引腳封裝的半導體封裝結構的剖面示意圖。在本實施例中,半導體封裝10b的封裝件300可以是與四方扁平無引腳封裝100的結構完全不同的封裝件。封裝件300可包括上基板310、上晶片320、上凸塊330以及上封裝膠體340等元件。具體而言,上晶片320設置於上基板310上,並可例如透過覆晶接合的方式通過上凸塊330與上基板310電性連接。上封裝膠體340設置於上基板310上並包封上晶片320與上凸塊330於其內。FIG. 12 is a schematic cross-sectional view of a semiconductor package structure having a quad flat no-lead package according to an embodiment of the present disclosure. In this embodiment, the package 300 of the semiconductor package 10b may be a package having a structure completely different from that of the quad flat no-lead package 100. The package 300 may include components such as an upper substrate 310, an upper chip 320, an upper bump 330, and an upper packaging colloid 340. Specifically, the upper chip 320 is disposed on the upper substrate 310 and may be electrically connected to the upper substrate 310 through the upper bump 330, for example, by flip chip bonding. The upper packaging colloid 340 is disposed on the upper substrate 310 and encapsulates the upper chip 320 and the upper bump 330 therein.
在一實施例中,疊設於四方扁平無引腳封裝100上的封裝件300可例如包括記憶體裝置等半導體裝置,所述半導體裝置可例如用於為四方扁平無引腳封裝100內的晶片140提供所儲存的資料。在此種實施例中,晶片140可包括記憶體控制模組,所述記憶體控制模組可對封裝件300的記憶體裝置提供控制功能。然而,本實施例僅用以舉例說明,本揭露並不限制疊設於四方扁平無引腳封裝100上的封裝件的種類與功能。In one embodiment, the package 300 stacked on the quad flat no-lead package 100 may include, for example, a semiconductor device such as a memory device, which may be used, for example, to provide stored data to the
圖13是依照本揭露的一實施例的一種四方扁平無引腳封裝的部分元件的上視示意圖。請參照圖13,在本實施例中,引腳114包括多個第一引腳1141以及至少一第二引腳1142,其中,多個導電柱120分別形成於多個第一引腳1141上。在一實施例中,導電柱120不形成於第二引腳1142上。也就是說,導電柱120並非設置於所有的引腳114上,而是依實際電性需求而具選擇性地設置於部分的引腳114上,在電路設計上具有可調整的彈性。此外,在本實施例中,晶片140的接點142可沿著晶片140的相對兩側而設置,而引腳114及對應的導電柱120也對應地位於晶片140的相對兩側,使其可經由導線150分別與對應的接點142連接。然而,在其他實施例中,晶片140的接點142也可環繞晶片140的所有邊緣而設置,例如沿著晶片140的四個側邊而設置。如此,引腳114及對應的導電柱120也對應地環繞晶片140的四周而設置,使其可經由導線150分別與對應的接點142連接。本揭露並不局限於此。FIG13 is a schematic top view of some components of a quad flat leadless package according to an embodiment of the present disclosure. Referring to FIG13 , in this embodiment, the
圖14是依照本揭露的一實施例的四方扁平無引腳封裝的剖面示意圖。請先參照圖14,在本實施例中,晶片140是經由覆晶接合的方式設置於晶片座112a上。具體而言,晶片座112a是由多個引腳114a分別往導線架110a的中央區域延伸的多個延伸部112a所組成,且晶片140的多個接點分別連接多個延伸部112a。換句話說,導線架110a包括多個引腳114a環繞導線架110a的中心點設置,且各個引腳114a包括往此中心點的方向延伸的延伸部112a。這些環繞此中心點的延伸部112a共同組成供晶片140設置的晶片座112a。如此,晶片140便可經由多個凸塊180以覆晶接合的方式設置於晶片座112上。FIG. 14 is a cross-sectional schematic diagram of a quad flat leadless package according to an embodiment of the present disclosure. Please refer to FIG. 14 first. In this embodiment, a
圖15是依照本揭露的一實施例的四方扁平無引腳封裝的剖面示意圖。請參照圖15,在本實施例中,設置於導線架110a上的晶片可包括彼此堆疊的多個晶片140a、140b。並且,晶片140a、140b是例如通過覆晶接合的方式彼此堆疊而設置於導線架110a的晶片座112a上。在本實施例中,晶片140a是經由多個凸塊180接合於晶片座112a(多個引腳114a的多個延伸部)上,而晶片140b是經由多個凸塊180接合於晶片140a上。當然,本揭露並不限制晶片140a、140b設置於晶片座112a上的方法。FIG. 15 is a cross-sectional schematic diagram of a quad flat leadless package according to an embodiment of the present disclosure. Referring to FIG. 15 , in the present embodiment, the chip disposed on the
綜上所述,本揭露的四方扁平無引腳封裝以打線裝置於對應的引腳上形成導電柱,使導電柱的配置可依電性連接所需而具有可選擇性及可調整性的特性,依所需而形成於導線架的引腳上,將晶片設置於導線架的晶片座上,並使封裝膠體暴露引腳的下表面以及導電柱的頂表面。如此配置,被封裝膠體所暴露的引腳的下表面以及導電柱的頂表面可分別與其他的元件電性連接,因而使四方扁平無引腳封裝得以於封裝膠體的上下兩側分別堆疊其他的基板或封裝件,以達到立體堆疊的目的,更可提升半導體封裝的功能及效能。In summary, the quad flat leadless package disclosed herein forms conductive posts on corresponding pins with a wire bonding device, so that the configuration of the conductive posts can be selective and adjustable according to the needs of electrical connection, and is formed on the pins of the lead frame as required, and a chip is placed on the chip seat of the lead frame, and the packaging colloid exposes the lower surface of the pins and the top surface of the conductive posts. With such a configuration, the lower surface of the pins and the top surface of the conductive posts exposed by the packaging colloid can be electrically connected to other components respectively, so that the quad flat leadless package can be stacked with other substrates or packaging components on the upper and lower sides of the packaging colloid respectively to achieve the purpose of three-dimensional stacking, and can also enhance the function and performance of the semiconductor package.
10、10a、10b:半導體封裝
50:減薄工具
100、100a、100b、100c、100d、100e:四方扁平無引腳封裝
100’、300:封裝件
105:打線裝置
110、110a:導線架
112、112a:晶片座
112a:延伸部
114、114a:引腳
1141:第一引腳
1142:第二引腳
120、120a、120b、120c:導電柱
1201、1202:子導電柱、導電柱
122:底座部、第一底座部
124:柱體部
1241:第一柱體部、柱體部
1243:第二柱體部、柱體部
1242:彎折部
125:第二底座部
126:頂端部
140、140a、140b:晶片
142:接點
150:導線
160:封裝膠體
162:上表面
164:底表面
180:凸塊
200:基板
230:電傳導路徑
232、236、170:電性接點
234:電性導通孔
310:上基板
320:上晶片
330:上凸塊
340:上封裝膠體
S1:主動表面
S2:背表面
D1、D2、D3:外徑
10, 10a, 10b: semiconductor package
50: thinning
圖1至圖6是依照本揭露的一實施例的一種四方扁平無引腳封裝的製造方法的流程剖面示意圖。 圖7是依照本揭露的一實施例的一種四方扁平無引腳封裝的剖面示意圖。 圖8是依照本揭露的一實施例的一種四方扁平無引腳封裝的剖面示意圖。 圖8A是圖8的四方扁平無引腳封裝的局部上視示意圖。 圖8B是依照本揭露的一實施例的一種四方扁平無引腳封裝的剖面示意圖。 圖8C是圖8B的四方扁平無引腳封裝的局部上視示意圖。 圖9是依照本揭露的一實施例的四方扁平無引腳封裝的剖面示意圖。 圖10至圖12是依照本揭露的不同實施例的具有四方扁平無引腳封裝的半導體封裝結構的剖面示意圖。 圖13是依照本揭露的一實施例的一種四方扁平無引腳封裝的部分元件的上視示意圖。 圖14及圖15是依照本揭露的不同實施例的四方扁平無引腳封裝的剖面示意圖。 Figures 1 to 6 are schematic cross-sectional views of a manufacturing method of a quad flat pinless package according to an embodiment of the present disclosure. Figure 7 is a schematic cross-sectional view of a quad flat pinless package according to an embodiment of the present disclosure. Figure 8 is a schematic cross-sectional view of a quad flat pinless package according to an embodiment of the present disclosure. Figure 8A is a partial top view of the quad flat pinless package of Figure 8. Figure 8B is a schematic cross-sectional view of a quad flat pinless package according to an embodiment of the present disclosure. Figure 8C is a partial top view of the quad flat pinless package of Figure 8B. Figure 9 is a schematic cross-sectional view of a quad flat pinless package according to an embodiment of the present disclosure. Figures 10 to 12 are schematic cross-sectional views of semiconductor package structures having quad flat no-lead packages according to different embodiments of the present disclosure. Figure 13 is a schematic top view of some components of a quad flat no-lead package according to an embodiment of the present disclosure. Figures 14 and 15 are schematic cross-sectional views of quad flat no-lead packages according to different embodiments of the present disclosure.
50:減薄工具 50: Thinning tool
100:四方扁平無引腳封裝 100:Quad Flat No-Pin Package
110:導線架 110: Conductor frame
112:晶片座 112: Wafer holder
114:引腳 114: Pins
120:導電柱 120: Conductive column
122:底座部 122: Base part
124:柱體部 124: Column part
126:頂端部 126: Top end
140:晶片 140: Chip
150:導線 150: Conductor wire
160:封裝膠體 160: Packaging colloid
162:上表面 162: Upper surface
164:底表面 164: Bottom surface
D1、D2、D3:外徑 D1, D2, D3: outer diameter
Claims (23)
Priority Applications (2)
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TW112127644A TWI867633B (en) | 2023-07-24 | 2023-07-24 | Quad flat non-leaded package and manufacturing method thereof |
CN202311242491.6A CN119361560A (en) | 2023-07-24 | 2023-09-25 | Quad flat no-lead package and method of manufacturing the same |
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TW112127644A TWI867633B (en) | 2023-07-24 | 2023-07-24 | Quad flat non-leaded package and manufacturing method thereof |
Publications (2)
Publication Number | Publication Date |
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TWI867633B TWI867633B (en) | 2024-12-21 |
TW202505699A true TW202505699A (en) | 2025-02-01 |
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Country Status (2)
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CN (1) | CN119361560A (en) |
TW (1) | TWI867633B (en) |
Family Cites Families (1)
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TWI762046B (en) * | 2020-11-24 | 2022-04-21 | 恆勁科技股份有限公司 | Semiconductor package structure and manufacturing method thereof |
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2023
- 2023-07-24 TW TW112127644A patent/TWI867633B/en active
- 2023-09-25 CN CN202311242491.6A patent/CN119361560A/en active Pending
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