JPS56104779A - Siccsi3n4 type composite specific heattresistant ceramics and manufacture - Google Patents
Siccsi3n4 type composite specific heattresistant ceramics and manufactureInfo
- Publication number
- JPS56104779A JPS56104779A JP793080A JP793080A JPS56104779A JP S56104779 A JPS56104779 A JP S56104779A JP 793080 A JP793080 A JP 793080A JP 793080 A JP793080 A JP 793080A JP S56104779 A JPS56104779 A JP S56104779A
- Authority
- JP
- Japan
- Prior art keywords
- siccsi3n4
- heattresistant
- ceramics
- manufacture
- type composite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Ceramic Products (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55007930A JPS6026074B2 (en) | 1980-01-25 | 1980-01-25 | Production method of β-SiC-Si↓3N↓4-based composite heat-resistant ceramics |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55007930A JPS6026074B2 (en) | 1980-01-25 | 1980-01-25 | Production method of β-SiC-Si↓3N↓4-based composite heat-resistant ceramics |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56104779A true JPS56104779A (en) | 1981-08-20 |
JPS6026074B2 JPS6026074B2 (en) | 1985-06-21 |
Family
ID=11679234
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55007930A Expired JPS6026074B2 (en) | 1980-01-25 | 1980-01-25 | Production method of β-SiC-Si↓3N↓4-based composite heat-resistant ceramics |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6026074B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4990471A (en) * | 1988-01-08 | 1991-02-05 | Alcan International Limited | Process for producing silicon nitride |
US5209996A (en) * | 1989-07-26 | 1993-05-11 | Shin-Etsu Chemical Co., Ltd. | Membrane consisting of silicon carbide and silicon nitride, method for the preparation thereof and mask for X-ray lithography utilizing the same |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61185075U (en) * | 1985-05-10 | 1986-11-18 |
-
1980
- 1980-01-25 JP JP55007930A patent/JPS6026074B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4990471A (en) * | 1988-01-08 | 1991-02-05 | Alcan International Limited | Process for producing silicon nitride |
US5209996A (en) * | 1989-07-26 | 1993-05-11 | Shin-Etsu Chemical Co., Ltd. | Membrane consisting of silicon carbide and silicon nitride, method for the preparation thereof and mask for X-ray lithography utilizing the same |
Also Published As
Publication number | Publication date |
---|---|
JPS6026074B2 (en) | 1985-06-21 |
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