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JPS57182994A - High frequency heater - Google Patents

High frequency heater

Info

Publication number
JPS57182994A
JPS57182994A JP6853981A JP6853981A JPS57182994A JP S57182994 A JPS57182994 A JP S57182994A JP 6853981 A JP6853981 A JP 6853981A JP 6853981 A JP6853981 A JP 6853981A JP S57182994 A JPS57182994 A JP S57182994A
Authority
JP
Japan
Prior art keywords
high frequency
frequency heater
heater
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6853981A
Other languages
Japanese (ja)
Other versions
JPS6127878B2 (en
Inventor
Shiyouzou Kobayashi
Mitsuo Mochizuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP6853981A priority Critical patent/JPS57182994A/en
Publication of JPS57182994A publication Critical patent/JPS57182994A/en
Publication of JPS6127878B2 publication Critical patent/JPS6127878B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Constitution Of High-Frequency Heating (AREA)
JP6853981A 1981-05-07 1981-05-07 High frequency heater Granted JPS57182994A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6853981A JPS57182994A (en) 1981-05-07 1981-05-07 High frequency heater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6853981A JPS57182994A (en) 1981-05-07 1981-05-07 High frequency heater

Publications (2)

Publication Number Publication Date
JPS57182994A true JPS57182994A (en) 1982-11-11
JPS6127878B2 JPS6127878B2 (en) 1986-06-27

Family

ID=13376642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6853981A Granted JPS57182994A (en) 1981-05-07 1981-05-07 High frequency heater

Country Status (1)

Country Link
JP (1) JPS57182994A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01225129A (en) * 1988-03-03 1989-09-08 Nec Corp Vessel for semiconductor wafer

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50135643A (en) * 1974-04-17 1975-10-28
JPS5313826A (en) * 1976-07-26 1978-02-07 Hitachi Ltd Horizontal adjuster for color television picture

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50135643A (en) * 1974-04-17 1975-10-28
JPS5313826A (en) * 1976-07-26 1978-02-07 Hitachi Ltd Horizontal adjuster for color television picture

Also Published As

Publication number Publication date
JPS6127878B2 (en) 1986-06-27

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