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TW200509285A - Die carrier - Google Patents

Die carrier

Info

Publication number
TW200509285A
TW200509285A TW093104950A TW93104950A TW200509285A TW 200509285 A TW200509285 A TW 200509285A TW 093104950 A TW093104950 A TW 093104950A TW 93104950 A TW93104950 A TW 93104950A TW 200509285 A TW200509285 A TW 200509285A
Authority
TW
Taiwan
Prior art keywords
die carrier
fluid chamber
die
port
attachment
Prior art date
Application number
TW093104950A
Other languages
English (en)
Other versions
TWI239068B (en
Inventor
Ronald A Hellekson
Chien Hua Chen
William R Boucher
Joshua W Smith
David M Craig
Gary J Watts
Original Assignee
Hewlett Packard Development Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Development Co filed Critical Hewlett Packard Development Co
Publication of TW200509285A publication Critical patent/TW200509285A/zh
Application granted granted Critical
Publication of TWI239068B publication Critical patent/TWI239068B/zh

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0083Temperature control
    • B81B7/009Maintaining a constant temperature by heating or cooling
    • B81B7/0093Maintaining a constant temperature by heating or cooling by cooling
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032Packages or encapsulation
    • B81B7/0058Packages or encapsulation for protecting against damages due to external chemical or mechanical influences, e.g. shocks or vibrations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032Packages or encapsulation
    • B81B7/0061Packages or encapsulation suitable for fluid transfer from the MEMS out of the package or vice versa, e.g. transfer of liquid, gas, sound
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/10Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/12Specific details about manufacturing devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Micromachines (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Manipulator (AREA)
  • Reciprocating Pumps (AREA)
  • Die Bonding (AREA)
TW093104950A 2003-08-27 2004-02-26 Die carrier TWI239068B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/650,572 US6917099B2 (en) 2003-08-27 2003-08-27 Die carrier with fluid chamber

Publications (2)

Publication Number Publication Date
TW200509285A true TW200509285A (en) 2005-03-01
TWI239068B TWI239068B (en) 2005-09-01

Family

ID=34104710

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093104950A TWI239068B (en) 2003-08-27 2004-02-26 Die carrier

Country Status (6)

Country Link
US (1) US6917099B2 (zh)
EP (1) EP1510500A3 (zh)
JP (1) JP4133970B2 (zh)
KR (1) KR20050021323A (zh)
CN (1) CN1590278A (zh)
TW (1) TWI239068B (zh)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050012197A1 (en) * 2003-07-15 2005-01-20 Smith Mark A. Fluidic MEMS device
US7249302B2 (en) * 2003-08-01 2007-07-24 Intermec Ip Corp. Integrated test-on-chip system and method and apparatus for manufacturing and operating same
US7395474B2 (en) * 2003-08-01 2008-07-01 Intermec Ip Corp. Lab-on-chip system and method and apparatus for manufacturing and operating same
US6858466B1 (en) * 2003-11-03 2005-02-22 Hewlett-Packard Development Company, L.P. System and a method for fluid filling wafer level packages
US7397067B2 (en) * 2003-12-31 2008-07-08 Intel Corporation Microdisplay packaging system
JP2006245356A (ja) * 2005-03-04 2006-09-14 Hitachi Ltd 電子デバイスの冷却装置
JP2007027279A (ja) * 2005-07-13 2007-02-01 Shinko Electric Ind Co Ltd 半導体装置および半導体装置の製造方法
US7417307B2 (en) * 2005-07-29 2008-08-26 Hewlett-Packard Development Company, L.P. System and method for direct-bonding of substrates
IT1392230B1 (it) * 2008-12-15 2012-02-22 Sgm Technology For Lighting Strtuura di impianto di raffreddamento per dispositivi digitali a microspecchi
JP5649125B2 (ja) * 2011-07-01 2015-01-07 Necエンジニアリング株式会社 テープ貼付装置
KR101468881B1 (ko) * 2013-04-15 2014-12-05 이엘케이 주식회사 캐리어 기판 및 이를 이용한 터치스크린 패널의 제조방법

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1303238C (en) * 1988-05-09 1992-06-09 Kazuhiko Umezawa Flat cooling structure of integrated circuit
US5171132A (en) * 1989-12-27 1992-12-15 Seiko Epson Corporation Two-valve thin plate micropump
US5016090A (en) * 1990-03-21 1991-05-14 International Business Machines Corporation Cross-hatch flow distribution and applications thereof
JP2995590B2 (ja) * 1991-06-26 1999-12-27 株式会社日立製作所 半導体冷却装置
JP3328300B2 (ja) * 1991-07-18 2002-09-24 アイシン精機株式会社 流体制御装置
US5514906A (en) * 1993-11-10 1996-05-07 Fujitsu Limited Apparatus for cooling semiconductor chips in multichip modules
US5707850A (en) * 1995-11-09 1998-01-13 Cole; Kenneth D. Concentration and size-fractionation of nucleic acids and viruses in porous media
US6299300B1 (en) * 1997-07-15 2001-10-09 Silverbrook Research Pty Ltd Micro electro-mechanical system for ejection of fluids
US6215221B1 (en) * 1998-12-29 2001-04-10 Honeywell International Inc. Electrostatic/pneumatic actuators for active surfaces
US6567138B1 (en) * 1999-02-15 2003-05-20 Rainbow Displays, Inc. Method for assembling a tiled, flat-panel microdisplay array having imperceptible seams
DE10202996A1 (de) * 2002-01-26 2003-08-14 Eppendorf Ag Piezoelektrisch steuerbare Mikrofluidaktorik

Also Published As

Publication number Publication date
US20050045974A1 (en) 2005-03-03
TWI239068B (en) 2005-09-01
JP4133970B2 (ja) 2008-08-13
KR20050021323A (ko) 2005-03-07
CN1590278A (zh) 2005-03-09
US6917099B2 (en) 2005-07-12
EP1510500A3 (en) 2006-11-15
EP1510500A2 (en) 2005-03-02
JP2005072593A (ja) 2005-03-17

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees