TW201301968A - Substrate structure and manufacturing method thereof - Google Patents
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- TW201301968A TW201301968A TW100121417A TW100121417A TW201301968A TW 201301968 A TW201301968 A TW 201301968A TW 100121417 A TW100121417 A TW 100121417A TW 100121417 A TW100121417 A TW 100121417A TW 201301968 A TW201301968 A TW 201301968A
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- 239000000758 substrate Substances 0.000 title claims abstract description 128
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 238000000034 method Methods 0.000 claims abstract description 21
- 230000003287 optical effect Effects 0.000 claims abstract description 13
- 238000007650 screen-printing Methods 0.000 claims abstract description 8
- 239000011248 coating agent Substances 0.000 claims description 167
- 238000000576 coating method Methods 0.000 claims description 167
- 229910052751 metal Inorganic materials 0.000 claims description 57
- 239000002184 metal Substances 0.000 claims description 57
- 229920002120 photoresistant polymer Polymers 0.000 claims description 23
- 238000005530 etching Methods 0.000 claims description 9
- 239000003513 alkali Substances 0.000 claims description 4
- 238000004945 emulsification Methods 0.000 claims description 4
- 239000002253 acid Substances 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 3
- 238000007639 printing Methods 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 20
- 239000002245 particle Substances 0.000 description 10
- 239000011247 coating layer Substances 0.000 description 9
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 6
- 238000004528 spin coating Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 239000004408 titanium dioxide Substances 0.000 description 3
- 239000006229 carbon black Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000008199 coating composition Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000004108 freeze drying Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
Description
本發明是有關於一種基板結構及其製作方法,且特別是有關於一種具有較佳可靠度的基板結構及其製作方法。The invention relates to a substrate structure and a manufacturing method thereof, and in particular to a substrate structure with better reliability and a manufacturing method thereof.
於一透明基材上形成一黑框的方法,早期是採用旋轉塗佈(spinning coating)的方式。首先,於透明基材上塗佈一油墨塗層,其中油墨塗層會全面性地覆蓋透明基材。接著,透過中低溫預烘烤方法,以使油墨塗層中的部分溶劑揮發,接著,再經由底片曝光與鹼液乳化顯影的方式,來形成一圖案化油墨塗層,此即為黑框(意即銘板用油墨)。此圖案化油墨塗層是位於局部透明基材上或透明基材的表面周圍區域,且此圖案化油墨塗層具有一高遮蔽率與不透光之特性。A method of forming a black frame on a transparent substrate was preceded by a spin coating method. First, an ink coating is applied to the transparent substrate, wherein the ink coating covers the transparent substrate in a comprehensive manner. Then, through a medium-low temperature pre-baking method, a part of the solvent in the ink coating is volatilized, and then a patterning ink coating is formed through the film exposure and lyophilization development, which is a black frame ( Intentional ink for the nameplate). The patterned ink coating is located on a partially transparent substrate or a region around the surface of the transparent substrate, and the patterned ink coating has a high shielding rate and an opaque property.
由於習知是先將油墨塗層優先地全面性覆蓋於透明基材上,再透過曝光與乳化顯影的方式來移除部份的油墨塗層,以形成最佳圖案化油墨塗層。然因此黑框(意即銘板用油墨)的製作流程較為複雜,且其所採用的油墨材料的消耗成本也相對較高。再者,由於習知所採用之油墨塗層的表面硬度不夠,且該油墨塗層亦不能承受200℃以上之高溫製程,因而限制了後續產品的應用性。Since it is conventional to firstly cover the ink coating on a transparent substrate in a comprehensive manner, a part of the ink coating is removed by exposure and emulsification to form an optimal patterned ink coating. However, the manufacturing process of the black frame (meaning the ink for the nameplate) is complicated, and the consumption cost of the ink material used is relatively high. Moreover, since the surface hardness of the ink coating used in the prior art is insufficient, and the ink coating cannot withstand the high temperature process of 200 ° C or higher, the applicability of the subsequent products is limited.
本發明提供一種基板結構,其具有用以改善習知之缺陷,並可以提高產品的可靠度及應用性。The present invention provides a substrate structure having the advantages of improving conventional defects and improving the reliability and applicability of the product.
本發明提供一種基板結構的製作方法,用以製作上述之基板結構。The invention provides a method for fabricating a substrate structure for fabricating the above substrate structure.
本發明提出一種基板結構的製作方法,其包括下述步驟。提供一透明基材,其中透明基材具有一表面。進行一網版印刷步驟,以形成一圖案化油墨塗層於透明基材的表面上。圖案化油墨塗層位於透明基材的部分表面,且圖案化油墨塗層的熱溫度介於250℃至450℃之間,且圖案化油墨塗層的光學密度大於等於3.5。The invention provides a method for fabricating a substrate structure, which comprises the following steps. A transparent substrate is provided wherein the transparent substrate has a surface. A screen printing step is performed to form a patterned ink coating on the surface of the transparent substrate. The patterned ink coating is on a portion of the surface of the transparent substrate, and the patterned ink coating has a thermal temperature between 250 ° C and 450 ° C and the patterned ink coating has an optical density greater than or equal to 3.5.
在本發明之一實施例中,上述之圖案化油墨塗層的鉛筆硬度規格大於6H。In one embodiment of the invention, the patterned ink coating has a pencil hardness specification greater than 6H.
在本發明之一實施例中,上述之圖案化油墨塗層的厚度約介於3微米至20微米之間。In one embodiment of the invention, the patterned ink coating has a thickness between about 3 microns and 20 microns.
在本發明之一實施例中,上述之圖案化油墨塗層的顏色包括黑色、白色、紅色、灰色、綠色、藍色或黃色。In an embodiment of the invention, the color of the patterned ink coating comprises black, white, red, gray, green, blue or yellow.
在本發明之一實施例中,上述之圖案化油墨塗層的邊緣與透明基材的表面之間具有一油墨夾角,且油墨夾角介於7度至45度之間。In an embodiment of the invention, the edge of the patterned ink coating and the surface of the transparent substrate have an ink angle, and the ink angle is between 7 and 45 degrees.
在本發明之一實施例中,上述於形成圖案化油墨塗層之後,形成一透明之金屬導電塗層於透明基材上,其中透明之金屬導電塗層會同時覆蓋在透明基材的表面與圖案化之油墨塗層上。接著,形成一光阻層於透明金屬導電塗層上,再對光阻層進行一圖像曝光及鹼液乳化顯影步驟,以形成一圖案化光阻層。以圖案化光阻層為一蝕刻罩幕,以蝕刻圖案化之光阻層外的透明金屬導電塗層,以形成一圖案化透明金屬導電塗層。之後,移除圖案化光阻層,而暴露出圖案化透明金屬導電塗層。In an embodiment of the invention, after forming the patterned ink coating layer, a transparent metal conductive coating is formed on the transparent substrate, wherein the transparent metal conductive coating covers the surface of the transparent substrate simultaneously Patterned ink coating. Next, a photoresist layer is formed on the transparent metal conductive coating, and then an image exposure and alkali emulsification development step is performed on the photoresist layer to form a patterned photoresist layer. The patterned photoresist layer is an etch mask to etch a transparent metal conductive coating outside the patterned photoresist layer to form a patterned transparent metal conductive coating. Thereafter, the patterned photoresist layer is removed to expose the patterned transparent metal conductive coating.
在本發明之另一實施例中,上述於形成圖案化油墨塗層之後,形成一透明金屬導電塗層於透明基材上,其中透明金屬導電塗層同時覆蓋在透明基材的表面與圖案化油墨塗層上。接著,印刷一圖案化蝕刻膏塗層於透明金屬導電塗層上,並接續進行一烘烤步驟,以加速圖案化蝕刻膏塗層與透明金屬導電塗層的反應,並移除圖案化蝕刻膏塗層之底部的透明金屬導電塗層。之後,以圖案化蝕刻塗膏層為一酸蝕刻罩幕,移除圖案蝕刻膏塗層內之的透明金屬導電塗層,以形成一圖案化透明金屬導電塗層。最後,進行一清洗步驟並移除圖案化蝕刻膏塗層,而暴露出圖案化透明金屬導電塗層。In another embodiment of the present invention, after forming the patterned ink coating layer, a transparent metal conductive coating is formed on the transparent substrate, wherein the transparent metal conductive coating simultaneously covers the surface of the transparent substrate and is patterned. On the ink coating. Next, a patterned etching paste is printed on the transparent metal conductive coating, and a baking step is successively performed to accelerate the reaction of the patterned etching paste coating and the transparent metal conductive coating, and remove the patterned etching paste. A transparent metallic conductive coating on the bottom of the coating. Thereafter, the patterned etching paste layer is an acid etching mask to remove the transparent metal conductive coating in the pattern etching paste coating to form a patterned transparent metal conductive coating. Finally, a cleaning step is performed and the patterned etch paste coating is removed to expose the patterned transparent metal conductive coating.
本發明還提出一種基板結構,其包括一透明基材以及一圖案化油墨塗層。透明基材具有一表面。圖案化油墨塗層配置於透明基材上,且位於部分表面上。圖案化油墨塗層的耐熱溫度介於250℃至450℃之間,且圖案化油墨塗層的光學密度大於3.5以上。The present invention also provides a substrate structure comprising a transparent substrate and a patterned ink coating. The transparent substrate has a surface. The patterned ink coating is disposed on a transparent substrate and is located on a portion of the surface. The patterned ink coating has a heat resistant temperature between 250 ° C and 450 ° C and the patterned ink coating has an optical density greater than 3.5.
在本發明之一實施例中,上述之圖案化油墨塗層的鉛筆硬度規格大於6H。In one embodiment of the invention, the patterned ink coating has a pencil hardness specification greater than 6H.
在本發明之一實施例中,上述之圖案化油墨塗層的厚度介於3微米至20微米之間。In one embodiment of the invention, the patterned ink coating has a thickness between 3 microns and 20 microns.
在本發明之一實施例中,上述之圖案化油墨塗層的顏色包括黑色、白色、紅色、灰色、綠色、藍色或黃色。In an embodiment of the invention, the color of the patterned ink coating comprises black, white, red, gray, green, blue or yellow.
在本發明之一實施例中,上述之圖案化油墨塗層的邊緣,與透明基材的表面之間具有一油墨夾角,且油墨夾角介於7度至45度之間。In an embodiment of the invention, the edge of the patterned ink coating has an ink angle with the surface of the transparent substrate, and the ink angle is between 7 and 45 degrees.
在本發明之一實施例中,上述之基板結構更包括一圖案化透明金屬導電塗層,配置於透明基材的表面上。In an embodiment of the invention, the substrate structure further includes a patterned transparent metal conductive coating disposed on a surface of the transparent substrate.
基於上述,由於本發明之基板結構的製作方法是採用網版印刷的方式,於任一透明基材上形成圖案化油墨塗層,相較於習知所採用旋轉塗佈、曝光與顯影的方式來形成圖案化油墨塗層而言,本發明之基板結構的製作方法及其製作流程較為簡單,且製造成本也較為低廉。再者,由於本發明之圖案化油墨塗層可承受之耐熱溫度介於250℃至450℃之間,且圖案化油墨塗層具有高光源遮蔽率,其的光學密度大於3.5以上。因此可增加後續基板結構的加值運用,例如是形成一具有觸控功能的基板結構,並可提高製程良率與產品的可靠度。Based on the above, since the substrate structure of the present invention is formed by screen printing, a patterned ink coating is formed on any transparent substrate, which is compared with the conventional method of spin coating, exposure and development. In order to form a patterned ink coating, the manufacturing method of the substrate structure of the present invention and the manufacturing process thereof are relatively simple, and the manufacturing cost is also low. Furthermore, since the patterned ink coating of the present invention can withstand a heat resistant temperature of between 250 ° C and 450 ° C, and the patterned ink coating has a high light source masking ratio, its optical density is greater than 3.5. Therefore, the value-added operation of the subsequent substrate structure can be increased, for example, forming a substrate structure with a touch function, and the process yield and product reliability can be improved.
為讓本發明之上述特徵和優點能更為明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。The above described features and advantages of the present invention will be more apparent from the following description.
圖1A至圖1H為本發明之一實施例之一種基板結構的製作方法的示意圖。在此必須說明的是,為了方便說明起見,圖1A與圖1B分別繪示為透明基材110與基板結構100a的俯視示意圖,而圖1C至圖1H則繪示為基板結構100a及基板結構100b之製作步驟的剖面示意圖。請先參考圖1A,依照本實施例的基板結構100a的製作方法,首先,提供一透明基材110,其中透明基材110具有一表面112。在本實施例中,透明基材110例如是一塑膠基板、一玻璃基板或是一可撓性基板。於此,本發明對於透明基材110之材質不作任何限制。1A to 1H are schematic views showing a method of fabricating a substrate structure according to an embodiment of the present invention. It should be noted that, for convenience of description, FIG. 1A and FIG. 1B are respectively a schematic plan view of the transparent substrate 110 and the substrate structure 100a, and FIGS. 1C to 1H illustrate the substrate structure 100a and the substrate structure. A schematic cross-sectional view of the fabrication steps of 100b. Referring to FIG. 1A , in accordance with the method for fabricating the substrate structure 100 a of the present embodiment, first, a transparent substrate 110 is provided, wherein the transparent substrate 110 has a surface 112 . In the embodiment, the transparent substrate 110 is, for example, a plastic substrate, a glass substrate or a flexible substrate. Herein, the present invention does not impose any limitation on the material of the transparent substrate 110.
接著,請同時參考圖1B與圖1C,進行一網版印刷步驟,以形成一圖案化油墨塗層120於透明基材110的表面112上,其中圖案化油墨塗層120位於透明基材110之表面112的周圍。特別是,圖案化油墨塗層120可承受之耐熱溫度介於250℃至450℃之間,且圖案化油墨塗層120的光學密度大於3.5以上。此外,圖案化油墨塗層120的邊緣與透明基材110的表面112之間具有一夾角θ,且夾角θ例如是介於7度至45度之間。並且,本實施例之圖案化油墨塗層120的鉛筆硬度規格大於6H以上,且圖案化油墨塗層120的厚度T例如是介於3微米至20微米之間。Next, referring to FIG. 1B and FIG. 1C, a screen printing step is performed to form a patterned ink coating layer 120 on the surface 112 of the transparent substrate 110, wherein the patterned ink coating layer 120 is located on the transparent substrate 110. The periphery of the surface 112. In particular, the patterned ink coating 120 can withstand a heat resistant temperature between 250 ° C and 450 ° C, and the patterned ink coating 120 has an optical density greater than 3.5. Further, the edge of the patterned ink coating 120 and the surface 112 of the transparent substrate 110 have an angle θ, and the included angle θ is, for example, between 7 and 45 degrees. Moreover, the pencil hardness specification of the patterned ink coating 120 of the present embodiment is greater than 6H, and the thickness T of the patterned ink coating 120 is, for example, between 3 micrometers and 20 micrometers.
值得一提的是,本實施例之圖案化油墨塗層120的顏色可為黑色或白色。舉例來說,當圖案化油墨塗層120的顏色為黑色時,此圖案化油墨塗層120可包括多個碳黑顆粒(未繪示)以及多個鈦白粉粉末顆粒(未繪示)組成,其中碳黑顆粒的粒徑約為0.02~0.08微米,而鈦白粉粉末顆粒的粒徑約為0.3~0.7微米。透過這些不同大小的顆粒經由與樹脂包覆組成,來構成不同程度的黑色圖案化油墨塗層120。另,當圖案化油墨塗層120的顏色為白色時,此圖案化油墨塗層120可包括多個淡藍色粉末顆粒(未繪示)以及多個鈦白粉粉末顆粒(未繪示)經由與樹脂包覆組成,透過這些不同大小的顆粒分布,來構成不同程度的白色圖案化油墨塗層120。至此,已大致完成基板結構100a的製作。It is worth mentioning that the color of the patterned ink coating 120 of the present embodiment may be black or white. For example, when the color of the patterned ink coating layer 120 is black, the patterned ink coating layer 120 may include a plurality of carbon black particles (not shown) and a plurality of titanium dioxide powder particles (not shown). The carbon black particles have a particle diameter of about 0.02 to 0.08 μm, and the titanium dioxide powder particles have a particle diameter of about 0.3 to 0.7 μm. Different levels of black patterned ink coating 120 are formed by coating these different sized particles with a resin coating. In addition, when the color of the patterned ink coating layer 120 is white, the patterned ink coating layer 120 may include a plurality of light blue powder particles (not shown) and a plurality of titanium dioxide powder particles (not shown) via The resin coating composition, through these differently sized particle distributions, constitutes varying degrees of white patterned ink coating 120. So far, the fabrication of the substrate structure 100a has been substantially completed.
在結構上,請再參考圖1C,基板結構100a包括透明基材110以及圖案化油墨塗層120,其中圖案化油墨塗層120配置於透明基材110的表面112上,且位於透明基材110之表面112的局部或周圍區域。特別是,圖案化油墨塗層120的可承受之耐熱溫度介於250℃至450℃之間,且圖案化油墨塗層120的光學密度大於3.5以上,意即圖案化油墨塗層120的光學密度大於等於3.5。Structurally, referring again to FIG. 1C , the substrate structure 100 a includes a transparent substrate 110 and a patterned ink coating 120 , wherein the patterned ink coating 120 is disposed on the surface 112 of the transparent substrate 110 and located on the transparent substrate 110 . A portion or surrounding area of surface 112. In particular, the patterned ink coating 120 can withstand a heat resistant temperature of between 250 ° C and 450 ° C, and the patterned ink coating 120 has an optical density greater than 3.5, which means that the optical density of the patterned ink coating 120 is Greater than or equal to 3.5.
由於本實施例之基板結構100a的製作方法是採用網版印刷的方式,於透明基材110上形成圖案化油墨塗層120,相較於習知採用旋轉塗佈、曝光與顯影的方式來形成圖案化油墨塗層而言,本實施例之基板結構100a的製作方法其製作流程較為簡單,且製造成本也較為低廉。再者,由於圖案化油墨塗層120可承受之耐熱溫度介於250℃至450℃之間,且圖案化油墨塗層120的光學密度大於3.5以上。因此,圖案化油墨塗層120具有耐高溫製程需求與優異的遮光效果,可提高基板結構100a的應用性。此外,由於圖案化油墨塗層120的鉛筆硬度規格大於6H,因此其具有一定程度之油墨表面的耐刮與耐磨能力。Since the substrate structure 100a of the present embodiment is formed by screen printing, the patterned ink coating layer 120 is formed on the transparent substrate 110, which is formed by spin coating, exposure and development. In the case of the patterned ink coating, the manufacturing method of the substrate structure 100a of the present embodiment has a simple manufacturing process and a relatively low manufacturing cost. Moreover, since the patterned ink coating 120 can withstand a heat resistant temperature of between 250 ° C and 450 ° C, and the patterned ink coating 120 has an optical density greater than 3.5. Therefore, the patterned ink coating 120 has a high temperature process resistance requirement and an excellent light shielding effect, and can improve the applicability of the substrate structure 100a. In addition, since the patterned ink coating 120 has a pencil hardness specification greater than 6H, it has a certain degree of scratch and abrasion resistance of the ink surface.
以下將列舉以圖案化油墨塗層120之特性為基礎所延伸出之多個基板結構100b、100c的應用進行詳細說明。The application of the plurality of substrate structures 100b, 100c extending based on the characteristics of the patterned ink coating 120 will be described in detail below.
請參考圖1D,於形成圖案化油墨塗層120之後,透過例如是高溫金屬真空濺鍍的方式形成一透明金屬導電塗層130a於透明基材110上,其中透明金屬導電塗層130a並同時覆蓋在透明基材110的表面112,與圖案化油墨塗層120上方。由於圖案化油墨塗層120的油墨邊緣與透明基材110的表面112之間,具有例如是介於7度至45度之間的夾角θ。因此,透明金屬導電塗層130a與透明基材110及圖案化油墨塗層120之間可具有較佳的塗墨連續性與附著性,且透明金屬導電塗層130a可共形(conformally)且均勻地覆蓋於透明基材110,與圖案化油墨塗層120上方。Referring to FIG. 1D, after the patterned ink coating 120 is formed, a transparent metal conductive coating 130a is formed on the transparent substrate 110 by, for example, high temperature metal vacuum sputtering, wherein the transparent metal conductive coating 130a is simultaneously covered. Above the surface 112 of the transparent substrate 110, over the patterned ink coating 120. Since the ink edge of the patterned ink coating 120 and the surface 112 of the transparent substrate 110 have an included angle θ of, for example, between 7 and 45 degrees. Therefore, the transparent metal conductive coating 130a and the transparent substrate 110 and the patterned ink coating 120 may have better ink continuity and adhesion, and the transparent metal conductive coating 130a may be conformally and uniform. The cover is over the transparent substrate 110 and over the patterned ink coating 120.
接著,請參考圖1E,茲形成一光阻層140a於透明金屬導電塗層130a上,其中光阻層140a可共形且均勻地覆蓋於透明金屬導電塗層130a上。並且,進行一低溫烘烤步驟將部份溶劑揮發,以固化光阻層140a。接著。請參考圖1F,對光阻層140a進行一圖像曝光及鹼液乳化顯影步驟,以形成一圖案化光阻層140。然後,請參考圖1G,圖案化之光阻層140為一具耐蝕刻製程之罩幕,以蝕刻去除圖案化光阻層140之外的透明金屬導電塗層130a,以形成一圖案化透明金屬導電塗層130。最後,請參考圖1H,以鹼液來移除圖案化光阻層140,而暴露出圖案化透明金屬導電塗層130。至此,即完成基板結構100b的製作。Next, referring to FIG. 1E, a photoresist layer 140a is formed on the transparent metal conductive coating 130a, wherein the photoresist layer 140a can be conformally and uniformly covered on the transparent metal conductive coating 130a. And, a low temperature baking step is performed to volatilize a part of the solvent to cure the photoresist layer 140a. then. Referring to FIG. 1F, an image exposure and alkali emulsification development step is performed on the photoresist layer 140a to form a patterned photoresist layer 140. Then, referring to FIG. 1G, the patterned photoresist layer 140 is an etch-resistant mask to etch away the transparent metal conductive coating 130a outside the patterned photoresist layer 140 to form a patterned transparent metal. Conductive coating 130. Finally, referring to FIG. 1H, the patterned photoresist layer 140 is removed with an alkali solution to expose the patterned transparent metal conductive coating 130. Thus, the fabrication of the substrate structure 100b is completed.
於結構上,基板結構100b包括透明基材110、圖案化油墨塗層120,以及圖案化透明金屬導電塗層130,其中圖案化油墨塗層120配置於透明基材110的表面112上,且位於透明基材110之表面112的局部或周圍區域。特別是,圖案化油墨塗層120可承受之耐熱溫度介於250℃至450℃之間,且圖案化油墨塗層120的光學密度大於3.5以上。另,圖案化透明金屬導電塗層130配置於透明基材110上,其中圖案化透明金屬導電塗層130可依據產品使用需求而製作成覆蓋,或不覆蓋於圖案化油墨塗層120之上。於此,圖1H是繪示圖案化透明金屬導電塗層130不覆蓋圖案化油墨塗層120,但並不以此為限制。Structurally, the substrate structure 100b includes a transparent substrate 110, a patterned ink coating 120, and a patterned transparent metal conductive coating 130, wherein the patterned ink coating 120 is disposed on the surface 112 of the transparent substrate 110 and located A portion or surrounding area of the surface 112 of the transparent substrate 110. In particular, the patterned ink coating 120 can withstand a heat resistant temperature between 250 ° C and 450 ° C, and the patterned ink coating 120 has an optical density greater than 3.5. In addition, the patterned transparent metal conductive coating 130 is disposed on the transparent substrate 110, wherein the patterned transparent metal conductive coating 130 can be covered or not covered by the patterned ink coating 120 according to the use requirements of the product. Here, FIG. 1H illustrates that the patterned transparent metal conductive coating 130 does not cover the patterned ink coating 120, but is not limited thereto.
由於圖案化油墨塗層120的油墨邊緣與透明基材110的表面112之間具有夾角θ,因此後續形成透明金屬導電塗層130a與光阻層140於透明基材110與圖案化油墨塗層120上時,可具有較佳的塗墨連續性及附著性,進而提高製程良率。此外,由於圖案化油墨塗層120的可承受之耐熱溫度介於250℃至450℃之間,且圖案化油墨塗層120的光學密度大於3.5,意即圖案化油墨塗層120具有耐高溫製程與優異的遮光效果。因此,於後續的烘烤、曝光與顯影中,圖案化油墨塗層120仍可維持其材料特性,或可提高基板結構100b的可靠度。再者,形成於透光基材110上的圖案化透明金屬導電塗層130,可使得基板結構100b具有觸控之功能運用。相較於一般習知需要先將圖案化透明金屬電塗層形成於另一基板上後,再貼附於透光基材上所形成具有觸控功能的基板結構而言,本實施例之基板結構100b可具有較薄的結構厚度。Since the ink edge of the patterned ink coating 120 and the surface 112 of the transparent substrate 110 have an angle θ, the transparent metal conductive coating 130a and the photoresist layer 140 are subsequently formed on the transparent substrate 110 and the patterned ink coating 120. In the upper case, it has better ink continuity and adhesion, thereby improving the process yield. In addition, since the heat resistant temperature of the patterned ink coating 120 is between 250 ° C and 450 ° C, and the optical density of the patterned ink coating 120 is greater than 3.5, that is, the patterned ink coating 120 has a high temperature resistant process. With excellent shading effect. Thus, the patterned ink coating 120 can still maintain its material properties during subsequent baking, exposure, and development, or can improve the reliability of the substrate structure 100b. Moreover, the patterned transparent metal conductive coating 130 formed on the transparent substrate 110 can enable the substrate structure 100b to function as a touch. The substrate of the embodiment is similar to the conventional structure in which the patterned transparent metal electrocoat layer is formed on another substrate and then attached to the light-transmitting substrate to form a substrate structure having a touch function. Structure 100b can have a relatively thin structural thickness.
於其他實施例中,亦可採用其他的方式來形成具有觸控功能運用的基板結構100b。舉例來說,圖2A至圖2C為本發明之另一實施例之一種基板結構的製作方法之局部步驟的剖面示意圖。請先參考圖2C,圖2C之基板結構100c的結構形態與圖1H之基板結構100b的結構形態相似,不同之處僅在於:圖2C之基板結構100c的圖案化透明金屬導電塗層130’即是覆蓋圖案化油墨塗層120上方。In other embodiments, other methods may be used to form the substrate structure 100b with the touch function. For example, FIG. 2A to FIG. 2C are schematic cross-sectional views showing a partial step of a method for fabricating a substrate structure according to another embodiment of the present invention. Referring to FIG. 2C, the structure of the substrate structure 100c of FIG. 2C is similar to that of the substrate structure 100b of FIG. 1H, except that the patterned transparent metal conductive coating 130' of the substrate structure 100c of FIG. 2C is It is overlaid over the patterned ink coating 120.
於製程上,圖2C之基板結構100c的製作方法可採用與前述實施例之基板結構100b大致相同的製作方式,並且在圖1D的步驟之後,亦即經過特殊高溫金屬濺鍍製程方式,形成透明導電導電塗層130a於透明基材110上之後,請參考圖2A,另提供一網版150於透明金屬導電塗層130a的上方。然後,請參考圖2B,透過網版印刷的方式,或印刷一圖案化之網板將蝕刻膏塗層160於透明金屬導電塗層130a上。並且,進行一中溫烘烤步驟,以加速圖案化蝕刻膏塗層160與透明金屬導電塗層130a的反應。最後,請參考圖2C,以使圖案化蝕刻膏塗層160能夠將其底部的透明金屬導電塗層130a予以移除。乃茲以圖案化之蝕刻塗膏層為一酸蝕刻罩幕,並移除圖案蝕刻膏塗層160之內的透明金屬導電塗層130a,以形成一圖案化之透明金屬導電塗層130’。接著,進行一清洗步驟,例如是以大量清水沖洗,並移除圖案化蝕刻膏塗層160,而暴露出圖案化透明金屬導電塗層130’。至此,即完成基板結構100c的製作。In the process, the substrate structure 100c of FIG. 2C can be fabricated in substantially the same manner as the substrate structure 100b of the previous embodiment, and is transparent after the step of FIG. 1D, that is, through a special high-temperature metal sputtering process. After the conductive conductive coating 130a is on the transparent substrate 110, please refer to FIG. 2A, and a screen 150 is disposed above the transparent metal conductive coating 130a. Then, referring to FIG. 2B, the etch paste coating 160 is applied to the transparent metal conductive coating 130a by screen printing or by printing a patterned stencil. Also, a moderate temperature baking step is performed to accelerate the reaction of the patterned etch paste coating 160 with the transparent metal conductive coating 130a. Finally, please refer to FIG. 2C to enable the patterned etch paste coating 160 to remove the transparent metal conductive coating 130a at its bottom. The patterned etch paste layer is an acid etch mask and the transparent metal conductive coating 130a within the patterned etch paste coating 160 is removed to form a patterned transparent metal conductive coating 130'. Next, a cleaning step, such as rinsing with a large amount of water, and removing the patterned etch paste coating 160, exposes the patterned transparent metal conductive coating 130'. Thus, the fabrication of the substrate structure 100c is completed.
綜上所述,由於本發明之基板結構的製作方法是採用網版印刷的方式,並於透明基材上形成圖案化油墨塗層,相較於習知採用旋轉塗佈、曝光與顯影的方式來形成圖案化油墨塗層而言,本發明之基板結構的製作方法及其製作流程較為簡單,且製造成本也較為低廉。再者,由於本發明之圖案化油墨塗層的可承受之耐熱溫度介於250℃至450℃之間,且圖案化油墨塗層的光學密度大於3.5,因此可增加後續基板結構的應用,例如是形成一具有觸控功能的基板結構,並可提高製程良率與產品的可靠度。In summary, since the substrate structure of the present invention is fabricated by screen printing, and a patterned ink coating is formed on the transparent substrate, compared with the conventional method of spin coating, exposure and development. In order to form a patterned ink coating, the manufacturing method of the substrate structure of the present invention and the manufacturing process thereof are relatively simple, and the manufacturing cost is also low. Furthermore, since the patterned ink coating of the present invention can withstand a heat resistant temperature of between 250 ° C and 450 ° C and the optical density of the patterned ink coating is greater than 3.5, the application of the subsequent substrate structure can be increased, for example It is formed into a substrate structure with touch function, and can improve process yield and product reliability.
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,故本發明之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims.
100a、100b、100c...基板結構100a, 100b, 100c. . . Substrate structure
110...透明基材110. . . Transparent substrate
112...表面112. . . surface
120...圖案化油墨塗層120. . . Patterned ink coating
130、130’...圖案化透明金屬導電塗層130, 130’. . . Patterned transparent metal conductive coating
130a...透明金屬導電塗層130a. . . Transparent metal conductive coating
140...光阻層140. . . Photoresist layer
140a...圖案化光阻層140a. . . Patterned photoresist layer
150...網版150. . . Web version
160...圖案化蝕刻膏塗層160. . . Patterned etch paste coating
T...厚度T. . . thickness
θ...油墨夾角θ. . . Ink angle
圖1A至圖1H為本發明之一實施例之一種基板結構的製作方法的示意圖。1A to 1H are schematic views showing a method of fabricating a substrate structure according to an embodiment of the present invention.
圖2A至圖2C為本發明之另一實施例之一種基板結構的製作方法之局部步驟的剖面示意圖。2A-2C are cross-sectional views showing a partial step of a method of fabricating a substrate structure according to another embodiment of the present invention.
100a...基板結構100a. . . Substrate structure
110...透明基材110. . . Transparent substrate
112...表面112. . . surface
120...圖案化油墨塗層120. . . Patterned ink coating
T...厚度T. . . thickness
θ...油墨夾角θ. . . Ink angle
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