KR20010099356A - 파릴렌코팅방법 - Google Patents
파릴렌코팅방법 Download PDFInfo
- Publication number
- KR20010099356A KR20010099356A KR1020010058757A KR20010058757A KR20010099356A KR 20010099356 A KR20010099356 A KR 20010099356A KR 1020010058757 A KR1020010058757 A KR 1020010058757A KR 20010058757 A KR20010058757 A KR 20010058757A KR 20010099356 A KR20010099356 A KR 20010099356A
- Authority
- KR
- South Korea
- Prior art keywords
- parylene
- substrate
- deposition
- parylene material
- state
- Prior art date
Links
- 229920000052 poly(p-xylylene) Polymers 0.000 title claims abstract description 68
- 238000000576 coating method Methods 0.000 title claims abstract description 34
- 239000011248 coating agent Substances 0.000 title claims abstract description 17
- 238000000034 method Methods 0.000 title claims abstract description 13
- 239000000463 material Substances 0.000 claims abstract description 28
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 230000008021 deposition Effects 0.000 claims abstract description 22
- 238000010438 heat treatment Methods 0.000 claims abstract description 18
- 238000012360 testing method Methods 0.000 claims abstract description 12
- 238000001816 cooling Methods 0.000 claims abstract description 8
- 239000000539 dimer Substances 0.000 claims abstract description 8
- 230000008016 vaporization Effects 0.000 claims abstract description 8
- 229920006311 Urethane elastomer Polymers 0.000 claims abstract description 7
- 239000000178 monomer Substances 0.000 claims abstract description 5
- 229920000642 polymer Polymers 0.000 claims abstract description 4
- 238000000197 pyrolysis Methods 0.000 claims abstract description 4
- 238000003303 reheating Methods 0.000 claims abstract description 4
- 239000007787 solid Substances 0.000 claims abstract description 4
- 238000009834 vaporization Methods 0.000 claims abstract description 4
- 239000006200 vaporizer Substances 0.000 claims abstract description 4
- 239000010409 thin film Substances 0.000 abstract description 6
- 238000005260 corrosion Methods 0.000 abstract description 5
- 230000007797 corrosion Effects 0.000 abstract description 4
- 230000003647 oxidation Effects 0.000 abstract description 3
- 238000007254 oxidation reaction Methods 0.000 abstract description 3
- 238000010292 electrical insulation Methods 0.000 abstract description 2
- 238000004078 waterproofing Methods 0.000 abstract description 2
- 230000002265 prevention Effects 0.000 abstract 1
- 238000000151 deposition Methods 0.000 description 12
- 238000009413 insulation Methods 0.000 description 3
- 229920003002 synthetic resin Polymers 0.000 description 3
- 239000000057 synthetic resin Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- IYZWUWBAFUBNCH-UHFFFAOYSA-N 2,6-dichlorobiphenyl Chemical compound ClC1=CC=CC(Cl)=C1C1=CC=CC=C1 IYZWUWBAFUBNCH-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- ZGHQUYZPMWMLBM-UHFFFAOYSA-N 1,2-dichloro-4-phenylbenzene Chemical compound C1=C(Cl)C(Cl)=CC=C1C1=CC=CC=C1 ZGHQUYZPMWMLBM-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 206010013647 Drowning Diseases 0.000 description 1
- 230000003064 anti-oxidating effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 230000002354 daily effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 230000003203 everyday effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 230000028327 secretion Effects 0.000 description 1
- 210000004243 sweat Anatomy 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/60—Deposition of organic layers from vapour phase
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/002—Pretreatement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
- B05D3/0433—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases the gas being a reactive gas
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
- B05D5/12—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain a coating with specific electrical properties
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/285—Permanent coating compositions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D2518/00—Other type of polymers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
Abstract
Description
Claims (5)
- 시험용커넥터의 커넥터핀 부위에 우레탄고무튜브를 씌운 해당 기판을 증착챔버에 로드하는 기판로드단계;파릴렌물질을 기화기에서 가열하는 1차가열단계;상기 파릴렌물질이 가열됨에 따라 고체 다이머상태에서 기화되는 기화단계;상기 파릴렌물질을 재가열하는 2차가열단계;상기 파릴렌물질이 재가열됨에 따라 다이머상태에서 열분해되어 모노머상태로 변환되는 열분해단계;상기 모노머상태의 파릴렌물질을 증착챔버 내부로 공급하고, 증착챔버 내부를 상온의 진공상태로 조성하여 냉각시키는 냉각단계;콜드트랩과 진공펌프를 이용하여 상기 파릴렌물질이 냉각되면서 폴리머상태로 변환되어 상기 기판 주위에 코팅되는 파릴렌증착단계를 포함하는 것을 특징으로 하는 파릴렌코팅방법.
- 제 1 항에 있어서,상기 기판상에 증착되는 파릴렌의 코팅두께는 공급되는 파릴렌의 증착량, 증착시간에 비례적으로 제어되고, 바람직한 코팅두께는 2∼5㎛인 것을 특징으로 하는 파릴렌코팅방법.
- 제 1 항에 있어서,상기 1차가열단계의 공정조건은 상기 파릴렌물질을 150℃의 온도와 1.0 Torr의 압력으로 가열하는 것을 특징으로 파릴렌코팅방법.
- 제 1 항에 있어서,상기 2차가열단계의 공정조건은 상기 파릴렌물질을 680℃ 이하의 온도와 0.5 Torr 이상의 압력으로 가열하는 것을 특징으로 하는 파릴렌코팅방법.
- 제 1 항에 있어서,상기 파릴렌증착단계의 공정조건은 25℃의 온도와 0.1 Torr의 압력으로 진행하는 것을 특징으로 하는 파릴렌코팅방법.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020010058757A KR20010099356A (ko) | 2001-09-21 | 2001-09-21 | 파릴렌코팅방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020010058757A KR20010099356A (ko) | 2001-09-21 | 2001-09-21 | 파릴렌코팅방법 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20010099356A true KR20010099356A (ko) | 2001-11-09 |
Family
ID=19714566
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020010058757A KR20010099356A (ko) | 2001-09-21 | 2001-09-21 | 파릴렌코팅방법 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR20010099356A (ko) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100675806B1 (ko) * | 2005-08-04 | 2007-01-30 | 주식회사 누리테크 | 패럴린 코팅방법 |
CN106702343A (zh) * | 2015-07-14 | 2017-05-24 | 深圳安吉尔饮水产业集团有限公司 | 一种硅胶管涂覆方法及应用 |
KR20190098551A (ko) | 2018-02-14 | 2019-08-22 | 정순원 | 수직일체형 파릴렌 코팅장치 |
KR20190098552A (ko) | 2018-02-14 | 2019-08-22 | 정순원 | 수직일체형 다중 파릴렌 코팅장치 및 이를 이용한 코팅방법 |
CN114574094A (zh) * | 2022-03-03 | 2022-06-03 | 上海派拉纶生物技术股份有限公司 | 一种高可靠性集成电路防护涂层 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04224683A (ja) * | 1990-03-19 | 1992-08-13 | Union Carbide Chem & Plast Co Inc | 被覆基体の防食性を最適化する方法 |
JPH0560871A (ja) * | 1991-09-04 | 1993-03-12 | Hamamatsu Photonics Kk | 放射線検出素子 |
KR970030470A (ko) * | 1995-11-30 | 1997-06-26 | 빈센트 비. 안그레시아 | 유기 소자의 패시베이션 방법 및 패시베이션 유기소자 |
JPH10113610A (ja) * | 1996-10-04 | 1998-05-06 | Dow Corning Corp | 電子デバイス用塗膜 |
WO1998036291A1 (fr) * | 1997-02-14 | 1998-08-20 | Hamamatsu Photonics K.K. | Dispositif de detection de radiations et son procede de production |
KR20020095804A (ko) * | 2001-06-15 | 2002-12-28 | 조대형 | 기판의 파릴렌 코팅방법 |
-
2001
- 2001-09-21 KR KR1020010058757A patent/KR20010099356A/ko not_active Application Discontinuation
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04224683A (ja) * | 1990-03-19 | 1992-08-13 | Union Carbide Chem & Plast Co Inc | 被覆基体の防食性を最適化する方法 |
JPH0560871A (ja) * | 1991-09-04 | 1993-03-12 | Hamamatsu Photonics Kk | 放射線検出素子 |
KR970030470A (ko) * | 1995-11-30 | 1997-06-26 | 빈센트 비. 안그레시아 | 유기 소자의 패시베이션 방법 및 패시베이션 유기소자 |
JPH10113610A (ja) * | 1996-10-04 | 1998-05-06 | Dow Corning Corp | 電子デバイス用塗膜 |
WO1998036291A1 (fr) * | 1997-02-14 | 1998-08-20 | Hamamatsu Photonics K.K. | Dispositif de detection de radiations et son procede de production |
KR20020095804A (ko) * | 2001-06-15 | 2002-12-28 | 조대형 | 기판의 파릴렌 코팅방법 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100675806B1 (ko) * | 2005-08-04 | 2007-01-30 | 주식회사 누리테크 | 패럴린 코팅방법 |
CN106702343A (zh) * | 2015-07-14 | 2017-05-24 | 深圳安吉尔饮水产业集团有限公司 | 一种硅胶管涂覆方法及应用 |
KR20190098551A (ko) | 2018-02-14 | 2019-08-22 | 정순원 | 수직일체형 파릴렌 코팅장치 |
KR20190098552A (ko) | 2018-02-14 | 2019-08-22 | 정순원 | 수직일체형 다중 파릴렌 코팅장치 및 이를 이용한 코팅방법 |
CN114574094A (zh) * | 2022-03-03 | 2022-06-03 | 上海派拉纶生物技术股份有限公司 | 一种高可靠性集成电路防护涂层 |
CN114574094B (zh) * | 2022-03-03 | 2023-03-03 | 上海派拉纶生物技术股份有限公司 | 一种高可靠性集成电路防护涂层 |
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Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 20010921 |
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