KR101093686B1 - Hollow actuator driven droplet dispensing device - Google Patents

Abstract

Provided are a hollow actuator driven droplet dispensing apparatus.

The present invention is made of an elastic body, the elastic tube of a predetermined length having a receiving space therein; When the external voltage is applied to the elastic tube in the longitudinal direction of the elastic tube is inserted and installed to the outside of the elastic tube, when applying an electric field includes a hollow actuator for generating a force and displacement in the longitudinal direction, applying an external voltage As the hollow actuator extends or contracts in the longitudinal direction of the elastic tube, the inner space volume of the elastic tube is reduced or expanded.

According to the present invention, by using a hollow actuator in which the generated displacement responds to the applied voltage at a high speed, the inner space volume of the tube installed in the hollow actuator is compressed or contracted so that the contents in the tube are fixed in and out of the tube. Since the structure is simple, the overall structure is simple and the assembly structure is simple, reducing the manufacturing cost, and the volume is small, so that it is suitable for the design of small and light products, and can have high-speed response.

Hollow actuators, dispensing, droplets, elastic tubes, nozzles,

Description

Hollow Type Actuator Driven Droplet Dispensing Apparatus}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a droplet dispensing apparatus for precisely and quantitatively discharging, and in particular, is formed by laminating and bonding an electrode-coated element in multiple layers on both end surfaces of a hollow piezoelectric ceramic. Hollow laminated piezoelectric actuator is configured by installing the outside of the tube, as the piezoelectric element is stretched in the longitudinal direction so that the tube shrinks or stretches, the contents of the hollow actuator drive type droplet dispensing device to be introduced or discharged inside the tube It is about.

That is, the present invention relates to a hollow actuator drive type droplet dispensing apparatus which is configured of a hollow multilayer piezoelectric element and thus controls precisely the amount of contents discharged from a tube by controlling power supplied to the piezoelectric element.

Micro-droplet jetting technology is suitable for various packaging or ultra-precision color patterning, digital textile printing, and small parts in the precision machinery, semiconductor industry, chemical process equipment industry and medical and bio industry, especially in the next generation semiconductor / display manufacturing process. It is a technology that can be applied to three-dimensional molding, chemical analysis equipment, and biochip / sensor industry, and is one of the important core process technologies in terms of improving product yield and increasing productivity.

Among the fine droplet jetting technologies, the dispensing method currently used is a pneumatic drive method using compressed air and a solenoid valve. there is a problem.

There is a dispensing means for droplet jetting using a piezoelectric element has been developed to solve this disadvantage.

Dispensers using such piezoelectric elements include the bending displacement of a thin disk type piezoelectric element and the operation of a metal diaphragm using the longitudinal displacement of the stacked piezoelectric actuators, but these have a disadvantage in that the structure is complicated and bulky. .

The present invention has been developed to solve the problems of the prior art as described above, by configuring the drive means with a hollow actuator that can generate a high speed response and a large force more accurate, fast response hollow actuator An object of the present invention is to provide a drive droplet dispensing apparatus.

That is, a hollow actuator configured by laminating and attaching an electrode-coated element in multiple layers on both sides of a thin hollow piezoelectric ceramic is installed on the outside of the tube so that the tube contracts or extends as the actuator is stretched in the longitudinal direction. Accordingly, an object of the present invention is to provide a hollow actuator driven droplet dispensing apparatus in which contents inside a tube are introduced or discharged.

As a specific means for achieving the above object, the present invention is made of an elastic body, the elastic tube of a predetermined length formed in the receiving space therein; When the external voltage is applied to the elastic tube in the longitudinal direction of the elastic tube is inserted and installed to the outside of the elastic tube, when applying an electric field includes a hollow actuator for generating a force and displacement in the longitudinal direction, applying an external voltage When the hollow actuator is elongated or contracted in the longitudinal direction of the elastic tube provides a hollow actuator drive type droplet dispensing device characterized in that the inner space volume of the elastic tube is reduced or expanded.

Preferably, the elastic tube includes a deformation portion on the outer surface of the body corresponding to the hollow actuator, the deformation portion is provided in a corrugated shape.

Preferably, the elastic tube has a female screw member which is screwed to the male screw portion formed on the outer surface of the body in contact with one end of the hollow actuator.

Preferably, the elastic tube further comprises a protective case, the protective case has an upper opening portion is inserted and fixed to the inlet of the elastic tube, and the lower opening portion spaced apart from the outlet of the elastic tube at a predetermined interval.

Preferably, the elastic tube includes a deformable portion on the outer surface of the body corresponding to the hollow actuator, the deformable portion is a boundary region connecting between the central region and the inlet having a uniform length of inner diameter, and between the central region and the outlet Another boundary region for connecting the inlet and outlet is provided with a cross-sectional shape of the inner diameter becomes smaller toward.

Preferably, the elastic tube is provided with an upper flange and a lower flange, respectively screwed with the male thread formed on each outer surface of the inlet and outlet to contact the top and bottom of the hollow actuator.

Preferably, the elastic tube includes at least one deformation portion on the body outer surface corresponding to the hollow actuator, the deformation portion is provided with an outer diameter relatively smaller than the outer diameter of the inlet and outlet of the elastic tube, the outer body The face is provided in a cross section which is curved outwardly convex.

Preferably, the elastic tube is screwed to the male thread formed on the outer surface of the inlet and the upper flange contacting one end of the hollow actuator, and the other end of the hollow actuator extending outward from the outlet of the elastic tube A lower flange is in contact.

More preferably, the elastic tube has a discharge nozzle at the outlet.

More preferably, an elastic mold is filled between the elastic tube and the hollow actuator.

More preferably, the elastic tube has a backflow prevention means at the inlet.

According to the present invention, by using a hollow actuator in which the generated displacement responds to the applied voltage at high speed, the inner space volume of the tube is compressed or contracted so that the contents in the tube are made to enter and exit the tube by a predetermined amount. It is simple and the assembly structure is simple to reduce the manufacturing cost, the volume is small, there is an effect that can be fast and responsive while being suitable for the compact and lightweight product design.

In addition, when the hollow actuator expands and contracts in the longitudinal direction of the tube, a large force generated simultaneously in the vertical and horizontal directions is used to facilitate the dispensing of a liquid with high viscosity, and also to the voltage applied to the tubular actuator. By using a proportional force and displacement amount there is an effect that can precisely control the discharge amount discharged to the outside.

Hereinafter, exemplary embodiments of the present invention will be described in more detail with reference to the accompanying drawings.

1 is a longitudinal sectional view showing a dispensing apparatus according to a first embodiment of the present invention, Figure 2 is for explaining the operating state of the dispensing apparatus shown in Figure 1, Figure 2a shows a suction state 2b shows a discharge state.

The hollow actuator driven droplet dispensing device H according to the first embodiment of the present invention is an elastic tube 1 and a hollow actuator, as shown in FIGS. 1 and 2 (a) and (b). It includes (2).

The elastic tube 1 may be elastically deformed by an external force, and may be formed of a hollow elastic body having a predetermined length to form an inner space so that contents such as liquid or powder are filled in the center of the body.

The hollow actuator 2 is fitted and fixed to the outside of the body of the elastic tube 1, and is electrically connected to an external power source to elastically deform the entire or specific portion of the elastic tube 1 when power is applied. It is a driving means for providing an external force while extending or contracting in the longitudinal direction of the elastic tube.

In addition, the elastic tube 1 may be made of a metal material having excellent elastic deformation force as a means for actually containing and discharging contents such as liquid or powder for dispensing.

As shown in FIG. 1, the elastic tube 1 includes a deformation part 1a capable of elastic deformation due to external force on an outer surface of the body corresponding to the position where the hollow actuator 2 is disposed.

The deformable portion (1a) is preferably provided with a corrugated shape of the cross section or the corrugated cross section having a longitudinal end section in order to maximize the amount of longitudinal deformation caused by external force, the body outer surface of the elastic tube (1) The deformation part 1a can be formed by machining such as cutting and rolling.

Accordingly, when the hollow actuator 2 expands and contracts in the longitudinal direction when voltage is applied, the inner space formed through the center of the body of the elastic tube is elastically deformed so that a volume change occurs while the inner diameter is reduced. By the deformable portion (1a) made of more easy and can be made in a large amount of deformation.

It is preferable to have a female screw member 15 screwed to the male screw portion 1b formed on the outer surface of the body of the elastic tube 1 and moved along the outer surface of the body of the elastic tube.

Accordingly, when the female screw member 15 is screwed along the male screw portion 1b in a state where the female screw member 15 is in contact with one end of the hollow actuator 2 disposed on the outer surface of the body of the elastic tube 1, the elastic tube ( 1) in contact with the other end and difficult to move the actuator (2) in the screw movement direction while giving the preliminary compression load to the actuator (2) and at the same time the preliminary tensile load can be applied to the deformation portion (1a) will be.

At this time, the other end of the actuator (2) should be disposed so as to be difficult to move in contact with the stepped portion is formed recessed or protruding on the outer surface of the body of the elastic tube (1).

Here, the female screw member 15 is screwed to the male screw portion formed on the outer surface of the body of the elastic tube 1 corresponding to the upper side of the deformable portion (1a) is shown and described as being moved from the upper side to the lower side, but not limited thereto. It is not intended to be screwed to the male screw portion formed on the outer surface of the body of the elastic tube corresponding to the lower side of the deformable portion (1a) may be provided to be moved from the lower side to the upper side.

One end of the upper end of the actuator 2 is in contact with or integrally connected to a specific portion of the elastic tube or the female screw member 15, and the other end of the actuator 2 is connected to a specific portion of the elastic tube. It is in contact with or integrally connected.

In addition, the hollow actuator 2 may be formed of a hollow multilayer piezoelectric (Piezoelectric) configured by stacking a piezoelectric element coated with a predetermined electrode on both sides of the thin ceramic sheet in multiple layers, but not limited thereto. In this case, any one of an electromagnetic magnetic, an electric polymer actuator, a shape memory alloy, and an electric motor driving linear actuator may be selectively used to generate force and displacement in the longitudinal direction. have.

1 to 2 (a) and (b), the protective case 10 may be provided to protect the hollow actuator 2 and the elastic tube 1 from the external environment. .

The protective case 10 has an upper opening 10a to which the outer surface of the inlet 11 into which the contents of the elastic tube 1 is introduced is fixed, and an outlet 12 through which the contents of the elastic tube 1 are discharged. The lower opening 10b is separated from and spaced apart at a predetermined interval so that the elastic tube 1 and the hollow actuator 2 are disposed in the inner space of the protective case to protect them from the external environment.

Here, the outlet 12 of the elastic tube 1 is opposed to each other at a predetermined interval with the lower opening 10b of the protective case 10, disposed on the same virtual vertical axis, the lower opening 10b The inner diameter of the outlet 12 is the same as or larger than the inner diameter of the contents discharged from the outlet 12 of the elastic tube 1 is discharged to the outside of the protective case 10 through the lower opening (10b). It can be.

Accordingly, when discharging the contents through the outlet 12 which is the nozzle end of the elastic tube 1, the lower end of the elastic tube 1 is caused by micro displacement due to the repeated stretching operation of the hollow actuator 2. Even if the upper and lower vibration by the lower end of the elastic tube 1 is not in contact with the protective case 10, the gap between the lower end of the protective case and the workpiece such as a substrate dropping the contents discharged from the outlet It can be kept constant at all times, and thus the droplets, which are the discharged contents, can be stably dispensed in a desired position.

A cable member (not shown) electrically connected to the hollow actuator 2 to supply power is led out through the protective case.

3 is a longitudinal sectional view showing a dispensing apparatus according to a second embodiment of the present invention, Figure 4 is for explaining the operating state of the dispensing apparatus shown in Figure 3, Figure 4a shows a suction state 4b shows a discharge state.

Hollow actuator drive type droplet dispensing device (H ') according to a second embodiment of the present invention, as shown in Figs. 3 and 4 (a) (b), the elastic tube (1') and hollow actuator (2 ').

The elastic tube (1 ') is a hollow elastic body of a predetermined length to form an inner space so that the elastic deformation by the external force, the contents such as liquid or powder can be filled in the center of the body, the hollow actuator (2') Is driving means for providing an external force while extending or contracting in the longitudinal direction of the elastic tube to elastically deform the whole or a specific portion of the elastic tube (1 ') when power is applied.

As shown in FIG. 3, the elastic tube 1 ′ includes a deformable portion 1 a ′ capable of elastic deformation by external force on an outer surface of the body corresponding to the position where the hollow actuator 2 ′ is disposed. do.

The deformable portion 1a 'has a boundary region connecting the central region and the inlet 11' having a uniform inner diameter and another boundary region connecting the central region and the outlet 12 '. As the inner diameter decreases toward the cross section, the deformable portion 1 'has a cross section relatively wider than that of the inlet 11' and the outlet 12 '.

Accordingly, when the hollow actuator 2 'is stretched in the longitudinal direction when voltage is applied, the inner space formed in the center of the body of the elastic tube 1' is elastically deformed so that a volume change occurs while the inner diameter is reduced. Elastic deformation can be made easier and larger elastic deformation amount by the deformation portion (1a ') the inner diameter is extended to the outside than the inlet and outlet.

Here, the deformable portion 1a 'may be provided as a deformable portion on a pleated cross section, as disclosed in the first embodiment.

The elastic tube 1 is provided with a female threaded hole so as to be respectively screwed into male screw portions 1b 'and 1c' formed on each outer surface of the inlet 11 'and the outlet 12' of the elastic tube 1 '. The hollow actuator 2 'is provided with an upper flange 20' and a lower flange 21 'which are moved along the outer surface of the body of the hollow actuator 2' and are in contact with the upper and lower ends of the hollow actuator 2 ', respectively. The upper flange 20 'is screwed to the inlet of the elastic tube 1' to surround the elastic tube 1 'and the lower flange 21' is screwed to the outlet of the elastic tube 1 '. It is arranged between and.

Accordingly, any one of the upper and lower flanges in the state where the upper and lower flanges 20 'and 21' are in contact with the upper and lower ends of the hollow actuator 2 'and the male screw portions 1b' and 1c 'are connected to each other. When the screw is moved along, it is possible to apply a pre-compression load to the actuator (2 ') while pressing the hollow actuator (2') in the screw movement direction.

In addition, the hollow actuator 2 'is disposed to surround the deformable portion 1a' at a predetermined distance from the deformable portion 1a 'of the elastic tube 1' and is radial in addition to the longitudinal direction when voltage is applied. As can be stretched and deformed, when the elastic mold 3 'is filled in the space between the hollow actuator 2' and the elastic tube 1 'as in the second embodiment, the length of the hollow actuator Displacement in the direction and radial direction is transmitted to the deformable portion 1a 'through the elastic mold 3' to further improve the operation of discharging the contents in the elastic tube to the outside through the outlet or flowing through the inlet. have.

 In addition, the outlet 12 ′ of the elastic tube 1 ′ may further include a discharge nozzle 4 ′ to more precisely control the direction or the amount of discharge of the contents to the outside.

5 is a longitudinal sectional view showing a dispensing apparatus according to a third embodiment of the present invention, Figure 6 is for explaining the operating state of the dispensing apparatus shown in Figure 5, Figure 6a shows a suction state 6B illustrates a discharge state, and FIG. 7 is a perspective view illustrating a dispensing apparatus according to a third embodiment of the present invention.

As shown in FIGS. 5 to 7, the hollow actuator drive type droplet dispensing device H ″ according to the third embodiment of the present invention has an elastic tube 1 ″ as in the first and second embodiments. And a hollow actuator 2 ''.

The elastic tube (1 '') is a hollow elastic body of a predetermined length to form an inner space so that the elastic deformation by the external force, the contents such as liquid or powder can be filled in the center of the body, the hollow actuator (2 ' ') Is a driving means for providing an external force while extending or contracting in the longitudinal direction of the elastic tube so as to elastically deform the whole or a specific portion of the elastic tube (1') when power is applied.

As shown in FIG. 5, the elastic tube 1 ″ is a deformable portion 1a ″ capable of elastic deformation due to external force on an outer surface of the body corresponding to the position where the hollow actuator 2 ″ is disposed. ).

The deformable portion 1a ″ is provided with an outer diameter size that is relatively smaller than the outer diameters of the inlet 11 ′ and the outlet 12 ′, and has a cross section in which the outer surface of the body is convexly curved outward.

Accordingly, when the hollow actuator 2 '' expands and contracts in the longitudinal direction when voltage is applied, the inner space formed in the center of the body of the elastic tube 1 '' is elastically deformed so that a volume change occurs while the inner diameter thereof decreases. This elastic deformation can be made easier and larger by the deformation portion (1a ″) the outer diameter is reduced than the inlet and outlet.

Here, the deformable portion 1a '' is provided as a deformable portion on a pleated cross section as described in the first embodiment, or a deformed portion on a cross section whose inner diameter extends outward from the inlet and the outlet as disclosed in the second embodiment. Can be.

It moves along the outer surface of the body of the elastic tube (1 ') with a female threaded hole to be screwed to the male thread portion (1b' ') formed on the outer surface of the inlet (11' ') of the elastic tube (1' '). Upper flange 20 " contacting the upper end of the hollow actuator 2 ", and extending outward from the outlet 12 " of the elastic tube 1 " ') Has a lower flange 21' 'in contact with the lower end of the hollow actuator (2' ') is screwed in the inlet of the elastic tube (1' ') to surround the elastic tube (1' ') It is disposed between the upper flange 20 ′ to be assembled and the lower flange 21 ″ integrally provided at the outlet of the elastic tube 1 ″.

Accordingly, the upper flange 20 '' is a male screw portion 1b '' in a state where the upper and lower flanges 20 '' and 21 '' are in contact with the upper and lower ends of the hollow actuator 2 ''. When the screw is moved along, it is possible to apply the preliminary compression load while pressing the hollow actuator (2 ″) in the screw movement direction.

In addition, the hollow actuator 2 '' is disposed to surround the deformable portion 1a '' at a predetermined interval from the deformable portion 1a '' of the elastic tube 1 '' and is applied in the longitudinal direction when voltage is applied. In addition, it can be elastically deformed in the radial direction. When the elastic mold 3 '' is filled in the space between the hollow actuator 2 '' and the elastic tube 1 '' as in the second embodiment, The displacement in the longitudinal and radial directions of the hollow actuator is transmitted to the deformable portion 1a '' through the elastic mold 3 '' to discharge the contents in the elastic tube to the outside through the outlet or to the inlet. Incoming operation can be further improved.

 In addition, the outlet nozzle 12 '' of the elastic tube 1 '' may be further provided with a discharge nozzle 4 '' to more precisely control the direction or amount of discharge of the contents to the outside.

The hollow actuator drive type droplet dispensing apparatus (H, H ', H' ') according to the first to third embodiments is illustrated in FIGS. 2 (a) (b), 4 (a) (b), and 6 (b). a) Micro-pumping operation that stretches elastically in the longitudinal direction and expands and discharges the contents of the elastic tube to the outside while expanding and contracting the hollow actuator disposed corresponding to the deformation portion of the elastic tube as shown in (b). It is to perform repeatedly for each expansion operation of the hollow actuator.

That is, when the hollow actuator is extended in the longitudinal direction as shown in Figs. 2 (a), 4 (a) and 6 (a), the inner space volume of the elastic tube expands relative to the initial atmospheric state and is inlet. The contents are introduced through. At this time, the hollow actuator is elongated in the longitudinal direction and contracted inward in the radial direction, but since the amount of elastic deformation in the longitudinal direction is larger than the amount of elastic deformation in the radial direction, the inner space of the elastic tube is expanded to expand the contents. It is possible to perform the suction operation flowing into the smoothly.

In addition, when the hollow actuator is contracted in the longitudinal direction while the contents such as liquid or powder are filled in the inner space of the elastic tube, as shown in FIGS. 2 (b), 4 (b) and 6 (b). Similarly, the deformed portion of the elastic tube, which was elastically deformed in the longitudinal direction, returns to its original state and contracts in the longitudinal direction, thereby discharging the contents quantitatively through the outlet while the inner space volume of the elastic tube is reduced or equal to the initial atmospheric state. Will be. At this time, the hollow actuator is reduced in the longitudinal direction and at the same time it extends outward in the radial direction, but because the amount of elastic deformation contracted in the longitudinal direction is relatively larger than the amount of elastic deformation extending in the radial direction, the inner space of the elastic tube is reduced to It is possible to smoothly perform the discharge operation to discharge the outside.

By repeating the suction operation and the discharge operation of the elastic tube due to the expansion and contraction operation of the hollow actuator, the contents in the elastic tube can be precisely provided where desired in a predetermined discharge amount.

On the other hand, the inlet of the elastic tube is preferably provided with a backflow preventing means (11a) such as an orifice to prevent the contents such as liquid or powder introduced into the elastic tube to flow back to the inlet.

That is, a flow path is formed toward the inside of the elastic tube and gradually narrows in diameter, and the inflow prevention means 11a formed in the orifice shape having a jaw formed at the inner end is installed at the inlet so that the contents introduced into the inlet 11 are at the inner end. Backflow into the inlet 11 by the formed jaw can be prevented.

Here, the backflow prevention means (11a) can further increase the backflow prevention effect by selectively installing a backflow prevention plate or the like in addition to the orifice structure.

While the invention has been shown and described with respect to particular embodiments, it will be understood that various changes and modifications can be made in the art without departing from the spirit or scope of the invention as set forth in the claims below. It will be appreciated that those skilled in the art can easily know.

1 is a longitudinal sectional view showing a dispensing apparatus according to a first embodiment of the present invention.

FIG. 2 illustrates an operating state of the dispensing apparatus of FIG. 1.

(a) is inhalation,

(b) is the discharge condition.

3 is a longitudinal sectional view showing a dispensing apparatus according to a second embodiment of the present invention.

4 is a view illustrating an operating state of the dispensing apparatus of FIG. 3.

(a) is inhalation,

(b) is the discharge state

5 is a longitudinal sectional view showing a dispensing apparatus according to a third embodiment of the present invention.

FIG. 6 illustrates an operating state of the dispensing apparatus of FIG. 5.

(a) is inhalation,

(b) is the discharge condition.

7 is a perspective view showing a dispensing apparatus according to a third embodiment of the present invention.

<Code Description of Main Parts of Drawing>

1,1 ', 1' ': Elastic tube 1a, 1a', 1a '': Deformation part

2,2 ', 2' ': Hollow Actuator 3', 3 '': Elastomer Mold

4 ', 4' ': Outlet nozzle 10: Protective case

11,11 ', 11' ': Entrance 12,12', 12 '': Exit

11a: countercurrent prevention means 15: female thread member

20 ', 20' ': Upper flange 21', 21 '': Lower flange

Claims (11)

It is made of an elastic body, the elastic tube of a predetermined length having a receiving space therein; It is installed on the outside of the elastic tube to expand and contract the elastic tube in the longitudinal direction of the elastic tube when an external voltage is applied, and includes a hollow actuator for generating a force and displacement in the longitudinal direction when applying an electric field, The hollow actuator drive type droplet dispensing apparatus, characterized in that the hollow actuator is reduced or expanded the volume of the inner space of the elastic tube as the hollow actuator is extended or contracted in the longitudinal direction of the elastic tube when an external voltage is applied. The method of claim 1, The elastic tube includes a deformation portion on the outer surface of the body corresponding to the hollow actuator, The hollow actuator-driven droplet dispensing apparatus, characterized in that the deformation portion is provided in a pleated shape. The method of claim 1, The elastic tube is a hollow actuator drive droplet dispensing device, characterized in that it has a female screw member which is screwed to the male screw portion formed on the outer surface of the body in contact with one end of the hollow actuator. The method of claim 1, The elastic tube further includes a protective case, The protective case has a hollow actuator drive type droplet dispensing apparatus comprising an upper opening portion into which the inlet of the elastic tube is inserted and fixed, and a lower opening portion spaced apart from the outlet of the elastic tube at a predetermined interval. The method of claim 1, The elastic tube includes a deformation portion on the outer surface of the body corresponding to the hollow actuator, The deformable portion is provided with a cross-sectional area in which the inner diameter decreases toward the inlet and the outlet, and a boundary region connecting the central region and the inlet with a uniform inner diameter to a predetermined length, and another boundary region connecting the central region and the outlet. Hollow actuator driven droplet dispensing device. The method of claim 1, The elastic tube is a hollow actuator drive type droplet display, characterized in that the screw thread formed on each outer surface of the inlet and outlet, respectively, the upper flange and the lower flange in contact with the top and bottom of the hollow actuator respectively; Fencing device. The method of claim 1, The elastic tube includes at least one deformation portion on the outer surface of the body corresponding to the hollow actuator, The deformation unit is provided with an outer diameter relatively smaller than the outer diameter of the inlet and outlet of the elastic tube, the hollow actuator drive type droplet dispensing apparatus, characterized in that the outer surface is convexly curved to the outside. The method of claim 1, The elastic tube is screwed to the male thread formed on the outer surface of the inlet to contact the one end of the hollow actuator, and the lower flange extending outward from the outlet of the elastic tube to the other end of the hollow actuator Hollow actuator driven droplet dispensing device comprising a. The method according to any one of claims 5 to 8, The hollow tube actuator type droplet dispensing device, characterized in that the outlet is provided with a discharge nozzle. The method according to any one of claims 5 to 8, Hollow actuator driven droplet dispensing device, characterized in that the elastic mold is filled between the elastic tube and the hollow actuator. The method according to any one of claims 1 to 8, The hollow tube actuator type droplet dispensing device, characterized in that the inlet is provided with a backflow prevention means.

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