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KR960035018U - Vacuum valve of pump device - Google Patents

Vacuum valve of pump device

Info

Publication number
KR960035018U
KR960035018U KR2019950007979U KR19950007979U KR960035018U KR 960035018 U KR960035018 U KR 960035018U KR 2019950007979 U KR2019950007979 U KR 2019950007979U KR 19950007979 U KR19950007979 U KR 19950007979U KR 960035018 U KR960035018 U KR 960035018U
Authority
KR
South Korea
Prior art keywords
pump device
vacuum valve
vacuum
valve
pump
Prior art date
Application number
KR2019950007979U
Other languages
Korean (ko)
Other versions
KR200201328Y1 (en
Inventor
황창노
Original Assignee
현대반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대반도체주식회사 filed Critical 현대반도체주식회사
Priority to KR2019950007979U priority Critical patent/KR200201328Y1/en
Publication of KR960035018U publication Critical patent/KR960035018U/en
Application granted granted Critical
Publication of KR200201328Y1 publication Critical patent/KR200201328Y1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Valves (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
KR2019950007979U 1995-04-19 1995-04-19 Vacuum valve of pump device KR200201328Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950007979U KR200201328Y1 (en) 1995-04-19 1995-04-19 Vacuum valve of pump device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950007979U KR200201328Y1 (en) 1995-04-19 1995-04-19 Vacuum valve of pump device

Publications (2)

Publication Number Publication Date
KR960035018U true KR960035018U (en) 1996-11-21
KR200201328Y1 KR200201328Y1 (en) 2000-12-01

Family

ID=19411630

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950007979U KR200201328Y1 (en) 1995-04-19 1995-04-19 Vacuum valve of pump device

Country Status (1)

Country Link
KR (1) KR200201328Y1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101124377B1 (en) * 2011-05-18 2012-03-16 이동민 Valve for vaccuum process

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100528169B1 (en) * 2003-01-27 2005-11-16 대호소하텍(주) Opening rate control apparatus of globe valve using electrical air control valve

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101124377B1 (en) * 2011-05-18 2012-03-16 이동민 Valve for vaccuum process

Also Published As

Publication number Publication date
KR200201328Y1 (en) 2000-12-01

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Legal Events

Date Code Title Description
UA0108 Application for utility model registration

Comment text: Application for Utility Model Registration

Patent event code: UA01011R08D

Patent event date: 19950419

UG1501 Laying open of application
A201 Request for examination
UA0201 Request for examination

Patent event date: 19980417

Patent event code: UA02012R01D

Comment text: Request for Examination of Application

Patent event date: 19950419

Patent event code: UA02011R01I

Comment text: Application for Utility Model Registration

E701 Decision to grant or registration of patent right
UE0701 Decision of registration

Patent event date: 20000731

Comment text: Decision to Grant Registration

Patent event code: UE07011S01D

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