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JPS60189005A - Distributed control device - Google Patents

Distributed control device

Info

Publication number
JPS60189005A
JPS60189005A JP4470484A JP4470484A JPS60189005A JP S60189005 A JPS60189005 A JP S60189005A JP 4470484 A JP4470484 A JP 4470484A JP 4470484 A JP4470484 A JP 4470484A JP S60189005 A JPS60189005 A JP S60189005A
Authority
JP
Japan
Prior art keywords
control
control loop
memory
control device
distributed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4470484A
Other languages
Japanese (ja)
Inventor
Takao Honna
孝男 本名
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4470484A priority Critical patent/JPS60189005A/en
Publication of JPS60189005A publication Critical patent/JPS60189005A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B11/00Automatic controllers
    • G05B11/01Automatic controllers electric
    • G05B11/36Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Feedback Control In General (AREA)

Abstract

PURPOSE:To apply a distributed control device to all process controls without generating a control loop by introducing an IC memory, where control loop information is preliminarily formed, into an operation monitor device of the distributed control device. CONSTITUTION:A select key SKEY1 in an operation monitor device POC1 is used to select a control loop stored in a mask ROM and acts upon a CPU1 with a signal SK1. With respect to contents of a memory of this CPU1, a SKEY supporting function SK0 is added in a memory MM0 as shown by a figure A, and a memory MM1 is added newly, and the mask ROM where control loops LOOP0 l1-(n) are stored is provided. IDs a1-an are only designated by SKEY to make generation of control loops unnecessary, and the operation is simplified very much. Thus, various difficulties concerning information processings of control loop generation check, maintenance, etc. are all resolved.

Description

【発明の詳細な説明】 〔発明の4u用分野〕 本発明は分散形制御装置に係υ、時に制御ループ作成を
しなくてもJi用できる分散形刊御装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of the Invention for 4U] The present invention relates to a distributed control device, and sometimes to a distributed control device that can be used for Ji without creating a control loop.

〔冗明の背景〕[Redundant background]

近年マイクロコンピュータ(μmCPU)tJ’6用し
た各種のifi制御装置が急謂し、μmCPUなしのこ
れらの装置煮qよ消失する過程にある。これらの制御装
置中、本案では工業計測部門に2いて古くから用いられ
ているPID制御に代表される各種のアナログ調節計と
称される範囲のμmCPU化に限定し罠分散形制御装置
に関する一提案である。
In recent years, various IFI control devices using microcomputers (μmCPUs) have suddenly become popular, and these devices without μmCPUs are in the process of disappearing. Among these control devices, this proposal is limited to micrometer CPU conversion of various analog controllers such as PID control, which have been used for a long time in the industrial measurement sector, and proposes a distributed control device. It is.

この釉の調節gtの機能もμmCP Uを応用するに伴
い制御ループ(調節ループとも称し、例えばプロセスの
温度、圧力、レベル、流量等をそのプロセスに最適な値
に+1ill側1する7ヒめの人力から出力まf Ir
 −、Q) *−11−ヤ1.1ffl 17)結、ヶ
。おっ。16.10yv−jlと称する)τプログラマ
ブル化し、ろら9るプロ 1セスに刈応できるゼイ、フ
ルパーパス的方式ケ持つている。
As the glaze adjustment gt function is applied to the μm CPU, the control loop (also called the adjustment loop, for example, the 7th step of adjusting the process temperature, pressure, level, flow rate, etc. to the optimum value for the process + 1ill side 1) Output from human power
-, Q) *-11-ya 1.1ffl 17) Conclusion, ga. Oh. 16.10yv-jl) has been made programmable and has a full-purpose method that can be adapted to various processes.

このような使米の分数ル1lfll llI41装置は
第1図の如き構成を有している。すなわち、図において
、P(JC+は操i’p盆祝装置+ el〜e1は制御
装置で、いず几もμmCPUτ甲核に構成され、通信C
C+でこれりの間を結合し、IOr〜IO,の入出力信
号がプロセスP1と結合されている。該入力16号I 
O+〜10アの信号ケもとにプロセスP+を自動運転す
るので制御装+t er □ enへの制御ループは、
分散形制御装置をスタートさせるに先立ち操作監視装置
P CI CIから通信eC,を通して、制御装置e、
−eゎヘロードされ、スタート後は運転操作機能吠、幅
情報が辿イぎeClを介して操作監視装(ItPすC1
と制御裟+& e 、〜e。
Such a fractional calculator 41 has a structure as shown in FIG. That is, in the figure, P(JC+ is the operation i'p Bongi device + el to e1 are the control devices, both of which are configured in the μm CPU τ core, and the communication C
These are connected by C+, and the input/output signals of IOr to IO are connected to process P1. The input No. 16 I
Since the process P+ is automatically operated based on the signals from O+ to 10A, the control loop to the control system +ter□en is as follows.
Before starting the distributed control device, the control device e,
- After the start, the driving operation function and width information are traced to the operation monitoring device (ItP C1) via the eCl.
and control unit +&e,~e.

との間に通信さfl、7)。この操作監視装置1) O
C1の構成は第3図に示芒れる如く、操作作成KEY+
(制御ループ作成機能を含み作成億罷用1(EYが全1
本の6,0〜80%を占めている)とディスプレイ(例
えばCRT 7ffiと)とC1)Ul とからなって
おり、これらはいずれもSl、2の1^@IJ IJ 
Sによって粕8されていゐ。また、このCPU+ 内は
第5図に示ず如く穎真都ALUo+メモ’JMM(1゜
入力処理部INo、出力処堆部りU T oとこれらを
制御ツーる側1卸部CQNT、とからI)Wシ、それぞ
れS l”、 5atul、 :3 outl、 Sm
1Tlq 、 S 1110 、 S out@の1S
号によって結付されている。また、メモリ材MMoに格
納される情報は、例えば、第4図に示す如きシステムソ
フトO8+、イニ7ヤライズ依能IL+、各棟ロジック
L!、各徨テーブルIl+ 。
communication between fl, 7). This operation monitoring device 1) O
The configuration of C1 is as shown in Figure 3.
(1 for creation failure including control loop creation function (EY has 1 total)
(occupies 6,0-80% of the book), display (for example, CRT 7ffi), and C1)Ul, all of which are Sl, 2's 1^@IJ IJ
It was made by S. In addition, as shown in Fig. 5, the inside of this CPU+ consists of an input processing section INo, an output processing section U To, and a side 1 output section CQNT that controls these. I) W, respectively S l", 5atul, :3 outl, Sm
1Tlq, S 1110, 1S of S out@
They are connected by numbers. Further, the information stored in the memory material MMo includes, for example, the system software O8+, initialization function IL+, and each building logic L! shown in FIG. , each slave table Il+.

から@成されるマツプでおる。こ才′シらの愼l]ヒに
よッテμ−CPUは1′L励すゐ。をらにロジックLl
内はプログツム做能t’ito、運転操作4涜龍POC
0通信4M能CCO% i栗+’lE + I’l”成
KEYoz ティスプレィ伝能IJISo#が配き才し
ておシ、一連の動作を侍でいる。
It is a map made from @. The μ-CPU is powered by 1'L. Orani Logic Ll
Inside is Programm Kano t'ito, Driving operation 4 Sacred Dragon POC
0 communication 4M ability CCO% i chestnut +'lE + I'l''sei KEYoz Display teaching ability IJISo# is in charge of the skill, and the series of movements are performed as a samurai.

一万、第1図図示itj’llj’l装Ue1〜ehは
第6図に示す如き構成を有している。すなわち、操作監
視装置POC1がなくても操作のできる1〜gYc。
The devices Ue1 to eh shown in FIG. 1 have a configuration as shown in FIG. That is, 1 to gYc can be operated without the operation monitoring device POC1.

と、衣不訣直であるディスプレイDISC+ とμ−C
PUでめるCPUC,とかSC+ + SC2の悄−4
1JUSによって示占台さjL−Cいる。寸/こ、プロ
セスP1との・1゛g報父俟部I10□がCP LI 
CIに接続さ!しでおり、この′清報交換部f10.1
は情報13 U S 。
And, the display DISC+ and μ-C are completely different from each other.
CPUC with PU, or SC+ + SC2 no Yu-4
There is a fortune telling table jL-C by 1JUS. CP LI
Connect to CI! By the way, this 'News Exchange Department f10.1
Information 13 US.

SIO+によってCt−’uc、vこ粘合されている。Ct-'uc,v is viscous by SIO+.

この第6図図示CPUCtは第8図に示す如き・til
’J成を為しており、第5図とでのt+jj成の基本は
変らない。但しメモ’) M M o内は第7図に示す
如きロジックLl内が全く異なる。ずなわ゛ら、′操作
監視装置P OCl力・らローデングされる制御・1に
@はCo部に、CCC0は通倍域能を、KEYCoはK
 E Y C+ウポー1゛懺能金、DISCoはDIS
C+サホート機能のでれそれを格納しIll elは谷
独情報テーブルで構成きれる。このように一連の分散形
制御装置はμmCL’U全中核としており、めらゆるプ
ロセスの制御を竺て処理する工うソフトウェアにてメモ
リ上のロジック都に栢稍さXシ、それに9LつてμmC
P Uは1・「動する。このような従来の制御方式にや
っては、 (1)ひとつの制御ループ金適用プラント毎に作成し、
と扛をマイクロコンピュータと組合せチェックを要する
This CPUCt shown in FIG. 6 is as shown in FIG.
'J formation, and the basics of t+jj formation in Figure 5 remain the same. However, note that the inside of MMo is completely different in the logic Ll as shown in FIG. Zunawa et al., 'Operation and monitoring device P OCl force, control loaded from 1, @ to Co section, CCC0 to the common range capability, KEYCo to K
E Y C + Upo 1゛Rinnokin, DISCo is DIS
It stores the output of the C+ support function, and Ill el can be configured with a valley information table. In this way, a series of distributed control devices is the core of μmCL'U, and the software that handles the control of various processes has a logic capital of
P U is 1. "Moves." In this conventional control method, (1) one control loop is created for each plant to which gold is applied;
It is necessary to check the combination of and a microcomputer.

(2)会話形で単純作梁で(よらるが、こ庇を数巨ルー
ズの情報kKEY操作によるインプット或はte、械を
敗ってのインプットを行う必要がおる。
(2) In a conversational form, it is necessary to input information using a simple method, but it is necessary to input information by operating a large number of loose information kKEY or inputting information by defeating the machine.

(3)作成した制御ループを保持する必要がある。(3) It is necessary to maintain the created control loop.

(4)変更には便利でりるが、保守メンテナンスをおこ
たると全く誤った変更になってしまう。
(4) It is convenient to make changes, but if maintenance is not done, the changes will be completely incorrect.

(5) ライタプルit OMに格納した場合は、RO
M書込消去機能を要し、取扱いが抜雑になる。
(5) If stored in the writer it OM, the RO
Requires M write/erase function and requires sloppy handling.

(6)制御ループ作成用1< EYと運転操作KEYと
を要し操作面を複雑化している。
(6) Control loop creation 1< EY and driving operation key are required, making the operation complicated.

(1)制御ループ作成機能と運転操作機能とが・腎に入
り組んでμmCPUソフトを複雑化している。
(1) The control loop creation function and the driving operation function are complicated, making the μm CPU software complicated.

(8) 制御ループ作成ソフトウェアが全体の機能ボリ
ウムの5〜101汗ケ占めている。
(8) The control loop creation software occupies 5 to 101 parts of the total functional volume.

といった欠点を有している。It has drawbacks such as:

〔発明の目的」 本発明の1的は、匍」御ループの作成にすることなく、
りらゆるプロセス市り御に週)]」す@Cとのでさる分
収形+if制御装置忙従供することにある。
[Object of the invention] One of the objects of the present invention is to avoid creating a control loop.
If you are interested in a real-time process market, you will be able to use the control device in conjunction with @C.

〔発明の概璧〕[Synopsis of the invention]

本発明の安旨は次のpt」<でりる。すなわち、士数年
米この4m+の市1」御装匝は十二分に性能(制御磯目
巨)がイJrt認さノt1 そのfu制御ル−フ゛自体
も50〜200拙内で十分な+ti!I御が町nヒであ
ること。
The advantage of the present invention is as follows. In other words, the performance of this 4m+ city 1 in the junior year is more than enough (control Isome Giant), and the fu control loop itself is sufficient within 50 to 200. +ti! I should be in town.

また、最近の(JA機器に与られる各種の機能をICメ
モリの製造過程で格納したICメモリ(例えばマスクR
OM)が出現し、これを制御ループ格納へ適用が可能で
あること。さらに、マスクROMの最近の情報容量が犬
さくなり、1メガピツトとなっておシ、20〜300バ
イト/制御ループであってもひとつのICパッケージに
十分格できる状態にめること。
In addition, in recent years (IC memory (for example, mask R
OM) has appeared and it is possible to apply this to control loop storage. Furthermore, the information capacity of mask ROMs has recently become smaller and has become 1 megabit, so even 20 to 300 bytes/control loop can be packed into one IC package.

このような状況τもとに、本発明は分散形制御装置の操
作監視表置内に制御叶ルーグ1に撒を必らかじめ悔成し
たICメモリを#−入り−ゐことにより、制御用jルー
プを作戟することなくめりゆるプロセス市1]@jに基
剤できる工うにしようとすめものでおる。
Based on such a situation τ, the present invention provides an integrated circuit for controlling the control function by inserting an IC memory that must be installed in the control loop 1 in the operation monitoring unit of the distributed control device. I am trying to create a process that can be used as a base material without creating a J loop.

〔発明の央zf1M例」 以下、本うα明の実施例Vこついて続開−Tる。[Central example of invention zf1M” The following is a continuation of the present Example V.

第9図には、杢)ら明の一央、池例が示さ几ている。Figure 9 shows the example of Ichio and Ike from Mokura Akira.

図において、1ぐEYnは操作専用KEYで、5KEY
+はりlえばマスク几(JMに格納された市り御ループ
を選択すめKEYでSK+の侶号によってCPU+ に
作用させる傅成となっている。このCPU+のメモリの
内容は第10図に示す如くである。すなわち、第10区
(A)に示す如く第5図中のメモ’JAdMo内には5
KEY、サポート機能SKoが加えられ、第4図図示ブ
ログフム機能PRoがなくなっている。七ノ′しに代り
第10図(B)に示す如きメモ’) fvi M rが
p[たに追加されtl −nの制御ループL (J O
P o格納した、レリえばマスクi(OMが配備さ7’
している。
In the figure, 1GEYn is a key for operation only, and 5KEY
+ If you press the mask, select the market loop stored in JM and use the KEY to affect the CPU+ with the SK+ key.The contents of the CPU+ memory are as shown in Figure 10. In other words, as shown in Section 10 (A), there are 5 notes in the memo 'JAdMo' in Figure 5.
KEY and the support function SKo have been added, and the blogging function PRO shown in FIG. 4 has been removed. Instead of a memo as shown in Figure 10(B), fvi M r is added to p[ and the control loop L (J O
Po stored, mask i (OM is deployed 7'
are doing.

ti、第1O図(H)中a1.a2・・・・・・a、、
はIDで、第9図中のS k E Yによってこれ勿指
定しちえすれば使米の制、御ループの1乍成は全く不要
となり、非常に面素化さJtた状態忙呈する。従って制
御裟直内部の第7図C8部にはt。−toのいずれかが
ロードされることVCなる。
ti, a1. in Figure 1O (H). a2...a,,
is the ID, and if this is specified by S k EY in FIG. 9, there is no need to control the use of rice or to construct a control loop at all, resulting in a very streamlined state. Therefore, in the section C8 of FIG. 7 directly inside the control unit, t is displayed. - to be loaded.

し罠がって、本来/m FIJによ!しば、17IIえ
はマスク+((J M甲に十数年来の制御ループ、畝士
〜数d(200ル一プ界内4社度)ループを一つのIC
メモリ内に格納して’b’ @ 、これケ指定し選出す
ることにより、従来の1ltlJ御ル一プ作成チェック
、保守。
Shitrapagatte, originally/m to FIJ! Shiba, 17II is a mask + ((JM Ko has a control loop for over ten years, Uneji ~ several d (200 loops in the world) loop in one IC.
By storing 'b' @ in memory and specifying and selecting it, you can check and maintain the conventional 1ltlJ control group.

メンテナンス等の情報カロエにまつわる各種の≠に点を
全て解消できる。
Information on maintenance, etc. All the various points related to Kaloe can be resolved.

さらに、第6図図示制御装置e1〜e、を第11図のル
<偶成することによって、1苗1台に格納されるCoの
情報の管理をしやすくすることができる。すなわち、5
KEYIを追加しS K et倍信号CPIJ’ C+
に作用させる。CPU’Ct中には、第12図に示す如
くメモIJMM、に加えメモリMM+に設けるメモ!J
 MM lはIC製造工程中に制御ループt。−tアk
 L 00 Poとして格納したICメモリで、このメ
モリMMIの■l) a I−n全前記5KEY、によ
って選択させる。それにより、第12図図示情報テーブ
ルTel中のaoへiDが小鉾され、メモ!JMM1部
が第7図図示従来のCoに相当する機能となシ作動する
。本制御ループは十数年来のμmCPU適ハJ芙消から
みて、数十〜数百(200制御ル一プ程度が最大)制御
ループであり、例えば1メガビツトのマスクROMが1
個あれば、その目的は十分達成できる。
Furthermore, by combining the control devices e1 to e shown in FIG. 6 with the control devices shown in FIG. 11, it is possible to easily manage the Co information stored in each seedling. That is, 5
Add KEYI and double signal CPIJ' C+
to act on. In the CPU'Ct, as shown in FIG. 12, there is a memo IJMM, and a memo provided in the memory MM+! J
MM l is the control loop t during the IC manufacturing process. -tak
In the IC memory stored as L 00 Po, selection is made using all 5KEYs of 1) a I-n of this memory MMI. As a result, ID is added to ao in the illustrated information table Tel in FIG. 12, and a memo! The first part of the JMM operates as a function corresponding to the conventional Co shown in FIG. This control loop is a control loop of tens to hundreds (about 200 control loops is the maximum), considering the number of μm CPUs that have been used over the past ten years.For example, a 1 megabit mask ROM is
If you have enough, you can achieve your goal.

このように本夾施例によれば、vJえば、マスクROM
のようにIC製造工程において、必要な制御ループを全
て格納したICメモリ、1個を備えこれケ選択する方法
にすれば、前記問題点は全くなく、場らにはこれを使う
ための、l1lI御ル一プ作成製作チェックの知識を全
く必要としない。
In this way, according to the present example, vJ, for example, mask ROM
If you select one IC memory that stores all the necessary control loops in the IC manufacturing process, the above-mentioned problems will not occur at all, and in some cases there will be a l1lI It does not require any knowledge of group creation and production checking.

第13図には、不発明の他の実施例がボされている。In FIG. 13, another embodiment of the invention is omitted.

図において、5KEY2(第2の選択K E Y )は
I/Ul−n(これに対応したDIS+ n)を選択す
るKl(Yで、この5KEY2によって選択さtした情
報と第1のKEYであるSKI!;Yxによって選択さ
才した市1j御ループ 14図中の・情報テーブルII+ 、 、中のao中へ
格納される。従ってとの格納胆に従ってI / O I
− nに対応した制側Iループが作動し、n台分の動作
忙児鮎1−る。従って第13図中のI10+ (Dl.
S)〜I10。(DIR.)rn=x 〜:+ 2vc
s択しても、I / O l( IJ I S + )
に相当するスペースさえ増加させればn=1〜;う28
の調節目1が倚られることになる。これら1/(Jt(
DIS+)〜I10Il(I〕■SIl)の増設は、汐
1]えはプラグイン方式前により容易に実現pJ能であ
り、ま/ζ、第13図中のS K EY 2とにKY+
 とeDIsl −nへ分散eftしても伺らその機能
を失うことはない。
In the figure, 5KEY2 (second selection KEY) is Kl(Y) that selects I/Ul-n (DIS+n corresponding to this), and is the information selected by this 5KEY2 and the first KEY. SKI!; is stored in the ao of the information table II+, , in the control loop 14 of the city 1j selected by Yx.Therefore, according to the storage capacity of the I/O I
- The control side I loop corresponding to n is activated, and the operation for n cars is busy. Therefore, I10+ (Dl.
S) ~I10. (DIR.)rn=x ~:+2vc
Even if you select s, I/O l (IJ I S +)
If we increase the space equivalent to n = 1 ~; U28
Adjustment number 1 will be closed. These 1/(Jt(
Expansion of DIS+) to I10Il (I〕■SIl) can be easily realized before the plug-in method, and KY+ is added to SK EY 2 in Fig. 13.
Even if it is distributed to eDIsl-n, it will not lose its functionality.

〔発明の効果〕〔Effect of the invention〕

以上説明したようeこ、本発明によれば、制御ループの
作成をすることなく、あらゆるプロセス1[11御に適
用することができる。
As explained above, the present invention can be applied to any process 1 [11] without creating a control loop.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図、第2図は柾米の分散形’+Ij:J @l装置
区の4構成図、第3図は第1図図示P CJ C+の構
成図、第4図はメモリマップを示す図、第5図は第3図
図示CPけの1性成図、第6図は第1図図示制御装置の
構成図、47図はメモリマツプ図示す図、第8図は第6
図図示CPU構成図、第9図は本発明の実施例ゲ示すP
OCの檜J戊図、第10図Vよメモリマツプを示す図、
第11図は本発明の他の冥加り1」を示す図、第12図
はメモリマツプ図、第13図は本発明の別の実施例で示
す図、第14図はメモリマツプ図である。 i”oc・・・操作監視装置&、5KEY・・・セレク
トギー。 代理人 プP埋士 鵜沼辰之 穿 20 芽3 目 茅40 第 乙 し≧1 V ″7巳 琴9巳 芋10図 竿// 口 療12図
Figures 1 and 2 are four configuration diagrams of Masamai's distributed type '+Ij:J @l device section, Figure 3 is a configuration diagram of P CJ C+ shown in Figure 1, and Figure 4 is a diagram showing the memory map. , FIG. 5 is a configuration diagram of the CP shown in FIG. 3, FIG. 6 is a configuration diagram of the control device shown in FIG. 1, FIG. 47 is a memory map diagram, and FIG.
FIG. 9 is a diagram showing the configuration of a CPU according to an embodiment of the present invention.
OC's Hinoki diagram, Figure 10 V, a diagram showing the memory map,
FIG. 11 is a diagram showing another embodiment of the present invention, FIG. 12 is a memory map diagram, FIG. 13 is a diagram showing another embodiment of the present invention, and FIG. 14 is a memory map diagram. i"oc...operation and monitoring device &, 5KEY...select gear. Proxy PuP Buriji Tatsunoki Unuma 20 Bud 3 Eyes 40 No. Otsushi≧1 V ″7 Mikoto 9 Miimo 10 Zurod/ / Oral therapy 12 diagrams

Claims (1)

【特許請求の範囲】[Claims] 1、マイクロコンピュータを適用した複数個の制御装置
と操作監視装置と全通信によ、!7結合して成る分散形
制御表直において、上記操作監視装置内にICメモリ製
造工程においてあらかじめ構成された数十〜数百の制御
ループ全格納したICメモ9 (、配すると共に、各−
j御ループのILIを選択する操作キーを配したことを
特徴とする分散形1Ti制御装置。
1. All communication with multiple control devices and operation/monitoring devices using microcomputers! 7. In the distributed control table formed by 7 combinations, an IC memo 9 (and an IC memo 9) storing all the control loops of tens to hundreds of control loops configured in advance in the IC memory manufacturing process is placed in the operation and monitoring device.
1. A distributed 1Ti control device characterized by having an operation key for selecting an ILI of a J control loop.
JP4470484A 1984-03-08 1984-03-08 Distributed control device Pending JPS60189005A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4470484A JPS60189005A (en) 1984-03-08 1984-03-08 Distributed control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4470484A JPS60189005A (en) 1984-03-08 1984-03-08 Distributed control device

Publications (1)

Publication Number Publication Date
JPS60189005A true JPS60189005A (en) 1985-09-26

Family

ID=12698801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4470484A Pending JPS60189005A (en) 1984-03-08 1984-03-08 Distributed control device

Country Status (1)

Country Link
JP (1) JPS60189005A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5356483A (en) * 1976-10-29 1978-05-22 Foxboro Co Industrial process control apparatus
JPS55131803A (en) * 1979-03-30 1980-10-14 Mitsubishi Electric Corp Digital controller

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5356483A (en) * 1976-10-29 1978-05-22 Foxboro Co Industrial process control apparatus
JPS55131803A (en) * 1979-03-30 1980-10-14 Mitsubishi Electric Corp Digital controller

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