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JPH06238643A - Flat package and its manufacture - Google Patents

Flat package and its manufacture

Info

Publication number
JPH06238643A
JPH06238643A JP3234993A JP3234993A JPH06238643A JP H06238643 A JPH06238643 A JP H06238643A JP 3234993 A JP3234993 A JP 3234993A JP 3234993 A JP3234993 A JP 3234993A JP H06238643 A JPH06238643 A JP H06238643A
Authority
JP
Japan
Prior art keywords
sheet
package
small
parts
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP3234993A
Other languages
Japanese (ja)
Inventor
Takeshi Wachi
健 和智
Takeshi Yamanaka
剛 山中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Original Assignee
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renesas Semiconductor Manufacturing Co Ltd, Kansai Nippon Electric Co Ltd filed Critical Renesas Semiconductor Manufacturing Co Ltd
Priority to JP3234993A priority Critical patent/JPH06238643A/en
Publication of JPH06238643A publication Critical patent/JPH06238643A/en
Withdrawn legal-status Critical Current

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  • Producing Shaped Articles From Materials (AREA)
  • Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)

Abstract

PURPOSE:To make smaller projections and cutouts of a flat package and reduce the defective appearance of the package. CONSTITUTION:A number of package parts 28 are formed vertically and horizontally on the face of a ceramic sheet 30, and small holes 29 are perforated continuously on boundaries of respective package parts 28 and burnt at high temperature, and then the sheet is broken along the small holes 29 to separate respective package parts 28. Projections and cutouts formed on the broken faces can be made smaller by setting the sizes and arranging pitches of small holes 29 within the given range of the sheet thickness, and the outer appearance dimension accuracy of the package can be improved.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明はセラミック材料やセラ
ミック材料とガラス材料の混合材料を用いたフラットパ
ッケ−ジ及びその製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat package using a ceramic material or a mixed material of a ceramic material and a glass material and a method for manufacturing the flat package.

【0002】[0002]

【従来の技術】セラミック材料やセラミック材料とガラ
ス材料の混合材料は耐熱性や気密性に優れる上、これら
の粉末からドクタ−ブレ−ド法や押出成形法により厚膜
のシ−ト部材を形成し、このシ−ト部材に印刷配線、プ
レス成形、熱処理など一連の処理を施すことにより、一
度に多数個のパッケ−ジ部品が生産ができるなど、多量
生産に適するため、水晶振動子やSAWフィルタ−等小
形で耐熱性や気密性を要する電子素子の収納容器に使用
されている。
2. Description of the Related Art A ceramic material or a mixed material of a ceramic material and a glass material has excellent heat resistance and airtightness, and a thick film sheet member is formed from these powders by a doctor blade method or an extrusion molding method. However, by performing a series of processes such as printed wiring, press molding, and heat treatment on this sheet member, a large number of package parts can be produced at one time, which is suitable for mass production. It is used as a container for small electronic devices such as filters that require heat resistance and airtightness.

【0003】図7及び図8はこの種水晶振動子やSAW
フィルタ−等の素子1の収納容器であり、セラミック材
料を用いたフラットパッケ−ジの構造例を示すものであ
る。即ち、図7のフラットパッケ−ジ2は、方形平板状
のキャップ部材3と、このキャップ部材3と同外形で、
内部に2段の凹部4を形成した扁平状のベ−ス部材5と
で構成したものである。そして、素子1をベ−ス部材5
の凹部4内の段部6に固着した後、その開口端にキャッ
プ部材3を封着して閉塞する構成が採用されている。な
お、素子1は段部6の下方に貫通して穿設したスル−ホ
−ル7内の導電ペ−ストを介して、ベ−ス部材5の下面
に印刷配線された電極端子8に接続され、電極導出して
いる。
7 and 8 show this type of crystal oscillator and SAW.
1 is a storage container for an element 1 such as a filter, showing an example of the structure of a flat package using a ceramic material. That is, the flat package 2 of FIG. 7 has a rectangular flat plate-shaped cap member 3 and the same outer shape as the cap member 3.
It is composed of a flat base member 5 having a two-stage recess 4 formed therein. Then, the element 1 is attached to the base member 5
After being fixed to the step portion 6 in the concave portion 4, the cap member 3 is sealed and closed at the open end thereof. The element 1 is connected to an electrode terminal 8 printed on the lower surface of the base member 5 through a conductive paste in a through hole 7 penetrating below the step portion 6. The electrodes are led out.

【0004】また、図8のフラットパッケ−ジ9は、内
部に凹部10を形成した方形扁平状のキャップ部材11
と、このキャップ部材11と同外形で、同じく内部に凹
部12を形成した方形扁平状のベ−ス部材13とで構成
したものである。そして、素子1をベ−ス部材13の底
面に植設した保持板14に固着した後、その開口端にキ
ャップ部材11を封着して閉塞する構成が採用されてい
る。なお、素子1は保持板14の下方に貫通して穿設し
たスル−ホ−ル7内の導電ペ−ストを介して、ベ−ス部
材13の下面に印刷配線された電極端子8に接続され、
電極導出している。
The flat package 9 shown in FIG. 8 has a rectangular flat cap member 11 having a recess 10 formed therein.
And a base member 13 having the same outer shape as that of the cap member 11 and having a rectangular flat shape and having a recess 12 formed therein. Then, after the element 1 is fixed to the holding plate 14 planted on the bottom surface of the base member 13, the cap member 11 is sealed and closed at the opening end thereof. The element 1 is connected to an electrode terminal 8 printed on the lower surface of the base member 13 through a conductive paste in a through hole 7 penetrating below the holding plate 14. Is
The electrodes are led out.

【0005】かかる構造のフラットパッケ−ジ2、9は
外形がフラットな箱形であり、自動機によるチャックが
容易であり、下面の電極端子8をそのままプリント配線
基板上に載置して固着することができ、電子装置の自動
組立に適するものである。また、フラットパッケ−ジ
2、9を構成するキャップ部材3、11やベ−ス部材
5、13はそれぞれ扁平なフラット部材であり、その製
造には以下のようなセラミックのシ−ト部材が用いられ
る。
The flat packages 2 and 9 having such a structure are box-shaped with a flat outer shape, can be easily chucked by an automatic machine, and the electrode terminals 8 on the lower surface can be placed and fixed on the printed wiring board as they are. It is suitable for automatic assembly of electronic devices. Further, the cap members 3 and 11 and the base members 5 and 13 constituting the flat packages 2 and 9 are flat members, and the following ceramic sheet members are used for their manufacture. To be

【0006】すなわち、図9は上記セラミックのシ−ト
部材をドクタ−ブレ−ド法で製造する場合の成膜装置1
5であり、まず、セラミック粉末、バインダ、溶剤を所
定量で調合し、スラリ−状に調整した泥漿16を、下端
にブレ−ド状開口17aを設けた泥漿容器17に注入す
るようにしてある。泥漿容器17の下方には、一対の供
給ドラム18と巻取りドラム19が配設されていて、前
記ブレ−ド状開口17aの下面に、長尺のキャリヤ−テ
−プ20を順次送出し、かつ巻取るように構成してあ
る。そして、キャリヤ−テ−プ20の下流側に、泥漿容
器17から所定距離離間して乾燥炉21を配設してい
る。
That is, FIG. 9 shows a film forming apparatus 1 for manufacturing the above-mentioned ceramic sheet member by a doctor blade method.
5, the ceramic powder, the binder, and the solvent are mixed in a predetermined amount, and the slurry 16 adjusted into a slurry is poured into the slurry container 17 having the blade-shaped opening 17a at the lower end. . A pair of supply drum 18 and take-up drum 19 are arranged below the sludge container 17, and a long carrier tape 20 is sequentially delivered to the lower surface of the blade-shaped opening 17a. And it is configured to be wound up. Further, a drying furnace 21 is arranged downstream of the carrier tape 20 at a predetermined distance from the sludge container 17.

【0007】上記構成において、キャリヤ−テ−プ20
を順次、矢印方向に送出すると、泥漿容器17の泥漿1
6がブレ−ド状開口17aから供給され、キャリヤ−テ
−プ20上に刷り切り状に塗膜され、テ−プ20上に一
定厚さのセラミック生シ−ト22Aが成膜される。この
セラミック生シ−ト22Aを乾燥炉21に通し、溶剤を
半乾燥状に乾燥すると、柔軟性のあるセラミック生シ−
ト22Aが得られる。そして、かかる柔軟性のセラミッ
ク生シ−ト22Aは適宜積層・熱プレスして、セラミッ
クシ−トとした後、次のようにしてセラミックの各パッ
ケ−ジ要素に製造される。
In the above structure, the carrier tape 20
Are sequentially sent in the direction of the arrow, the slurry 1 in the slurry container 17
6 is supplied from the blade-shaped opening 17a, and is coated on the carrier tape 20 in a cut-off shape, and a ceramic green sheet 22A having a constant thickness is formed on the tape 20. This ceramic raw sheet 22A is passed through the drying oven 21 and the solvent is dried in a semi-dry state.
22A is obtained. Then, the flexible ceramic green sheet 22A is laminated and hot pressed as appropriate to form a ceramic sheet, which is then manufactured into each ceramic package element as follows.

【0008】例えば、図7のフラットパッケ−ジ2のキ
ャップ部材3を製造する場合について説明すると、図1
0に示すように、まず、基材として上記ドクタ−ブレ−
ド法で製造した幅広のセラミック生シ−ト22Aを適宜
積層して型に嵌め、略100℃に加温した熱プレスで成
形して得たセラミックシ−ト22を準備する。そして、
次のハ−フカット工程において、セラミックシ−ト22
の面上からダイヤモンド刃で切削して、面上にキャップ
部材3の外形寸法に合わせた縦横の溝23を形成する。
すると、セラミックシ−ト22の面上には、溝23で仕
切られた方形平板状のキャップ部材3がマス目状に縦横
のパタ−ンで多数形成される。次に、多数のキャップ部
材3を縦横のパタ−ン状に形成したセラミックシ−ト2
2を、図示しないが、次の高温焼成工程で、略1000
℃の高温で脱脂焼成して、各キャップ部材3が厚さ0.
2〜1.0mm程度で所定寸法に形成された脱脂焼成済み
セラミックシ−ト24を得る。後は、ブレイク工程で、
焼成済みセラミックシ−ト24を縦横の溝23に沿って
折曲げて破断すると、多数個のキャップ部材3が得られ
る。
For example, the case of manufacturing the cap member 3 of the flat package 2 shown in FIG. 7 will be described with reference to FIG.
As shown in FIG. 0, first, the doctor blade is used as a base material.
A wide ceramic green sheet 22A manufactured by the method of Do. is appropriately laminated, fitted in a mold, and molded by a hot press heated to about 100 ° C. to prepare a ceramic sheet 22. And
In the next half cut process, the ceramic sheet 22
The surface is cut with a diamond blade to form vertical and horizontal grooves 23 according to the outer dimensions of the cap member 3.
Then, on the surface of the ceramic sheet 22, a large number of rectangular flat plate-shaped cap members 3 partitioned by the grooves 23 are formed in a grid pattern in vertical and horizontal patterns. Next, a ceramic sheet 2 having a large number of cap members 3 formed in a vertical and horizontal pattern.
Although not shown in FIG.
Each cap member 3 has a thickness of 0.
A degreased and fired ceramic sheet 24 having a predetermined size of about 2 to 1.0 mm is obtained. After that, in the break process,
When the fired ceramic sheet 24 is bent along the vertical and horizontal grooves 23 and broken, a large number of cap members 3 are obtained.

【0009】また、フラットパッケ−ジ2のベ−ス部材
5やフラットパッケ−ジ9のキャップ部材11、ベ−ス
部材13など、内部に素子収納用の凹部を形成したパッ
ケ−ジ部品を製造する場合も、基本的には上記キャップ
部材3と同様にして製造される。すなわち、これらのパ
ッケ−ジ部品は内部に2段の凹部4や、1段の凹部1
0、12を設ける点で、上記キャップ部材3の場合と大
きく異なっているが、これは、例えば、積層・熱プレス
時に、みキャップ部材3と同一部材を方形枠状にくりぬ
いて枠状部材を形成し、それをキャップ部材3と同一部
材上に適宜積み重ねて一体化すれば良い。従って、図1
0のキャップ部材3の製造と同様に、ハ−フカット、高
温焼成、ブレ−クなどの処理をして、個々のパッケ−ジ
部品が製造される。
Further, package parts having recesses for accommodating elements such as the base member 5 of the flat package 2, the cap member 11 of the flat package 9 and the base member 13 are manufactured. Also in the case of performing, it is manufactured basically in the same manner as the cap member 3. That is, these package parts have a two-step recess 4 and a one-step recess 1 inside.
Although 0 and 12 are provided, this is greatly different from the case of the cap member 3 described above. This is, for example, when laminating and hot pressing, the same member as the cap member 3 is hollowed out to form a frame-shaped member. The cap member 3 may be formed, and the cap member 3 and the cap member 3 may be appropriately stacked and integrated. Therefore, FIG.
In the same manner as in the production of the cap member 3 of No. 0, half cut, high temperature firing, and break treatment are performed to produce individual package parts.

【0010】[0010]

【発明が解決しようとする課題】ところで、このように
パッケ−ジ部品を多数面上に形成したセラミックシ−ト
は、高温焼成後、これを個個の部品にブレ−クすると
き、切断面がハ−フカットの切込みからはみだし、出バ
リや欠けを生じることが多かった。この結果、フラット
パッケ−ジの製品寸法、特に外形寸法に不良を生じて、
電子機器への実装時、チャックミスや、出バリの割れに
よる組立機器の故障原因となっていた。 本発明者等は
この出バリや欠けの原因を鋭意検討した結果、これがハ
−フカット工程においてセラミックシ−ト面上に形成す
る切込み溝の深さに起因することをつきとめた。
By the way, the ceramic sheet having the package parts formed on a large number of surfaces as described above has a cut surface when it is broken into individual parts after high temperature firing. However, it often protruded from the cut of the half cut and caused a flash or a chip. As a result, the product dimensions of the flat package, especially the external dimensions, are defective,
At the time of mounting on electronic equipment, it was a cause of failure of assembly equipment due to chuck error and cracking of flash. The inventors of the present invention have made extensive studies on the cause of the flash and the chipping, and have found that this is due to the depth of the cut groove formed on the ceramic sheet surface in the half cut process.

【0011】即ち、図11は前記ハ−フカット工程にお
いて、切込み溝23形成後のセラミックシ−ト22の部
分拡大図であり、図中の溝23は、ダイアモンドポイン
トなどで、セラミックシ−ト22の面上から、シ−ト厚
さの約1/2〜1/4程度の深さで鋭角状に切込みされ
ている。このため、切込み溝23下方のシ−ト厚さの約
1/2以上の部分はカットされず、焼成後は固いセラミ
ックのまま接続する。そして、焼成後のブレ−ク工程に
おいて、この切込み溝23に沿って折曲し、破断する
と、焼成済みセラミックシ−ト24は、図12に拡大図
示するように、破断面25の一方側が突出して、出バリ
26が生じる。同時に、他方側には、前記出バリ26に
対応した欠け27が生じる。
That is, FIG. 11 is a partially enlarged view of the ceramic sheet 22 after the cut groove 23 is formed in the half cut step. The groove 23 in the figure is a diamond point or the like, and the ceramic sheet 22 is formed. The surface is cut into an acute angle with a depth of about 1/2 to 1/4 of the sheet thickness. For this reason, a portion of about 1/2 or less of the sheet thickness below the cut groove 23 is not cut, and is connected as a hard ceramic after firing. When the ceramic sheet 24 is bent and broken along the cut groove 23 in the breaking step after firing, the fired ceramic sheet 24 projects on one side of the fracture surface 25 as shown in an enlarged view in FIG. Then, the flash 26 is generated. At the same time, on the other side, a chip 27 corresponding to the projecting burr 26 occurs.

【0012】この出バリ26や欠け27をなくには、ハ
−フカット工程での切込み溝23の深さをシ−ト厚さに
対して出来るだけ深めることが望ましい。しかしなが
ら、このように溝深さをシ−ト厚さに対して1/2程度
以上に設定すると、ハ−フカット工程で分離したり、以
降の処理工程途上で割れるなどの不都合を生じ、その解
決策が要望されていた。
It is desirable that the depth of the cut groove 23 in the half-cutting step be made as deep as possible with respect to the sheet thickness without eliminating the flash 26 and the chip 27. However, if the groove depth is set to about ½ or more of the sheet thickness as described above, problems such as separation in the half cut process and cracking during the subsequent process steps occur, and the solution thereof is solved. A measure was requested.

【0013】したがって、本発明は上記に鑑みなされた
ものであり、焼成済みセラミックシ−トが処理工程途上
で割れることなくパッケ−ジ部品がブレ−クでき、かつ
パッケ−ジ部品の破断面に出バリや欠けが生じにくいフ
ラットパッケ−ジおよびその製造方法を提供することを
目的としている。
Therefore, the present invention has been made in view of the above, and the packaged parts can be broken without cracking the fired ceramic sheet during the processing step, and the fracture surface of the packaged parts can be obtained. It is an object of the present invention to provide a flat package and a method for manufacturing the flat package that are less likely to cause flash or chipping.

【0014】[0014]

【課題を解決するための手段】このため、本発明はセラ
ミック粉末又はセラミック粉末とガラス粉末の混合物を
スラリ−状に調整した泥漿から、ドクタ−ブレ−ド法や
押出成形法により前記粉末の生シ−トを作製し、この生
シ−トを適宜積層・熱プレスして得たシ−トの面をマス
目状に区分して、その境界線に沿って多数の断面丸形ま
たは長形の小孔を所定ピッチでミシン目状に連続かつ厚
み方向に貫通して穿設し、高温焼成した後、前記小孔に
沿って破断分離して多数のパッケ−ジ部品を製造するよ
うにしたことを特徴としている。また、上記小孔に替え
て、小溝をシ−ト片面からその厚み方向に途中まで穿設
することを特徴としている。また、小溝を手をシ−ト上
下面からその厚み方向に途中まで穿設することを特徴と
している。また、シ−ト板厚の1/4より小さい厚みを
残して小溝を穿設することを特徴としている。また、孔
径がシ−ト板厚よりも小さく、かつ、ピッチ間隔がシ−
ト板厚の1/2より小さい断面丸形小孔を穿設すること
を特徴としている。また、本発明のフラットパッケ−ジ
はセラミック粉末又はセラミック粉末とガラス粉末の混
合物から形成した厚膜の生シ−トを適宜積層・熱プレス
して得たシ−ト面上に多数のパッケ−ジ部品を縦横に形
成し、高温焼成した後、前記部品間で破断分離したパッ
ケ−ジ部品から構成され、前記パッケ−ジ部品の分離壁
面はパッケ−ジ部品間に連続して穿設された小孔壁面又
は小溝壁面を破断した凹凸状の壁面で形成されたことを
特徴としている。
Therefore, according to the present invention, the powder of ceramic powder or a mixture of ceramic powder and glass powder prepared in the form of a slurry is prepared by a doctor blade method or an extrusion molding method. A sheet is prepared, and the surface of the sheet obtained by appropriately laminating and hot pressing the raw sheet is divided into squares, and a large number of round or long sections are formed along the boundary line. The small holes are continuously pierced at a predetermined pitch in a perforated shape in the thickness direction, baked at a high temperature, and then fractured and separated along the small holes to produce a large number of package parts. It is characterized by that. Further, instead of the small hole, a small groove is formed halfway in the thickness direction from one side of the sheet. Further, the small groove is characterized in that the hand is formed from the upper and lower surfaces of the sheet halfway in the thickness direction. Further, it is characterized in that the small groove is formed leaving a thickness smaller than ¼ of the sheet thickness. Also, the hole diameter is smaller than the sheet thickness, and the pitch interval is
It is characterized in that a small hole having a round cross section, which is smaller than ½ of the plate thickness, is formed. Further, the flat package of the present invention has a large number of packages on a sheet surface obtained by appropriately laminating and hot pressing a thick film raw sheet formed of ceramic powder or a mixture of ceramic powder and glass powder. The package parts are formed vertically and horizontally, and after high temperature firing, they are composed of package parts that are fractured and separated between the parts, and the separation wall surface of the package parts is continuously bored between the package parts. It is characterized in that it is formed by an uneven wall surface obtained by breaking the wall surface of the small hole or the wall surface of the small groove.

【0015】[0015]

【作用】セラミックシ−トのパッケ−ジ部品間に多数の
小孔又は小溝を連続して穿設した構成であるから、従来
のハ−フカット工程の刃状の切込み溝のように、処理工
程途上で割れるなどの不都合が解消する。また、パッケ
−ジ部品の分離壁面は破断面が各小孔又は小溝間に形成
される縦縞状の小さいものであり、出バリや欠けを極め
て小さくできる。したがって、パッケ−ジ部品の外形寸
法が精度よく製造できる。また、パッケ−ジ部品の分離
壁面は各小孔壁間又は小溝壁間を破断した凹凸状に形成
され、従来のように刃状の平坦面でないから、自動機の
チャックの装着性も向上する。
Since a large number of small holes or small grooves are continuously formed between the package parts of the ceramic sheet, the processing steps can be performed like the blade-shaped cut grooves in the conventional half cut step. Inconvenience such as breaking on the way is eliminated. Further, the separation wall surface of the package part has a small vertical stripe-shaped fracture surface formed between each small hole or small groove, so that a flash or a chip can be made extremely small. Therefore, the outer dimensions of the package component can be manufactured accurately. Further, the separation wall surface of the package part is formed in an uneven shape by breaking the small hole walls or the small groove walls, and is not a flat blade-like surface as in the conventional case, so that the mountability of the chuck of the automatic machine is improved. .

【0016】[0016]

【実施例】以下、本発明の実施例を図面と共に詳述す
る。ここで、セラミックシ−トを作製し、これを適宜積
層・熱プレスしてセラミックシ−トを得る迄の工程は従
来例で述べた通りであり、その説明は省略する。図1は
本発明の第1の実施例で、面上に多数のパッケ−ジ部品
28を縦横に形成し、各パッケ−ジ部品28間に連続し
た小孔29を穿設したセラミックシ−ト30を示してい
る。上記パッケ−ジ部品28は前記したフラットパッケ
−ジ2、9の構成要素のキャップ部材3、11或いはベ
−ス部材5、13であり、それぞれ、図示しないが、電
極印刷やプレス打抜きにより所定のパタ−ンで縦横に形
成したものである。
Embodiments of the present invention will now be described in detail with reference to the drawings. Here, the steps until the ceramic sheet is produced and the ceramic sheet is appropriately laminated and hot pressed to obtain the ceramic sheet are as described in the conventional example, and the description thereof is omitted. FIG. 1 is a first embodiment of the present invention, which is a ceramic sheet in which a large number of package parts 28 are vertically and horizontally formed on a surface and continuous small holes 29 are formed between the package parts 28. 30 is shown. The package parts 28 are cap members 3 and 11 or base members 5 and 13 which are the components of the flat packages 2 and 9 described above, respectively, which are not shown in the drawings but are predetermined by electrode printing or press punching. The pattern is formed vertically and horizontally.

【0017】図2は上記セラミックシ−ト30の小孔2
9穿設部分の拡大図である。この小孔29は直径φをシ
−ト30の板厚tに対してφ〈tに設定した極めて細い
丸孔で形成したものであり、そのピッチpをシ−ト30
の板厚tに対してp〈1/2tに設定して、各パッケ−
ジ部品28、28の境界線上を略連設状態に貫通して穿
設している。
FIG. 2 shows the small holes 2 of the ceramic sheet 30.
FIG. 9 is an enlarged view of a 9-drilled portion. This small hole 29 is formed by an extremely thin round hole whose diameter φ is set to φ <t with respect to the plate thickness t of the sheet 30, and the pitch p thereof is set to the sheet 30.
Set p <1 / 2t for the plate thickness t of
The component parts 28, 28 are perforated in a substantially continuous state on the boundary line.

【0018】図3は上記セラミックシ−ト30を高温焼
成した後、境界線上で破断分離して得たパッケ−ジ部品
28の拡大図であり、分離壁面上には小孔29の各円弧
壁面31間を橋絡した多数の破断面32が縦縞状に形成
されている。
FIG. 3 is an enlarged view of a package component 28 obtained by breaking and separating the ceramic sheet 30 at a high temperature and then breaking it along the boundary line. A large number of fracture surfaces 32 bridging 31 are formed in vertical stripes.

【0019】上記縦縞状の破断面32は、小孔29の孔
径φをシ−トの板厚tに対してφ〈tで、かつピッチp
がシ−トの板厚tに対してp〈1/2tに設定している
から、各破断面32の面積は極めて小さくものであり、
各破断面32に生じる出バリ26やカケ27は極めて小
さく押さえることができる。
The vertical stripe-shaped fracture surface 32 is such that the hole diameter φ of the small holes 29 is φ <t with respect to the sheet thickness t of the sheet and the pitch p.
Is set to p <1 / 2t with respect to the sheet thickness t of the sheet, the area of each fracture surface 32 is extremely small.
The protruding burr 26 and the chip 27 formed on each fracture surface 32 can be suppressed to be extremely small.

【0020】また、ここで特に注目すべき点は、パッケ
−ジ部品28の分離壁面が小孔29の円弧壁面31と破
断面32との凹凸面に形成されことである。そして、こ
の凹凸面は、孔径φがシ−トの板厚tに対してφ〈tと
小さく設定され、円弧壁面31の凹みは高々板厚tの1
/2であり、破断面32の凸面も上記のとうり小さいも
のであるから、微視的には凹凸面であっても略直線状と
なり、外形寸法精度が得られる上、外観も特に問題にな
らないものである。さらに、かかる微細な凹凸面は、従
来のパッケ−ジのように平坦でないために、却って自動
機での部品チャックがやり易く、自動装着性が向上す
る。
What is particularly noteworthy here is that the separation wall surface of the package component 28 is formed on the uneven surface of the arc wall surface 31 of the small hole 29 and the fracture surface 32. In this uneven surface, the hole diameter φ is set to be smaller than φ <t with respect to the sheet thickness t of the sheet, and the depression of the arc wall surface 31 is at most 1 of the sheet thickness t.
/ 2, and the convex surface of the fracture surface 32 is also as small as the above, so even if it is a microscopically uneven surface, it becomes a substantially linear shape, and external dimension accuracy is obtained, and the appearance is also a particular problem. It does not happen. Further, since such a fine uneven surface is not flat like a conventional package, it is rather easy to chuck a component in an automatic machine and the automatic mounting property is improved.

【0021】図4は本発明の第2の実施例であり、上記
実施例の小孔29を長孔33で構成したパッケ−ジ部品
34の拡大図であり、前記実施例の図3に対応したもの
である。この小孔29は長径y側を連設方向に向けて穿
設され、短径の幅員xがシ−トの板厚tに対してx〈t
である長溝に形成し、ピッチpをシ−トの板厚tに対し
てp〈t/2に設定して、連設状態でシ−トを貫通して
穿設してある。
FIG. 4 is a second embodiment of the present invention, and is an enlarged view of a package component 34 in which the small hole 29 of the above embodiment is formed by a long hole 33, and corresponds to FIG. 3 of the above embodiment. It was done. The small hole 29 is bored with the long diameter y side facing in the continuous direction, and the width x of the short diameter is x <t with respect to the sheet thickness t of the sheet.
And the pitch p is set to p <t / 2 with respect to the sheet thickness t of the sheet, and the sheet is bored through the sheet in a continuous state.

【0022】かかる構成のパッケ−ジ部品34も、上記
パッケ−ジ部品28と同様に、各破断面35の面積が小
さく設定されるため、出バリ26やカケ27を極めて小
さく押さえることができる。なお、この場合、パッケ−
ジ部品34の分離壁面は、上記実施例と同様、凹凸状に
形成されるが、円弧状壁面に比べて、より直線的に形成
できる。
Since the area of each fracture surface 35 of the package component 34 having such a structure is set to be small like the package component 28, the projecting burr 26 and the chip 27 can be held extremely small. In this case, the package
The separation wall surface of the di-component 34 is formed in an uneven shape as in the above-described embodiment, but can be formed more linearly than the arc-shaped wall surface.

【0023】図5は本発明の第3の実施例であり、前記
第1の実施例において、パッケ−ジ部品間に穿設する小
孔29をシ−トに貫通させないように小溝29aとして
穿設したものである。このパッケ−ジ部品36も、第1
の実施例と同様に、小溝29aの孔径φや、ピッチpは
シ−トの板厚tに対してφ〈t、p〈t/2に設定して
いるが、その深さdを板厚tに対して3/4t以上でシ
−トを貫通させないように設定したものである。このパ
ッケ−ジ部品36の分離壁面には小溝29a間の縦縞状
の破断面37aと小溝29aの下方の面方向に沿う破断
面37bが形成される。
FIG. 5 shows a third embodiment of the present invention. In the first embodiment, the small hole 29 formed between the package parts is formed as a small groove 29a so as not to penetrate the sheet. It was set up. This package component 36 is also the first
In the same manner as in the embodiment described above, the hole diameter φ and the pitch p of the small groove 29a are set to φ <t, p <t / 2 with respect to the sheet thickness t of the sheet, but the depth d is set to the sheet thickness. The sheet is set so as not to penetrate the sheet at 3 / 4t or more with respect to t. A vertical stripe-shaped fracture surface 37a between the small grooves 29a and a fracture surface 37b along the surface direction below the small groove 29a are formed on the separation wall surface of the package component 36.

【0024】かかる構成のパッケ−ジ部品36は上方の
縞状の破断面37aは出バリ26や欠け27が小さいも
のであり、また、下方の破断面37bも肉厚が板厚tの
1/4程度以下と薄く設定しているから、出バリ26や
欠け27を充分小さく押さえることができる。なお、こ
の場合、小溝29aを第2の実施例の長孔33で形成
し、これをシ−トの板厚tの3/4以上貫通させないよ
うに穿設しても同様の作用効果を奏する。
In the package component 36 having such a construction, the upper striped fracture surface 37a has small burrs 26 and chips 27, and the lower fracture surface 37b has a thickness of 1 / th of the plate thickness t. Since the thickness is set as thin as about 4 or less, the flash 26 and the chip 27 can be suppressed sufficiently small. In this case, even if the small groove 29a is formed by the long hole 33 of the second embodiment and the small hole 29a is formed so as not to penetrate by 3/4 or more of the sheet thickness t of the sheet, the same effect is obtained. .

【0025】図6は本発明の第4の実施例であり、上記
実施例において、小溝29aをシ−トの上下面側から穿
設し、未貫通部分をシ−トの中程に形成したものであ
る。かかる構成のパッケ−ジ部品38は、上記図5の実
施例と同様の作用効果が得られると共に、シ−トの面方
向に沿う破断面39がシ−ト厚さの中央部に設定でき、
破断時、パッケ−ジ部品38の表面側への破損が生じ難
く、出バリや欠けを小さく押さえることが出来る。
FIG. 6 shows a fourth embodiment of the present invention. In the above embodiment, the small groove 29a is formed from the upper and lower surfaces of the seat, and the non-penetrating portion is formed in the middle of the seat. It is a thing. The package component 38 having such a structure has the same effects as those of the embodiment shown in FIG. 5, and the fracture surface 39 along the plane direction of the sheet can be set at the central portion of the sheet thickness.
At the time of breakage, damage to the front surface side of the package component 38 is unlikely to occur, and flash or chip can be suppressed to a small extent.

【0026】[0026]

【発明の効果】以上詳述した通り、本発明はセラミック
シ−トに形成した各パッケ−ジ部品間の境界線に連続的
に小孔又は小溝を穿設し、境界線に沿って各パッケ−ジ
部品を破断するよう構成したから、破断面の出バリや欠
けを可及的に小さく押さえることができ、外形寸法精度
の良いフラットパッケ−ジが提供できる。したがって、
電子機器への実装時のチャックミスや、出バリの割れに
よる組立機器の故障も低減できる。尚、本発明は基材原
料にセラミック粉末を用いたが、セラミック粉末とガラ
ス粉末の混合物を用いても同様の生シ−トが得られ、こ
れらを適宜積層・熱プレスして得たシ−トに適用して同
様の効果が得られる。
As described in detail above, according to the present invention, small holes or small grooves are continuously formed in the boundary line between the package parts formed on the ceramic sheet, and each package is formed along the boundary line. -Since the parts are configured to be broken, it is possible to suppress the occurrence of burrs and chips on the fracture surface as small as possible, and it is possible to provide a flat package with good external dimension accuracy. Therefore,
It is also possible to reduce chucking mistakes when mounting on electronic devices and breakdowns of assembling devices due to cracking of burrs. Although the present invention uses the ceramic powder as the base material, the same raw sheet can be obtained by using the mixture of the ceramic powder and the glass powder, and the sheet obtained by appropriately laminating and hot pressing these sheets is used. The same effect can be obtained when applied to

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1実施例で、面上にパッケ−ジ部品
を形成した斜視図である。
FIG. 1 is a perspective view of a first embodiment of the present invention in which a package component is formed on a surface.

【図2】図1の要部拡大斜視図である。FIG. 2 is an enlarged perspective view of a main part of FIG.

【図3】図1のパッケ−ジ部品の一部破断斜視図であ
る。
3 is a partially cutaway perspective view of the package component of FIG.

【図4】本発明の第2実施例で、パッケ−ジ部品の一部
破断斜視図である。
FIG. 4 is a partially cutaway perspective view of a package component according to the second embodiment of the present invention.

【図5】本発明の第3実施例で、パッケ−ジ部品の一部
破断斜視図である。
FIG. 5 is a partially cutaway perspective view of a package component according to the third embodiment of the present invention.

【図6】本発明の第4実施例で、パッケ−ジ部品の一部
破断斜視図である。
FIG. 6 is a partially cutaway perspective view of a package component according to the fourth embodiment of the present invention.

【図7】フラットパッケ−ジの構造例を示す断面図であ
る。
FIG. 7 is a cross-sectional view showing a structural example of a flat package.

【図8】同じく、フラットパッケ−ジの構造例を示す断
面図である。
FIG. 8 is a sectional view showing an example of the structure of a flat package.

【図9】セラミック生シ−トの成膜装置の側面図であ
る。
FIG. 9 is a side view of a film forming apparatus for a ceramic raw sheet.

【図10】パッケ−ジ部品の製造工程図である。FIG. 10 is a manufacturing process diagram of the package component.

【図11】図10のハ−フカット工程後のセラミックシ
−トの斜視図である。
11 is a perspective view of the ceramic sheet after the half cut process of FIG.

【図12】図10のブレ−ク工程後のパッケ−ジ部品の
斜視図である。
12 is a perspective view of the package component after the breaking process of FIG.

【符号の説明】[Explanation of symbols]

28、34、36、38 パッケ−ジ部品 29 小孔 29a 小溝 30 セラミックシ−ト 33 長孔 32、35、37a,37b,39 破断面 28, 34, 36, 38 Package parts 29 Small hole 29a Small groove 30 Ceramic sheet 33 Long hole 32, 35, 37a, 37b, 39 Broken cross section

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 セラミック粉末又はセラミック粉末とガ
ラス粉末の混合物をスラリ−状に調整した泥漿から、ド
クタ−ブレ−ド法や押出成形法により前記粉末の生シ−
トを作製し、この生シ−トを適宜積層・熱プレスして得
たシ−ト面をマス目状に区分して、その境界線に沿って
多数の断面丸形または長形の小孔を所定ピッチでミシン
目状に連続かつ厚み方向に貫通して穿設し、高温焼成し
た後、前記小孔に沿って破断分離して多数のパッケ−ジ
部品を製造するようにしたことを特徴とするフラットパ
ッケ−ジの製造方法。
1. A raw sheet of ceramic powder or a mixture of ceramic powder and glass powder prepared from a slurry prepared by a doctor blade method or an extrusion molding method.
Sheet is prepared and the raw sheet is appropriately laminated and hot-pressed to divide the sheet surface into squares, and a number of small holes with a round or elongated cross section are formed along the boundary line. Perforated continuously at a predetermined pitch in a perforated manner in the thickness direction, baked at a high temperature, and then fracture-separated along the small holes to produce a large number of package parts. And a method of manufacturing a flat package.
【請求項2】セラミック粉末又はセラミック粉末とガラ
ス粉末の混合物をスラリ−状に調整した泥漿から、ドク
タ−ブレ−ド法や押出成形法により前記粉末の生シ−ト
を作製し、この生シ−トを適宜積層・熱プレスして得た
シ−ト面をマス目状に区分して、その境界線に沿って多
数の断面丸形または長形の小溝をシ−ト片面又はシ−ト
上下面から厚み方向に途中まで穿設し、高温焼成した
後、前記小溝に沿って破断分離して多数のパッケ−ジ部
品を製造するようにしたことを特徴とするフラットパッ
ケ−ジの製造方法。
2. A raw sheet of the powder is prepared by a doctor blade method or an extrusion molding method from slurry prepared by preparing a slurry of ceramic powder or a mixture of ceramic powder and glass powder. -The sheet surface obtained by appropriately laminating and hot pressing the sheets is divided into squares, and a number of small grooves with a round or elongated cross section are formed along the boundary line of the sheet. A method for producing a flat package, characterized in that a plurality of package parts are produced by piercing the upper and lower surfaces partway in the thickness direction, firing at high temperature, and then breaking and separating along the small grooves. .
【請求項3】 シ−ト板厚の1/4より小さい厚みを残
して小溝を穿設することを特徴とする請求項2記載のフ
ラットパッケ−ジの製造方法。
3. The method of manufacturing a flat package according to claim 2, wherein the small groove is formed while leaving a thickness smaller than ¼ of the sheet thickness.
【請求項4】 孔径がシ−ト板厚よりも小さく、かつ、
ピッチ間隔がシ−ト板厚の1/2より小さい断面丸形小
孔又は小溝を穿設することを特徴とする請求項1及び2
記載のフラットパッケ−ジの製造方法。
4. The hole diameter is smaller than the sheet thickness, and
3. Small holes or grooves having a circular cross section with a pitch interval smaller than ½ of the sheet thickness are formed.
A method for producing the flat package described.
【請求項5】 セラミック粉末又はセラミック粉末と
ガラス粉末の混合物から形成した厚膜の生シ−トを適宜
積層・熱プレスして得たシ−ト面上に多数のパッケ−ジ
部品を縦横に形成し、高温焼成した後、前記部品間で破
断分離したパッケ−ジ部品から構成され、前記パッケ−
ジ部品の分離壁面はパッケ−ジ部品間に連続して穿設さ
れた小孔壁面又は小溝壁面を破断した凹凸状の壁面で形
成されたことを特徴とするフラットパッケ−ジ。
5. A large number of package parts are vertically and horizontally arranged on a sheet surface obtained by appropriately laminating and hot pressing a thick film green sheet formed of ceramic powder or a mixture of ceramic powder and glass powder. After being formed and fired at a high temperature, the package is composed of package parts that are fractured and separated between the parts.
A flat package characterized in that the separation wall surface of each of the package parts is formed by a wall surface of a small hole or a wall surface of a groove formed by breaking a groove wall formed continuously between the package parts.
JP3234993A 1993-02-23 1993-02-23 Flat package and its manufacture Withdrawn JPH06238643A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3234993A JPH06238643A (en) 1993-02-23 1993-02-23 Flat package and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3234993A JPH06238643A (en) 1993-02-23 1993-02-23 Flat package and its manufacture

Publications (1)

Publication Number Publication Date
JPH06238643A true JPH06238643A (en) 1994-08-30

Family

ID=12356490

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3234993A Withdrawn JPH06238643A (en) 1993-02-23 1993-02-23 Flat package and its manufacture

Country Status (1)

Country Link
JP (1) JPH06238643A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008296431A (en) * 2007-05-30 2008-12-11 Kitagawa Ind Co Ltd Ceramic sheet
JP2011218689A (en) * 2010-04-12 2011-11-04 Fdk Corp Ferrite substrate
KR101232832B1 (en) * 2011-07-29 2013-02-13 조상용 Breaking apparatus of a package equipment
US9929067B2 (en) 2016-04-26 2018-03-27 Canon Kabushiki Kaisha Ceramic package, method of manufacturing the same, electronic component, and module

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008296431A (en) * 2007-05-30 2008-12-11 Kitagawa Ind Co Ltd Ceramic sheet
JP2011218689A (en) * 2010-04-12 2011-11-04 Fdk Corp Ferrite substrate
KR101232832B1 (en) * 2011-07-29 2013-02-13 조상용 Breaking apparatus of a package equipment
US9929067B2 (en) 2016-04-26 2018-03-27 Canon Kabushiki Kaisha Ceramic package, method of manufacturing the same, electronic component, and module

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