KR20000056424A - Flip chip dispensing - Google Patents

Abstract

PURPOSE: Dispensing equipment for a flip chip is provided which implements a first dispensing, a first degasing, a second dispensing and a second degasing automatically and entirely. CONSTITUTION: A dispensing equipment for a flip chip contains the parts of: at least one dispensing parts(150) wherein an X-Y-Z transfer robot(160), a dispensing head which is placed in the transfer robot and a carrier transfer/placement part(180) which alternatively transfers and places two carriers from the on-off loader are placed; and two on-off loaders(100)(100') which are oppositely placed and wherein an up-down plate(113) and a pusher(115) are included wherein a magazine(11) is built in an elevator.

Description

Flip chip dispensing

The present invention belongs to underfilling a flip chip such as a micro-BIA, and as shown in FIG. 1 (a) (b), a circuit film 2 is adhered to a carrier 1, and an ele on it. After the stormer 4 is installed, the flip chip 3 is seated on the elastomer 4. Thereafter, the connecting line 5 of the circuit film is brought into contact with the port portion of the chip 3. In addition, the encapsulation 6 is filled in the bottom surface of the chip 3 in order to protect the connection line 5 and the flip chip 3 as well as durability. The present invention provides an apparatus (hereinafter referred to as a dispensing apparatus) used to fill the encapsulate 6 described above. There have been many studies on the dispensing method. In the early stages, many dispensing methods were performed on four sides of the chip 3 at one time. The encapsulation 6 hardens in a state of air retention, resulting in a defective package. In order to prevent such defects, as shown in FIG. 2, the first dispensing operation in a U shape is performed along the first dispensing path 8, and after a predetermined time, the second dispensing path is second along the second dispensing path 9. A method of dispensing has been developed. The advantage of this method is that after a predetermined time after the first dispensing is performed on three sides, the liquid 6 discharged on the three sides flows to the underside of the flip chip 3 except for the other one side. It is almost completely filled. That is, the liquid 6 is filled while the air escapes to the surface where the liquid 6 is not discharged. After that, dispensing the remaining one surface is almost prevented air. In addition, if the pressure is reduced at a predetermined time after the first and second dispensing and dispensing, the air is better escaped. The first degassing operation is performed by maintaining a predetermined time in a depressurized state after the first dispensing, and the second degassing operation is performed. It is called tea degassing. Thus, the highest quality flip chip semiconductor devices are produced by performing the operations of primary dispensing, primary degassing, secondary dispensing, and secondary degassing under a predetermined depressurization state.

Conventionally, as described above, the primary dispensing, the primary degassing, the secondary dispensing, and the secondary degassing cannot be performed at one time. This fell and required a lot of manpower.

The present invention is proposed to solve the conventional problems, the first dispensing, the first degassing, the second dispensing, the second degassing is automatically performed in one apparatus, and furthermore, the apparatus for performing in a predetermined decompression state It is to provide a structure in which two on-off loaders in one dispensing unit are coupled in opposite directions to each other, and one on-off loader receives the carriers loaded in the magazine one by one, and then dispenses the primary carriers one by one in the on-off loader. After the first dispensing has been completed, the flip chip receives the carrier in the magazine from the other on-off loader and completes the first dispensing process. Carriers loaded in the container come out again one by one to perform secondary dispensing. After the second dispensing is completed, the second degassing enters and the carrier of the opposite on-off loader comes out to perform the second dispensing. After the operation is completed, the second degassing is entered. As it is completed, the operator takes out the magazine and installs a new magazine. Since the work is repeatedly performed, fast and efficient work can be achieved with a very simple equipment structure.

In another embodiment, the first dispensing is performed in the first dispensing unit, and the first dispensing unit is transferred to the first drain unit to perform the primary degassing, and the carrier having the primary degassing is transferred to the secondary dispensing unit to dispose the secondary. After the operation, the second dwell is transferred to the second degassing, and after the second degassing is completed, the structure is loaded on the offloader.

1 is a view for explaining a manufacturing process of a general microbiage,

(A) is a diagram in which chips are attached to the circuit film on a carrier in a matrix;

(B) is a front sectional view of one chip in (a),

2 is an explanatory diagram for a method of dispensing a typical flip chip;

3 is an overall plan view of a flip chip dispensing apparatus according to an embodiment of the present invention;

4 is a front view of FIG. 3;

5 is a left side view of FIG. 4;

6 is a detailed view of the on-loader section in the apparatus of FIG.

(A) is a view showing the mounting state of the magazine,

(B) is a right side view of FIG.

7 is a detailed view of the X-Y-Z transfer robot in the apparatus of FIG.

(A) is a plan view,

(B) is a front view of (a),

(C) is a left side view of FIG.

8 is a detailed view of the belt feed and carrier seat in the apparatus of FIG. 4, FIG.

(A) is a plan view,

(B) is a front view of (a),

(C) is a left side view of FIG.

(D) is a detailed view of a portion with a heater in (b),

9 is an overall plan view of a flip chip dispensing apparatus according to another embodiment of the present invention;

10 is an overall plan view of a flip chip dispensing apparatus according to another embodiment of the present invention.

※ Brief description of major codes

1: Carrier 2: Circuit Film 3: Microbiza, Flip Chip 4: Elastomer

5: connection line 6: encapsulation 7: solder ball 8: first dispensing path

9: second dispensing path 11: magazine 12: dummy magazine 100,100 ': on-off loader

101,101 ': Dwell chamber 102,102': Gate 110: Elevator

111: step motor 112: ball screw 113: up-down plate 114: air cylinder

115: pusher 120: drive motor 121: feed roller 122: conveyor belt

150: dispensing unit 151: main chamber 160: X-Y-Z transfer robot

161,161 ', 161' ': X, Y, Z axis servo motor, 162,162', 162 '': X, Y, Z axis ball screw

163,163 ', 163' ': X, Y, Z axis guide rail 171: Upper fixing board 172: Support block

173: Y-axis movable board 175: X-Y-axis movable board 177: X-Y-Z axis movable board

178: dispensing head 179: nozzle 180: carrier transport and seat 181: drive motor

182: roller 183: conveyor belt 184: rotating shaft 185: guide block 186: substrate

189: air cylinder 190: upload 191: support plate 192: insulation

193: heater 194: thermocouple 195: seating plate 200: on-loader 210: elevator

211: conveyor belt 212: pusher 215: first gate 216: prechamber

220: first belt transfer means 221: conveyor belt 222: guide block

225: second gate 230: main chamber 240, 240 ': first, second dispensing unit

241,241 ': 1st, 2X-Y-Z axis transfer robot 250,250': 1st, 2nd transfer plate

251,251 ': 1st, 2nd ball screw 252,252': 1st, 2nd guide rail

254: second belt transfer means 255: third belt transfer means 256: fourth belt transfer means

257: fifth belt conveying means 258: sixth belt conveying means 259: seventh belt conveying means

270: Dwell chamber 271,271 ': First and second dwell part 272,272': First and second pusher

273,273 ': First and second up-down plate 275: Third gate 276: Post chamber

278: eighth belt transfer means 279: fourth gate 280: offloader 281: elevator

282: conveyor belt 310: on-loader 315: prechamber

320,320 ': First and second dispensing unit 321,321': First and second dispensing chamber

330,330 ': First and second dwell parts 331,331': First and second dwell chambers

332,332 ': Up-down plate 333,333': Conveyor belt

334,334 ': belt transfer means 335,335': pusher 340: postchamber

350: Offloader 361,362,363,364: First, second, third, fourth gate

Hereinafter, the configuration and operation of the apparatus according to the present invention will be described in detail with reference to the accompanying drawings.

3 is an overall plan view of a flip chip dispensing apparatus according to an exemplary embodiment of the present invention, and two on / off loaders 100 and 100 ′ are installed at both sides of the dispensing unit 150. Since the structure of the two on-off loaders 100 and 100 'is exactly the same, only one side will be described. The on-loader 100 moves up and down by the elevator 110 inside the dwell chamber 101, whereby the carrier is loaded. It consists of a pusher 115 which is operated by an up-down plate 113 and an air cylinder 114 for mounting the magazine and pushes the carrier in the magazine 11, and the structure of the elevator 110 is shown in FIG. 6 (a). As shown in (b), the up-down plate 113 is installed to be movable by the ball screw 112 rotated by the step motor 111, and the carrier 1 is mounted on the up-down plate 113. The stacked magazine 11 is mounted. The magazine 113 is mounted up and down on both sides, and all four magazines are mounted, which can be changed in design. 3 again, the carriers alternately pushed out by the two pushers 114 are transported by the conveyor belt 122 operated by the drive motor 120 and moved to the dispensing unit 150. And there is a gate 102 between the on-off loader 100 and the dispensing unit 150, which can be opened and closed. This is to prevent the decompression of the decompressed state due to the closing of the gate of the on-off loader being replaced when the magazine of the on-off loader is completed secondary degassing is introduced into the main chamber 151.

The carrier transported from the on-off loader 100 is transferred to the dispensing unit 150. The dispensing unit 150 transfers the XYZ transfer robot 160, the dispensing head 178 and the carrier 1 fixed thereto. Consists of a carrier transfer and seating unit 180 to be seated for the dispensing operation, the structure of the XYZ transfer robot 160 with reference to Figure 7 (a) to (c), the upper fixed substrate 171 The support block 172 and the Y-axis guide rail 163 'is installed at the bottom of the Y-axis movable board 173 is installed at the bottom of the Y-axis servo motor 161' and Y-axis ball screw 162 ' ) Moves in the Y-axis (front and rear direction when viewed from the front of the device), while being guided by the Y-axis guide rail (163 '). The X-axis servo board 175 is formed by the X-axis servo motor 161, the X-axis ball screw 162, and the X-axis guide rail 163 on the lower side of the Y-axis movable board 163 '. Since it is movable in the axial direction (left and right when viewed from the front of the device), the XY axis movable substrate 175 can be moved in the XY direction. In addition, the lower part of the XY axis movable substrate 175, the XYZ axis movable substrate 177 by the Z axis servo motor 161 '', Z axis ball screw 162 '', Z axis guide rail 163 '' This movement in the Z direction (up and down direction) is possible, so the XYZ axis movable substrate 177 can be moved in the XYZ axis, thereby enabling three-dimensional movement. The dispensing head 178 having a nozzle 179 is mounted on the X-Y-Z axis movable substrate to move the dispensing operation while discharging the liquid (6, encapsulation). Since the X-Y-Z axis transfer robot 160 is a structure commonly used in the prior art, further description will be omitted.

In order to dispense with the encapsulation 6 coming out of the nozzle 179 of the dispensing head 178, the carrier transport and seating unit 180 must be transported and accurately seated. Referring to the structure in detail with reference to Figure 8 (a) to (d), when the rotating shaft 184 is rotated by the drive motor 181, the roller 182 is rotated and the opposite roller by the conveyor belt 183 The conveyor belt 183 transports the carrier while rotating 182 as well. Here, the conveyor belt 183 is to be able to move two carriers at the same time side by side, because two conveyor belts 183 to move one carrier (1) consists of all four conveyor belts.

When the carrier is stopped by a stopper (not shown) after being transported for a predetermined distance, the up-up download 190 which is lifted by the air cylinder 189 installed at the lower part of the substrate 186 and the seating plate 195 fixed to the upper part are lifted. The carrier is seated. As a result, the carrier 1 is lifted up from the conveyor belt. The carrier is fixed to the seating plate by vacuum suction or clamping mechanism. A heater 193 is installed at a lower portion of the seating plate to serve to heat the seating plate, and a heat insulating material 192 is installed at side and bottom surfaces of the heater to transmit heat only to the seating plate 195. A thermocouple 194 is installed between the seating plate 195 and the heater 193 to keep the temperature of the seating plate constant at all times, thereby reducing the temperature of the circuit plume 2 and the flip chip 3 on the carrier 1. It is kept at about 80 ℃. In this state, the X-Y-Z transfer robot described above discharges the liquid 6 while dispensing. In addition, although not shown, a CCD camera is also installed on the X-Y-Z axis moving substrate 175 of the X-Y-Z transfer robot 160 to perform the dispensing operation more accurately.

Referring to the operation of the dispensing apparatus according to an embodiment of the present invention configured as described above,

When the operator manually loads the magazine 11 loaded with the carrier 1 on two on / off loaders 100 and 100 ', the up and down plates 113 are lifted one by one by the elevator 110, and two When the carriers 1 are alternately pushed out by the pusher 115, the carriers 1 are pushed to the inlet of the dispensing unit 150 by the conveyor belt 122, and the driving motor of the dispensing unit 150 is driven. 181 moves the carrier 1 to approximately the center of the dispensing unit 150 while the conveyor is operating. After the carrier 1 stops, the mounting plate 195 is raised by the error cylinder 189 to seat the carrier 1. At this time, if the carrier 1 is fixed by vacuum suction or clamping means, not shown, the dispensing operation can be more stably performed. After the carrier is seated, the dispensing head 178 mounted on the X-Y-Z axis moving substrate 175 of the X-Y-Z transfer robot 160 is moved to perform the primary dispensing operation. At this time, the dispensing operation to the correct position by the vision system including the CCD camera. While the carrier 1 is moved to the other conveyor belt while the dispensing is performed on one side, the seating plate 195 is raised to stand by.

When the primary dispensing operation is completed, the carrier 1 moves back to the original magazine 11 and the dispensing head moves to the carrier on the other conveyor belt side to perform the primary dispensing as well. In this way, one dispensing head alternately moves to two seating plates 195 to perform work, thereby saving time for setting the carrier 1 and increasing productivity. In this way, if the primary dispensing is completed on the carrier of one side of the on-off loader 100 by repeating the operation, the primary dispensing is performed by moving the carrier of the other on-off loader 100 '. At this time, the flip chip 3 loaded in the on-off loader 100 enters a primary degassing operation maintained in a decompressed state for a predetermined time. When all of the flip chips 3 of the on and off loader 100 'are finished with the first dispensing, the flip chips 3 of the on and off loader 100 are subjected to the secondary dispensing operation. The flip chip 3 enters a primary degassing operation. In order to secondary dispensing the flip chip 3 of the on-off loader 100, the second dispensing is performed after the first dispensing is completed. After the secondary dispensing is completed, the carrier 1 is loaded into the magazine 11 of the on-off loader 100 again and enters the secondary degassing operation. At this time, the carrier of the on-off loader (100 ') comes out to be secondary dispensing. Before the flip chip 3 of the on-off loader 100 'is finished with the secondary dispensing, the operator manually removes the magazine 11 loaded with the flip chip which has been completed with the second degassing loaded on the on-off loader 100 by hand. Reload the magazine 11 loaded with the flip chip to be worked. At this time, during this replacement operation, the gate 102 is blocked between the on-off loader 100 and the dispensing unit 150 to prevent the air from flowing into the dispensing unit 150. When the second chip dispensing of the flip chip of the on-off loader 100 'is completed, secondary degassing is performed in the on-off loader 100', and the carrier 1 loaded on the on-off loader 100 is moved to the primary. Enter the dispensing operation. By repeating this operation, very small and simple equipment is capable of automatically dispensing primary dispensing, primary degassing, secondary dispensing and secondary degassing, as well as dispensing on the carrier 1 on one seat plate 195. During this process, the other mounting plate 195 is previously set with a new carrier 1, so that the dispensing head 178 continues to work without stopping time, thereby improving productivity.

A second embodiment according to the present invention will be described with reference to FIG.

As a configuration of the present invention, the conveyor belt 211, the pusher 212 and the elevator 210, the on-loader 200, which the operator mounts the magazine 11 loaded with the carrier, and the carrier from the on-loader 200 A prechamber 216 having a first gate 215 and having a first belt conveying means therein, the prechamber 216 acting to reduce pressure before the carrier moves to the main chamber 230; The main chamber 230 and the main chamber 230, which form an area that is ultimately decompressed, are attached with the chamber 216 and the second gate 225 interposed therebetween, and a first dispensing operation is performed inside the main chamber 230. A first dispensing unit 240 having a 3,4 belt conveying means 255 and 256, a first dwell portion which is a region in which a carrier having a first dispensing operation is loaded and a first degassing operation is carried out, and a carrier To transfer the first dispensing part 240 from the first dispensing part 240 to the first dwell part 271 on the first transfer plate 250. A second dispensing unit 240 ′ having a second belt conveying means 255 installed, a second dispensing carrier having completed the first degassing operation, and having sixth and seventh belt conveying means 258 and 259; The second dwell part, which is an area for performing the second degassing operation of the carrier having the second dispensing, and the carrier whose primary degassing is completed in the first dwell part 271 are transferred to the second dispensing part 240 '. The second conveying plate 250 ′ which transfers the carrier having the second dispensing to the second dwell part 271 ′ and transfers the carrier having the second degassing operation to the inlet of the post chamber 276 again. And a fifth belt conveying means 257 provided thereon, a post chamber 276 provided between the main chamber 230 and the offloader 280, and an offloader for loading the finished carrier.

In the on-loader 200, when a plurality of magazines 11 are mounted on the conveyor belt 211, the pusher 212 pushes the carrier while the elevator 210 raises the magazine step by step. The carrier from the onloader 200 is transferred to the first belt transfer means 220 of the prechamber 216. Here, the first to eighth belt transfer means are all the same structure, the carrier is transported by the conveyor belt 221 while being guided to the guide block 222. A first gate 215 is installed between the prechamber 216 and the onloader 200 to open when the carrier passes and close after the carrier is transferred. The carrier in the prechamber 216 is again passed through the second gate to the second belt transfer means 255 in the main chamber 216. The second belt transfer means 255 is a first ball screw ( 251 and the first guide rail 252 are installed on the first conveying plate 250 to move between the first dispensing unit 240 and the first dwell portion. Two carriers are alternately moved to the first dispensing unit 240 by the second belt transfer means 255. The first dispensing unit 255 is provided with a first X-Y-Z transfer robot, and a dispensing head is installed therein for dispensing. Since the structure thereof is the same as in the first embodiment, a detailed description thereof will be omitted. The first dispensing carrier in the first dispensing unit 240 is transferred to the first dwell unit by the second belt transfer unit 255 again. The first dwell part 271 has the same structure as the on-off loader 100 of the first embodiment. The dummy magazine 12 is installed on the up-down plate 273 to serve to store the carrier for a predetermined time. Carrier in which the first degassing work is completed in the first dwell part 271 is transferred to the fifth belt installed on the second conveying plate which is moved by the second ball screw 251 'and the second guide rail 252'. After being conveyed by the pusher 272 to the means 257, this fifth belt conveying means 257 conveys the carrier to the second dispensing portion 240 '. Since the structure and operation of the second dispensing unit 240 'are the same as those of the first dispensing unit 240, a detailed description thereof will be omitted. Herein, the carrier having the second dispensing is transferred to the fifth belt conveying means 257, and the carrier is transferred to the dummy magazine 12 in the second dwell part 271 ′ by the fifth belt conveying means 257. The second degassing takes place here. When the second desasing is completed in the second dwell part 271 ′, the pusher 272 ′ pushes the carrier in the dummy magazine 12 mounted on the up-down plate 273 ′ which is stepped by an unillustrated elevator. When the carrier is again transferred to the fifth belt transfer means. The fifth belt conveying means 257 is conveyed to the vicinity of the third gate 275 of the post chamber 276 and when the third gate 275 is opened, the carrier is moved from the fifth belt conveying means 257 to the post chamber 276. The carrier of the eighth belt transfer means 278 is transferred to the off-loader 280 as the eighth belt transfer means 278 is transferred to the eighth belt transfer means 278, and the third gate 275 is closed and the fourth gate 279 is opened. The structure of the offloader 280 is also similar to the onloader 200 and is composed of an elevator 281 and a conveyor belt 282.

In addition, the third belt transfer means 255, the fourth belt transfer means 256, the sixth belt transfer means 258 and the seventh belt transfer means 259 is provided with a seating plate is raised to the clamping means As a result, the carrier is fixed so that the carrier is fixed while dispensing. Its structure is the same as the device according to the first embodiment.

The advantage of the apparatus according to the second embodiment is that the first dispensing unit 240, only the first dispensing operation, the second dispensing unit 240 'the second dispensing operation to the two dispensing heads There is an advantage that the work speed is much improved than the first embodiment because it is installed and working each.

Referring to the third embodiment according to the present invention with reference to FIG.

This is invented to operate similar to the second embodiment, which includes an onloader 310, a prechamber 315, a first dispensing part 320, a first dwell part 330, a second dispensing part 320 '. ), The second dwell part 330 ', the post chamber 340, and the offloader 350 are all eight parts, and here, like the second embodiment, between the onloader 310 and the prechamber 315 The second gate 362 between the first gate 361, the prechamber 315 and the first dispensing portion 320, the third gate between the second dwell portion 330 ′ and the post chamber 340. Fourth gates are installed between the post chamber 340 and the offloader 350, respectively.

The advantage of this embodiment is that the structure is simpler and easier to manufacture than the second embodiment. However, a disadvantage of this embodiment is that the device is placed too long in the longitudinal direction and takes up a lot of space.

Since the dispensing apparatus according to the present invention performs the processes of the first dispensing, the first degassing, the second dispensing, and the second degassing in a completely automatic batch, the worker reduces labor and labor costs as in the prior art. Of course, there is an advantage that the productivity is greatly improved due to the significantly increased processing speed.

Claims (8)

An apparatus for dispensing flip chips, the apparatus comprising: At least one dispensing unit 150 and two on / off loaders 100 and 100 'are disposed at positions in which the dispensing unit 150 is opposed to each other. An up-down plate 113 and a pusher 115 on which a magazine 11 is mounted are included in the 110. The dispensing unit 150 includes an XYZ transfer robot 160 and a dispensing head 178 installed thereon. Dispensing device for flip chip, characterized in that consisting of the carrier transport and seating unit 180 for alternately transporting and seating two carriers from the offloader (100) (100 '). The method of claim 1, The carrier transport and seating unit 180 is seated by the conveyor belt 183 for alternately transporting two carriers, a guide block 185 for guiding the carrier, and a carrier being lifted from the conveyor belt 183. Dispensing device for flip chip, characterized in that consisting of a seating plate (195). The method according to claim 1 or 2, Each of the onloaders 100, 100 ′ is provided with dwell chambers 101, 101 ′ so that the magazine 11, up-down plate 113, elevator 110, etc. are provided with dwell chambers 101, 101. ') Is installed in the dispensing unit 150, the main chamber 151 is installed, the XYZ transfer robot 160, the dispensing head 178, the carrier transfer and seating unit 180 is the main chamber 151 The dispensing apparatus for flip chip, characterized in that the gate (102, 102 ') is installed between the dwell chamber (101) (101') and the main chamber (151). An apparatus for dispensing flip chips, The on-loader 200 on which the magazine loaded with the carrier is mounted, the first dispensing unit 240 for performing the first dispensing, the first dwell portion 271 for performing the first degassing, and the second dispensing And a second dispensing unit (240 '), a second dwell unit (271') for second degassing, and an off-loader for loading the finished carrier. The method of claim 4, wherein The first and second dispensing units 240 and 240 ′ are provided with first and second XYZ transfer robots each having a dispensing head installed therein and are capable of seating two dispensing to alternately dispense two carriers. Dispensing device for flip chip, characterized in that. The method of claim 5, The prechamber 216 is installed between the onloader 200 and the main chamber 230, and a first gate 215 is installed between the prechamber 216 and the onloader 200, and the prechamber ( A second gate 225 is installed between the 216 and the main chamber 230, and a post chamber 276 is installed between the main chamber 230 and the offloader 280. The post chamber 276 and the main chamber are provided. A third chip is installed between the chambers 230, and a fourth chip is fencing device, characterized in that the fourth gate is provided between the post chamber (276) and the off-loader (280). The method of claim 6, The first belt transfer means 220 is installed in the prechamber 216, and the second belt transfer means 254 is installed between the prechamber 216 and the first dispensing part 240, and the first dispensing part ( The third and fourth belt transfer means 255 is installed in the 240, and the fifth belt transfer means 257 is installed between the second dispensing part 240 ′ and the post chamber 276, and the second dispensing means. A sixth and seventh belt transfer means is installed at 240 ', an eighth belt transfer means is installed in the post chamber 276, and the second belt transfer means 254 is formed of a first dispensing unit and a first rod. It is installed on the first transfer plate 250 to reciprocate between the well portion 271, the fifth belt transfer means 257 is the first dwell portion 271, the second dispensing portion, the second dwell portion 271 ' And dispensing device for flip chip, characterized in that installed on the second transfer plate (250 ') that is movable to the position of the third gate (275) of the post chamber (276). The method of claim 7, wherein The third belt conveying means 255, the fourth belt conveying means 256, the sixth belt conveying means 258 and the seventh belt conveying means 259 are provided with seating plates, and the seating plates are raised, and then clamped by means of clamping means. Dispensing device for flip chip, characterized in that for fixing the carrier.