KR930022510A - 테스트 접촉부만을 가지는 반도체 장치 제조 방법 - Google Patents
테스트 접촉부만을 가지는 반도체 장치 제조 방법Info
- Publication number
- KR930022510A KR930022510A KR1019930005518A KR930005518A KR930022510A KR 930022510 A KR930022510 A KR 930022510A KR 1019930005518 A KR1019930005518 A KR 1019930005518A KR 930005518 A KR930005518 A KR 930005518A KR 930022510 A KR930022510 A KR 930022510A
- Authority
- KR
- South Korea
- Prior art keywords
- pads
- package substrate
- test
- semiconductor device
- semiconductor die
- Prior art date
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
- H01L22/32—Additional lead-in metallisation on a device or substrate, e.g. additional pads or pad portions, lines in the scribe line, sacrificed conductors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
- H01L23/053—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body
- H01L23/055—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body the leads having a passage through the base
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49838—Geometry or layout
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/4985—Flexible insulating substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0555—Shape
- H01L2224/05552—Shape in top view
- H01L2224/05554—Shape in top view being square
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
- H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/1015—Shape
- H01L2924/1016—Shape being a cuboid
- H01L2924/10161—Shape being a cuboid with a rectangular active surface
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1517—Multilayer substrate
- H01L2924/15172—Fan-out arrangement of the internal vias
- H01L2924/15173—Fan-out arrangement of the internal vias in a single layer of the multilayer substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Geometry (AREA)
- General Engineering & Computer Science (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
Description
Claims (2)
- 테스트 접촉부만을 가지는 반도체 장치(10,30,50)제조 방법에 있어서, 집적 회로와 집적 회로에 전기 연결된 다수의 본드 패드를 반도체 다이(20)를 제공하는 단계와, 상부 표면 및 하부 표면을 가지며 복수의 작동 접촉부 및 복수의 테스트 접촉부만을 가지는 패키지 기판 재료(12)를 제공하는 단계와, 상기 패키지 기판의 상부 표면상에 반도체 다이를 장착하는 단계와, 상기 반도체 다이의 복수의 본드 패드를 복수의 작동 접촉부 및 복수의 테스트 접촉부만 전기 연결하기 위한 수단(23)을 제공하는 단계와, 상기 패키지 기판의 상부 표면 일부분 및 반도체 다이를 캡슐화시키는 단계와, 핀(58) 또는 솔더 볼(26)중의 어느 하나를 각각 복수의 작동 접촉부에만 부착시키는 단계를 포함하는 것을 특징으로 하는 반도체 장치 제조 방법.
- 테스트 접촉부만을 가지는 반도체 장치(10, 30) 제조방법에 있어서, 다이위에 형성된 집적 회로를 가지하는 반도체 다이(20)를 제공하는 단계와, 상부 표면, 하부 표면, 예비 결정된 경계(A)를 가지는 어레이내에 배열된 복수의 작동 패드와, 사용자 패드의 어레이의 경계 외부에 배열된 복수 텍스트 패드만을 가지는 패키지 기판(12)을 제공하는 단계와, 상기 패키지 기판의 상부표면상에 반도체 다이를 위치 설정하는 단계와, 상기 반도체 다이를 복수의 작동 패드 및 복수의 테스트 패드만을 전기 연결시키기 위한 수단(23)을 제공하는 단계와, 적어도 복수의 테스트 패드만을 사용하여 집적회로를 전기 테스트 하는 단계와, 복수의 작동 패드를 그대로 놔둔채 복수의 태스트 패드만을 가지는 패키지 기판 부분을 제거시키는 단계를 포함하는 것을 특징으로 하는 테스트 접촉부만을 가지는 반도체 장치 제조 방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US864,246 | 1992-04-06 | ||
US07/864,246 US5334857A (en) | 1992-04-06 | 1992-04-06 | Semiconductor device with test-only contacts and method for making the same |
Publications (1)
Publication Number | Publication Date |
---|---|
KR930022510A true KR930022510A (ko) | 1993-11-24 |
Family
ID=25342828
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019930005518A KR930022510A (ko) | 1992-04-06 | 1993-03-31 | 테스트 접촉부만을 가지는 반도체 장치 제조 방법 |
Country Status (4)
Country | Link |
---|---|
US (1) | US5334857A (ko) |
EP (1) | EP0564865A1 (ko) |
JP (1) | JPH0621173A (ko) |
KR (1) | KR930022510A (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100258350B1 (ko) * | 1997-05-13 | 2000-06-01 | 마이클 디. 오브라이언 | 슈퍼 bga 반도체패키지 |
Families Citing this family (111)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5729894A (en) * | 1992-07-21 | 1998-03-24 | Lsi Logic Corporation | Method of assembling ball bump grid array semiconductor packages |
US5367763A (en) * | 1993-09-30 | 1994-11-29 | Atmel Corporation | TAB testing of area array interconnected chips |
US6111306A (en) * | 1993-12-06 | 2000-08-29 | Fujitsu Limited | Semiconductor device and method of producing the same and semiconductor device unit and method of producing the same |
US5679978A (en) * | 1993-12-06 | 1997-10-21 | Fujitsu Limited | Semiconductor device having resin gate hole through substrate for resin encapsulation |
US5578869A (en) * | 1994-03-29 | 1996-11-26 | Olin Corporation | Components for housing an integrated circuit device |
JPH07335783A (ja) * | 1994-06-13 | 1995-12-22 | Fujitsu Ltd | 半導体装置及び半導体装置ユニット |
JP2569400B2 (ja) * | 1994-06-23 | 1997-01-08 | 九州日本電気株式会社 | 樹脂封止型半導体装置の製造方法 |
JPH0883866A (ja) * | 1994-07-15 | 1996-03-26 | Shinko Electric Ind Co Ltd | 片面樹脂封止型半導体装置の製造方法及びこれに用いるキャリアフレーム |
US5717252A (en) * | 1994-07-25 | 1998-02-10 | Mitsui High-Tec, Inc. | Solder-ball connected semiconductor device with a recessed chip mounting area |
DE69530037T2 (de) * | 1994-09-22 | 2003-10-16 | Nec Electronics Corp., Kawasaki | Automatische Bandmontage für Halbleiteranordnung |
US5728600A (en) * | 1994-11-15 | 1998-03-17 | Vlt Corporation | Circuit encapsulation process |
US5945130A (en) * | 1994-11-15 | 1999-08-31 | Vlt Corporation | Apparatus for circuit encapsulation |
US6465743B1 (en) * | 1994-12-05 | 2002-10-15 | Motorola, Inc. | Multi-strand substrate for ball-grid array assemblies and method |
JPH08167691A (ja) * | 1994-12-13 | 1996-06-25 | Toshiba Corp | 半導体装置 |
US5866941A (en) * | 1995-02-23 | 1999-02-02 | Silicon Systems, Inc. | Ultra thin, leadless and molded surface mount integrated circuit package |
JPH08316364A (ja) * | 1995-05-16 | 1996-11-29 | Toshiba Corp | 半導体装置 |
US5650595A (en) * | 1995-05-25 | 1997-07-22 | International Business Machines Corporation | Electronic module with multiple solder dams in soldermask window |
US5598036A (en) * | 1995-06-15 | 1997-01-28 | Industrial Technology Research Institute | Ball grid array having reduced mechanical stress |
JP3311215B2 (ja) * | 1995-09-28 | 2002-08-05 | 株式会社東芝 | 半導体装置 |
US5686759A (en) * | 1995-09-29 | 1997-11-11 | Intel Corporation | Integrated circuit package with permanent identification of device characteristics and method for adding the same |
US5670825A (en) * | 1995-09-29 | 1997-09-23 | Intel Corporation | Integrated circuit package with internally readable permanent identification of device characteristics |
EP0767492A3 (en) * | 1995-10-02 | 1998-09-09 | Altera Corporation | Integrated circuit test system |
US5969538A (en) * | 1996-10-31 | 1999-10-19 | Texas Instruments Incorporated | Semiconductor wafer with interconnect between dies for testing and a process of testing |
US6046600A (en) * | 1995-10-31 | 2000-04-04 | Texas Instruments Incorporated | Process of testing integrated circuit dies on a wafer |
US5994912A (en) * | 1995-10-31 | 1999-11-30 | Texas Instruments Incorporated | Fault tolerant selection of die on wafer |
US5760643A (en) * | 1995-10-31 | 1998-06-02 | Texas Instruments Incorporated | Integrated circuit die with selective pad-to-pad bypass of internal circuitry |
FR2742548B1 (fr) * | 1995-12-19 | 1998-01-16 | Siemens Automotive Sa | Module electronique |
US5731709A (en) * | 1996-01-26 | 1998-03-24 | Motorola, Inc. | Method for testing a ball grid array semiconductor device and a device for such testing |
US5859538A (en) * | 1996-01-31 | 1999-01-12 | Hewlett-Packard Company | Method and apparatus for connecting a ball grid array device to a test instrument to facilitate the monitoring of individual signals or the interruption of individual signals or both |
US5869869A (en) * | 1996-01-31 | 1999-02-09 | Lsi Logic Corporation | Microelectronic device with thin film electrostatic discharge protection structure |
US5763947A (en) * | 1996-01-31 | 1998-06-09 | International Business Machines Corporation | Integrated circuit chip package having configurable contacts and a removable connector |
JPH09232368A (ja) * | 1996-02-20 | 1997-09-05 | Fujitsu Ltd | 半導体装置 |
US6020758A (en) * | 1996-03-11 | 2000-02-01 | Altera Corporation | Partially reconfigurable programmable logic device |
JPH09260552A (ja) * | 1996-03-22 | 1997-10-03 | Nec Corp | 半導体チップの実装構造 |
US5844315A (en) * | 1996-03-26 | 1998-12-01 | Motorola Corporation | Low-profile microelectronic package |
US6169329B1 (en) * | 1996-04-02 | 2001-01-02 | Micron Technology, Inc. | Semiconductor devices having interconnections using standardized bonding locations and methods of designing |
US5776798A (en) * | 1996-09-04 | 1998-07-07 | Motorola, Inc. | Semiconductor package and method thereof |
US5854512A (en) * | 1996-09-20 | 1998-12-29 | Vlsi Technology, Inc. | High density leaded ball-grid array package |
US5719449A (en) * | 1996-09-30 | 1998-02-17 | Lucent Technologies Inc. | Flip-chip integrated circuit with improved testability |
US6098283A (en) * | 1996-12-19 | 2000-08-08 | Intel Corporation | Method for filling vias in organic, multi-layer packages |
JPH10284535A (ja) * | 1997-04-11 | 1998-10-23 | Toshiba Corp | 半導体装置の製造方法及び半導体部品 |
US5841198A (en) * | 1997-04-21 | 1998-11-24 | Lsi Logic Corporation | Ball grid array package employing solid core solder balls |
US6175161B1 (en) | 1998-05-22 | 2001-01-16 | Alpine Microsystems, Inc. | System and method for packaging integrated circuits |
WO1998053493A1 (en) * | 1997-05-23 | 1998-11-26 | Alpine Microsystems, Inc. | A system and method for packaging integrated circuits |
US6085962A (en) * | 1997-09-08 | 2000-07-11 | Micron Technology, Inc. | Wire bond monitoring system for layered packages |
US6034426A (en) * | 1997-10-30 | 2000-03-07 | Hewlett-Packard Co. | Testable low inductance integrated circuit package |
US5991161A (en) * | 1997-12-19 | 1999-11-23 | Intel Corporation | Multi-chip land grid array carrier |
JP3638771B2 (ja) * | 1997-12-22 | 2005-04-13 | 沖電気工業株式会社 | 半導体装置 |
JP2000208698A (ja) * | 1999-01-18 | 2000-07-28 | Toshiba Corp | 半導体装置 |
JP3147071B2 (ja) * | 1998-01-19 | 2001-03-19 | 日本電気株式会社 | 半導体装置及びその製造方法 |
US6408413B1 (en) | 1998-02-18 | 2002-06-18 | Texas Instruments Incorporated | Hierarchical access of test access ports in embedded core integrated circuits |
US6405335B1 (en) | 1998-02-25 | 2002-06-11 | Texas Instruments Incorporated | Position independent testing of circuits |
US6125042A (en) * | 1998-04-10 | 2000-09-26 | Lucent Technologies, Inc. | Ball grid array semiconductor package having improved EMI characteristics |
US6020629A (en) * | 1998-06-05 | 2000-02-01 | Micron Technology, Inc. | Stacked semiconductor package and method of fabrication |
US6451624B1 (en) | 1998-06-05 | 2002-09-17 | Micron Technology, Inc. | Stackable semiconductor package having conductive layer and insulating layers and method of fabrication |
US6297548B1 (en) * | 1998-06-30 | 2001-10-02 | Micron Technology, Inc. | Stackable ceramic FBGA for high thermal applications |
DE19831634B4 (de) | 1998-07-15 | 2005-02-03 | Pac Tech - Packaging Technologies Gmbh | Chipträgeranordnung sowie Verfahren zur Herstellung einer Chipträgeranordnung mit elektrischem Test |
JP2000138104A (ja) * | 1998-08-26 | 2000-05-16 | Yazaki Corp | 回路保護素子の検査構造 |
US6194250B1 (en) | 1998-09-14 | 2001-02-27 | Motorola, Inc. | Low-profile microelectronic package |
EP1118120A1 (en) * | 1998-09-30 | 2001-07-25 | Conexant Systems, Inc. | Package for providing improved electrical contact and methods for forming the same |
JP3179420B2 (ja) * | 1998-11-10 | 2001-06-25 | 日本電気株式会社 | 半導体装置 |
JP3908908B2 (ja) | 1999-01-22 | 2007-04-25 | 株式会社ルネサステクノロジ | 半導体集積回路装置 |
US6507117B1 (en) * | 1999-01-29 | 2003-01-14 | Rohm Co., Ltd. | Semiconductor chip and multichip-type semiconductor device |
US7058862B2 (en) | 2000-05-26 | 2006-06-06 | Texas Instruments Incorporated | Selecting different 1149.1 TAP domains from update-IR state |
US6711812B1 (en) * | 1999-04-13 | 2004-03-30 | Unicap Electronics Industrial Corporation | Method of making metal core substrate printed circuit wiring board enabling thermally enhanced ball grid array (BGA) packages |
US6675472B1 (en) | 1999-04-29 | 2004-01-13 | Unicap Electronics Industrial Corporation | Process and structure for manufacturing plastic chip carrier |
US6221682B1 (en) | 1999-05-28 | 2001-04-24 | Lockheed Martin Corporation | Method and apparatus for evaluating a known good die using both wire bond and flip-chip interconnects |
US6728915B2 (en) | 2000-01-10 | 2004-04-27 | Texas Instruments Incorporated | IC with shared scan cells selectively connected in scan path |
US6469530B1 (en) | 2000-02-15 | 2002-10-22 | Agilent Technologies, Inc. | Method and apparatus for testing of ball grid array circuitry |
US6769080B2 (en) | 2000-03-09 | 2004-07-27 | Texas Instruments Incorporated | Scan circuit low power adapter with counter |
JP2001313127A (ja) | 2000-04-28 | 2001-11-09 | Nec Corp | 電子機器における静電気破壊防止装置 |
US6522018B1 (en) | 2000-05-16 | 2003-02-18 | Micron Technology, Inc. | Ball grid array chip packages having improved testing and stacking characteristics |
US6610591B1 (en) | 2000-08-25 | 2003-08-26 | Micron Technology, Inc. | Methods of ball grid array |
US20020170897A1 (en) * | 2001-05-21 | 2002-11-21 | Hall Frank L. | Methods for preparing ball grid array substrates via use of a laser |
JP3675364B2 (ja) * | 2001-05-30 | 2005-07-27 | ソニー株式会社 | 半導体装置用基板その製造方法および半導体装置 |
US6734552B2 (en) | 2001-07-11 | 2004-05-11 | Asat Limited | Enhanced thermal dissipation integrated circuit package |
US7015072B2 (en) | 2001-07-11 | 2006-03-21 | Asat Limited | Method of manufacturing an enhanced thermal dissipation integrated circuit package |
US6790710B2 (en) * | 2002-01-31 | 2004-09-14 | Asat Limited | Method of manufacturing an integrated circuit package |
US6683468B1 (en) * | 2001-08-29 | 2004-01-27 | Cypress Semiconductor Corporation | Method and apparatus for coupling to a device packaged using a ball grid array |
US6611052B2 (en) | 2001-11-16 | 2003-08-26 | Micron Technology, Inc. | Wafer level stackable semiconductor package |
US7344899B2 (en) * | 2002-01-22 | 2008-03-18 | Micron Technology, Inc. | Die assembly and method for forming a die on a wafer |
JP2003249743A (ja) * | 2002-02-26 | 2003-09-05 | Seiko Epson Corp | 配線基板及びその製造方法、半導体装置並びに電子機器 |
US20030178719A1 (en) * | 2002-03-22 | 2003-09-25 | Combs Edward G. | Enhanced thermal dissipation integrated circuit package and method of manufacturing enhanced thermal dissipation integrated circuit package |
US7259043B2 (en) * | 2002-05-14 | 2007-08-21 | Texas Instruments Incorporated | Circular test pads on scribe street area |
US6940154B2 (en) * | 2002-06-24 | 2005-09-06 | Asat Limited | Integrated circuit package and method of manufacturing the integrated circuit package |
US6965160B2 (en) * | 2002-08-15 | 2005-11-15 | Micron Technology, Inc. | Semiconductor dice packages employing at least one redistribution layer |
KR100505665B1 (ko) * | 2003-01-14 | 2005-08-03 | 삼성전자주식회사 | 테스트용 패드가 이면에 형성된 테이프 패키지 및 그검사방법 |
DE10343578B4 (de) * | 2003-09-18 | 2007-01-18 | Infineon Technologies Ag | Umverdrahtungssubstratstreifen mit mehreren Halbleiterbauteilpositionen und Verfahren zu seiner Herstellung |
GB0329516D0 (en) * | 2003-12-19 | 2004-01-28 | Univ Kent Canterbury | Integrated circuit with debug support interface |
US7419852B2 (en) * | 2004-08-27 | 2008-09-02 | Micron Technology, Inc. | Low temperature methods of forming back side redistribution layers in association with through wafer interconnects, semiconductor devices including same, and assemblies |
JP4583850B2 (ja) * | 2004-09-16 | 2010-11-17 | 富士通セミコンダクター株式会社 | 半導体装置及びその製造方法 |
JP4592634B2 (ja) * | 2005-06-17 | 2010-12-01 | パナソニック株式会社 | 半導体装置 |
US7259028B2 (en) * | 2005-12-29 | 2007-08-21 | Sandisk Corporation | Test pads on flash memory cards |
KR100843202B1 (ko) * | 2006-09-06 | 2008-07-02 | 삼성전자주식회사 | 기판 양면에 검사용 패드를 갖는 반도체 패키지 및검사방법 |
US7714426B1 (en) * | 2007-07-07 | 2010-05-11 | Keith Gann | Ball grid array package format layers and structure |
US7829977B2 (en) * | 2007-11-15 | 2010-11-09 | Advanced Semiconductor Engineering, Inc. | Low temperature co-fired ceramics substrate and semiconductor package |
JP5071084B2 (ja) * | 2007-12-10 | 2012-11-14 | パナソニック株式会社 | 配線用基板とそれを用いた積層用半導体装置および積層型半導体モジュール |
SG142321A1 (en) * | 2008-04-24 | 2009-11-26 | Micron Technology Inc | Pre-encapsulated cavity interposer |
US7859120B2 (en) * | 2008-05-16 | 2010-12-28 | Stats Chippac Ltd. | Package system incorporating a flip-chip assembly |
US8022521B1 (en) * | 2008-11-12 | 2011-09-20 | Amkor Technology, Inc. | Package failure prognostic structure and method |
EP2535926A3 (en) * | 2011-06-17 | 2015-08-05 | BIOTRONIK SE & Co. KG | Semiconductor package |
KR101633373B1 (ko) * | 2012-01-09 | 2016-06-24 | 삼성전자 주식회사 | Cof 패키지 및 이를 포함하는 반도체 장치 |
KR101944795B1 (ko) | 2012-01-25 | 2019-04-17 | 삼성전자주식회사 | 테이프 필름 패키지 및 그의 제조방법 |
US9153507B2 (en) * | 2012-01-31 | 2015-10-06 | Broadcom Corporation | Semiconductor package with improved testability |
US8910310B2 (en) * | 2012-05-17 | 2014-12-09 | Silicon Motion, Inc. | Embedded flash memory card and electronic device using the same, and engineering board for embedded flash memory card |
US9134366B2 (en) | 2013-08-27 | 2015-09-15 | Freescale Semiconductor, Inc. | Method for forming a packaged semiconductor device |
CN106856177B (zh) * | 2016-11-28 | 2019-07-02 | 嘉兴鹏武电子科技有限公司 | 应用于测试的裸芯片结构及其制造方法 |
CN106847719B (zh) * | 2016-11-28 | 2019-08-13 | 西安科锐盛创新科技有限公司 | 应用于测试的裸芯片结构及其制造方法 |
US20180315672A1 (en) * | 2017-04-26 | 2018-11-01 | Qualcomm Incorporated | Sacrificial test pads for inline test access |
US11355403B2 (en) * | 2018-06-28 | 2022-06-07 | Western Digital Technologies, Inc. | Semiconductor device including through-package debug features |
US12094789B2 (en) * | 2021-12-23 | 2024-09-17 | Micron Technology, Inc. | Analog sense points for measuring circuit die |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4437141A (en) * | 1981-09-14 | 1984-03-13 | Texas Instruments Incorporated | High terminal count integrated circuit device package |
JPS5963751A (ja) * | 1982-10-04 | 1984-04-11 | Matsushita Electronics Corp | 半導体装置 |
JPS6276640A (ja) * | 1985-09-30 | 1987-04-08 | Toshiba Corp | 半導体集積回路装置 |
US4970454A (en) * | 1986-12-09 | 1990-11-13 | Texas Instruments Incorporated | Packaged semiconductor device with test circuits for determining fabrication parameters |
EP0351581A1 (de) * | 1988-07-22 | 1990-01-24 | Oerlikon-Contraves AG | Hochintegrierte Schaltung sowie Verfahren zu deren Herstellung |
JPH02211648A (ja) * | 1989-02-11 | 1990-08-22 | Nec Ic Microcomput Syst Ltd | 半導体装置 |
US5018005A (en) * | 1989-12-27 | 1991-05-21 | Motorola Inc. | Thin, molded, surface mount electronic device |
US5065227A (en) * | 1990-06-04 | 1991-11-12 | International Business Machines Corporation | Integrated circuit packaging using flexible substrate |
-
1992
- 1992-04-06 US US07/864,246 patent/US5334857A/en not_active Expired - Lifetime
-
1993
- 1993-03-18 EP EP93104432A patent/EP0564865A1/en not_active Withdrawn
- 1993-03-26 JP JP5090492A patent/JPH0621173A/ja active Pending
- 1993-03-31 KR KR1019930005518A patent/KR930022510A/ko active IP Right Grant
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100258350B1 (ko) * | 1997-05-13 | 2000-06-01 | 마이클 디. 오브라이언 | 슈퍼 bga 반도체패키지 |
Also Published As
Publication number | Publication date |
---|---|
EP0564865A1 (en) | 1993-10-13 |
US5334857A (en) | 1994-08-02 |
JPH0621173A (ja) | 1994-01-28 |
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